JPH0335732B2 - - Google Patents

Info

Publication number

JPH0335732B2

JPH0335732B2 JP20258983A JP20258983A JPH0335732B2 JP H0335732 B2 JPH0335732 B2 JP H0335732B2 JP 20258983 A JP20258983 A JP 20258983A JP 20258983 A JP20258983 A JP 20258983A JP H0335732 B2 JPH0335732 B2 JP H0335732B2

Authority

JP

Japan

Prior art keywords

magnetic

magnetic recording

recording medium

thin film

manufacturing

Prior art date

1983-10-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 230000005291 magnetic effect Effects 0.000 claims description 53
• 238000000034 method Methods 0.000 claims description 31
• 239000010409 thin film Substances 0.000 claims description 31
• 239000000758 substrate Substances 0.000 claims description 15
• 238000005468 ion implantation Methods 0.000 claims description 10
• 230000005415 magnetization Effects 0.000 claims description 9
• 230000005294 ferromagnetic effect Effects 0.000 claims description 8
• 238000004519 manufacturing process Methods 0.000 claims description 8
• 238000010438 heat treatment Methods 0.000 claims description 7
• 229910052751 metal Inorganic materials 0.000 claims description 7
• 229910045601 alloy Inorganic materials 0.000 claims description 6
• 239000000956 alloy Substances 0.000 claims description 6
• 239000002184 metal Substances 0.000 claims description 6
• 229910052757 nitrogen Inorganic materials 0.000 claims description 6
• 239000000696 magnetic material Substances 0.000 claims description 4
• 229910052760 oxygen Inorganic materials 0.000 claims description 4
• 229910052698 phosphorus Inorganic materials 0.000 claims description 4
• 229910052786 argon Inorganic materials 0.000 claims description 3
• 229910052796 boron Inorganic materials 0.000 claims description 3
• 229910052799 carbon Inorganic materials 0.000 claims description 3
• 229910052804 chromium Inorganic materials 0.000 claims description 3
• 150000001875 compounds Chemical class 0.000 claims description 3
• 150000002739 metals Chemical class 0.000 claims description 3
• 229910052742 iron Inorganic materials 0.000 claims description 2
• 150000002603 lanthanum Chemical class 0.000 claims description 2
• 229910052759 nickel Inorganic materials 0.000 claims description 2
• 230000000737 periodic effect Effects 0.000 claims description 2
• 229910052710 silicon Inorganic materials 0.000 claims description 2
• 150000002500 ions Chemical class 0.000 description 17
• 239000010408 film Substances 0.000 description 8
• 239000010410 layer Substances 0.000 description 8
• 239000011230 binding agent Substances 0.000 description 6
• 238000000151 deposition Methods 0.000 description 6
• 230000008021 deposition Effects 0.000 description 6
• 230000015572 biosynthetic process Effects 0.000 description 5
• 239000013078 crystal Substances 0.000 description 5
• 238000001704 evaporation Methods 0.000 description 5
• 239000000463 material Substances 0.000 description 4
• -1 polytetrafluoroethylene Polymers 0.000 description 4
• 230000001133 acceleration Effects 0.000 description 3
• 229910017052 cobalt Inorganic materials 0.000 description 3
• 239000010941 cobalt Substances 0.000 description 3
• GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
• 230000008020 evaporation Effects 0.000 description 3
• 239000003302 ferromagnetic material Substances 0.000 description 3
• 239000011521 glass Substances 0.000 description 3
• 239000004033 plastic Substances 0.000 description 3
• 229920003023 plastic Polymers 0.000 description 3
• 229910052782 aluminium Inorganic materials 0.000 description 2
• 230000006835 compression Effects 0.000 description 2
• 238000007906 compression Methods 0.000 description 2
• 229920001577 copolymer Polymers 0.000 description 2
• 238000002513 implantation Methods 0.000 description 2
• 239000006249 magnetic particle Substances 0.000 description 2
• 239000002245 particle Substances 0.000 description 2
• 229920000642 polymer Polymers 0.000 description 2
• 238000001771 vacuum deposition Methods 0.000 description 2
• 229910001369 Brass Inorganic materials 0.000 description 1
• 229910052684 Cerium Inorganic materials 0.000 description 1
• VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
• VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
• 239000001856 Ethyl cellulose Substances 0.000 description 1
• ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
• 239000005977 Ethylene Substances 0.000 description 1
• 229910052688 Gadolinium Inorganic materials 0.000 description 1
• 229910052779 Neodymium Inorganic materials 0.000 description 1
• 239000000020 Nitrocellulose Substances 0.000 description 1
• 239000004952 Polyamide Substances 0.000 description 1
• 239000004698 Polyethylene Substances 0.000 description 1
• 239000004642 Polyimide Substances 0.000 description 1
• 229910052772 Samarium Inorganic materials 0.000 description 1
• 229910052771 Terbium Inorganic materials 0.000 description 1
• BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
• FJWGYAHXMCUOOM-QHOUIDNNSA-N [(2s,3r,4s,5r,6r)-2-[(2r,3r,4s,5r,6s)-4,5-dinitrooxy-2-(nitrooxymethyl)-6-[(2r,3r,4s,5r,6s)-4,5,6-trinitrooxy-2-(nitrooxymethyl)oxan-3-yl]oxyoxan-3-yl]oxy-3,5-dinitrooxy-6-(nitrooxymethyl)oxan-4-yl] nitrate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O)O[C@H]1[C@@H]([C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@@H](CO[N+]([O-])=O)O1)O[N+]([O-])=O)CO[N+](=O)[O-])[C@@H]1[C@@H](CO[N+]([O-])=O)O[C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O FJWGYAHXMCUOOM-QHOUIDNNSA-N 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 238000000137 annealing Methods 0.000 description 1
• 229910052797 bismuth Inorganic materials 0.000 description 1
• 239000010951 brass Substances 0.000 description 1
• 229920002301 cellulose acetate Polymers 0.000 description 1
• 239000000919 ceramic Substances 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 238000009826 distribution Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 235000019325 ethyl cellulose Nutrition 0.000 description 1
• 229920001249 ethyl cellulose Polymers 0.000 description 1
• 239000007943 implant Substances 0.000 description 1
• 229910052738 indium Inorganic materials 0.000 description 1
• 238000009776 industrial production Methods 0.000 description 1
• 238000007737 ion beam deposition Methods 0.000 description 1
• 238000007733 ion plating Methods 0.000 description 1
• 239000006247 magnetic powder Substances 0.000 description 1
• 238000010297 mechanical methods and process Methods 0.000 description 1
• 229920000609 methyl cellulose Polymers 0.000 description 1
• 239000001923 methylcellulose Substances 0.000 description 1
• 235000010981 methylcellulose Nutrition 0.000 description 1
• 229910052750 molybdenum Inorganic materials 0.000 description 1
• 229920001220 nitrocellulos Polymers 0.000 description 1
• IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
• 229910052755 nonmetal Inorganic materials 0.000 description 1
• 239000003973 paint Substances 0.000 description 1
• 238000007747 plating Methods 0.000 description 1
• 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
• 229920002647 polyamide Polymers 0.000 description 1
• 239000004417 polycarbonate Substances 0.000 description 1
• 229920000515 polycarbonate Polymers 0.000 description 1
• 229920000728 polyester Polymers 0.000 description 1
• 229920000573 polyethylene Polymers 0.000 description 1
• 229920001721 polyimide Polymers 0.000 description 1
• 239000004926 polymethyl methacrylate Substances 0.000 description 1
• 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
• 239000004810 polytetrafluoroethylene Substances 0.000 description 1
• QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
• 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
• 230000008707 rearrangement Effects 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1
• 239000002344 surface layer Substances 0.000 description 1
• 229910052715 tantalum Inorganic materials 0.000 description 1
• KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
• 238000007738 vacuum evaporation Methods 0.000 description 1
• 238000007740 vapor deposition Methods 0.000 description 1
• 239000004711 α-olefin Substances 0.000 description 1