JPH033744U - - Google Patents
Info
- Publication number
- JPH033744U JPH033744U JP6444689U JP6444689U JPH033744U JP H033744 U JPH033744 U JP H033744U JP 6444689 U JP6444689 U JP 6444689U JP 6444689 U JP6444689 U JP 6444689U JP H033744 U JPH033744 U JP H033744U
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- holding
- processed surface
- jig
- set temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6444689U JPH033744U (zh) | 1989-06-01 | 1989-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6444689U JPH033744U (zh) | 1989-06-01 | 1989-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH033744U true JPH033744U (zh) | 1991-01-16 |
Family
ID=31595404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6444689U Pending JPH033744U (zh) | 1989-06-01 | 1989-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033744U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004134725A (ja) * | 2002-08-09 | 2004-04-30 | Fuji Electric Device Technology Co Ltd | 半導体ウエハ保持治具および半導体素子の製造方法 |
-
1989
- 1989-06-01 JP JP6444689U patent/JPH033744U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004134725A (ja) * | 2002-08-09 | 2004-04-30 | Fuji Electric Device Technology Co Ltd | 半導体ウエハ保持治具および半導体素子の製造方法 |