JPH0333059Y2 - - Google Patents

Description

[Detailed explanation of the idea] [Field of application of invention] The present invention relates to a molecular beam source.

[Background of the idea]

For example, regarding the molecular beam source used in molecular beam epitaxy, see Kiyoshi Takahashi (ed.), "Molecular Beam Epitaxy Technology", Industrial Research Association Co., Ltd., published January 20, 1980.
However, there is no description on how to support the thermocouple that detects the temperature of the crucible.

[Purpose of invention]

The purpose of the present invention is to provide a molecular beam source that can stably detect the temperature of a crucible using a thermocouple.

[Summary of the idea]

The present invention provides a molecular beam source consisting of a first support that supports a crucible, a heater, an insulator, and a heat shield, and a thermocouple that detects the temperature at the bottom of the crucible. an insulator tube that passes through the first and second support bases and supports the thermocouple therein;
and a clip that is provided between the support stands and is attached to the second support stand via a spring that presses in the direction of the first support stand, so that the longitudinal position of the insulator tube can be adjusted and supported. The feature is that the temperature of the crucible can be stably detected by the thermocouple by pressing and holding the detection end of the thermocouple against the bottom of the crucible stably and with good reproducibility.

[Example of idea]

An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.

As shown in FIG. 1, the support base 6 and the support base 2 are connected by a column 9, a heater support 4 is combined with the support base 2, a heater 3 is arranged on the heater support 4, and a heat shield plate is provided in the center. After inserting 10,
The crucible 5 is assembled inside the heater 3, and supports 6, 2 and a heat shield plate 10 constitute an evaporation source.
A hole is provided in the center of the insulator tube 1 to pass through the thermocouple 11, and the thermocouple 11 is inserted from the support stand 6 side so that the detection end of the thermocouple 11 contacts the bottom of the crucible 5. At this time, as shown in FIG. 2, a clip 8 was combined with the insulator tube 1 so that it could be fixed at any desired position with screws 12 and nuts 13.
Furthermore, a U with holes provided at both ends through which the insulator tube 1 can pass through.
A letter-shaped leaf spring 7 is installed between the support base 6 and the clip 8, so that the detection end of the thermocouple 11 is pressed against the bottom of the crucible 5 via the clip 8. Here, by changing the position of clip 8,
The force with which the detection end of the thermocouple 11 is pressed against the bottom of the crucible 5 can be changed.

Since the leaf spring has a wide contact surface, that is, a support surface, it can stably support the posture of the insulator tube 1, so the thermocouple 11
The detection end is stable, which is effective for stabilizing temperature detection. In this way, since the temperature of the crucible 5 can be detected stably, the temperature control of the molecular beam evaporation source is stabilized, and the performance of the molecular beam source is improved.

[Effect of idea]

As explained above, the present invention has the advantage that the thermocouple can maintain a stable posture and the detection end can be pressed and held in a fixed position, so that the temperature of the crucible can be stably detected by the thermocouple.

[Brief explanation of the drawing]

FIG. 1 is a vertical cross-sectional view of a main part showing an embodiment of a molecular beam source according to the present invention, and FIG. 2 is a perspective view showing details of the relationship between the thermocouple and the spring shown in FIG. 1. 1... Insulator tube, 2, 6... Support stand, 3... Heater, 5... Crucible, 7... Leaf spring, 8... Clip, 9... Support column, 10... Heat shield plate, 11...
...thermocouple, 12...screw, 13...nut.

Claims (1)

[Scope of utility model registration request] A crucible into which molecular beam raw material is loaded, a heater provided outside the crucible to heat the raw material, an insulator that supports the heater, and a heat shield that prevents heat generated by the heater from escaping to the outside. , a first support stand that supports these, and a thermocouple that penetrates the first support stand and detects the temperature at the bottom of the crucible.
a second support stand supported from the support stand; an insulator tube that passes through the first and second support stands and supports the thermocouple therein; and between the first and second support stands; and a clip that is attached to the second support base via a spring that presses in the direction of the first support base and is capable of adjusting and supporting the longitudinal position of the insulator tube. Molecular beam source.