JPH0333566A - Digital valve - Google Patents

Digital valve

Info

Publication number
JPH0333566A
JPH0333566A JP16736289A JP16736289A JPH0333566A JP H0333566 A JPH0333566 A JP H0333566A JP 16736289 A JP16736289 A JP 16736289A JP 16736289 A JP16736289 A JP 16736289A JP H0333566 A JPH0333566 A JP H0333566A
Authority
JP
Japan
Prior art keywords
orifice
valve
orifice plate
valve seat
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16736289A
Other languages
Japanese (ja)
Inventor
Akira Miyasa
宮佐 明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP16736289A priority Critical patent/JPH0333566A/en
Publication of JPH0333566A publication Critical patent/JPH0333566A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To get a digital valve, whose orifice is easy to manufacture and has a shape accurately matched to a resolution of the valve, by fixing an orifice plate removably and tightly inside a valve port which forms an element valve, and by providing an orifice in the orifice plate. CONSTITUTION:A valve seat 2 is screwed into a screw hole 11 provided on a partition wall 1 through an O-ring 12. The valve seat 2 has a screw hole 21 inside its port at its upper side. An orifice plate 3 is screwed into the screw hole 21. A clearance between the orifice plate 3 and the valve seat 2 is sealed tightly by placing an O-ring 4 between an end face of the orifice plate 3 and the valve seat 2. The orifice plate 3 has an orifice 31, whose sectional area is determined so as to correspond to the respective element valves. Because the orifice plate 3 can be mounted and dismounted easily to the valve seat 2, repairs and changes of the orifice 31 can be performed easily. Consequently, the orifice 31 is always kept as the best one.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は2進デジタルバルブに関し、特に2進デジタル
バルブの要素弁のオリフィス構造に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a binary digital valve, and more particularly to an orifice structure of an element valve of a binary digital valve.

[従来の構造] 従来の2進デジタルバルブは、例えば時開ロ63−96
366号公報にて開示された第6図で示すものがある。
[Conventional structure] A conventional binary digital valve is, for example, a time-opening valve 63-96.
There is a device shown in FIG. 6 disclosed in Japanese Patent No. 366.

このものは上流側液溜りと下流側液溜りとを仕切る隔壁
に複数の開閉弁を設け、該開閉弁のオリフィスの面積比
を2°l  2’l  2”l ・・・・・・2”−°
となる等比数列に設けたものである。この様に形成され
たデジタルバルブではオリフィス断面積を正確に製作す
る必要があり、直径で±1%の誤差が生じると断面積で
約12%の誤差が生じデジタルバルブの分解能に影響を
およぼす。例えば8ビツトのデジタルバルブでは分解能
が理論上1/255であるが、この場合最大口径のオリ
フィスの精度が少くとも直径の17510以下であるこ
とが必要である。
In this device, a plurality of on-off valves are provided on the partition wall that partitions the upstream liquid pool and the downstream liquid pool, and the area ratio of the orifices of the on-off valves is set to 2°l 2'l 2"l...2" −°
It is set in the geometric progression. In a digital valve formed in this way, it is necessary to accurately manufacture the orifice cross-sectional area, and an error of ±1% in diameter causes an error of approximately 12% in cross-sectional area, which affects the resolution of the digital valve. For example, in an 8-bit digital valve, the resolution is theoretically 1/255, but in this case, the accuracy of the maximum diameter orifice must be at least 17,510 times the diameter.

上記従来のデジタルバルブでは第7図に示す様にオリフ
ィスは弁座に一体構造で設けられており、オリフィスの
精度が不適な場合は弁座と共に交換される様になってい
る。
In the conventional digital valve described above, the orifice is integrally provided with the valve seat, as shown in FIG. 7, and if the accuracy of the orifice is inadequate, it is replaced together with the valve seat.

[発明が解決しようとする課題] この様に弁座と一体構造のオリフィスは、オリフィスと
共に弁座の弁体とのシール面も精密に製作する必要があ
り、弁座を固定する特別な治具を要するなど製作に多く
の手間を要す。またオリフィスの摩耗を最小限に押える
ため熱処理や表面処理を施して硬化させると弁座のシー
ル面にも寸法変化等の悪影響を及ぼすので更に研磨加工
等の追加工を必要とする。
[Problems to be Solved by the Invention] In this way, the orifice that is integrated with the valve seat requires precision manufacturing of the orifice as well as the sealing surface of the valve seat with the valve body, and a special jig is required to fix the valve seat. It takes a lot of time and effort to manufacture. Further, if heat treatment or surface treatment is applied to harden the orifice in order to minimize wear, this will have an adverse effect on the sealing surface of the valve seat, such as dimensional changes, so additional processing such as polishing will be required.

またバルブ使用中においてもオリフィスの摩耗や弁座面
の摩耗等いずれかの異常によって、弁座と一体構造のオ
リフィスを交換しなければならず不都合であった。
Further, even during use of the valve, due to any abnormality such as wear of the orifice or wear of the valve seat surface, the orifice, which is integrally constructed with the valve seat, must be replaced, which is inconvenient.

本発明は上記の問題点を解決することを目的とするもの
である。
The present invention aims to solve the above problems.

[課題を解決するための手段] 上記の問題点を解決するために本発明のデジタルバルブ
は、上流側と下流側の液溜りを隔てる隔壁にN(N≧2
)個の要素弁を設け、該要素弁のオルフィスの開口面積
比が等比数列2°  2“ 、2N・・・・・・ 2N
−“である2進デジタルバルブにおいて、前記要素弁を
形成する弁口内に交換可能にオリフィス板を密封固定し
、該オリフィス板に前記オリフィスを設けたことを特徴
とするものである。
[Means for Solving the Problems] In order to solve the above problems, the digital valve of the present invention has N (N≧2
) element valves are provided, and the orifice opening area ratio of the element valves is a geometric progression of 2° 2", 2N...2N
-'' is a binary digital valve, characterized in that an orifice plate is replaceably sealed and fixed in a valve port forming the element valve, and the orifice is provided in the orifice plate.

[作用] 本発明は上記の構成のごとく、オリフィス板にオリフィ
スを形成して弁口内で交換可能に密封固定しであるから
、オリフィスの加工が容易で精度よく製作でき、バルブ
の分解能にマツチしたオリフィス形状を得ることができ
る。
[Function] As the present invention has the above configuration, the orifice is formed on the orifice plate and is sealed and fixed in a replaceable manner within the valve opening. Therefore, the orifice can be easily manufactured and manufactured with high precision, and can match the resolution of the valve. Orifice shape can be obtained.

また弁座とは別体で設けであるから耐摩耗性に優れたセ
ラミックスや焼結金属等でも材質が可能で、弁座の材質
に関係なく製作できる。更に容易に交換が可能であるか
らオルフィスの修理が簡単に行え、常に精度よいデジタ
ルバルブの分解能を維持できる。
In addition, since it is provided separately from the valve seat, it can be made of materials such as ceramics or sintered metal, which have excellent wear resistance, and can be manufactured regardless of the material of the valve seat. Furthermore, since it can be easily replaced, the orphis can be easily repaired, and the highly accurate resolution of the digital valve can be maintained at all times.

[実施例] 以下本発明の実施例を図面に基づいて説明する。[Example] Embodiments of the present invention will be described below based on the drawings.

尚本発明は上流側液溜りと下流側液溜りとを連通ずるオ
リフィスに関するものであり、デジタルバルブの全体構
造については従来のものと変らないので省略する。
The present invention relates to an orifice that communicates between an upstream liquid pool and a downstream liquid pool, and the overall structure of the digital valve is the same as the conventional one, so a description thereof will be omitted.

第1図は第1実施例を示し、隔壁lにはめねじIIを設
けてあり、このめねじIIに弁座2がOリング12を介
して装着しである。弁座2の弁口内面には図の上側より
めねじ21を有し、このめねじ21にはオリフィス板3
を螺合して装着しである。オリフィス板3の端部と弁座
2との間にはOリング4を挟着してあり、オリフィス板
3と弁座2との間は密封されている。オリフィス板3に
はオリフィス31を設けである。このオリフィス31の
断面積は各要素弁に必要な大きさに設けられている。こ
の様にオリフィス板3は弁座2に容易に取付け、取外し
が行えるのでオリフィス31の修理、交換が簡単に行え
常に最良のオリフィスに保持できる。
FIG. 1 shows a first embodiment, in which a partition wall l is provided with an internal thread II, and a valve seat 2 is attached to this internal thread II via an O-ring 12. The inner surface of the valve opening of the valve seat 2 has a female thread 21 from the upper side of the figure, and the orifice plate 3 is attached to this female thread 21.
It is installed by screwing them together. An O-ring 4 is sandwiched between the end of the orifice plate 3 and the valve seat 2, and the space between the orifice plate 3 and the valve seat 2 is sealed. The orifice plate 3 is provided with an orifice 31. The cross-sectional area of this orifice 31 is set to a size necessary for each element valve. In this way, the orifice plate 3 can be easily attached to and removed from the valve seat 2, so the orifice 31 can be easily repaired or replaced, and can always be maintained at the best orifice position.

第2図は第2実施例を示し、隔壁1には図の」二側に第
1実施例と同様に弁座2が螺合締結されている。この隔
壁1の弁口32の下流にはめねじ51を有す切欠き5が
設けてあり、切欠き5内にはOリング4を介してオリフ
ィス板3がオリフィス板押え6の螺合によって密封固定
されている。オリフィス板3には前記と同様にオリフィ
ス31が設けられており、又オリフィス板6にはオリフ
ィス31より大径の穴が形成されている。本実施例の場
合、オリフィス板押え6の螺合によってオリフィス板3
を隔壁1に密封固定しているから、オリフィス板押え6
の取付け、取外しによって容易にオリフィス板を交換す
ることが可能で前記実施例と同様常に最良のオリフィス
に保持できる。
FIG. 2 shows a second embodiment, in which a valve seat 2 is screwed to the partition wall 1 on the second side of the figure, as in the first embodiment. A notch 5 having a female thread 51 is provided downstream of the valve port 32 of the partition wall 1, and an orifice plate 3 is sealed and fixed in the notch 5 via an O-ring 4 by screwing an orifice plate holder 6. has been done. The orifice plate 3 is provided with an orifice 31 in the same manner as described above, and the orifice plate 6 is provided with a hole having a larger diameter than the orifice 31. In the case of this embodiment, the orifice plate 3 is screwed together with the orifice plate retainer 6.
is hermetically fixed to the bulkhead 1, so the orifice plate retainer 6
The orifice plate can be easily replaced by attaching and removing the orifice plate, and as in the previous embodiment, the best orifice can always be maintained.

第3図は第3実施例を示し、弁座2は弁座2の端部弁口
内面に切欠き22を設け、この切欠き22内にシールリ
ング4を介してオリフィス板3を装着し、隔壁lのめね
じ11に螺合装着したものである。
FIG. 3 shows a third embodiment, in which a notch 22 is provided on the inner surface of the valve opening at the end of the valve seat 2, and an orifice plate 3 is installed in this notch 22 via a seal ring 4. It is screwed onto the female thread 11 of the partition wall l.

オリフィス板3にはオリフィス31を設けてあり、この
場合オリフィス3Iの交換は隔壁lから弁座2を取外し
て行われる。
The orifice plate 3 is provided with an orifice 31, and in this case, the orifice 3I is replaced by removing the valve seat 2 from the partition l.

第4図は第4実施例を示し、この場合も弁座2は弁座2
の端部弁口内面に切欠き23を設け、この切欠き23内
にシールリング4を介してオリフィス板3を装着し、切
欠き23の端部内面に設けためねじ24に穴が穿いたオ
リフィス押え6を螺合締結することによりオリフィス板
3を弁口32に密封固定している。この場合隔壁lの下
部よりオリフィス押え6を取外すことによりオリフィス
板3を容易に交換することが可能である。
FIG. 4 shows a fourth embodiment, in which the valve seat 2 is also
A notch 23 is provided on the inner surface of the end valve port, and an orifice plate 3 is installed in this notch 23 via a seal ring 4. The orifice plate 3 is hermetically fixed to the valve port 32 by screwing and fastening the presser foot 6. In this case, the orifice plate 3 can be easily replaced by removing the orifice holder 6 from the lower part of the partition wall l.

第5図は第5実施例を示し、この場合も弁座2は弁座2
の端部弁口内面に切欠き23を設け、この切欠き23内
にシールリング4を介して切欠き23のめねじ24に螺
合するオリフィス板3を螺合して弁座2の弁口32内に
オリフィス板3を密封固定している。オリフィス31は
オリフィス板3に設けられてあり、弁座2からオリフィ
ス板3を取外すことによって容易にオリフィスを交換又
は修理することが可能である。
FIG. 5 shows a fifth embodiment, in which the valve seat 2 is also
A notch 23 is provided on the inner surface of the valve opening at the end of the valve seat 2, and the orifice plate 3, which is screwed into the internal thread 24 of the notch 23, is screwed into the notch 23 via the seal ring 4. The orifice plate 3 is hermetically fixed within 32. The orifice 31 is provided on the orifice plate 3, and by removing the orifice plate 3 from the valve seat 2, the orifice can be easily replaced or repaired.

向上記第1図から第5図の実施例において、オリフィス
板3に設けるオリフィス31は複数個のオリフィスを形
成して各要素弁に最適のオリフィスとしても良い。
In the embodiments shown in FIGS. 1 to 5, the orifice 31 provided in the orifice plate 3 may be formed into a plurality of orifices to provide the optimum orifice for each element valve.

[発明の効果] 以」二の説明のごとく本発明のデジタルバルブは、オリ
フィスの交換修理が容易で、又オリフィス板にオリフィ
スを設ける様にしたため加工が容易で、オリフィスが正
確に精度よく製作でき、又各要素弁に最良のオリフィス
を設けることができる。更に耐摩耗や耐熱変化性に優れ
た材質でオリフィスを形成することも容易で、従来のご
とく弁座に影響を及ぼすことなく高精度の分解能を有す
るデジタルバルブを得ることを可能にするものである。
[Effects of the Invention] As explained in section 2 below, in the digital valve of the present invention, the orifice can be easily replaced and repaired, and since the orifice is provided on the orifice plate, it is easy to process, and the orifice can be manufactured accurately and with high precision. , and each element valve can be provided with the best orifice. Furthermore, it is easy to form the orifice using a material with excellent wear resistance and heat change resistance, making it possible to obtain a digital valve with high precision resolution without affecting the valve seat as in conventional valves. .

【図面の簡単な説明】[Brief explanation of drawings]

第1図乃至第5図は本発明の実施例を示すもので各要素
弁における弁座部の断面図、第6図は従来のデジタルバ
ルブの断面図、第7図は第6図の要素弁における弁座部
の断面図である。 l・・・・・・隔壁、      2・・・・・弁座。 3・・・・・・オリフィス板、  4 ・・・・シール
リング。 5・・・・・・切欠き、     6・・・・・・オリ
フィス板押え。 31・・・・・・オリフィス、32・・・・・・弁口。 特開平3 33566 (4) 第 図 2 第 図 □ 第 7 図
Figures 1 to 5 show embodiments of the present invention, and are sectional views of the valve seat portions of each element valve, Figure 6 is a sectional view of a conventional digital valve, and Figure 7 is the element valve of Figure 6. It is a sectional view of the valve seat part in . l...Bulkhead, 2...Valve seat. 3... Orifice plate, 4... Seal ring. 5... Notch, 6... Orifice plate holder. 31... Orifice, 32... Valve. JP-A-3-33566 (4) Figure 2 Figure □ Figure 7

Claims (1)

【特許請求の範囲】 1)上流側と下流側の液溜りを隔てる隔壁にN(N≧2
)個の要素弁を設け、該要素弁のオリフィスの開口面積
比が等比数列2^0、2^1、2^2、・・・・・・、
2^N^−^1である2進デジタルバルブにおいて、前
記要素弁を形成する弁口内に交換可能にオリフィス板を
密封固定し、該オリフィス板に前記オリフィスを設けた
ことを特徴とするデジタルバルブ。 2)特許請求の範囲第1項に記載において、前記オリフ
ィスを設けたオリフィス板は前記要素弁を形成する弁座
の弁口内面にねじ結合したことを特徴とするデジタルバ
ルブ。 3)特許請求の範囲第1項記載において、前記オリフィ
スを設けたオリフィス板は前記隔壁に形成した弁口内面
にねじ結合するオリフィス押えによって隔壁の弁口内に
挟着したことを特徴とするデジタルバルブ。 4)特許請求の範囲第1項記載において、前記オリフィ
スを設けたオリフィス板は要素弁を形成する弁座の弁口
端部と隔壁に形成した切欠き段部との間に挟着したこと
を特徴とするデジタルバルブ。 5)特許請求の範囲第1項乃至第4項記載において、前
記オリフィスは前記オリフィス板に複数個設けたことを
特徴とするデジタルバルブ。
[Claims] 1) N (N≧2) on the partition wall separating the upstream and downstream liquid pools
) element valves are provided, and the opening area ratio of the orifice of the element valves is a geometric progression 2^0, 2^1, 2^2,...
2^N^-^1, which is a binary digital valve, characterized in that an orifice plate is hermetically fixed in a replaceable manner within a valve port forming the element valve, and the orifice is provided on the orifice plate. . 2) The digital valve according to claim 1, wherein the orifice plate provided with the orifice is screwed to the inner surface of the valve opening of the valve seat forming the element valve. 3) The digital valve according to claim 1, wherein the orifice plate provided with the orifice is clamped within the valve port of the partition wall by an orifice holder screwed to the inner surface of the valve port formed in the partition wall. . 4) In claim 1, it is stated that the orifice plate provided with the orifice is sandwiched between the valve port end of the valve seat forming the element valve and the notch step formed in the partition wall. Features a digital valve. 5) The digital valve according to claims 1 to 4, wherein a plurality of the orifices are provided on the orifice plate.
JP16736289A 1989-06-29 1989-06-29 Digital valve Pending JPH0333566A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16736289A JPH0333566A (en) 1989-06-29 1989-06-29 Digital valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16736289A JPH0333566A (en) 1989-06-29 1989-06-29 Digital valve

Publications (1)

Publication Number Publication Date
JPH0333566A true JPH0333566A (en) 1991-02-13

Family

ID=15848312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16736289A Pending JPH0333566A (en) 1989-06-29 1989-06-29 Digital valve

Country Status (1)

Country Link
JP (1) JPH0333566A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0564007U (en) * 1992-02-04 1993-08-24 日産ディーゼル工業株式会社 Vehicle power supply
US5522034A (en) * 1993-08-20 1996-05-28 Nippondenso Co., Ltd. Battery disconnection detecting apparatus
WO2001094824A1 (en) * 2000-06-05 2001-12-13 Fujikin Incorporated Orifice-built-in valve
KR100436628B1 (en) * 1995-05-31 2004-07-31 가부시키가이샤 후지킨 Fluid control device
WO2007023597A1 (en) * 2005-08-26 2007-03-01 Fujikin Incorporated Gasket type orifice and pressure type flow controller using the same
US8418714B2 (en) 2005-06-27 2013-04-16 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
US9383758B2 (en) 2005-06-27 2016-07-05 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
US9921089B2 (en) 2005-06-27 2018-03-20 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
WO2019107123A1 (en) * 2017-11-30 2019-06-06 株式会社フジキン Valve device, and fluid control device and semiconductor manufacturing device using this valve device
KR20200065061A (en) * 2017-11-30 2020-06-08 가부시키가이샤 후지킨 Valve device, fluid control device using this valve device, and semiconductor manufacturing device
WO2020158512A1 (en) * 2019-01-31 2020-08-06 株式会社フジキン Flow passage assembly, valve device employing said flow passage assembly, fluid control device, semiconductor manufacturing device, and semiconductor manufacturing method
TWI701403B (en) * 2016-11-30 2020-08-11 日商富士金股份有限公司 Valve device, flow control method using the valve device, and semiconductor manufacturing method

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0564007U (en) * 1992-02-04 1993-08-24 日産ディーゼル工業株式会社 Vehicle power supply
US5522034A (en) * 1993-08-20 1996-05-28 Nippondenso Co., Ltd. Battery disconnection detecting apparatus
KR100436628B1 (en) * 1995-05-31 2004-07-31 가부시키가이샤 후지킨 Fluid control device
WO2001094824A1 (en) * 2000-06-05 2001-12-13 Fujikin Incorporated Orifice-built-in valve
EP1300619A1 (en) * 2000-06-05 2003-04-09 Fujikin Incorporated Orifice-built-in valve
EP1300619A4 (en) * 2000-06-05 2004-08-11 Fujikin Kk Orifice-built-in valve
US7150444B2 (en) 2000-06-05 2006-12-19 Fujikin Incorporated Valve with an integral orifice
US8418714B2 (en) 2005-06-27 2013-04-16 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
US9921089B2 (en) 2005-06-27 2018-03-20 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
US9383758B2 (en) 2005-06-27 2016-07-05 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
US9010369B2 (en) 2005-06-27 2015-04-21 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
WO2007023597A1 (en) * 2005-08-26 2007-03-01 Fujikin Incorporated Gasket type orifice and pressure type flow controller using the same
JP4690827B2 (en) * 2005-08-26 2011-06-01 株式会社フジキン Gasket type orifice and pressure type flow control device using the same
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EP1918799A4 (en) * 2005-08-26 2009-05-06 Fujikin Kk Gasket type orifice and pressure type flow controller using the same
US9133951B2 (en) 2005-08-26 2015-09-15 Fujikin Incorporated Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed
EP1918799A1 (en) * 2005-08-26 2008-05-07 Fujikin Incorporated Gasket type orifice and pressure type flow controller using the same
JP2007057474A (en) * 2005-08-26 2007-03-08 Fujikin Inc Gasket type orifice and pressure type flow control device using the same
TWI701403B (en) * 2016-11-30 2020-08-11 日商富士金股份有限公司 Valve device, flow control method using the valve device, and semiconductor manufacturing method
KR20200065061A (en) * 2017-11-30 2020-06-08 가부시키가이샤 후지킨 Valve device, fluid control device using this valve device, and semiconductor manufacturing device
TWI690669B (en) * 2017-11-30 2020-04-11 日商富士金股份有限公司 Valve device, fluid control device using the same, and semiconductor manufacturing device
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CN111417809A (en) * 2017-11-30 2020-07-14 株式会社富士金 Valve device, fluid control device using the same, and semiconductor manufacturing apparatus
CN111433496A (en) * 2017-11-30 2020-07-17 株式会社富士金 Valve device, fluid control device using the same, and semiconductor manufacturing apparatus
WO2019107123A1 (en) * 2017-11-30 2019-06-06 株式会社フジキン Valve device, and fluid control device and semiconductor manufacturing device using this valve device
JPWO2019107123A1 (en) * 2017-11-30 2020-11-26 株式会社フジキン Valve device, fluid control device and semiconductor manufacturing device using this valve device
US11365830B2 (en) 2017-11-30 2022-06-21 Fujikin Incorporated Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device
US11427911B2 (en) 2017-11-30 2022-08-30 Fujikin Incorporated Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device
WO2020158512A1 (en) * 2019-01-31 2020-08-06 株式会社フジキン Flow passage assembly, valve device employing said flow passage assembly, fluid control device, semiconductor manufacturing device, and semiconductor manufacturing method
TWI724771B (en) * 2019-01-31 2021-04-11 日商富士金股份有限公司 Flow path component, valve device using the flow path component, fluid control device, semiconductor manufacturing device, and semiconductor manufacturing method
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