JPH0334777B2 - - Google Patents

Info

Publication number
JPH0334777B2
JPH0334777B2 JP61013696A JP1369686A JPH0334777B2 JP H0334777 B2 JPH0334777 B2 JP H0334777B2 JP 61013696 A JP61013696 A JP 61013696A JP 1369686 A JP1369686 A JP 1369686A JP H0334777 B2 JPH0334777 B2 JP H0334777B2
Authority
JP
Japan
Prior art keywords
plasma irradiation
plasma
irradiation means
guide
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61013696A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62172036A (ja
Inventor
Hidehiro Okamoto
Katsumi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP1369686A priority Critical patent/JPS62172036A/ja
Publication of JPS62172036A publication Critical patent/JPS62172036A/ja
Publication of JPH0334777B2 publication Critical patent/JPH0334777B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Treatment Of Fiber Materials (AREA)
JP1369686A 1986-01-27 1986-01-27 プラズマ処理装置 Granted JPS62172036A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1369686A JPS62172036A (ja) 1986-01-27 1986-01-27 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1369686A JPS62172036A (ja) 1986-01-27 1986-01-27 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS62172036A JPS62172036A (ja) 1987-07-29
JPH0334777B2 true JPH0334777B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-23

Family

ID=11840357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1369686A Granted JPS62172036A (ja) 1986-01-27 1986-01-27 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS62172036A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174235A (ja) * 1986-01-28 1987-07-31 Toray Ind Inc 長尺物用プラズマ処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149441A (ja) * 1984-01-17 1985-08-06 Kuraray Co Ltd プラズマ処理方法

Also Published As

Publication number Publication date
JPS62172036A (ja) 1987-07-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees