JPH0332985U - - Google Patents

Info

Publication number
JPH0332985U
JPH0332985U JP8915389U JP8915389U JPH0332985U JP H0332985 U JPH0332985 U JP H0332985U JP 8915389 U JP8915389 U JP 8915389U JP 8915389 U JP8915389 U JP 8915389U JP H0332985 U JPH0332985 U JP H0332985U
Authority
JP
Japan
Prior art keywords
cleaning
chamber
cleaning liquid
liquid supply
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8915389U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8915389U priority Critical patent/JPH0332985U/ja
Publication of JPH0332985U publication Critical patent/JPH0332985U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案に係る洗浄装置の一実施例を示
す断面図、第2図は仕切板の正面図、第3図は従
来の洗浄装置の断面図である。 1……洗浄槽、2,2A,2B……洗浄液、3
……オーバーフロー槽、4……超音波振動子、6
……フイルタ、7……ポンプ、9……被洗浄物、
10……ケース、11……異物等、12……洗浄
液供給口、20……仕切板、21……主洗浄室、
22……洗浄液供給室、23……洗浄液用送給孔
、24,25……側壁、26……排出口。
FIG. 1 is a sectional view showing an embodiment of a cleaning device according to the present invention, FIG. 2 is a front view of a partition plate, and FIG. 3 is a sectional view of a conventional cleaning device. 1...Cleaning tank, 2, 2A, 2B...Cleaning liquid, 3
... Overflow tank, 4 ... Ultrasonic vibrator, 6
...Filter, 7...Pump, 9...Object to be cleaned,
10... Case, 11... Foreign matter, etc., 12... Cleaning liquid supply port, 20... Partition plate, 21... Main cleaning chamber,
22...Cleaning liquid supply chamber, 23...Cleaning liquid feed hole, 24, 25...Side wall, 26...Discharge port.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被洗浄物を洗浄槽内の洗浄液中に浸漬し、超音
波振動子によつて超音波洗浄する洗浄装置におい
て、前記洗浄槽内を多数の洗浄液用送給孔を有す
る仕切板によつて主洗浄室と、洗浄液供給室の2
室に画成し、ポンプによつて前記洗浄液供給室に
洗浄液を供給して前記洗浄液用送給孔より主洗浄
室内に送り込み、前記仕切板側とは反対側の主洗
浄室底面部に排出口を設けたことを特徴とする洗
浄装置。
In a cleaning device that immerses an object to be cleaned in a cleaning liquid in a cleaning tank and performs ultrasonic cleaning using an ultrasonic vibrator, the main cleaning is carried out in the cleaning tank by a partition plate having a large number of cleaning liquid supply holes. chamber and cleaning liquid supply chamber.
A cleaning liquid is supplied to the cleaning liquid supply chamber by a pump and sent into the main cleaning chamber from the cleaning liquid supply hole, and a discharge port is provided at the bottom of the main cleaning chamber on the opposite side from the partition plate side. A cleaning device characterized by being provided with.
JP8915389U 1989-07-31 1989-07-31 Pending JPH0332985U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8915389U JPH0332985U (en) 1989-07-31 1989-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8915389U JPH0332985U (en) 1989-07-31 1989-07-31

Publications (1)

Publication Number Publication Date
JPH0332985U true JPH0332985U (en) 1991-03-29

Family

ID=31638748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8915389U Pending JPH0332985U (en) 1989-07-31 1989-07-31

Country Status (1)

Country Link
JP (1) JPH0332985U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010094639A (en) * 2008-10-20 2010-04-30 Various Co Ltd Method of cleaning object to be cleaned and equipment for cleaning the object to be cleaned

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110731A (en) * 1986-10-29 1988-05-16 Nec Kyushu Ltd Semiconductor substrate processor
JPS6463086A (en) * 1987-09-02 1989-03-09 Yoshimi Oshitari Ultrasonic cleaner

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110731A (en) * 1986-10-29 1988-05-16 Nec Kyushu Ltd Semiconductor substrate processor
JPS6463086A (en) * 1987-09-02 1989-03-09 Yoshimi Oshitari Ultrasonic cleaner

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010094639A (en) * 2008-10-20 2010-04-30 Various Co Ltd Method of cleaning object to be cleaned and equipment for cleaning the object to be cleaned

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