JPH0328248Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to a clean bench (clean workbench) having a working area kept in a clean air atmosphere inside.

Conventional technology Manufacturing of products such as semiconductor parts and ultra-precision mechanical parts, as well as pharmaceutical products, is usually carried out in a clean room where clean air is kept flowing down from the ceiling to the floor to maintain a clean air atmosphere inside the room. It is. In particular, semiconductor components are increasingly required to be manufactured in an ultra-clean air atmosphere due to the recent trend toward ultra-LSI technology.In order to meet the above requirements, clean benches have been installed in clean rooms in recent years. Various manufacturing operations are carried out inside the clean bench.

Next, the above-mentioned clean bench will be explained with reference to FIGS. 5 and 6.

In the drawings, 1 indicates a clean room and 10 indicates a clean bench.

In the clean room 1, between the ceiling and the floor,
The clean air circulation unit 2 is equipped with a clean air circulation unit 2, which uses a blower 3 to forcefully send the air in the duct 4 toward the ceiling of the clean room 1, and passes through an air filter 5 installed on the ceiling of the clean room 1. By passing through the clean air 6, the clean air 6 flows down in the clean room 1 in a laminar flow state, and the down flowed clean air 6 is returned to the blower 3 through the duct 8 through the prefilter 7 on the floor.

As shown in FIG. 6, the clean bench 10 is equipped with a clean air unit 11.
This clean air unit 11 maintains a working area 12 provided inside in a clean air atmosphere. The clean air unit 11 of the clean bench 10 uses a blower 13 to forcefully send clean air from the clean room 1 toward the ceiling of the work area 12, and further increases the cleanliness level by passing it through an air filter 15 installed on the ceiling. The clean air 16 is made into clean air 16 and flows down in the working area 12 in a laminar flow state, and the downflowed clean air 16
The work area 12 is exhausted through the porous bottom toward the floor of the clean room 1.
to maintain a more highly clean air atmosphere than in clean room 1.

A predetermined manufacturing device 18 is disposed within the work area 12, and this manufacturing device 18 performs a predetermined work by hand of the worker M through an opening window 19 provided at the front of the clean bench 10, for example. It will be done.

Problems to be Solved by the Invention By using the clean bench 10 described above, manufacturing work can now be carried out in a more highly clean air atmosphere than in the clean room 1.

However, the clean air 16 that flows down near the opening window 19 of the clean bench 10 is the outside air around the opening window 19, that is, the clean room 1
There was a high possibility that the air inside would be drawn into the work area 12 and contaminate the work area 12.

Therefore, an attempt has been made to prevent outside air from entering the work area 12 by attaching a dustproof curtain with the lower part of the opening window 19 open, but this method is not suitable for all workers M of different heights. It is necessary to leave the opening relatively wide so that work can be performed on the other hand, and when a hand is put into the working area 12 through this opening, a laminar flow flows down inside the working area 12. Since the clean air 16 that is generated is disturbed by these hands, there is a high possibility that the work area 12 will be contaminated by drawing in outside air from the above and opening portions.

Means for Solving the Problems The present invention was made in view of the above problems, and is a clean bench that has a work area that maintains a clean air atmosphere inside and an opening window for the work area on the side. This is a clean bench equipped with a dustproof curtain that covers the opening window and a winding device that rolls up the dustproof curtain to expose the opening window.

Function The clean bench according to the present invention is configured such that the dustproof curtain attached to the opening window is rolled up by a winding device only when necessary while the worker stands in front of the clean bench, thereby exposing a predetermined amount of the opening window. This is what I did.

Embodiment FIG. 1 shows an embodiment of a clean bench according to the present invention, and the same constituent members as those of the clean bench 10 shown in FIG. 5 and FIG. Omitted.

In FIG. 1, 20 is a dustproof curtain, 21 is a winding device, and 22 is a line sensor.

The above dustproof curtain 20 is the clean bench 10
It has dimensions to cover the opening window 19, and is manufactured from, for example, a transparent vinyl resin sheet.

The winding device 21 is disposed above the air filter 15 of the clean bench 10, and winds up and lowers the dustproof curtain 20 using an appropriate driving means.

The line sensor 22 has, for example, a light emitting part and a light receiving part arranged in a line, and is arranged substantially in the center of the opening window 19 along the vertical direction. Then, as will be described later, the position of the reflector 25 attached to the worker M is detected, and the winding device 21 is operated by a control device (not shown).

The operation of the clean bench 10 having the above configuration will be explained below.

When the clean bench 10 is not working, the dustproof curtain 20 is lowered to the lowest position, and the opening window 19 is completely closed. In this state, the clean air 16 around the open window 19 flows down in a laminar flow along the dustproof curtain 20, so that an ultra-clean air atmosphere is maintained in the work area 12 without drawing in outside air.

Next, a case where the worker M performs a predetermined work on the work area 12 in the clean bench 10 will be described.

The worker M has a reflector 25 attached to the chest of his work clothes in advance, and when the worker M approaches the opening window 19 of the clean bench 10 to perform the above-mentioned work, the line sensor 22 detects the Reflector 2
Detect the height position of 5. A control device (not shown) controls the dust curtain 20 from the detected height position.
determines the amount of winding and operates the winding device 21;
The dustproof curtain 20 is rolled up to expose the opening window 19 to the minimum height required for work corresponding to the height of the worker.

Thereafter, the worker M inserts his hand through the opening 26 of the open window 19 exposed by rolling up the dustproof curtain 20 and performs a predetermined work within the work area 12. At this time, since the opening 26 has the minimum necessary area as described above, there is a very low possibility that outside air will enter the working area 12, and therefore the working area 12 is kept in an ultra-clean air atmosphere. It can be done.

After completing the above work, worker M
0, the reflection plate 2 by the line sensor 22
When the height position No. 5 is no longer detected, the winding device 21 lowers the dustproof curtain 20 to the original lowest position.

FIG. 2 shows a second embodiment of the clean bench according to the present invention. The difference from the first embodiment shown in FIG. By arranging the opening window 19 so as to face the opening window 19, the opening window 19 can be used over its entire width without any obstructions, thereby improving work efficiency.

3 and 4 show a third embodiment of the clean bench according to the present invention, in which the bench is placed in front of the dustproof curtain 20 at a distance slightly wider than the opening width of the opening window 19 in the horizontal direction. Opposed floodlight 2
7 and a light receiver 28 are arranged in predetermined sets at equal intervals in the vertical direction.

In the embodiment described above, when the worker M extends his hand toward the opening window 19 in order to work, the height position of the hand is detected by the light receiver 28 that is blocked by the hand. From this height position, the control device operates the winding device and winds up the dustproof curtain 20 to the minimum height required for the work and at which a hand can enter the work area 12. After this, work area 12
Insert your hand through the opening 26 and perform the predetermined work.
After that, in the same manner as described above, by removing the hand from the opening window 19 and releasing the light-shielding state of the light receiver 28, the dustproof curtain 20 is rolled down to its original lowest position.

Effects of the invention As explained above, in the clean bench according to the invention, the dustproof curtain is installed in front of the opening window so that it can be rolled up and lowered using a winding device, so that when the worker is not working, The above opening window is covered with a dustproof curtain, and when the worker is working in the work area, the dustproof curtain is rolled up to the minimum necessary level, so that contaminated air from outside the clean bench is not drawn into the work area. It is possible to maintain high air cleanliness at all times without
Furthermore, when implementing the present invention, there is no need to create a new clean bench, and the present invention can be applied as is to a conventional clean bench, resulting in low cost.

[Brief explanation of drawings]

FIG. 1 is a vertical side view showing the first embodiment of the clean bench according to the present invention, FIG. 2 is a vertical side view showing the second embodiment, and FIGS. 3 and 4 are the third embodiment. FIG. 2 is a longitudinal side view and a front view of main parts. Figures 5 and 6 show an example of a conventional clean bench. Figure 5 is a schematic vertical side view showing the clean bench in a clean room, and Figure 6
The figure is a vertical side view of the clean bench. 10...Clean bench, 12...Work area,
19...opening window, 20...dustproof curtain, 21...
...winding device.

Claims (1)

[Scope of Claim for Utility Model Registration] A clean bench that has a working area that maintains a clean air atmosphere inside and has an opening window for the working area on the side, a dust-proof curtain that covers the opening window, and a worker's height or A clean bench comprising: a sensor that detects the position of a hand; and a winding device that winds up the dustproof curtain to expose an opening window in accordance with the detection output of the sensor.