JPH0333059Y2 - - Google Patents

Info

Publication number
JPH0333059Y2
JPH0333059Y2 JP1985057516U JP5751685U JPH0333059Y2 JP H0333059 Y2 JPH0333059 Y2 JP H0333059Y2 JP 1985057516 U JP1985057516 U JP 1985057516U JP 5751685 U JP5751685 U JP 5751685U JP H0333059 Y2 JPH0333059 Y2 JP H0333059Y2
Authority
JP
Japan
Prior art keywords
support
crucible
thermocouple
heater
molecular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985057516U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61174740U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985057516U priority Critical patent/JPH0333059Y2/ja
Publication of JPS61174740U publication Critical patent/JPS61174740U/ja
Application granted granted Critical
Publication of JPH0333059Y2 publication Critical patent/JPH0333059Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP1985057516U 1985-04-19 1985-04-19 Expired JPH0333059Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985057516U JPH0333059Y2 (pm) 1985-04-19 1985-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985057516U JPH0333059Y2 (pm) 1985-04-19 1985-04-19

Publications (2)

Publication Number Publication Date
JPS61174740U JPS61174740U (pm) 1986-10-30
JPH0333059Y2 true JPH0333059Y2 (pm) 1991-07-12

Family

ID=30582120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985057516U Expired JPH0333059Y2 (pm) 1985-04-19 1985-04-19

Country Status (1)

Country Link
JP (1) JPH0333059Y2 (pm)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725733U (pm) * 1980-07-18 1982-02-10
JPS5842224A (ja) * 1981-09-07 1983-03-11 Mitsubishi Electric Corp 真空蒸着用セル

Also Published As

Publication number Publication date
JPS61174740U (pm) 1986-10-30

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