JPH0336801Y2 - - Google Patents

Info

Publication number
JPH0336801Y2
JPH0336801Y2 JP3137987U JP3137987U JPH0336801Y2 JP H0336801 Y2 JPH0336801 Y2 JP H0336801Y2 JP 3137987 U JP3137987 U JP 3137987U JP 3137987 U JP3137987 U JP 3137987U JP H0336801 Y2 JPH0336801 Y2 JP H0336801Y2
Authority
JP
Japan
Prior art keywords
cleaning liquid
amount
gas
liquid supply
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3137987U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63139414U (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3137987U priority Critical patent/JPH0336801Y2/ja
Publication of JPS63139414U publication Critical patent/JPS63139414U/ja
Application granted granted Critical
Publication of JPH0336801Y2 publication Critical patent/JPH0336801Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP3137987U 1987-03-03 1987-03-03 Expired JPH0336801Y2 (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3137987U JPH0336801Y2 (nl) 1987-03-03 1987-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3137987U JPH0336801Y2 (nl) 1987-03-03 1987-03-03

Publications (2)

Publication Number Publication Date
JPS63139414U JPS63139414U (nl) 1988-09-13
JPH0336801Y2 true JPH0336801Y2 (nl) 1991-08-05

Family

ID=30837051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3137987U Expired JPH0336801Y2 (nl) 1987-03-03 1987-03-03

Country Status (1)

Country Link
JP (1) JPH0336801Y2 (nl)

Also Published As

Publication number Publication date
JPS63139414U (nl) 1988-09-13

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