JPH0331702A - Position sensor for cylinder rod - Google Patents

Position sensor for cylinder rod

Info

Publication number
JPH0331702A
JPH0331702A JP16796289A JP16796289A JPH0331702A JP H0331702 A JPH0331702 A JP H0331702A JP 16796289 A JP16796289 A JP 16796289A JP 16796289 A JP16796289 A JP 16796289A JP H0331702 A JPH0331702 A JP H0331702A
Authority
JP
Japan
Prior art keywords
cylinder rod
scale
head
electromagnetic
solenoid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16796289A
Other languages
Japanese (ja)
Inventor
Masami Sumida
隅田 雅美
Taku Murakami
卓 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP16796289A priority Critical patent/JPH0331702A/en
Publication of JPH0331702A publication Critical patent/JPH0331702A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To optionally change the waveform of an output curve in accordance with a purpose and to easily execute signal processing by constituting a position sensor with a cylinder rod provided with an electromagnetic scale and a solenoid type head consisting of differential coils. CONSTITUTION:Reforming parts having respectively different electromagnetic characteristics are provided on the cylinder rod 1 with a fixed interval as a pattern and used as a scale. On the other hand, the solenoid type head 2 is constituted of detecting coils 2a, 2b whose winding directions are different from each other and an exciting coil 2c as a differential type. When the cylinder is differentially moved and the rod 1 is deformed in the axial direction, the difference of voltages generated by the coil 2c of the head 2 is detected by the coils 2a, 2b, so that an output is increased and the dispersion of a peak is reduced. Since an inflection point is set up on the center of a pattern in the electromagnetic scale, the dispersion of the pitch of the peak is also reduced. Thus, the waveform of a detected output curve can be optionally changed in accordance with a purpose and signal processing can easily be executed.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、シリンダロッドの位置センサに係わり、特に
ソレノイド形へラドを用いたシリンダロッドの位置セン
サに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cylinder rod position sensor, and more particularly to a cylinder rod position sensor using a solenoid type heald.

〔従来の技術〕[Conventional technology]

磁気スケールは、母材に磁気特性の異なる一定間隔の変
質部を設けてパターン化したもの及び母知られる。これ
ら磁気スケールに対し、検出側はコア形磁気ヘッド、M
R素子やホール素子等の磁気センサ素子又はソレノイド
形ヘッドが用いられるのが一般である0本発明は前記ソ
レノイド形ヘッドに係わり、通常、合成樹脂等を用いた
非磁性材からなるボビンに導線を巻き付けた構成が知ら
れる。尚、上記コア形磁気ヘッド及び磁気センサ素子は
検出出力が高いという長所を有している反面、ギャップ
変動に対して敏感に反応してしまうため、ギャップ管理
が困難であるという欠点を有している。更に第5図に示
すように、磁気スケール1の変質点Hがコア形磁気ヘッ
ド3による出力曲線と一致するため、前記磁気スケール
11体の変質点Hのバラツキ(磁気パターンのピッチの
バラツキである)により、検出出力のピークの幅にもバ
ラツキが生じてしまうという不都合がある。
The magnetic scale is known as a pattern formed by providing a base material with altered parts having different magnetic properties at regular intervals. For these magnetic scales, the detection side is a core-type magnetic head, M
Generally, a magnetic sensor element such as an R element or a Hall element or a solenoid type head is used. The present invention relates to the solenoid type head, and generally includes a bobbin made of a non-magnetic material such as synthetic resin and the like. It is known for its wrapped configuration. Although the above-mentioned core-type magnetic head and magnetic sensor element have the advantage of high detection output, they also have the disadvantage that gap management is difficult because they react sensitively to gap fluctuations. There is. Furthermore, as shown in FIG. 5, since the transformation point H of the magnetic scale 1 coincides with the output curve of the core-type magnetic head 3, the variation in the transformation point H of the magnetic scale 11 (which is a variation in the pitch of the magnetic pattern) ), there is an inconvenience that the width of the peak of the detection output also varies.

これは、磁気スケール自体の磁気パターンにおいて、こ
の磁気変質部と母材部との境を安定して、かつ、明確に
作り出すことが困難であるという点から生ずる問題であ
る。これに対して、ソレノイド形ヘッドは、検出出力は
やや少なくなるが、電気特性又は磁気特性を、スケール
の円周方向に均一化して検出するので、ギャップ管理、
又は電気磁気スケール自体の電気又は磁気変質点の製造
バラツキの管理が容易であるという利点を持っている。
This problem arises from the fact that it is difficult to stably and clearly create a boundary between the magnetically altered part and the base material part in the magnetic pattern of the magnetic scale itself. On the other hand, the solenoid type head has a slightly lower detection output, but detects the electrical or magnetic characteristics by making them uniform in the circumferential direction of the scale, so gap management,
Another advantage is that it is easy to manage manufacturing variations in the electrical or magnetic transformation points of the electromagnetic scale itself.

(発明が解決しようとする課題] ソレノイド形ヘッドは上述のような利点を備え′ζいる
が、それでも従来の単コイルのソレノイド形ヘッドは、
他のコア形磁気ヘッドや磁気セン号素子と同様、スケー
ルの変質点と、ソレノイド形ヘッドの出力曲線の変曲点
とが一致するので、電気磁気スケールの変質点の検出積
度の低下を免れることができないという不都合がある。
(Problem to be Solved by the Invention) Although the solenoid type head has the above-mentioned advantages, the conventional single coil solenoid type head still has
As with other core-type magnetic heads and magnetic sensor elements, the deformation point of the scale coincides with the inflection point of the output curve of the solenoid-type head, thus avoiding a decrease in the detection density of the deformation point of the electromagnetic scale. The disadvantage is that it cannot be done.

本発明は、上記従来の問題点に着目し、電気磁気スケー
ルの変質点の検出精度及び分解能を向」ニさせ、検出目
的に対して最適の出力曲線を得ることができるようなシ
リンダロッドの位置センサをト共することを目的とする
The present invention focuses on the above-mentioned conventional problems, improves the detection accuracy and resolution of alteration points of an electromagnetic scale, and positions the cylinder rod so that an optimal output curve can be obtained for the detection purpose. The purpose is to share sensors.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するため、本発明に係わるシリンダロッ
ドの位置センサは、第1図を参照し説明すれば、電気磁
気スケールを備えてなるシリンダロッド1と、差動コイ
ルからなるソレノイド形へノド2とからなる構成とした
。更に、かかる構成において、電気磁気スケールの電気
磁気パターンのピッチと、ソレノイド形ヘッドの幅とが
異なる構成としてもよい。
In order to achieve the above object, the cylinder rod position sensor according to the present invention will be described with reference to FIG. It has a structure consisting of. Further, in such a configuration, the pitch of the electromagnetic pattern of the electromagnetic scale and the width of the solenoid head may be different.

〔作用〕[Effect]

上記構成によれば、ソレノイド形へノドに差動コイルを
用いたので、出力特性が向上し、出力の変曲点が電気磁
気スケールのパターンの中央となるので、ピーク幅のバ
ラツキは小さくなる。またシリンダロッドに設けた電気
磁気スケールのバタンのピッチと、ソレノイド形ヘッド
の幅とを異なる寸法としたので、検出される出力曲線の
波形を検出目的に応じて自在に変化させることができる
According to the above configuration, since the differential coil is used at the solenoid type node, the output characteristics are improved, and the inflection point of the output is at the center of the pattern of the electromagnetic scale, so the variation in peak width is reduced. Furthermore, since the pitch of the bangs of the electromagnetic scale provided on the cylinder rod and the width of the solenoid head are different, the waveform of the output curve to be detected can be freely changed depending on the purpose of detection.

〔実施例] 以下に本発明に係わるシリンダロッドの位置センサの実
施例について、図面を参照して詳繍に説明する。第1図
は請求項1記載の実施例である。
[Embodiments] Examples of the cylinder rod position sensor according to the present invention will be described in detail below with reference to the drawings. FIG. 1 shows an embodiment according to claim 1.

油ノリンダロノド(又は、空圧シリンダロッド)lに電
気磁気特性の異なる改質部を一定間隔ごとに設けてパタ
ーン化し、これをスケールとした。
Modified parts having different electromagnetic properties were provided at regular intervals on an oil cylinder rod (or pneumatic cylinder rod) l to form a pattern, and this was used as a scale.

一方ソレノイド形ヘッド2は、互いに巻き方向の異なる
2(国の検出コイル2a、2bと、励磁コイル2cとか
らなる差動形とした。シリンダが差動してシリンダロッ
ド1が軸方向に変位すると、前記ソレノイド形へノド2
の励磁コイル2Cによって生じた電圧の差を検出コイル
2a、2bが検出するので、第2図に示すように、単コ
イルのソレノイド形ヘッドを用いる場合に比べ、検出出
力が増大し、出力ピークの高さのバラツキが小さくなる
。また変曲点が電気磁気スケールのパターンの中央に位
置するので、ピークのピッチのバラツキも小さくなる。
On the other hand, the solenoid type head 2 is a differential type consisting of two (national detection coils 2a, 2b) and an excitation coil 2c with different winding directions.When the cylinder moves differentially and the cylinder rod 1 is displaced in the axial direction, , the throat 2 to the solenoid type
Since the detection coils 2a and 2b detect the voltage difference generated by the excitation coil 2C, as shown in Fig. 2, the detection output increases compared to the case where a single-coil solenoid head is used, and the output peak is reduced. Variations in height are reduced. Furthermore, since the inflection point is located at the center of the pattern of the electromagnetic scale, variations in the pitch of the peaks are also reduced.

第3図は、請求項2の実施例であり、ソレノイド形ヘッ
ドの幅Xと、シリンダ口。
FIG. 3 shows an embodiment of claim 2, and shows the width X of the solenoid head and the cylinder mouth.

ドlに設けた改質部のとフチyとの関係において、x<
yとした場合の出力曲線を示す、この場合、電気磁気ス
ケールの変質点がパルス状の波形で出力される。尚、x
=yとした場合の出力曲線は第5図に示す通り、サイン
カーブに近い波形で出力される。Xとyとの寸法はシリ
ンダロッドに設けた電気磁気スケールのパターンのピッ
チやソレノイド形ヘッドの装着スペース等によって任意
に選択することができる。これにより、検出目的に対し
て最適の出力曲線を得ることができる。この幅は周波数
を調整することにより微妙な幅調整を行うことができる
。つまり、周波数を上げると、コイル幅を小さくしたと
同じになり、下げるとコイル幅を上げたことになる。勿
論コイルの周囲の磁性材により、磁束分布を微妙に調整
することも可能である。またソレノイドは通常、ボビン
の長さに対して均等に導線を巻きつけるが、意図的に壱
きむらを作り磁束分布を変えて出方特性を調整すること
ができる。
In the relationship between the edge y and the reforming part provided in the door l, x<
The output curve is shown when y is set. In this case, the alteration point of the electromagnetic scale is output in a pulsed waveform. Furthermore, x
=y, the output curve is output in a waveform close to a sine curve, as shown in FIG. The dimensions of X and y can be arbitrarily selected depending on the pitch of the pattern of the electromagnetic scale provided on the cylinder rod, the mounting space of the solenoid head, etc. This makes it possible to obtain an optimal output curve for the purpose of detection. This width can be finely adjusted by adjusting the frequency. In other words, increasing the frequency is equivalent to decreasing the coil width, and decreasing the frequency is equivalent to increasing the coil width. Of course, it is also possible to finely adjust the magnetic flux distribution by using the magnetic material around the coil. In addition, a solenoid normally winds the conductor wire evenly around the length of the bobbin, but it is possible to intentionally make the winding uneven and change the magnetic flux distribution to adjust the output characteristics.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば、ソレノイド形ヘ
ッドに差動コイルを用いたのでその幅をga整して従来
用いられているソレノイド形ヘッドよりも出力特性が向
上する。更に、シリンダロッどの変質点の検出における
閾値の設定等が容易きなる等、管理面での利点がある。
As explained above, according to the present invention, since the differential coil is used in the solenoid head, the width is adjusted to ga, and the output characteristics are improved compared to the conventional solenoid head. Furthermore, there are advantages in terms of management, such as ease of setting thresholds for detecting deformation points in cylinder rods, etc.

更にシリンダロッドに設けた電気磁気スケールのパター
ンのピッチと、ソレノイド形ヘッドの幅とを異なる寸法
としたので、検出される出力曲線の波形を検出目的に応
じて自在に変化させ、信号処理の容す化を図ることがで
きる。
Furthermore, since the pitch of the pattern of the electromagnetic scale provided on the cylinder rod and the width of the solenoid head are different, the waveform of the output curve to be detected can be freely changed according to the detection purpose, increasing the capacity of signal processing. It is possible to improve the

【図面の簡単な説明】[Brief explanation of drawings]

第1図・・・請求項1に係わるソレノイド形ヘッドの実
施例に係わるシリンダロッドの位置センサの概念図 第2図、第4図・・・第1図のソレノイド形ヘッドによ
り検出される出力曲線の説明図 第3図・・・II請求項に係わるソレノイド形ヘッドと
、電気磁気スケールのパターンのピッチ幅との関係を変
化させた場合の出力曲線の説明図第5図・・・従来のコ
ア形磁気ヘッドにより検出される出力曲線の説明図 1・・・シリンダロッド 2・・・ソレノイド形ヘッド 第1図 第2!!i!! 苓3図 第4図 第5ズ
Figure 1: Conceptual diagram of a cylinder rod position sensor according to an embodiment of the solenoid head according to claim 1. Figures 2 and 4: Output curve detected by the solenoid head of Figure 1. Figure 3: An explanatory diagram of the output curve when the relationship between the solenoid head according to claim II and the pitch width of the electromagnetic scale pattern is changed. Figure 5: Conventional core Explanation of the output curve detected by the type magnetic head Figure 1... Cylinder rod 2... Solenoid type head Figure 1 Figure 2! ! i! ! Figure 3 Figure 4 Figure 5

Claims (2)

【特許請求の範囲】[Claims] (1)電気磁気スケールを備えてなるシリンダロッド1
と、差動コイルからなるソレノイド形ヘッド2とから構
成されたことを特徴とするシリンダロッドの位置センサ
(1) Cylinder rod 1 equipped with an electromagnetic scale
and a solenoid head 2 made of a differential coil.
(2)電気磁気スケールの電気磁気パターンのピッチと
、ソレノイド形ヘッドの幅とが異なる構成を特徴とする
請求項1記載のシリンダロッドの位置センサ。
(2) The cylinder rod position sensor according to claim 1, wherein the pitch of the electromagnetic pattern of the electromagnetic scale and the width of the solenoid head are different.
JP16796289A 1989-06-29 1989-06-29 Position sensor for cylinder rod Pending JPH0331702A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16796289A JPH0331702A (en) 1989-06-29 1989-06-29 Position sensor for cylinder rod

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16796289A JPH0331702A (en) 1989-06-29 1989-06-29 Position sensor for cylinder rod

Publications (1)

Publication Number Publication Date
JPH0331702A true JPH0331702A (en) 1991-02-12

Family

ID=15859267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16796289A Pending JPH0331702A (en) 1989-06-29 1989-06-29 Position sensor for cylinder rod

Country Status (1)

Country Link
JP (1) JPH0331702A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007113973A (en) * 2005-10-18 2007-05-10 Yokohama National Univ Apparatus and method for measuring axial displacement
CN109186448A (en) * 2018-10-13 2019-01-11 西安航天动力测控技术研究所 One kind falling pin depth tester

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007113973A (en) * 2005-10-18 2007-05-10 Yokohama National Univ Apparatus and method for measuring axial displacement
JP4745788B2 (en) * 2005-10-18 2011-08-10 国立大学法人横浜国立大学 Axial displacement measuring device and axial displacement measuring method
CN109186448A (en) * 2018-10-13 2019-01-11 西安航天动力测控技术研究所 One kind falling pin depth tester
CN109186448B (en) * 2018-10-13 2020-06-16 西安航天动力测控技术研究所 Pin falling depth tester

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