JPH0243134U - - Google Patents
Info
- Publication number
- JPH0243134U JPH0243134U JP11994288U JP11994288U JPH0243134U JP H0243134 U JPH0243134 U JP H0243134U JP 11994288 U JP11994288 U JP 11994288U JP 11994288 U JP11994288 U JP 11994288U JP H0243134 U JPH0243134 U JP H0243134U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electric heater
- electrically insulating
- ceramic substrate
- insulating ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11994288U JPH0243134U (zh) | 1988-09-13 | 1988-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11994288U JPH0243134U (zh) | 1988-09-13 | 1988-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0243134U true JPH0243134U (zh) | 1990-03-26 |
Family
ID=31365609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11994288U Pending JPH0243134U (zh) | 1988-09-13 | 1988-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0243134U (zh) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04304941A (ja) * | 1991-03-29 | 1992-10-28 | Ngk Insulators Ltd | ウエハー保持具の製造方法 |
| JPH058140A (ja) * | 1990-12-28 | 1993-01-19 | Ngk Insulators Ltd | 静電チヤツク |
| JP2001189378A (ja) * | 1990-12-25 | 2001-07-10 | Ngk Insulators Ltd | ウエハー吸着加熱装置 |
| JP2003347396A (ja) * | 1990-12-25 | 2003-12-05 | Ngk Insulators Ltd | ウエハー吸着加熱装置及びウエハー吸着装置 |
-
1988
- 1988-09-13 JP JP11994288U patent/JPH0243134U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001189378A (ja) * | 1990-12-25 | 2001-07-10 | Ngk Insulators Ltd | ウエハー吸着加熱装置 |
| JP2003347396A (ja) * | 1990-12-25 | 2003-12-05 | Ngk Insulators Ltd | ウエハー吸着加熱装置及びウエハー吸着装置 |
| JPH058140A (ja) * | 1990-12-28 | 1993-01-19 | Ngk Insulators Ltd | 静電チヤツク |
| JPH04304941A (ja) * | 1991-03-29 | 1992-10-28 | Ngk Insulators Ltd | ウエハー保持具の製造方法 |