JPH0330786U - - Google Patents

Info

Publication number
JPH0330786U
JPH0330786U JP8870389U JP8870389U JPH0330786U JP H0330786 U JPH0330786 U JP H0330786U JP 8870389 U JP8870389 U JP 8870389U JP 8870389 U JP8870389 U JP 8870389U JP H0330786 U JPH0330786 U JP H0330786U
Authority
JP
Japan
Prior art keywords
conductors
voltage
pair
electrostatic
adsorption device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8870389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8870389U priority Critical patent/JPH0330786U/ja
Priority to US07/531,108 priority patent/US5173834A/en
Publication of JPH0330786U publication Critical patent/JPH0330786U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
JP8870389U 1989-06-02 1989-07-27 Pending JPH0330786U (US06521211-20030218-C00004.png)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8870389U JPH0330786U (US06521211-20030218-C00004.png) 1989-07-27 1989-07-27
US07/531,108 US5173834A (en) 1989-06-02 1990-05-31 Electrostatic attraction apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8870389U JPH0330786U (US06521211-20030218-C00004.png) 1989-07-27 1989-07-27

Publications (1)

Publication Number Publication Date
JPH0330786U true JPH0330786U (US06521211-20030218-C00004.png) 1991-03-26

Family

ID=31638297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8870389U Pending JPH0330786U (US06521211-20030218-C00004.png) 1989-06-02 1989-07-27

Country Status (1)

Country Link
JP (1) JPH0330786U (US06521211-20030218-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62153034A (ja) * 1985-12-25 1987-07-08 Taihei Kagaku Seihin Kk 静電保持装置
JPS62287950A (ja) * 1986-06-04 1987-12-14 Canon Inc 静電吸着装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62153034A (ja) * 1985-12-25 1987-07-08 Taihei Kagaku Seihin Kk 静電保持装置
JPS62287950A (ja) * 1986-06-04 1987-12-14 Canon Inc 静電吸着装置

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