JPH0336129U - - Google Patents
Info
- Publication number
- JPH0336129U JPH0336129U JP1989097641U JP9764189U JPH0336129U JP H0336129 U JPH0336129 U JP H0336129U JP 1989097641 U JP1989097641 U JP 1989097641U JP 9764189 U JP9764189 U JP 9764189U JP H0336129 U JPH0336129 U JP H0336129U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- charged particle
- particle beam
- lead wire
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989097641U JPH0336129U (enExample) | 1989-08-22 | 1989-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989097641U JPH0336129U (enExample) | 1989-08-22 | 1989-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0336129U true JPH0336129U (enExample) | 1991-04-09 |
Family
ID=31646776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989097641U Pending JPH0336129U (enExample) | 1989-08-22 | 1989-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336129U (enExample) |
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1989
- 1989-08-22 JP JP1989097641U patent/JPH0336129U/ja active Pending