JPH0337230Y2 - - Google Patents

Info

Publication number
JPH0337230Y2
JPH0337230Y2 JP5642687U JP5642687U JPH0337230Y2 JP H0337230 Y2 JPH0337230 Y2 JP H0337230Y2 JP 5642687 U JP5642687 U JP 5642687U JP 5642687 U JP5642687 U JP 5642687U JP H0337230 Y2 JPH0337230 Y2 JP H0337230Y2
Authority
JP
Japan
Prior art keywords
lid
hot plate
dried
semiconductor wafer
conveyor belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5642687U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63174438U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5642687U priority Critical patent/JPH0337230Y2/ja
Publication of JPS63174438U publication Critical patent/JPS63174438U/ja
Application granted granted Critical
Publication of JPH0337230Y2 publication Critical patent/JPH0337230Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP5642687U 1987-04-13 1987-04-13 Expired JPH0337230Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5642687U JPH0337230Y2 (enrdf_load_stackoverflow) 1987-04-13 1987-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5642687U JPH0337230Y2 (enrdf_load_stackoverflow) 1987-04-13 1987-04-13

Publications (2)

Publication Number Publication Date
JPS63174438U JPS63174438U (enrdf_load_stackoverflow) 1988-11-11
JPH0337230Y2 true JPH0337230Y2 (enrdf_load_stackoverflow) 1991-08-07

Family

ID=30885216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5642687U Expired JPH0337230Y2 (enrdf_load_stackoverflow) 1987-04-13 1987-04-13

Country Status (1)

Country Link
JP (1) JPH0337230Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63174438U (enrdf_load_stackoverflow) 1988-11-11

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