JPH0335205B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a cargo storage device that handles cargo formed by storing a large number of plate-like objects such as semiconductors (wafers) in parallel in a case. It is something.

Conventional technology In general, cargo storage equipment consists of a shelf that has a plurality of compartment storage spaces vertically and horizontally, and a cargo holder that can move freely along a fixed path along the shelf and that can move up and down as well as move in and out laterally. The loading/unloading device has a loading/unloading device, and transfers loads to and from the target compartment storage space by a combination of running movement, lifting/lowering movement, and lateral movement.

Problems to be Solved by the Invention In the above-mentioned conventional configuration, the load is, for example, a plate-like object such as a wafer, which is oriented laterally and stored in a case in a stacked manner at intervals. In cases where the plate-like object is formed by a method of manufacturing, the plate-like object is supported only on the bottom surface and the top and peripheral surfaces are open, making it prone to wobbling. do. As a result, the plate-like objects collide with the side panels of the case and the upper and lower partition plates (support plates for stacking), causing noise and damage. There is also a configuration in which the fork is forcibly tilted, such as in a forklift vehicle, but in this case an actuating device and control are required.

The objects of the present invention are to be able to carry out transport by running the loading/unloading device without affecting vibrations on the load, to be able to transfer the load to the shelf and to store the load within the shelf in a stable manner, and to The object of the present invention is to provide a load storage device that can automatically switch between horizontal and inclined support positions for the load.

Means for Solving the Problems In order to solve the above-mentioned problems, the cargo storage device of the present invention includes a shelf having a plurality of compartment storage spaces in the vertical and horizontal directions, and a storage device that can freely travel on a fixed path along the shelf. This loading/unloading device is equipped with an elevating platform that is linked to a forward/reverse drive device in the post via an elevating body, and a lateral moving device that is interlocked with an actuating device provided within the elevating platform. It has a flexible load holding device,
A movable platform that can be moved laterally is provided on the elevating platform, the actuating device is interlocked with the movable platform, and the load holder is attached to the movable platform with its base end so as to be vertically swingable; A biasing device for horizontally swinging the load holder is provided between the movable platform and the load holder, and the load holder resists the biasing device when the load holder moves back into the lifting platform. A swing imparting device is provided for tilting and swinging.

Effects According to the configuration of the present invention, the load holder that is retracted into the lifting platform is inclined, and the load held by this load holder is also inclined, so that the load does not fall in the above-mentioned case. When this happens, multiple parts of the stored plate-like objects are received by the case bottom plate and the side plate on the lower side of the slope, making it difficult for them to move around and prevent rattling (collision) due to vibration when driving. Does not occur. In addition, the load can be transferred to the shelf in a horizontal state together with the load holder, and the load can be stored horizontally within the shelf.

Embodiment An embodiment of the present invention will be described below based on the drawings. 1 is a clean room, in which clean air 4 is blown down from the ceiling 2 side through a filter 3,
It is constructed so that the descending air is sucked under the floor through a mesh type floor 5. Reference numeral 6 denotes a shelf, which includes a box-shaped main body 7 with an open front, a large number of vertical frames 8 arranged horizontally in this main body 7, and these vertical frames 8.
A large number of front and rear frames 9 are installed in the vertical direction, a load receiving plate 10 is installed between the front and rear frames 9 that face each other, and an entrance 11 is formed by cutting out the main body 7 at the bottom.
It consists of an inlet loading tray 12 and an outlet loading tray 13 that protrude to the back side through the loading and unloading opening 11, and a plurality of partitioned storage spaces 14 are defined in the vertical and horizontal directions by the frames 8, 9, etc. Form. Reference numeral 15 denotes a loading/unloading device, which is movable along a fixed path 16 along the front side of the shelf 6. That is, the carry-in/out device 15 has a main body formed from a square cylindrical post 17, and a slide body 19 is attached to the lower end surface of the post 17 on the shelf 6 side via a bracket 18. This slide body 19 is attached to the main body 7 side of the shelf 6 and is supported and guided by a lower rail 20 along the constant path 16. A mounting member 21 is provided vertically from the lower surface of the post 17, and this mounting member 21 is connected to one point of an endless rotating body 22 provided on the main body 7 side, and the endless rotating body 22 can be rotated in forward and reverse directions via a wheel or the like. It is linked to the drive device 23. The lower rail 20, the forward/reverse drive device 23, etc. are disposed within a dustproof cover 24 that is integrated with the main body 7. At this time, the dustproof cover 24 has slits 25, 26 that allow movement of the bracket 18 and the mounting member 21. It has been formed.

A pair of idle rollers 2 are provided at the upper end of the post 17.
8 are disposed, and an upper rail 29 located between these idle rollers 28 and along the constant path 16 is attached to the main body 7 side via an attachment member 30.

The loading/unloading device 15 is supported and guided by both rails 20 and 29 and can freely run on a fixed path 16, and a slit 34 is formed in the vertical direction on one side of the post 17 in the traveling direction. . Inside the post 17 are an upper wheel body 35 and a lower wheel body 3.
6, a driving wheel body 37 etc. are arranged, and these wheel bodies 3
An endless rotating body 38 is wound between 5, 36, and 37, and the driving wheel body 37 is interlocked with a forward/reverse drive device 39. An elevating body 40 connected to one point of the endless rotating body 38 is guided by a vertical rail 41 disposed within the post 17, and a connecting member 42, which is a part of the elevating body 40, protrudes through the slit 34. There is. A lifting platform 4 is provided at the protruding end of this connecting member 42.
3 is attached, and a load holder 44 that can be moved out laterally is provided on the lifting platform 43, and both load receiving platforms 12, 1 are attached.
The cargo 45 can be transferred between the storage compartment 3 and the compartment storage space 14. That is, the lifting platform 43 has an installation space 47 that accommodates an actuating device 46 for moving the load holder 44 in and out, extending from the lower part to one side, and also has a load storage section 48 on the upper side. An arm 50 that can swing back and forth is attached to the side of the installation space 47 via a horizontal shaft 49.
is interlocked with a motor 51 equipped with an electromagnetic brake disposed on the lower side of the installation space 47 via a speed reducer 52. In the cargo storage section 48, a pair of upper and lower guide rods 53 are disposed at right angles to the horizontal axis 49, and are supported by the lifting platform 43 via a bracket 54. A movable base 56 is disposed between the guide rods 53 distributed in the front and rear directions, and is supported and guided by the guide rods 53 via a slide body 55. A vertical groove rail 57 is attached to one slide body 55, and a roller 58 attached to the free end of the arm 50 is engaged with the groove rail 57. Fixing pins 59 along the horizontal axis 49 are disposed on the movable base 56 in a manner divided into the front and rear, and plates 60 attached to these fixing pins 59 are respectively rotatably attached. And the swing plate 6 is placed between the mounting plates 60.
1 is attached, and the swing plate 61 is aligned with the pin axis 5.
It can freely swing up and down around 9A. This rocking plate 6
1 is attached with a horizontal rail 62 perpendicular to the guide rod 53, and a pair of brackets 64 each guided by the rail 62 via a slide body 63 has the load holder 44 attached thereto.
is installed. A stopper 65 is arranged on opposite sides of both brackets 64, and a cylinder device 66 is installed between these brackets 64. Locking members 67 are attached to opposing surfaces of the load holder 44, and two sets of these locking members 67 are arranged in the front and rear, with the right and left pairs being one set. The load 45 is formed by a case 69 in which a large number of plate-like objects 68 such as semiconductors are housed in parallel, and on the upper part of the case 69 is a locked part 70 that can be freely engaged and held by both locking members 67 from the left and right sides. provided. A biasing device 71 for horizontally swinging the load holder 44 is provided between the movable base 56 and the load holder 44. In other words, the movable body 5
A tension spring 72 is disposed between the swing plate 61 and the swing plate 61 to urge the tip of the load holder 44 to rotate upwardly around the pin axis 59A. A stopper 73 for regulating the horizontal posture of the load holder 44 is provided on the movable table 56 side.
Further, a swinging device 74 is provided which tilts and swings the load holder 44 against the biasing device 71 when the load holder 44 is retracted into the lifting platform 43. That is, a cam surface 75 is formed on the lower surface of the rear end of the swing plate 61, and the cam surface 75 becomes higher toward the rear end.
A cam roller 76 on which the cam surface 75 can ride freely is attached to the rear end of the roller 3 via a bracket 77.

The operation of the above embodiment will be explained below. Inside the clean room 1, the clean air 4 that is blown downward through the filter 3 descends, and the descending air is sucked below the floor 5, so that its cleanliness is ensured. In such a clean room 1, using the loading/unloading device 15, the partitioned storage space 14 targeted by the shelf 6 and both cargo receiving platforms 12, 13 are
The delivery of the load 45 between the
This can be performed by a combination of the lifting and lowering operations of step 3 and the moving and retracting operations of the load holder 44. At this time, the load holder 44 is moved forward and backward by the forward and reverse drive of the motor 51 on the horizontal shaft 49.
This is possible by swinging the arm 50 back and forth and moving the movable base 56 forward or rearward via the groove rail 57. And the holding of the load 45 is
A pair of fork-shaped load holders 44 in a separated state
are brought close to each other by the cylinder device 66 and the locking member 67 is engaged with the engaged portion 70, and the holding is released by a reverse action. When the load holder 44 is moved to protrude above the divided storage space 14 or both load receiving tables 12 and 13, the cam surface 75 is released from the restraint by the cam roller 76 as shown in FIG. 5, so that the elastic force of the tension spring 72 As a result, the swing plate 61 moves downward until it comes into contact with the stopper 73, and the load holder 44 becomes in a horizontal state. As a result, the compartment storage space 14 and both cargo receiving platforms 1
2 and 13 is carried out with the load 45 in a horizontal position. Furthermore, when the load holder 44 is completely retracted into the load storage section 48, the cam surface 75 rides up against the cam roller 76 as shown in FIG. Then, the swing plate 61 moves upward, and the load holder 44 automatically becomes tilted. As a result, the load 45 is transported by running the loading/unloading device 15 while tilting the load 45.
In other words, the group of plate-like objects 68 can be received by the bottom plate of the case 69 and the lower inclined side plate.

As shown in the above embodiment, by using the movement of the arm 50 as the actuating device 46, the movement of the movable base 56 can be automatically controlled from low speed → high speed → low speed,
Since the start and stop times of moving forward and backward can be made at low speeds, transfers can be performed with less impact.

Although the above embodiment shows an example in which the room is installed in a clean room 1, this may be an ordinary room, or it may be a form in which only the area where the shelves 6 and the loading/unloading device 15 are installed is converted into a clean room. .

Effects of the Invention According to the present invention having the above configuration, the load holder that is moved into and out of the lifting platform via the load holder is automatically tilted, and the load held by this load holder is also tilted. Therefore, when this load is a case containing a large number of plate-like objects, multiple parts of the housed group of plate-like objects are caught by the case bottom plate and the side plate on the lower side of the slope, making it difficult for them to move around. Therefore, it is possible to prevent plate-like objects from rattling and colliding with each other due to vibrations when the loading/unloading device is running, and it is possible to prevent noise generation and to completely eliminate damage to the group of plate-like objects. . In addition, when transferring loads to the shelf, the load is automatically leveled using the load holder, making it always stable and reliable.Furthermore, the load can be stored in the shelf in a stable manner, keeping the load level. be able to.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, in which FIG. 1 is a partially cutaway side view of the whole, FIG. 2 is a partially cutaway view of the same as seen from the back side, and FIG. 3 is a partially cutaway plan view of the same. Fourth
Figure 5 is a vertical sectional side view showing the function of the lifting platform, Figure 6 is a front view with the same part cut away, Figure 7 is a rear view with the same part cut away, and Figures 8 and 9 are the same part cut away. FIG. 1...clean room, 6...shelf, 10...load receiving board,
12...Archive entrance loading platform, 13...Outgoing loading dock, 14
...Division storage space, 15... Carrying in/out device, 16... Fixed route, 17... Post, 20... Lower rail, 29...
Upper rail, 34... Slit, 39... Forward/reverse drive device, 40... Elevating body, 42... Connecting member, 43... Lifting platform, 44... Load holder, 45... Load, 46... Actuating device, 47... Installation space, 50 ... Arm, 56... Movable base, 57... Groove rail, 58... Roller, 59... Fixed pin, 59A... Pin axis, 61... Rocking plate, 67...
Locking member, 68... plate-shaped object, 69... case, 71...
Biasing device, 72... tension spring, 74... rocking imparting device, 75... cam surface, 76... cam roller.

Claims (1)

[Claims] 1. A shelf having a plurality of compartment storage spaces in the vertical and horizontal directions, and a loading/unloading device that can freely travel on a fixed path along this shelf, and this loading/unloading device is connected to a forward/reverse drive device inside the post. It has an elevating platform that is interlocked via an elevating body, and a load holder that can move in and out in the lateral direction in conjunction with an actuating device provided within the elevating platform.
A movable platform that can be moved laterally is provided on the elevating platform, the actuating device is interlocked with the movable platform, and the load holder is attached to the movable platform with its base end so as to be vertically swingable; A biasing device for horizontally swinging the load holder is provided between the movable platform and the load holder, and the load holder resists the biasing device when the load holder moves back into the lifting platform. What is claimed is: 1. A cargo storage device characterized by being provided with a swinging device for tilting and swinging the cargo.