JPH0335433Y2 - - Google Patents

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Publication number
JPH0335433Y2
JPH0335433Y2 JP9286787U JP9286787U JPH0335433Y2 JP H0335433 Y2 JPH0335433 Y2 JP H0335433Y2 JP 9286787 U JP9286787 U JP 9286787U JP 9286787 U JP9286787 U JP 9286787U JP H0335433 Y2 JPH0335433 Y2 JP H0335433Y2
Authority
JP
Japan
Prior art keywords
solvent
solvent gas
liquid level
cap
precision cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9286787U
Other languages
Japanese (ja)
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JPS63201691U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9286787U priority Critical patent/JPH0335433Y2/ja
Publication of JPS63201691U publication Critical patent/JPS63201691U/ja
Application granted granted Critical
Publication of JPH0335433Y2 publication Critical patent/JPH0335433Y2/ja
Expired legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Description

【考案の詳細な説明】 (産業上の利用分野) 本考案は塩素化炭化水素系や弗素化塩素化炭化
水素系の主として低沸点の溶剤を用いてその蒸気
による精密洗浄を行うオープン型精密洗浄槽にお
いて、溶剤の加熱を制御して蒸気化した溶剤ガス
の発生量を一定に保つ溶剤加熱制御装置に関する
ものである。
[Detailed description of the invention] (Field of industrial application) This invention is an open precision cleaning method that performs precision cleaning with steam using a chlorinated hydrocarbon-based or fluorinated chlorinated hydrocarbon-based solvent with a mainly low boiling point. The present invention relates to a solvent heating control device that controls the heating of a solvent in a tank to keep the amount of vaporized solvent gas generated constant.

(従来の技術) オープン型精密洗浄槽ではオープン槽内で収容
した溶剤を加熱して蒸気化し、それを精密洗浄に
供している。蒸気化した溶剤ガスは空気より重く
精密洗浄槽内に滞留しようとする。しかしこの溶
剤ガスは新しい溶剤ガスの常時供給のために連続
的に発生させれられるのでそのままでは溢流して
しまう。そこで従来精密洗浄槽の周壁内側にコン
デンサーパイプを沿設し、これによつて滞留して
いる溶剤ガスを引き付けて凝縮させ、液化による
自然流下で連続回収するようにしている。
(Prior Art) In an open type precision cleaning tank, a solvent contained in the open tank is heated and vaporized, and then used for precision cleaning. The vaporized solvent gas is heavier than air and tends to stay in the precision cleaning tank. However, since this solvent gas is continuously generated in order to constantly supply new solvent gas, it will overflow if left as is. Conventionally, a condenser pipe is installed inside the peripheral wall of the precision cleaning tank, which attracts and condenses the stagnant solvent gas, and continuously collects it through natural flow due to liquefaction.

ところが精密洗浄槽が大きく、槽内中心部から
まわりのコンデンサーパイプまでの距離が大きく
なると、コンデンサーパイプによる溶剤ガスを引
き付けて凝縮させる作用は槽内周辺部の溶剤ガス
には及ぶが、槽内中央部の溶剤ガスには及びにく
い。
However, if the precision cleaning tank is large and the distance from the center of the tank to the surrounding condenser pipes becomes large, the condenser pipe's effect of attracting and condensing the solvent gas will reach the solvent gas around the periphery of the tank, but the distance from the center of the tank will increase. It is hard to reach the solvent gas of the part.

このため槽内中央部の溶剤ガスは徐々に上昇し
ていき、ついには槽開口部から大気中に放散して
しまう。
For this reason, the solvent gas in the center of the tank gradually rises, and eventually dissipates into the atmosphere from the tank opening.

この溶剤ガスの大気放散は高価な溶剤の早期流
失につながり使用経費がかさむことになるし、近
時W.H.O.等によつて警告されているオゾン層破
壊の危険をもたらす。
This release of solvent gas into the atmosphere leads to the premature loss of expensive solvents, which increases usage costs, and also poses the danger of ozone layer depletion, which has been recently warned by the WHO and other organizations.

これを抑制するためコンデンサーを大きくする
ことが考えられるが、物理的にも経済的にも限界
がありのぞめない。
In order to suppress this, it is possible to increase the size of the capacitor, but there are physical and economical limits to this.

そこで従来、溶剤の蒸気化が精密洗浄に充分で
あるがしかし過剰にならないよう、液化回収でき
る溶剤量から算出した必要溶剤ガス量に見合う蒸
発熱を単に加熱して与えている。
Conventionally, in order to ensure that the vaporization of the solvent is sufficient for precision cleaning, but not excessively, the heat of evaporation is simply applied by heating in accordance with the amount of required solvent gas calculated from the amount of solvent that can be liquefied and recovered.

(考案が解決しようとする問題点) しかし従来のように単に加熱するだけでは溶剤
ガスが発生する溶剤の沸騰状態を規制し切れず、
溶剤ガスの過不足を生じ勝ちである。溶剤ガスの
不足は精密洗浄の時間延長位いに止るが、溶剤ガ
スの過剰は前記のように環境の安全上問題であ
り、米国環境庁等が規制しようとしている溶剤ガ
スの実際発生量を制御することが望まれる。
(Problem that the invention aims to solve) However, simply heating as in the past cannot fully control the boiling state of the solvent that generates solvent gas.
This tends to lead to an excess or deficiency of solvent gas. A lack of solvent gas will only extend the time required for precision cleaning, but an excess of solvent gas is an environmental safety issue as mentioned above, and the actual amount of solvent gas generated is being controlled by the US Environmental Agency and others. It is desirable to do so.

これには溶剤の温度が溶剤ガス発生に応じたガ
ス圧を検出する必要がある。ところが前者は溶剤
が沸騰を始めると沸点温度であり飽和であるため
に変化しない。また後者は洗浄槽がオープンタイ
プであるために変化しない。
For this purpose, it is necessary to detect the temperature of the solvent and the gas pressure corresponding to the generation of solvent gas. However, the former does not change when the solvent starts boiling because it is at the boiling point temperature and is saturated. The latter does not change because the cleaning tank is an open type.

そこで本考案はオープン型洗浄槽としての機能
がいささかも損わずに溶剤ガス発生量に応じた圧
力変化を捉え、前記の要求の応え得るオープン型
精密洗浄槽における溶剤加熱制御装置を提供する
ことを目的とするものである。
Therefore, it is an object of the present invention to provide a solvent heating control device for an open type precision cleaning tank that can meet the above requirements by capturing pressure changes according to the amount of solvent gas generated without impairing the function of the open type cleaning tank in the slightest. The purpose is to

(問題点を解決するための手段) 本考案は前記のような目的を達成するため、収
容する液化溶剤をヒータにより加熱してガス化し
精密洗浄に供するオープン型精密洗浄槽におい
て、収容する溶剤の液面に被さるキヤツプを一定
の高さに設け、このキヤツプの天井壁に溶剤ガス
の流出を制限するオリフイスを形成し、キヤツプ
が被さつている範囲の液位を検出する手段と、検
出液位に応じてヒータへの通電を制御する制御手
段とを備えたことを特徴とするものである。
(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention aims to reduce the amount of solvent contained in an open type precision cleaning tank in which the contained liquefied solvent is heated by a heater and gasified for precision cleaning. A cap that covers the liquid level is installed at a certain height, an orifice is formed on the ceiling wall of the cap to restrict the outflow of solvent gas, and a means for detecting the liquid level in the range covered by the cap is provided. The present invention is characterized by comprising a control means for controlling energization to the heater in accordance with the above.

(作用) オープン型精密洗浄槽内には従来通り一定の液
位を保つようにして溶剤が循環供給されている。
この一定レベルの液面一部がそれぞれに被さるキ
ヤツプによつて他から隔てられる。この隔てられ
た液面からもまわりの液面と同じ割合で蒸気化し
た溶剤ガスが発生する。この溶剤ガスはキヤツプ
内に充満しながらキヤツプ天井壁に設けられたオ
リフイスからキヤツプ内圧と大気圧との差圧によ
りオープン型洗浄槽内に流出し、他の液面から発
生している溶剤ガスと合流して精密洗浄に与かる
ことができる。
(Function) As before, solvent is circulated and supplied to the open precision cleaning tank to maintain a constant liquid level.
One portion of this constant level liquid surface is separated from the other by a cap that covers each portion. This separated liquid surface also generates vaporized solvent gas at the same rate as the surrounding liquid surface. This solvent gas fills the cap and flows out from the orifice installed in the cap ceiling wall into the open cleaning tank due to the differential pressure between the cap internal pressure and atmospheric pressure, and mixes with the solvent gas generated from other liquid levels. They can join together and take part in precision cleaning.

溶剤ガスの発生量が多くなつてくると、前記オ
リフイスを通る溶剤ガスの流量も増え、オリフイ
スによる通過抵抗が大きくなる。これに応じキヤ
ツプ内圧力が大きくなつてキヤツプが被さつてい
る液面を押下げる。
As the amount of solvent gas generated increases, the flow rate of the solvent gas passing through the orifice also increases, and the passage resistance due to the orifice increases. Correspondingly, the pressure inside the cap increases, pushing down the liquid level covered by the cap.

この液位の変動は液位検出手段によつて検出さ
れ、それが溶剤ガス発生量の変化によるものであ
り、制御手段が検出液位に応じてヒータの通電を
制御することで、溶剤ガス発生量の一定化を溶剤
ガス発生状態からの直接情報によつて他の影響な
く正確に制御することができる。
Fluctuations in the liquid level are detected by the liquid level detection means, and are caused by changes in the amount of solvent gas generated.The control means controls the energization of the heater according to the detected liquid level, thereby increasing the amount of solvent gas generated. The constant quantity can be precisely controlled by direct information from the solvent gas generation state without any other influence.

(実施例) 図に示す本考案の一実施例について説明する。
精密洗浄槽1はオープン型のものであり、図示し
ない溶剤2を蒸留回収しながら繰返し供給する溶
剤循環系が接続され、清浄な溶剤2が常時一定の
レベルで保たれるようになつている。この溶剤2
はヒータ3による加熱で蒸気化し、蒸気化した溶
剤ガス2aを精密洗浄に供する。
(Example) An example of the present invention shown in the drawings will be described.
The precision cleaning tank 1 is of an open type, and is connected to a solvent circulation system that repeatedly supplies a solvent 2 (not shown) while distilling and recovering it, so that the clean solvent 2 is always maintained at a constant level. This solvent 2
is vaporized by heating with the heater 3, and the vaporized solvent gas 2a is used for precision cleaning.

精密洗浄槽1の槽壁1aの洗浄域部内側にはコ
ンデンサーパイプ4が沿設され、これに洗浄域部
に滞留している溶剤ガス2aを引き付けて凝縮さ
せるようになつている。この凝縮により液化して
自然流下する溶剤2は槽壁1aの内面に形成され
ている受溝5に受入れて管路6を通じる等して回
収する。
A condenser pipe 4 is installed inside the cleaning area of the tank wall 1a of the precision cleaning tank 1, and is designed to attract and condense the solvent gas 2a staying in the cleaning area. The solvent 2, which is liquefied by this condensation and flows down by gravity, is received in a receiving groove 5 formed on the inner surface of the tank wall 1a, passed through a pipe 6, and collected.

しかし精密洗浄槽1が大きく槽中心からコンデ
ンサーパイプ4までの距離が大きいと、コンデン
サーパイプ4により前記溶剤ガス2aを凝縮させ
回収する作用は槽内中央部には及びにくく、溶剤
ガスの回収は困難である。
However, if the precision cleaning tank 1 is large and the distance from the tank center to the condenser pipe 4 is long, the action of condensing and recovering the solvent gas 2a by the condenser pipe 4 will not reach the center of the tank, making it difficult to recover the solvent gas. It is.

そこで精密洗浄槽1内での溶剤ガス2aの発生
量は精密洗浄に充分で、しかし過剰にならないよ
う一定に保つことが行われる。
Therefore, the amount of solvent gas 2a generated in the precision cleaning tank 1 is kept constant so as to be sufficient for precision cleaning but not excessive.

本考案では、溶剤ガス2aの発生量そのものの
情報からヒータ3の通電を制御するものであり、
溶剤2の液面2bの一部にキヤツプ7を被せてそ
れを槽壁1aに取付具8により取付けてある。キ
ヤツプ7はその天井壁にオリフイス9を有し、キ
ヤツプ7が被さつてい溶剤液面2cから発生する
溶剤ガス2aの流出を制限する。
In the present invention, the energization of the heater 3 is controlled based on the information on the amount of solvent gas 2a generated.
A part of the liquid surface 2b of the solvent 2 is covered with a cap 7, and the cap 7 is attached to the tank wall 1a with a fixture 8. The cap 7 has an orifice 9 on its ceiling wall to restrict the outflow of the solvent gas 2a generated from the solvent liquid level 2c that the cap 7 covers.

キヤツプ7にはまた液面2cのレベルを検出す
る液位センサ10が設けられている。この液位セ
ンサ10は基準電極と高さの違う電極とが液位に
よつて通電し合つたり、通電を断たれたりする通
電方式のもの、あるいは相互に、また溶剤2との
間で絶縁された2極間の液位に応じた静電容量を
得る静電容量方式のもの等公知のものを用いるこ
とができる。
The cap 7 is also provided with a liquid level sensor 10 for detecting the level of the liquid surface 2c. This liquid level sensor 10 is of a current-carrying type in which a reference electrode and electrodes at different heights are energized or de-energized depending on the liquid level, or they are insulated from each other and from the solvent 2. A known method such as a capacitance method that obtains a capacitance depending on the liquid level between the two electrodes can be used.

液位センサ10からの検出信号はヒータ3を通
電制御する制御回路11に与えるようになつてい
る。
A detection signal from the liquid level sensor 10 is applied to a control circuit 11 that controls energization of the heater 3 .

以下作動と共に詳述する。溶剤2はヒータ3に
より加熱され蒸気化するが、液面2cから発生す
る溶剤ガス2aはキヤツプ7内に充満しながらオ
リフイス9から精密洗浄槽1内に流出し、液面2
bの他の部分から発生した溶剤ガス2aと合流し
て精密洗浄に与かる。したがつてキヤツプ7を被
せたことによつて液面2bの有効面積を少なくす
ることはない。
The operation will be explained in detail below. The solvent 2 is heated by the heater 3 and vaporized, but the solvent gas 2a generated from the liquid level 2c flows out from the orifice 9 into the precision cleaning tank 1 while filling the cap 7, and the liquid level 2c flows out into the precision cleaning tank 1.
It joins with the solvent gas 2a generated from other parts of b and participates in precision cleaning. Therefore, by covering the cap 7, the effective area of the liquid surface 2b is not reduced.

液面2cから発生した溶剤ガスはオリフイス9
から流出する際その発生量に応じた抵抗を受け流
出を制限される。
The solvent gas generated from the liquid level 2c flows through the orifice 9.
When it flows out, it is restricted by resistance depending on the amount generated.

このことは式 Q=CA√2 における流量Qと流量係数(抵抗)Cとの関係と
して与えられ、流量Qが増すと流量係数Cが増
す。
This is given as the relationship between the flow rate Q and the flow coefficient (resistance) C in the equation Q=CA√2, and as the flow rate Q increases, the flow coefficient C increases.

そこで例えば溶剤ガス2aが設定発生量を上回
つた時点で大きく流出制限を受けるようオリフイ
ス9の開口面積Aを設定しておくと、溶剤ガス2
aが設定発生量程度まではオリフイス9による流
出制限を余り受けず液面2cで発生した溶剤ガス
2aが効率よく精密洗浄に供することができる。
Therefore, for example, if the opening area A of the orifice 9 is set so that the outflow is greatly restricted when the solvent gas 2a exceeds the set generation amount, the solvent gas 2a
When the amount a reaches the set generation amount, the outflow is hardly restricted by the orifice 9, and the solvent gas 2a generated at the liquid level 2c can be efficiently used for precision cleaning.

溶剤ガス2aが設定発生量を上回つたときオリ
フイス9による流出制限を大きく受けてキヤツプ
7内の圧力を高めそれに応じた位置まで液面2c
を下げる。
When the amount of solvent gas 2a exceeds the set generation amount, the flow is greatly restricted by the orifice 9, and the pressure inside the cap 7 is increased to raise the liquid level 2c to a corresponding position.
lower.

この液位の変化は液位センサ10により検出さ
れており、溶剤ガスが設定発生量を上回つたとき
の液位検出によつて制御回路11がヒータ3の発
熱を抑えるか一旦停止するように通電制御する。
これにより溶剤は一時蒸発量が少なくなり溶剤ガ
ス2aの発生量が減る。
This change in the liquid level is detected by the liquid level sensor 10, and the control circuit 11 suppresses the heat generation of the heater 3 or temporarily stops it by detecting the liquid level when the amount of solvent gas exceeds the set generation amount. Controls energization.
As a result, the amount of temporary evaporation of the solvent is reduced, and the amount of generated solvent gas 2a is reduced.

溶剤ガス2aの発生量が減つていくとそれに応
じキヤツプ7内の圧力は減じていき、液面2cの
レベルが復帰していく。液面2cのレベルが復帰
したとき溶剤ガス2aの発生量が設定値に戻つた
ことを意味し、そのときの液位検出によつて制御
回路11はヒータ3を通常の通電状態に戻す。
As the amount of solvent gas 2a generated decreases, the pressure within the cap 7 decreases accordingly, and the liquid level 2c returns to its original level. When the level of the liquid surface 2c returns, it means that the amount of generated solvent gas 2a has returned to the set value, and based on the detection of the liquid level at that time, the control circuit 11 returns the heater 3 to the normal energized state.

以上の通電制御の繰返しで溶剤ガス2aの発生
量を一定に保つことができる。
By repeating the above energization control, the amount of solvent gas 2a generated can be kept constant.

なお制御回路11はヒータ3を段階的にあるい
は無段階に通電することができる。段階的に行う
には容量の異なる、あるいは同じ容量の複数のヒ
ータを組合せ使用し、通電制御はそのどれに通電
するかの単なる切換え回路にすることができる。
Note that the control circuit 11 can energize the heater 3 stepwise or steplessly. To carry out the process in stages, a plurality of heaters with different capacities or the same capacity can be used in combination, and the energization control can be performed simply by a switching circuit that determines which heater is energized.

(考案の効果) 本考案によれば前記構成および作用を有するの
で、溶剤ガス発生量そのものを情報としてその発
生量が一定となるよう正確に制御することができ
るし、そのことによつて液剤液面の有効面積が減
るようなこともない。
(Effect of the invention) Since the invention has the above-mentioned structure and operation, it is possible to accurately control the amount of solvent gas generation using the amount itself as information, so that the amount of generation is constant. There is no reduction in the effective surface area.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案の一実施例を示す断面図である。 1……精密洗浄槽、2……溶剤、2a……溶剤
ガス、2c,2c……液面、3……ヒータ、7…
…キヤツプ、9……オリフイス、10……液位セ
ンサ、11……制御回路。
The figure is a sectional view showing an embodiment of the present invention. 1... Precision cleaning tank, 2... Solvent, 2a... Solvent gas, 2c, 2c... Liquid level, 3... Heater, 7...
... Cap, 9 ... Orifice, 10 ... Liquid level sensor, 11 ... Control circuit.

Claims (1)

【実用新案登録請求の範囲】 (1) 収容する液化溶剤をヒータにより加熱してガ
ス化し精密洗浄に供するオープン型精密洗浄槽
において、 収容する溶剤の液面に被さるキヤツプを一定
の高さに設け、 このキヤツプの天井壁に溶剤ガスの流出を制
限するオリフイスを形成し、 キヤツプが被さつている範囲の液位を検出す
る手段と、 検出液位に応じてヒータへの通電を制御する
制御手段とを備えた ことを特徴とするオープン型精密洗浄槽における
溶剤加熱制御装置。
[Scope of Claim for Utility Model Registration] (1) In an open type precision cleaning tank in which the contained liquefied solvent is heated by a heater and gasified for precision cleaning, a cap is provided at a certain height to cover the liquid level of the contained solvent. , means for forming an orifice in the ceiling wall of this cap to restrict the outflow of solvent gas, detecting the liquid level in the range covered by the cap, and controlling means for controlling energization to the heater according to the detected liquid level. A solvent heating control device for an open type precision cleaning tank, characterized by comprising:
JP9286787U 1987-06-17 1987-06-17 Expired JPH0335433Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9286787U JPH0335433Y2 (en) 1987-06-17 1987-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9286787U JPH0335433Y2 (en) 1987-06-17 1987-06-17

Publications (2)

Publication Number Publication Date
JPS63201691U JPS63201691U (en) 1988-12-26
JPH0335433Y2 true JPH0335433Y2 (en) 1991-07-26

Family

ID=30954942

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9286787U Expired JPH0335433Y2 (en) 1987-06-17 1987-06-17

Country Status (1)

Country Link
JP (1) JPH0335433Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190132350A (en) * 2017-04-13 2019-11-27 가부시키가이샤 호리바 에스텍 Vaporizer and Vaporization System

Also Published As

Publication number Publication date
JPS63201691U (en) 1988-12-26

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