JPH0334317Y2 - - Google Patents
Info
- Publication number
- JPH0334317Y2 JPH0334317Y2 JP1985099616U JP9961685U JPH0334317Y2 JP H0334317 Y2 JPH0334317 Y2 JP H0334317Y2 JP 1985099616 U JP1985099616 U JP 1985099616U JP 9961685 U JP9961685 U JP 9961685U JP H0334317 Y2 JPH0334317 Y2 JP H0334317Y2
- Authority
- JP
- Japan
- Prior art keywords
- shaped electrodes
- cleaning tank
- rod
- shaped
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 14
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 7
- 235000019687 Lamb Nutrition 0.000 claims description 4
- 238000010897 surface acoustic wave method Methods 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 description 10
- 239000007788 liquid Substances 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 2
- 230000003670 easy-to-clean Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985099616U JPH0334317Y2 (el) | 1985-06-30 | 1985-06-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985099616U JPH0334317Y2 (el) | 1985-06-30 | 1985-06-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6210090U JPS6210090U (el) | 1987-01-21 |
JPH0334317Y2 true JPH0334317Y2 (el) | 1991-07-19 |
Family
ID=30968658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985099616U Expired JPH0334317Y2 (el) | 1985-06-30 | 1985-06-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0334317Y2 (el) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7133944B2 (ja) * | 2018-03-01 | 2022-09-09 | 株式会社国際電気セミコンダクターサービス | 超音波洗浄装置、洗浄方法および振動子 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56102977A (en) * | 1980-01-19 | 1981-08-17 | Matsushita Electric Ind Co Ltd | Ultrasonic washer |
JPS56141888A (en) * | 1980-04-09 | 1981-11-05 | Shimada Rika Kogyo Kk | Ultrasonic washing device |
JPS5842968A (ja) * | 1981-09-07 | 1983-03-12 | Hitachi Ltd | 超音波探触子 |
JPS60111387A (ja) * | 1983-11-21 | 1985-06-17 | Hitachi Ltd | 磁気バブルメモリ素子 |
-
1985
- 1985-06-30 JP JP1985099616U patent/JPH0334317Y2/ja not_active Expired
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56102977A (en) * | 1980-01-19 | 1981-08-17 | Matsushita Electric Ind Co Ltd | Ultrasonic washer |
JPS56141888A (en) * | 1980-04-09 | 1981-11-05 | Shimada Rika Kogyo Kk | Ultrasonic washing device |
JPS5842968A (ja) * | 1981-09-07 | 1983-03-12 | Hitachi Ltd | 超音波探触子 |
JPS60111387A (ja) * | 1983-11-21 | 1985-06-17 | Hitachi Ltd | 磁気バブルメモリ素子 |
Also Published As
Publication number | Publication date |
---|---|
JPS6210090U (el) | 1987-01-21 |
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