JPH0332417U - - Google Patents
Info
- Publication number
- JPH0332417U JPH0332417U JP9210689U JP9210689U JPH0332417U JP H0332417 U JPH0332417 U JP H0332417U JP 9210689 U JP9210689 U JP 9210689U JP 9210689 U JP9210689 U JP 9210689U JP H0332417 U JPH0332417 U JP H0332417U
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- tank
- chemical liquid
- supply pipe
- filtration filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9210689U JPH0332417U (fr) | 1989-08-04 | 1989-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9210689U JPH0332417U (fr) | 1989-08-04 | 1989-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0332417U true JPH0332417U (fr) | 1991-03-29 |
Family
ID=31641552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9210689U Pending JPH0332417U (fr) | 1989-08-04 | 1989-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0332417U (fr) |
-
1989
- 1989-08-04 JP JP9210689U patent/JPH0332417U/ja active Pending