JPH0332985U - - Google Patents
Info
- Publication number
- JPH0332985U JPH0332985U JP8915389U JP8915389U JPH0332985U JP H0332985 U JPH0332985 U JP H0332985U JP 8915389 U JP8915389 U JP 8915389U JP 8915389 U JP8915389 U JP 8915389U JP H0332985 U JPH0332985 U JP H0332985U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- chamber
- cleaning liquid
- liquid supply
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 4
- 238000004506 ultrasonic cleaning Methods 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第1図は本考案に係る洗浄装置の一実施例を示
す断面図、第2図は仕切板の正面図、第3図は従
来の洗浄装置の断面図である。
1……洗浄槽、2,2A,2B……洗浄液、3
……オーバーフロー槽、4……超音波振動子、6
……フイルタ、7……ポンプ、9……被洗浄物、
10……ケース、11……異物等、12……洗浄
液供給口、20……仕切板、21……主洗浄室、
22……洗浄液供給室、23……洗浄液用送給孔
、24,25……側壁、26……排出口。
FIG. 1 is a sectional view showing an embodiment of a cleaning device according to the present invention, FIG. 2 is a front view of a partition plate, and FIG. 3 is a sectional view of a conventional cleaning device. 1...Cleaning tank, 2, 2A, 2B...Cleaning liquid, 3
... Overflow tank, 4 ... Ultrasonic vibrator, 6
...Filter, 7...Pump, 9...Object to be cleaned,
10... Case, 11... Foreign matter, etc., 12... Cleaning liquid supply port, 20... Partition plate, 21... Main cleaning chamber,
22...Cleaning liquid supply chamber, 23...Cleaning liquid feed hole, 24, 25...Side wall, 26...Discharge port.
Claims (1)
波振動子によつて超音波洗浄する洗浄装置におい
て、前記洗浄槽内を多数の洗浄液用送給孔を有す
る仕切板によつて主洗浄室と、洗浄液供給室の2
室に画成し、ポンプによつて前記洗浄液供給室に
洗浄液を供給して前記洗浄液用送給孔より主洗浄
室内に送り込み、前記仕切板側とは反対側の主洗
浄室底面部に排出口を設けたことを特徴とする洗
浄装置。 In a cleaning device that immerses an object to be cleaned in a cleaning liquid in a cleaning tank and performs ultrasonic cleaning using an ultrasonic vibrator, the main cleaning is carried out in the cleaning tank by a partition plate having a large number of cleaning liquid supply holes. chamber and cleaning liquid supply chamber.
A cleaning liquid is supplied to the cleaning liquid supply chamber by a pump and sent into the main cleaning chamber from the cleaning liquid supply hole, and a discharge port is provided at the bottom of the main cleaning chamber on the opposite side from the partition plate side. A cleaning device characterized by being provided with.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8915389U JPH0332985U (en) | 1989-07-31 | 1989-07-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8915389U JPH0332985U (en) | 1989-07-31 | 1989-07-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0332985U true JPH0332985U (en) | 1991-03-29 |
Family
ID=31638748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8915389U Pending JPH0332985U (en) | 1989-07-31 | 1989-07-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0332985U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010094639A (en) * | 2008-10-20 | 2010-04-30 | Various Co Ltd | Method of cleaning object to be cleaned and equipment for cleaning the object to be cleaned |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63110731A (en) * | 1986-10-29 | 1988-05-16 | Nec Kyushu Ltd | Semiconductor substrate processor |
JPS6463086A (en) * | 1987-09-02 | 1989-03-09 | Yoshimi Oshitari | Ultrasonic cleaner |
-
1989
- 1989-07-31 JP JP8915389U patent/JPH0332985U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63110731A (en) * | 1986-10-29 | 1988-05-16 | Nec Kyushu Ltd | Semiconductor substrate processor |
JPS6463086A (en) * | 1987-09-02 | 1989-03-09 | Yoshimi Oshitari | Ultrasonic cleaner |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010094639A (en) * | 2008-10-20 | 2010-04-30 | Various Co Ltd | Method of cleaning object to be cleaned and equipment for cleaning the object to be cleaned |