JPH0328051B2 - - Google Patents
Info
- Publication number
- JPH0328051B2 JPH0328051B2 JP11764581A JP11764581A JPH0328051B2 JP H0328051 B2 JPH0328051 B2 JP H0328051B2 JP 11764581 A JP11764581 A JP 11764581A JP 11764581 A JP11764581 A JP 11764581A JP H0328051 B2 JPH0328051 B2 JP H0328051B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- substrate
- electron beam
- beam exposure
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 17
- 239000000919 ceramic Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000000465 moulding Methods 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11764581A JPS5821327A (ja) | 1981-07-29 | 1981-07-29 | 電子ビ−ム露光装置用基板ホルダ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11764581A JPS5821327A (ja) | 1981-07-29 | 1981-07-29 | 電子ビ−ム露光装置用基板ホルダ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5821327A JPS5821327A (ja) | 1983-02-08 |
| JPH0328051B2 true JPH0328051B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-04-17 |
Family
ID=14716808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11764581A Granted JPS5821327A (ja) | 1981-07-29 | 1981-07-29 | 電子ビ−ム露光装置用基板ホルダ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5821327A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4777371A (en) * | 1985-05-06 | 1988-10-11 | Siemens Aktiengesellschaft | Support material for electron beam systems |
-
1981
- 1981-07-29 JP JP11764581A patent/JPS5821327A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5821327A (ja) | 1983-02-08 |
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