JPH047660U - - Google Patents
Info
- Publication number
- JPH047660U JPH047660U JP4878590U JP4878590U JPH047660U JP H047660 U JPH047660 U JP H047660U JP 4878590 U JP4878590 U JP 4878590U JP 4878590 U JP4878590 U JP 4878590U JP H047660 U JPH047660 U JP H047660U
- Authority
- JP
- Japan
- Prior art keywords
- electrodeposition
- liquid
- tank
- outside
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004070 electrodeposition Methods 0.000 claims description 11
- 238000005192 partition Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 6
- 238000007599 discharging Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Description
第１図は本考案の一実施例によるレジスト電着
装置の断面斜視図、第２図は従来例によるレジス
ト電着装置の断面斜視図、第３図は他の従来例に
よるレジスト電着装置の断面斜視図である。
４……基板、８……供給口、９……槽、１０…
…排出口、１１……第１の多孔隔壁、１２……第
２の多孔隔壁。
FIG. 1 is a cross-sectional perspective view of a resist electrodeposition apparatus according to an embodiment of the present invention, FIG. 2 is a cross-sectional perspective view of a resist electrodeposition apparatus according to a conventional example, and FIG. 3 is a cross-sectional perspective view of a resist electrodeposition apparatus according to another conventional example. It is a cross-sectional perspective view. 4... Board, 8... Supply port, 9... Tank, 10...
...Exhaust port, 11...First porous partition, 12...Second porous partition.
Claims (1)
電着液によつて電着を行なうレジスト電着装置に
おいて、 前記槽には、対向して、前記電着液を外部より
供給する供給口と、 前記電着液を外部へ排出する排出口とを設ける
とともに、 前記槽内に配置した基板を挟んで、前記供給口
側及び前記排出口側にそれぞれ、第１の多孔隔壁
及び第２の多孔隔壁を設けてなることを特徴とす
るレジスト電着装置。[Claims for Utility Model Registration] In a resist electrodeposition apparatus for electrodepositing a resist resin on the surface of a substrate placed in a tank using an electrodeposition liquid, the tank has an electrodeposition liquid disposed opposite to the electrodeposition liquid. a supply port for supplying the electrocoating liquid from the outside, and a discharge port for discharging the electrodeposition liquid to the outside, and a first supply port and a first discharge port for discharging the electrodeposition liquid to the outside, respectively, with the substrate placed in the tank in between. 1. A resist electrodeposition apparatus comprising a porous partition wall and a second porous partition wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4878590U JPH047660U (en) | 1990-05-10 | 1990-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4878590U JPH047660U (en) | 1990-05-10 | 1990-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH047660U true JPH047660U (en) | 1992-01-23 |
Family
ID=31565908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4878590U Pending JPH047660U (en) | 1990-05-10 | 1990-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047660U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5290779U (en) * | 1975-12-29 | 1977-07-06 |
-
1990
- 1990-05-10 JP JP4878590U patent/JPH047660U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5290779U (en) * | 1975-12-29 | 1977-07-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH047660U (en) | ||
| JPH0363993U (en) | ||
| JPS62194468U (en) | ||
| JPH031971U (en) | ||
| JPS62143453U (en) | ||
| JPS58186433U (en) | Powder quantitative supply device | |
| JPS6134232U (en) | Air bubble generator for bathtub | |
| JPS611023U (en) | Ultrasonic humidifier spray barrel | |
| JPS6260827U (en) | ||
| JPS59162065U (en) | Toilet display stand with private cleaning device | |
| JPH0453405U (en) | ||
| JPH02133507U (en) | ||
| JPS58137427U (en) | dissolver | |
| JPS60186024U (en) | Equipment for distributing liquid evenly into a container filled with liquid | |
| JPS60179950U (en) | Experimental water tank | |
| JPH0189961U (en) | ||
| JPH0380364U (en) | ||
| JPS60134556U (en) | multi nozzle | |
| JPS6137879U (en) | Circulating Nagashi Somen device | |
| JPS5815660U (en) | spotting device | |
| JPS5872160U (en) | Spray type surface treatment equipment | |
| JPH0210462U (en) | ||
| JPS5886298U (en) | Sewage septic tank | |
| JPS6050265U (en) | Bathtub water supply device | |
| JPH03123565U (en) |