JPH0328722U - - Google Patents
Info
- Publication number
- JPH0328722U JPH0328722U JP8915489U JP8915489U JPH0328722U JP H0328722 U JPH0328722 U JP H0328722U JP 8915489 U JP8915489 U JP 8915489U JP 8915489 U JP8915489 U JP 8915489U JP H0328722 U JPH0328722 U JP H0328722U
- Authority
- JP
- Japan
- Prior art keywords
- rotation direction
- spin chuck
- screen wall
- substrate
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8915489U JPH0328722U (enExample) | 1989-07-31 | 1989-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8915489U JPH0328722U (enExample) | 1989-07-31 | 1989-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0328722U true JPH0328722U (enExample) | 1991-03-22 |
Family
ID=31638749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8915489U Pending JPH0328722U (enExample) | 1989-07-31 | 1989-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328722U (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5498574A (en) * | 1978-01-20 | 1979-08-03 | Matsushita Electric Ind Co Ltd | Rotary coating unit of viscous material |
| JPS5732759A (en) * | 1980-08-04 | 1982-02-22 | Mitsubishi Electric Corp | Substrate treating equipment |
| JPS57194070A (en) * | 1981-05-22 | 1982-11-29 | Hitachi Ltd | Double side coating device |
| JPS592135B2 (ja) * | 1973-09-20 | 1984-01-17 | バロ−ス コ−ポレ−シヨン | ヒヨウジパネル |
-
1989
- 1989-07-31 JP JP8915489U patent/JPH0328722U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS592135B2 (ja) * | 1973-09-20 | 1984-01-17 | バロ−ス コ−ポレ−シヨン | ヒヨウジパネル |
| JPS5498574A (en) * | 1978-01-20 | 1979-08-03 | Matsushita Electric Ind Co Ltd | Rotary coating unit of viscous material |
| JPS5732759A (en) * | 1980-08-04 | 1982-02-22 | Mitsubishi Electric Corp | Substrate treating equipment |
| JPS57194070A (en) * | 1981-05-22 | 1982-11-29 | Hitachi Ltd | Double side coating device |