JPH0331808A - Structure of optical semiconductor module - Google Patents
Structure of optical semiconductor moduleInfo
- Publication number
- JPH0331808A JPH0331808A JP16547289A JP16547289A JPH0331808A JP H0331808 A JPH0331808 A JP H0331808A JP 16547289 A JP16547289 A JP 16547289A JP 16547289 A JP16547289 A JP 16547289A JP H0331808 A JPH0331808 A JP H0331808A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- optical semiconductor
- light
- optical fiber
- ferrule
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 55
- 239000004065 semiconductor Substances 0.000 title claims abstract description 49
- 239000013307 optical fiber Substances 0.000 claims abstract description 36
- 238000003780 insertion Methods 0.000 claims abstract description 9
- 230000037431 insertion Effects 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 17
- 238000005452 bending Methods 0.000 abstract description 7
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 239000000835 fiber Substances 0.000 abstract 2
- 238000004806 packaging method and process Methods 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
【発明の詳細な説明】
[概 要]
光半導体モジュール構造に関し、
光ファイバの折れ曲がりに対する保護を図りながら、同
時に、光半導体モジュールを基板に搭載した後の基板の
厚さ方向の寸法をコンパクトにすることでき、シェルフ
等への基板の実装効率向上が図れる光半導体モジュール
構造を提供することを目的とし、
光半導体チップを内部底部に固設したバ戸ゲージ内に、
光ファイバを保持したフェルールを光半導体チップの受
光面又は発光面に略平行にバノゲージ側壁を通して挿設
すると共に、上記フェルールの挿入端部に、光を方向変
換せしめるミラーを備えた光方向変換部材を取着し、光
ファイバと光半導体チップとを光結合せしめるよう構成
する。[Detailed Description of the Invention] [Summary] Regarding the structure of an optical semiconductor module, it is possible to protect the optical fiber from bending while at the same time reducing the dimension in the thickness direction of the substrate after the optical semiconductor module is mounted on the substrate. The aim is to provide an optical semiconductor module structure that can improve the mounting efficiency of boards on shelves etc.
A ferrule holding an optical fiber is inserted through the vano gauge side wall approximately parallel to the light-receiving surface or light-emitting surface of the optical semiconductor chip, and a light direction conversion member equipped with a mirror for changing the direction of light is provided at the insertion end of the ferrule. The optical fiber and the optical semiconductor chip are attached to each other and configured to optically couple the optical fiber and the optical semiconductor chip.
パッケージ内部底部に固設した光半導体チップと光ファ
イバとを光結合する光半導体モジュール構造に関する。The present invention relates to an optical semiconductor module structure that optically couples an optical semiconductor chip and an optical fiber that are fixed at the bottom of a package.
光半導体モジュールの小型化等のため、光半導体チップ
とプリアンプ等のIC等とを同=−のパッケージ内に配
設すると共に、光ファイバと光半導体チップとを光結合
させてパンケージを密封・封止している。In order to miniaturize optical semiconductor modules, optical semiconductor chips and ICs such as preamplifiers are placed in the same package, and optical fibers and optical semiconductor chips are optically coupled to seal the pan cage. It has stopped.
このような光半導体モジュール構造の一例について第5
図を参照して説明するに、50はプリント基板、51は
このプリント基板50上に載置されたパッケージである
。パッケージ51は上方に開口した円筒形状を有し、そ
の内部底部には光半導体チップ52及びプリアンプrc
53等が配設される。これらの光・電子部品はボンディ
ングワイヤにより相互接続され、端子54や図示しない
端子を介してプリント基Fi、50上の所定の電子部品
等と電気的に接続される。Regarding an example of such an optical semiconductor module structure, the fifth
To explain with reference to the figure, 50 is a printed circuit board, and 51 is a package placed on this printed circuit board 50. The package 51 has a cylindrical shape with an upward opening, and an optical semiconductor chip 52 and a preamplifier rc are mounted on the inner bottom of the package 51.
53 etc. will be installed. These optical/electronic components are interconnected by bonding wires and electrically connected to predetermined electronic components on the printed circuit board Fi, 50 via terminals 54 and terminals not shown.
パッケージ51の上部は155で閉塞され、155の所
定位置に穿設された開口56を通して円柱状のフェルー
ル57が光半導体チップ52の受光面52a(あるいは
発光面)に対して挿入対設せしめられている。その内部
中央に光ファイバ58を保持するこのフェルール57は
、光半導体チップ52を受光面52aに垂直な方向(Z
方向)に移動し得るようにホルダ59によりその外面を
案内され、ホルダ59は光半導体チップ52の受光面5
2aに平行な平面方向(XY平面方向)に155の上面
を移動し得るようになっている。The upper part of the package 51 is closed with an opening 155, and a cylindrical ferrule 57 is inserted into and opposed to the light receiving surface 52a (or light emitting surface) of the optical semiconductor chip 52 through an opening 56 made at a predetermined position of the package 51. There is. This ferrule 57, which holds the optical fiber 58 in the center of its interior, supports the optical semiconductor chip 52 in the direction perpendicular to the light receiving surface 52a (Z
The outer surface of the holder 59 is guided so that the holder 59 can move in the direction of
The upper surface of 155 can be moved in a plane direction (XY plane direction) parallel to 2a.
従って、光半導体チップ52に対して光ファイバ58を
保持したフェルール57をホルダ59と共にXY平面方
向に移動することによりこの面内での位置調整ができ、
ホルダ59に対しフェルール57をZ方向に動かすこと
により光半導体チップ52に対する光ファイバ58の光
軸距離を調整することができる。Therefore, by moving the ferrule 57 holding the optical fiber 58 with the holder 59 in the XY plane direction relative to the optical semiconductor chip 52, the position within this plane can be adjusted.
By moving the ferrule 57 in the Z direction with respect to the holder 59, the optical axis distance of the optical fiber 58 with respect to the optical semiconductor chip 52 can be adjusted.
なお、位置決めの終了後には、フェルール57及びホル
ダ59そしてホルダ59及び蓋55はそれぞれレーザ溶
接等により固定される。Note that after the positioning is completed, the ferrule 57 and the holder 59, and the holder 59 and the lid 55 are each fixed by laser welding or the like.
しかるに、かかるプリント基板50はシェルフ等に相互
に平行になるように一般に収容されるため基板50の収
容枚数の増加に伴い部品搭載後の基板50の高さ(ある
いは厚さ)方向寸法を出来るだけコンパクトにする必要
があるが、第5図に示す従来構造の如く光半導体チップ
52に対して従って基板50に対してフェルール57を
垂直に配設すると、基板間相互の距離を狭めることは実
際上困難である。また、この距離を狭めることは光ファ
イバ58の曲げ半径を小さくすることに他ならず、光フ
ァイバ58の折れ曲がりや損傷を助長することになるた
め極めて好ましくない。However, since such printed circuit boards 50 are generally stored in parallel to each other on a shelf or the like, as the number of board 50 accommodated increases, the height (or thickness) direction dimension of the board 50 after mounting components is reduced as much as possible. Although it is necessary to make it compact, if the ferrule 57 is arranged perpendicularly to the optical semiconductor chip 52 and therefore to the substrate 50 as in the conventional structure shown in FIG. 5, it is practically impossible to reduce the distance between the substrates. Have difficulty. Moreover, narrowing this distance is nothing but reducing the bending radius of the optical fiber 58, which is extremely undesirable because it will encourage bending and damage to the optical fiber 58.
従って、光ファイバ58の保護という観点からは、光フ
ァイバ58が基板50に対して平行になり得るようにフ
ェルール57を配置すればよいが、パッケージ51を単
に縦向きに置き代えただけでは、第6図に示す如く基板
50全体の高さ方向寸法が却って大きくなるという不都
合が起き得る。Therefore, from the viewpoint of protecting the optical fiber 58, it is sufficient to arrange the ferrule 57 so that the optical fiber 58 can be parallel to the substrate 50, but simply replacing the package 51 vertically does not As shown in FIG. 6, a problem may arise in that the height dimension of the entire substrate 50 becomes rather large.
以上の点に鑑み本発明によれば、基板に対して光ファイ
バを平行に配置でき、光ファイバの耐久性・信顛性上好
ましく、且つ光半導体モジュール搭載後の基板全体の高
さ方向寸法を小さく抑えることができ、シェルフ等への
基板の実装効率上好ましい、光半導体モジュール構造を
提供することを課題とする。In view of the above points, according to the present invention, the optical fiber can be arranged parallel to the substrate, which is preferable in terms of the durability and reliability of the optical fiber, and the height direction dimension of the entire substrate after mounting the optical semiconductor module is reduced. It is an object of the present invention to provide an optical semiconductor module structure that can be kept small and is preferable in terms of mounting efficiency of a board on a shelf or the like.
上記課題を解決するために本発明によれば、光半導体チ
ップを内部底部に固設したパッケージ内に、光ファイバ
を保持したフェルールを光半導体チップの受光面又は発
光面に略平行にパッケージ側壁を通して挿設すると共に
、上記フェルールの挿入端部に、光を方向変換せしめる
ミラーを備えた光方向変換部材を取着し、光ファイバと
光半導体チップとを光結合せしめたことを構成上の特徴
とする。In order to solve the above problems, according to the present invention, a ferrule holding an optical fiber is passed through the side wall of the package approximately parallel to the light-receiving surface or the light-emitting surface of the optical semiconductor chip in a package in which an optical semiconductor chip is fixed to the internal bottom. In addition to the insertion, the optical fiber and the optical semiconductor chip are optically coupled by attaching to the insertion end of the ferrule an optical direction changing member having a mirror for changing the direction of light. do.
光ファイバを保持したフェルールをパッケージ内部底部
に固設した光半導体チップの投光面又は発光面に略平行
にパッケージ側壁を通して挿設したので、パッケージ高
さ方向の寸法がコンパクトになる。しかも、基板に対し
て光ファイバが略平行に延びることになるために光ファ
イバの折り曲げに対する保護が図れる。また、フェルー
ルの挿入端部に、光を方向変換せしめるミラーを備えた
光方向変換部材を取付けたために光ファイバと光半導体
チップの投光面又は受光面とが有効に光結合する。Since the ferrule holding the optical fiber is inserted through the side wall of the package substantially parallel to the light projecting surface or the light emitting surface of the optical semiconductor chip fixed to the inside bottom of the package, the size of the package in the height direction can be made compact. Moreover, since the optical fiber extends substantially parallel to the substrate, the optical fiber can be protected from bending. Further, since a light direction converting member including a mirror for changing the direction of light is attached to the insertion end of the ferrule, the optical fiber and the light emitting surface or the light receiving surface of the optical semiconductor chip are optically coupled effectively.
(実施例〕 以下、図示実施例に基づき本発明を説明する。(Example〕 The present invention will be explained below based on illustrated embodiments.
第1図は本発明に係る光半導体モジュール構造の拡大断
面側面図、第2図は第1図のト」線に沿い矢印方向より
見た断面図である。FIG. 1 is an enlarged cross-sectional side view of an optical semiconductor module structure according to the present invention, and FIG. 2 is a cross-sectional view taken along line T in FIG. 1 in the direction of the arrow.
第1図を参照するに、本実施例の光半導体モジュール1
のパッケージ2は従来のパッケージ51(第5図)と特
に形状的に変わるものではなく、また内部底部に光半導
体千ツブ52及びプリアンプIC53等を有し、これら
の光・電子部品が端子54等を介してプリント基板50
−トの所定部品等と電気的に接続される点では共通する
。Referring to FIG. 1, an optical semiconductor module 1 of this embodiment
The package 2 is not particularly different in shape from the conventional package 51 (FIG. 5), and has an optical semiconductor tube 52, a preamplifier IC 53, etc. on the internal bottom, and these optical/electronic components are connected to terminals 54, etc. via printed circuit board 50
- They are common in that they are electrically connected to predetermined parts, etc.
しかしながら、光ファイバ58を保持するフェルール5
7を光半導体チップ52の受光面52aに重直にM5を
通して挿入対設する代わりに、受光面52aに略平行に
パッケージ側壁を通してフェルール57を挿設している
。そして、フェルール57の挿入端部に、光を方向変換
せしめるミラー(反射鏡)7を備えた光方向変換部材8
を取付け、光ファイバ58と光半導体チップ52とを光
結合せしめている。However, the ferrule 5 holding the optical fiber 58
Instead of inserting and opposing M5 into the light receiving surface 52a of the optical semiconductor chip 52, a ferrule 57 is inserted through the side wall of the package substantially parallel to the light receiving surface 52a. A light direction conversion member 8 is provided at the insertion end of the ferrule 57 with a mirror (reflector) 7 that changes the direction of the light.
is attached to optically couple the optical fiber 58 and the optical semiconductor chip 52.
従って、光半導体モジュールlを搭載した後の基板50
全体の高さを低く抑えたまま、同時に基板50に対して
光ファイバ58を平行に配置できる。これにより光ファ
イバ58の耐久性・信較性の向りが図れ、且つシェルフ
等・\の基板の収容効率の向にが図れる。Therefore, the substrate 50 after mounting the optical semiconductor module l
The optical fiber 58 can be arranged parallel to the substrate 50 while keeping the overall height low. This improves the durability and reliability of the optical fiber 58, and improves the efficiency of accommodating boards such as shelves.
ここで光方向変換部材8等について更に詳細Qこ説明す
ると、この光方向変換部材8は、円柱をその軸に対し略
45度の傾きを有する平面で切断したときのその切り口
を反射面(ミラー7)とする円柱状部材9と、この円柱
状部材9が挿嵌される円筒体lOとから成る(第3図(
a)、 (b))。この円柱状部材9は例えばアルミニ
ウムで形成でき、L配りり口に研磨処理等を施すことに
よりその面を光反射用のミラー7とすることができる。To explain the light direction conversion member 8 in more detail here, this light direction conversion member 8 has a reflective surface (mirror 7) and a cylindrical body lO into which this columnar member 9 is inserted (see Fig. 3).
a), (b)). This cylindrical member 9 can be made of aluminum, for example, and its surface can be used as the mirror 7 for light reflection by subjecting the L distribution opening to a polishing treatment or the like.
そしてミラー7が形成された円柱状部材9は円筒体10
内に固着される。The cylindrical member 9 on which the mirror 7 is formed is a cylindrical body 10.
fixed inside.
光方向変換部材8は円柱状のフェルール57の挿入側端
部に冠着され、光フアイバ5日からの光はミラー7によ
りその光路が略90度変換され、円筒体IOのF部に形
成された開口11を通って光半導体チップ52の受光面
52aに光結合される(第1図、第3図(b))。The light direction conversion member 8 is attached to the insertion side end of the cylindrical ferrule 57, and the optical path of the light from the optical fiber 5 is converted by approximately 90 degrees by the mirror 7, and is formed in the F section of the cylindrical body IO. The light is optically coupled to the light-receiving surface 52a of the optical semiconductor chip 52 through the opening 11 (FIGS. 1 and 3(b)).
斯かる光結合を実際に行う場合、例えば、フェルール5
7と光方向変換部材8とを予め固着しておき、パッケー
ジ2に対してフェルール57をその軸線方向(X方向)
及びその回転方向(θ方向(第2図))に移動させるや
り方と、フェルール57をパッケージ2に予め固定して
おき、フェルール57に対して光方向変換部材8をその
軸線方向(X方向)及びその回転方向(θ方向)に移動
させるやり方とが考えられる。いずれのやり方にあって
も、フェルール57あるいは光方向変換部材8の軸線方
向(X方向)移動は反射鏡であるミラー7の平行移動に
他ならず、これによりX方向の光位置調整を行うことが
でき、また、フェルール57あるいは光方向変換部材8
の回転方向(θ方向)移動は光をX方向(第2図におい
ては左右方向)に振ることになり、これによりX方向の
先位11tjIl整を行うことができる。When actually performing such optical coupling, for example, the ferrule 5
7 and the light direction conversion member 8 are fixed in advance, and the ferrule 57 is attached to the package 2 in its axial direction (X direction).
The ferrule 57 is fixed to the package 2 in advance, and the light direction conversion member 8 is moved in the axial direction (X direction) and the ferrule 57 with respect to the ferrule 57. One possible method is to move it in the direction of rotation (θ direction). In either method, the movement of the ferrule 57 or the light direction conversion member 8 in the axial direction (X direction) is nothing but a parallel movement of the mirror 7, which is a reflecting mirror, and thereby the light position in the X direction can be adjusted. In addition, the ferrule 57 or the light direction conversion member 8
Movement in the rotation direction (θ direction) swings the light in the X direction (horizontal direction in FIG. 2), thereby making it possible to adjust the leading position in the X direction.
なお、円柱状部材9の光反射面は第1図に示す如くの平
面的なミラー7であるばかりでなく、第4図に示す球面
形状を呈するようなミラー7′でもよく、この場合には
光を集光できる。Note that the light reflecting surface of the cylindrical member 9 is not only a flat mirror 7 as shown in FIG. 1, but also a mirror 7' having a spherical shape as shown in FIG. Can focus light.
また、本実施例においては光半導体チップ52を光受光
面52aを備えた受光素子として説明したが、。Furthermore, in this embodiment, the optical semiconductor chip 52 has been described as a light receiving element having a light receiving surface 52a.
本発明の思想自体は発光素子である光半導体チップにも
適用できる。The idea of the present invention itself can also be applied to an optical semiconductor chip which is a light emitting element.
以上の如く本発明によれば、基板に対して光ファイバを
平行に配置でき光ファイバの折り曲げに対する保護を有
効に図ることができ、且つ、基板の厚さ方向の寸法をコ
ンパクトにすることができシェルフ等への基板の実装効
率の向とを図ることができる。As described above, according to the present invention, the optical fiber can be arranged parallel to the substrate, the optical fiber can be effectively protected from bending, and the dimension of the substrate in the thickness direction can be made compact. It is possible to improve the mounting efficiency of the board on a shelf or the like.
第1図は本発明に係る光半導体モジュール構造の拡大断
面側面図、
第2図は第1図の■−■線に沿い矢印方向より見た断面
図、
第3図は光方向変換部材の斜視図、
第4図は光方向変換部材の別の実施例を示す断面側面図
、
第5図は従来の光半導体モジュール構造の断面側面図、
第6図は第5図の示す構造を縦向きに置き代えたものを
示す断面側面図である。
l・・・光半導体モジュール、
2・・・パッケージ、 7・・・ミラー、8・
・・光方向変換部材、 52・・・光半導体チップ、
57・・・フェルール、58・・・光ファイバ。
第20
2・・・バ・νケージ
5・・・蓋
8・・・光方向変換部材
9・・・円柱状部材
10・・・円筒体
52・・・光半導体チップ
(a)
(b)
光方向r!Il!部材の斜視図
第3図
別の光方向f換部材の断面側面図
第4図
従来構造
第5図
56・・・開口
59・・・ホルダFig. 1 is an enlarged cross-sectional side view of the optical semiconductor module structure according to the present invention, Fig. 2 is a cross-sectional view taken along the line ■-■ in Fig. 1 in the direction of the arrow, and Fig. 3 is a perspective view of the light direction conversion member. Figure 4 is a cross-sectional side view showing another embodiment of the light direction conversion member, Figure 5 is a cross-sectional side view of a conventional optical semiconductor module structure, and Figure 6 is a vertically oriented structure of the structure shown in Figure 5. It is a cross-sectional side view showing what has been replaced. l... Optical semiconductor module, 2... Package, 7... Mirror, 8...
...Light direction conversion member, 52... Optical semiconductor chip,
57... Ferrule, 58... Optical fiber. 20th 2...Bar/ν cage 5...Lid 8...Light direction conversion member 9...Cylindrical member 10...Cylindrical body 52...Optical semiconductor chip (a) (b) Light Direction r! Il! Perspective view of the member Fig. 3 Cross-sectional side view of another light direction f conversion member Fig. 4 Conventional structure Fig. 5 56...Aperture 59...Holder
Claims (1)
ケージ(2)内に、光ファイバ(58)を保持したフェ
ルール(57)を光半導体チップ(52)の受光面又は
発光面に略平行にパッケージ側壁を通して挿設すると共
に、上記フェルール(57)の挿入端部に、光を方向変
換せしめるミラー(7)を備えた光方向変換部材(8)
を取着し、光ファイバ(58)と光半導体チップ(52
)とを光結合せしめたことを特徴とする光半導体モジュ
ール構造。1. A ferrule (57) holding an optical fiber (58) is placed approximately parallel to the light-receiving surface or light-emitting surface of the optical semiconductor chip (52) in a package (2) with an optical semiconductor chip (52) fixed to the internal bottom. a light direction changing member (8) which is inserted through the side wall of the package and is provided with a mirror (7) at the insertion end of the ferrule (57) to change the direction of the light;
Attach the optical fiber (58) and the optical semiconductor chip (52).
) is optically coupled to an optical semiconductor module structure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16547289A JPH0331808A (en) | 1989-06-29 | 1989-06-29 | Structure of optical semiconductor module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16547289A JPH0331808A (en) | 1989-06-29 | 1989-06-29 | Structure of optical semiconductor module |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0331808A true JPH0331808A (en) | 1991-02-12 |
Family
ID=15813062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16547289A Pending JPH0331808A (en) | 1989-06-29 | 1989-06-29 | Structure of optical semiconductor module |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0331808A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0613032A2 (en) * | 1993-02-23 | 1994-08-31 | The Whitaker Corporation | Fiber optic coupling devices |
US5692083A (en) * | 1996-03-13 | 1997-11-25 | The Whitaker Corporation | In-line unitary optical device mount and package therefor |
US5857050A (en) * | 1996-02-28 | 1999-01-05 | The Whitaker Corporation | Packaging for optoelectronic device |
EP1061392A1 (en) * | 1999-06-16 | 2000-12-20 | Seiko Epson Corporation | Optical module and method of manufacture thereof, semiconductor device, and optical transmission device |
JP2005094507A (en) * | 2003-09-18 | 2005-04-07 | Nippon Telegr & Teleph Corp <Ntt> | Optical lan card |
JP2009053280A (en) * | 2007-08-23 | 2009-03-12 | National Institute Of Advanced Industrial & Technology | Optical module |
JP2009053279A (en) * | 2007-08-23 | 2009-03-12 | National Institute Of Advanced Industrial & Technology | Optical module |
-
1989
- 1989-06-29 JP JP16547289A patent/JPH0331808A/en active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0613032A2 (en) * | 1993-02-23 | 1994-08-31 | The Whitaker Corporation | Fiber optic coupling devices |
EP0613032A3 (en) * | 1993-02-23 | 1995-04-05 | Whitaker Corp | Fiber optic coupling devices. |
US5515468A (en) * | 1993-02-23 | 1996-05-07 | The Whitaker Corporation | Light bending devices |
US5708743A (en) * | 1993-02-23 | 1998-01-13 | The Whitaker Corporation | Light bending devices |
US5857050A (en) * | 1996-02-28 | 1999-01-05 | The Whitaker Corporation | Packaging for optoelectronic device |
US5692083A (en) * | 1996-03-13 | 1997-11-25 | The Whitaker Corporation | In-line unitary optical device mount and package therefor |
EP1061392A1 (en) * | 1999-06-16 | 2000-12-20 | Seiko Epson Corporation | Optical module and method of manufacture thereof, semiconductor device, and optical transmission device |
JP2005094507A (en) * | 2003-09-18 | 2005-04-07 | Nippon Telegr & Teleph Corp <Ntt> | Optical lan card |
JP2009053280A (en) * | 2007-08-23 | 2009-03-12 | National Institute Of Advanced Industrial & Technology | Optical module |
JP2009053279A (en) * | 2007-08-23 | 2009-03-12 | National Institute Of Advanced Industrial & Technology | Optical module |
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