JPH0332417U - - Google Patents
Info
- Publication number
- JPH0332417U JPH0332417U JP9210689U JP9210689U JPH0332417U JP H0332417 U JPH0332417 U JP H0332417U JP 9210689 U JP9210689 U JP 9210689U JP 9210689 U JP9210689 U JP 9210689U JP H0332417 U JPH0332417 U JP H0332417U
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- tank
- chemical liquid
- supply pipe
- filtration filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Weting (AREA)
Description
第１図は、本考案の実施例を説明するオーバー
フロー式薬液循環処理装置の概略説明図、第２図
ａ，ｂは、第１図中の整流部の平面図及び正面図
、第３図は、別の整流部の部分縦断面図、第４図
は、従来のウエツトエツチング装置の概略説明図
である。
１……薬液循環処理装置、２……薬液処理槽、
２ａ……底部、２ｂ……中間槽、２ｃ，２ｄ……
側壁、３……薬液回収槽、３ａ……底部、５……
整流部、６……吐出部、７……ポンプ、８……濾
過フイルター、９……薬液供給管、１０……キヤ
リア位置決め治具、１１……排出部、１２，１３
……配管。
Fig. 1 is a schematic explanatory diagram of an overflow type chemical liquid circulation treatment device explaining an embodiment of the present invention, Fig. 2 a and b are a plan view and a front view of the rectifying section in Fig. 1, and Fig. 3 is a , a partial vertical sectional view of another rectifying section, and FIG. 4 are schematic illustrations of a conventional wet etching device. 1... Chemical liquid circulation processing device, 2... Chemical liquid processing tank,
2a...bottom, 2b...intermediate tank, 2c, 2d...
Side wall, 3... Chemical solution recovery tank, 3a... Bottom, 5...
Rectifier, 6... Discharge part, 7... Pump, 8... Filtration filter, 9... Chemical supply pipe, 10... Carrier positioning jig, 11... Discharge part, 12, 13
……Piping.
Claims (1)
に付設した薬液回収槽と、前記薬液回収槽の底部
に配管を介して接続したポンプと、前記ポンプに
配管を介して接続した濾過フイルターと、前記濾
過フイルターと前記薬液処理槽とを連通した薬液
供給管とから構成され、 前記薬液処理槽の底部側には、キヤリア載置治
具を設けた整流部を取り付けるとともに薬液処理
槽の底部と整流部との間に中間槽を形成し、 前記中間槽には、その長手方向両端側壁の複数
箇所に吐出部を対向させて設けるとともに前記吐
出部に前記薬液供給管を接続したことを特徴とす
るオーバーフロー式薬液循環処理装置。[Scope of Claim for Utility Model Registration] A chemical liquid processing tank provided with a liquid feeder, a chemical liquid recovery tank attached to the chemical liquid processing tank, a pump connected to the bottom of the chemical liquid recovery tank via piping, and a It is composed of a filtration filter connected via piping, and a chemical supply pipe that communicates the filtration filter with the chemical treatment tank, and a flow rectifier provided with a carrier mounting jig on the bottom side of the chemical treatment tank. At the same time, an intermediate tank is formed between the bottom of the chemical treatment tank and the rectifying part, and the intermediate tank is provided with discharge parts facing each other at a plurality of side walls at both ends in the longitudinal direction, and the chemical solution is supplied to the discharge part. An overflow type chemical liquid circulation treatment device characterized by connecting a supply pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9210689U JPH0332417U (en) | 1989-08-04 | 1989-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9210689U JPH0332417U (en) | 1989-08-04 | 1989-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0332417U true JPH0332417U (en) | 1991-03-29 |
Family
ID=31641552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9210689U Pending JPH0332417U (en) | 1989-08-04 | 1989-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0332417U (en) |
-
1989
- 1989-08-04 JP JP9210689U patent/JPH0332417U/ja active Pending
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