JPH0331296U - - Google Patents
Info
- Publication number
- JPH0331296U JPH0331296U JP8931989U JP8931989U JPH0331296U JP H0331296 U JPH0331296 U JP H0331296U JP 8931989 U JP8931989 U JP 8931989U JP 8931989 U JP8931989 U JP 8931989U JP H0331296 U JPH0331296 U JP H0331296U
- Authority
- JP
- Japan
- Prior art keywords
- heater element
- heater
- elongated hole
- cross
- hole size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8931989U JPH0636479Y2 (ja) | 1989-07-28 | 1989-07-28 | ヒータ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8931989U JPH0636479Y2 (ja) | 1989-07-28 | 1989-07-28 | ヒータ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0331296U true JPH0331296U (ko) | 1991-03-27 |
| JPH0636479Y2 JPH0636479Y2 (ja) | 1994-09-21 |
Family
ID=31638902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8931989U Expired - Lifetime JPH0636479Y2 (ja) | 1989-07-28 | 1989-07-28 | ヒータ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636479Y2 (ko) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003092946A (ja) * | 2001-09-21 | 2003-04-02 | Ricoh Co Ltd | 飼主音声再生システムの動作方法、飼主音声情報送信装置、飼主音声再生システムの動作方法、飼主音声出力装置を動作させるためのプログラム、食料供給システムの動作方法、食料供給装置を動作させるためのプログラム、被保護動物映像配信システムの動作方法および被保護動物映像配信装置 |
| JP2014158023A (ja) * | 2014-02-05 | 2014-08-28 | Hitachi Kokusai Electric Inc | 加熱装置、基板処理装置、及び半導体装置の製造方法 |
| US9064912B2 (en) | 2009-07-21 | 2015-06-23 | Hitachi Kokusai Electric, Inc. | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
| US9449849B2 (en) | 2009-07-21 | 2016-09-20 | Hitachi Kokusai Electric Inc. | Method of manufacturing semiconductor device using meander-shaped heating element |
-
1989
- 1989-07-28 JP JP8931989U patent/JPH0636479Y2/ja not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003092946A (ja) * | 2001-09-21 | 2003-04-02 | Ricoh Co Ltd | 飼主音声再生システムの動作方法、飼主音声情報送信装置、飼主音声再生システムの動作方法、飼主音声出力装置を動作させるためのプログラム、食料供給システムの動作方法、食料供給装置を動作させるためのプログラム、被保護動物映像配信システムの動作方法および被保護動物映像配信装置 |
| US9064912B2 (en) | 2009-07-21 | 2015-06-23 | Hitachi Kokusai Electric, Inc. | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
| US9449849B2 (en) | 2009-07-21 | 2016-09-20 | Hitachi Kokusai Electric Inc. | Method of manufacturing semiconductor device using meander-shaped heating element |
| JP2014158023A (ja) * | 2014-02-05 | 2014-08-28 | Hitachi Kokusai Electric Inc | 加熱装置、基板処理装置、及び半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0636479Y2 (ja) | 1994-09-21 |