JPH0328508Y2 - - Google Patents
Info
- Publication number
- JPH0328508Y2 JPH0328508Y2 JP1123984U JP1123984U JPH0328508Y2 JP H0328508 Y2 JPH0328508 Y2 JP H0328508Y2 JP 1123984 U JP1123984 U JP 1123984U JP 1123984 U JP1123984 U JP 1123984U JP H0328508 Y2 JPH0328508 Y2 JP H0328508Y2
- Authority
- JP
- Japan
- Prior art keywords
- holes
- wall
- sample chamber
- plate
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000498 cooling water Substances 0.000 claims description 13
- 238000000609 electron-beam lithography Methods 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1123984U JPS60124035U (ja) | 1984-01-30 | 1984-01-30 | 電子ビーム描画装置における試料室の恒温装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1123984U JPS60124035U (ja) | 1984-01-30 | 1984-01-30 | 電子ビーム描画装置における試料室の恒温装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60124035U JPS60124035U (ja) | 1985-08-21 |
JPH0328508Y2 true JPH0328508Y2 (de) | 1991-06-19 |
Family
ID=30493174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1123984U Granted JPS60124035U (ja) | 1984-01-30 | 1984-01-30 | 電子ビーム描画装置における試料室の恒温装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60124035U (de) |
-
1984
- 1984-01-30 JP JP1123984U patent/JPS60124035U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60124035U (ja) | 1985-08-21 |
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