JPH0332985U - - Google Patents
Info
- Publication number
- JPH0332985U JPH0332985U JP8915389U JP8915389U JPH0332985U JP H0332985 U JPH0332985 U JP H0332985U JP 8915389 U JP8915389 U JP 8915389U JP 8915389 U JP8915389 U JP 8915389U JP H0332985 U JPH0332985 U JP H0332985U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- chamber
- cleaning liquid
- liquid supply
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 4
- 238000004506 ultrasonic cleaning Methods 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8915389U JPH0332985U (th) | 1989-07-31 | 1989-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8915389U JPH0332985U (th) | 1989-07-31 | 1989-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0332985U true JPH0332985U (th) | 1991-03-29 |
Family
ID=31638748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8915389U Pending JPH0332985U (th) | 1989-07-31 | 1989-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0332985U (th) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010094639A (ja) * | 2008-10-20 | 2010-04-30 | Various Co Ltd | 被洗浄物の洗浄方法およびその洗浄装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63110731A (ja) * | 1986-10-29 | 1988-05-16 | Nec Kyushu Ltd | 半導体基板処理装置 |
| JPS6463086A (en) * | 1987-09-02 | 1989-03-09 | Yoshimi Oshitari | Ultrasonic cleaner |
-
1989
- 1989-07-31 JP JP8915389U patent/JPH0332985U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63110731A (ja) * | 1986-10-29 | 1988-05-16 | Nec Kyushu Ltd | 半導体基板処理装置 |
| JPS6463086A (en) * | 1987-09-02 | 1989-03-09 | Yoshimi Oshitari | Ultrasonic cleaner |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010094639A (ja) * | 2008-10-20 | 2010-04-30 | Various Co Ltd | 被洗浄物の洗浄方法およびその洗浄装置 |