JPH0332683U - - Google Patents

Info

Publication number
JPH0332683U
JPH0332683U JP9213189U JP9213189U JPH0332683U JP H0332683 U JPH0332683 U JP H0332683U JP 9213189 U JP9213189 U JP 9213189U JP 9213189 U JP9213189 U JP 9213189U JP H0332683 U JPH0332683 U JP H0332683U
Authority
JP
Japan
Prior art keywords
rotary table
sponge brush
drive motor
rotated
cleaning fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9213189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9213189U priority Critical patent/JPH0332683U/ja
Publication of JPH0332683U publication Critical patent/JPH0332683U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP9213189U 1989-08-07 1989-08-07 Pending JPH0332683U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9213189U JPH0332683U (enrdf_load_stackoverflow) 1989-08-07 1989-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9213189U JPH0332683U (enrdf_load_stackoverflow) 1989-08-07 1989-08-07

Publications (1)

Publication Number Publication Date
JPH0332683U true JPH0332683U (enrdf_load_stackoverflow) 1991-03-29

Family

ID=31641574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9213189U Pending JPH0332683U (enrdf_load_stackoverflow) 1989-08-07 1989-08-07

Country Status (1)

Country Link
JP (1) JPH0332683U (enrdf_load_stackoverflow)

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