JPH03279469A - Fiber having metallic thin film and production thereof - Google Patents
Fiber having metallic thin film and production thereofInfo
- Publication number
- JPH03279469A JPH03279469A JP7386690A JP7386690A JPH03279469A JP H03279469 A JPH03279469 A JP H03279469A JP 7386690 A JP7386690 A JP 7386690A JP 7386690 A JP7386690 A JP 7386690A JP H03279469 A JPH03279469 A JP H03279469A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- metal
- fiber
- fibrous body
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 46
- 239000000835 fiber Substances 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 49
- 239000002184 metal Substances 0.000 claims abstract description 49
- 238000001816 cooling Methods 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims description 15
- 230000000694 effects Effects 0.000 claims description 9
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 238000009833 condensation Methods 0.000 claims description 2
- 230000005494 condensation Effects 0.000 claims description 2
- 238000005019 vapor deposition process Methods 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 28
- 239000007789 gas Substances 0.000 abstract description 25
- 239000010408 film Substances 0.000 abstract description 23
- 238000004544 sputter deposition Methods 0.000 abstract description 23
- 229910052786 argon Inorganic materials 0.000 abstract description 14
- 229910052719 titanium Inorganic materials 0.000 abstract description 13
- 230000009471 action Effects 0.000 abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 7
- 238000001755 magnetron sputter deposition Methods 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 2
- 239000002657 fibrous material Substances 0.000 abstract 5
- 230000002542 deteriorative effect Effects 0.000 abstract 1
- 238000005247 gettering Methods 0.000 abstract 1
- 239000010936 titanium Substances 0.000 description 17
- 239000004744 fabric Substances 0.000 description 16
- 210000002268 wool Anatomy 0.000 description 15
- 238000012360 testing method Methods 0.000 description 13
- 239000002759 woven fabric Substances 0.000 description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 11
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 11
- 238000012545 processing Methods 0.000 description 11
- 229910052726 zirconium Inorganic materials 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 229920000742 Cotton Polymers 0.000 description 8
- 239000011888 foil Substances 0.000 description 8
- 238000002485 combustion reaction Methods 0.000 description 6
- 238000005086 pumping Methods 0.000 description 6
- 239000012209 synthetic fiber Substances 0.000 description 6
- 229920002994 synthetic fiber Polymers 0.000 description 6
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
- 229910026551 ZrC Inorganic materials 0.000 description 4
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000002845 discoloration Methods 0.000 description 3
- 238000005108 dry cleaning Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 3
- 238000005562 fading Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000004745 nonwoven fabric Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000003208 petroleum Substances 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000013256 coordination polymer Substances 0.000 description 2
- 239000003063 flame retardant Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 244000025254 Cannabis sativa Species 0.000 description 1
- 235000012766 Cannabis sativa ssp. sativa var. sativa Nutrition 0.000 description 1
- 235000012765 Cannabis sativa ssp. sativa var. spontanea Nutrition 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 208000012886 Vertigo Diseases 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 235000009120 camo Nutrition 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 235000005607 chanvre indien Nutrition 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000011487 hemp Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 101150067055 minC gene Proteins 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- NEPAJWNGAHIWMC-UHFFFAOYSA-N oxygen(2-) titanium(4+) Chemical compound [O--].[O--].[O--].[O--].[O--].[O--].[O--].[O--].[O--].[O--].[Ti+4].[Ti+4].[Ti+4].[Ti+4].[Ti+4] NEPAJWNGAHIWMC-UHFFFAOYSA-N 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Chemical Or Physical Treatment Of Fibers (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、金属薄膜を有する繊維体およびその製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a fibrous body having a thin metal film and a method for producing the same.
なお、本明細書においては、“金属薄膜”とは、金属単
独からなる薄膜のみならず、金属の酸化物、窒化物、炭
化物などの金属化合物からなる薄膜をも意味するものと
する。In this specification, the term "metal thin film" refers not only to a thin film made of a metal alone, but also to a thin film made of a metal compound such as a metal oxide, nitride, or carbide.
従来技術とその問題点
近年、繊維品(糸、織物、不織布など)に対する嗜好(
風合い、色調など)の変化への対応、特性の改善などを
目的として、繊維品の加工が種々の方法で行われている
。特に合成繊維の場合には、紡糸の段階での異形断面形
成、織物或いは不織布製造時の特殊加工などが広く行な
われており、付加価値の向上に大きく貢献している。Conventional technology and its problems In recent years, preferences for textile products (threads, woven fabrics, non-woven fabrics, etc.) have increased (
Textile products are processed using various methods to respond to changes in texture, color tone, etc., and to improve properties. Particularly in the case of synthetic fibers, formation of irregular cross-sections during the spinning stage and special processing during the production of woven or non-woven fabrics are widely practiced, and greatly contribute to increasing added value.
しかしながら、羊毛、絹、綿、麻などの天然繊維の場合
には、それぞれの素材本来の優れた特性を生かすために
、加工はあまり行なわれていなかった。僅かに、羊毛に
ついては、防縮性付与のための樹脂加工、脱スケール加
工、プラズマ加工などおよび防炎加工;絹については、
増量加工;綿については、防炎加工、樹脂加工、マーセ
ル加工などが行なわれているのみである。However, in the case of natural fibers such as wool, silk, cotton, and linen, processing has not been carried out much in order to take advantage of the excellent characteristics inherent to each material. For wool, resin processing, descaling processing, plasma processing, etc., and flame retardant processing are used to impart shrink-proof properties; for silk,
Weight-increasing processing: Cotton is only subjected to flame-retardant processing, resin processing, mercer processing, etc.
しかるに、最近、天然繊維についても、それぞれの本来
の優れた特性を維持しつつ、特性の改善乃至新たな特性
の付与を求める傾向が強まっている。したがって、天然
繊維に対しても、合成繊維と同様の加工を行ない、その
特性を改善する試みがなされている。例えば、従来水分
率が5%以下の合成繊維(ポリエステル、ポリアミド、
ポリアクリルなど)に対して行なわれていると同様の手
法により、金属薄膜を形成する試みがなされているが、
水分率が高い天然繊維の場合(羊毛=16%程度、絹=
11%程度、綿=8.5%程度)には、天然繊維から発
生する主としてH2Oからなる気体成分が真空槽内の圧
力を著しく上昇させ、放電を妨げて薄膜の形成を阻害す
るので、従来技術そのままでは、金属薄膜の形成は実質
的に不可能である。However, recently, there has been a growing trend to improve the properties of natural fibers or to provide them with new properties while maintaining their original excellent properties. Therefore, attempts have been made to improve the properties of natural fibers by subjecting them to the same processing as synthetic fibers. For example, conventional synthetic fibers (polyester, polyamide,
Attempts have been made to form metal thin films using methods similar to those used for polyacrylic, etc.
In the case of natural fibers with high moisture content (wool = approximately 16%, silk =
(about 11%, cotton = about 8.5%), the gas component mainly consisting of H2O generated from natural fibers significantly increases the pressure in the vacuum chamber, impeding discharge and inhibiting thin film formation. With the technology as it is, it is virtually impossible to form a metal thin film.
本発明者は、上記の様な技術の現状に鑑みて鋭意研究を
進めた結果、金属のゲッター作用(真空状態において、
主としてH2Oからなる気体成分を金属の吸着により除
去する作用)および冷却によるトラップにより水分を除
去しつつ、金属をターゲットとして、天然繊維を金属蒸
着処理に供する場合には、天然繊維上に金属薄膜を形成
し得ることを見出した。As a result of intensive research in view of the current state of the technology as described above, the inventor discovered that the getter action of metal (in a vacuum state)
When subjecting natural fibers to metal vapor deposition treatment using metal as a target, a thin metal film is applied to the natural fibers while removing water by trapping by cooling and removing gaseous components mainly consisting of H2O by adsorption of metals. We have found that it is possible to form
即ち、本発明は、下記の金属薄膜を有する繊維体および
その製造方法を提供するものである:■金属薄膜を有す
ることを特徴とする主として天然繊維からなる繊維体。That is, the present invention provides a fibrous body having a metal thin film and a method for producing the same as described below: (1) A fibrous body mainly made of natural fibers and characterized by having a metal thin film.
■主として天然繊維からなる繊維体を減圧乃至真空状態
に維持し、ゲッター作用を有する金属をターゲットとし
て金属蒸着処理を行ない、繊維体から発生する気体成分
を金属による吸着作用および冷却凝縮により除去しつつ
、繊維体表面に金属薄膜を形成させることを特徴とする
金属薄膜を有する繊維体の製造方法。■The fibrous body, which is mainly made of natural fibers, is maintained in a reduced pressure or vacuum state, and a metal vapor deposition process is performed using a metal that has a getter action as a target, and gas components generated from the fibrous body are removed by the adsorption effect of the metal and cooling condensation. A method for manufacturing a fibrous body having a thin metal film, which comprises forming a thin metal film on the surface of the fibrous body.
本発明が対象とする繊維体は、全体としての水分率が5
%以上の羊毛、絹、綿、麻などの天然繊維類からなる繊
維体ならびにこれらの天然繊維と合成繊維との混紡繊維
からなる繊維体である。本発明方法は、合成繊維のみか
らなる繊維体にも適用可能であるが、水分率の低い合成
繊維体は、本発明方法によらずとも、従来法により金属
薄膜を形成することができる。繊維体の形態は、糸状、
織物、不織布などの如何なる形態であっても良い。The fiber body targeted by the present invention has an overall moisture content of 5.
% or more of natural fibers such as wool, silk, cotton, and hemp, and fiber bodies made of blended fibers of these natural fibers and synthetic fibers. The method of the present invention is also applicable to a fibrous body made only of synthetic fibers, but a thin metal film can be formed on a synthetic fiber body with a low moisture content by a conventional method without using the method of the present invention. The morphology of the fibrous body is filamentous,
It may be in any form such as woven fabric or non-woven fabric.
ゲッター作用を有する金属としては、Nb。Nb is a metal having getter action.
T i、Ta5Th、V、Mo5Z r、YSS i。T i, Ta5Th, V, Mo5Z r, YSS i.
A12などが例示される。An example is A12.
金属薄膜の形成に際しては、所定の繊維体をスパッタ装
置、イオンブレーティング装置、真空蒸着装置などの薄
膜形成装置内に配置し、10−6〜10−2Torr程
度の減圧下にスパッタガス(アルゴン或いはアルゴンと
酸素、窒素、アセチレン、アンモニア、メタン、エチレ
ンなどの反応性ガスの少なくとも一種との混合ガス)を
使用し、上記のゲッター作用を有する金属をターゲット
として、金属薄膜の形成を行なう。減圧条件は、より好
ましくは、高周波スパッタ装置では、10−4〜10−
3Torr程度;直流スパッタ装置では、1o−3〜1
0−2Torr程度;電子サイクロトロン共鳴スパッタ
装置では、10−4〜10−3Torr程度;イオンビ
ームスパッタ装置では、10 ”−5〜10−3Tor
r程度;高周波イオンブレーティング装置では、10
’ 〜10−3Torr程度:直流イオンブレーティン
グ装置では、〜10−2Torr程度;真空蒸着装置で
は、10−6〜10 ””Torr程度である。上記の
薄膜形成装置の中では、繊維体と金属薄膜との接着制が
良い、膜厚の制御が容易である、放電が安定している、
大面積に対して均一な薄膜を形成できる、繊維体の温度
上昇が少ないなどの理由により、スパッタ装置を使用す
ることがより好ましい。When forming a metal thin film, a predetermined fibrous body is placed in a thin film forming apparatus such as a sputtering apparatus, an ion blating apparatus, or a vacuum evaporation apparatus, and sputtering gas (argon or A metal thin film is formed by using a mixed gas of argon and at least one of reactive gases such as oxygen, nitrogen, acetylene, ammonia, methane, and ethylene, and targeting the metal having the above getter action. The reduced pressure condition is more preferably 10-4 to 10-1 in a high frequency sputtering device.
Approximately 3 Torr; in DC sputtering equipment, 1o-3 to 1
About 0-2 Torr; For electron cyclotron resonance sputtering equipment, about 10-4 to 10-3 Torr; For ion beam sputtering equipment, about 10"-5 to 10-3 Torr
About r; for high frequency ion brating equipment, 10
' ~10-3 Torr: For a DC ion brating device, it is ~10-2 Torr; For a vacuum evaporation device, it is about 10-6 to 10'' Torr. Among the above-mentioned thin film forming devices, the adhesion between the fibrous body and the metal thin film is good, the film thickness is easy to control, and the discharge is stable.
It is more preferable to use a sputtering device because a uniform thin film can be formed over a large area and the temperature rise of the fibrous body is small.
なお、本発明で使用する薄膜形成装置および薄膜形成方
法自体は、下記に詳述する冷却パネルの使用を必須とす
る点を除けば、公知の装置および方法と実質的に相違す
るところがない。The thin film forming apparatus and thin film forming method used in the present invention are substantially the same as known apparatuses and methods, except that they require the use of a cooling panel, which will be described in detail below.
本発明においては、薄膜形成時に、繊維体の温度を10
0℃以下に維持して繊維体の劣化を防止するとともに繊
維体から発生する気体(主として水蒸気)を冷却凝縮に
より除去するために、薄膜形成装置からの気体を一50
℃(同温度における水の蒸気圧= 10’−2Torr
) 〜−190℃(同温度における水の蒸気圧= 10
−” Torr)の範囲に冷却し得る冷却パネル(冷却
剤として、例えば、液体窒素、超低温冷凍機で冷却され
たフロンガスなどを使用する)を薄膜形成装置に併設す
る。この様な冷却パネルは、薄膜形成装置内の真空ポン
プ付近、繊維体付近、真空装置内壁などに配置すること
ができる。冷却パネルには、繊維体を真空装置内に配置
した後、真空排気操作時および薄膜形成時にのみ冷却剤
を供給して、系内の冷却による気体成分の凝縮除去を行
なう。In the present invention, when forming a thin film, the temperature of the fiber body is set to 10
In order to maintain the temperature below 0°C to prevent deterioration of the fibrous body and to remove the gas (mainly water vapor) generated from the fibrous body by cooling and condensing, the gas from the thin film forming apparatus is
°C (vapor pressure of water at the same temperature = 10'-2 Torr
) ~-190℃ (vapor pressure of water at the same temperature = 10
A cooling panel (using liquid nitrogen, fluorocarbon gas cooled by an ultra-low temperature refrigerator, etc. as a coolant) that can cool the film to a temperature within the range of 100 to 1000 Torr is attached to the thin film forming apparatus. It can be placed near the vacuum pump in the thin film forming device, near the fibrous body, on the inner wall of the vacuum device, etc. After the fibrous body is placed in the vacuum device, the cooling panel is used for cooling only during evacuation operations and thin film formation. The gaseous components are condensed and removed by cooling the system.
一方、気体成分を吸着したゲッター金属も、薄膜形成装
置の壁面、試料取付は治具などに付着して、気体成分の
除去効果を発揮する。On the other hand, the getter metal that has adsorbed gaseous components also adheres to the walls of the thin film forming apparatus, the sample mounting jig, etc., and exhibits the effect of removing gaseous components.
第1図に本発明方法を実施するに際し使用するスパッタ
装置の一例の概要を示す。FIG. 1 shows an outline of an example of a sputtering apparatus used in carrying out the method of the present invention.
真空槽(1)は、排気装置(図示せず)により所定の真
空度まで減圧された後、ライン(3)がらのスパッタガ
ス或はさらにライン(5)からの反応性ガスを供給され
る。所定の条件下にターゲット金属(7)に対して電源
(9)から放電が開始されると、繊維体(11)は、供
給ローラー(13)カラ巻取ローラー(15)に順次送
られ、その表面に金属薄膜が形成される。図示の装置に
於ては、冷却パネル(17)は、繊維体(11)に近接
して配置されている。After the vacuum chamber (1) is depressurized to a predetermined degree of vacuum by an exhaust device (not shown), it is supplied with sputtering gas from the line (3) or a reactive gas from the line (5). When electric discharge is started from the power source (9) to the target metal (7) under predetermined conditions, the fibrous body (11) is sequentially sent to the supply roller (13) and the take-up roller (15). A thin metal film is formed on the surface. In the illustrated device, the cooling panel (17) is located close to the fibrous body (11).
繊維体表面および起毛繊維部分に形成される金属薄膜の
厚さは、繊維および金属の種類、繊維体の形状および用
途などに応じて適宜選択すれば良いが、通常500〜1
0000人程度の範囲内にある。The thickness of the metal thin film formed on the surface of the fibrous body and the raised fiber portion may be appropriately selected depending on the type of fiber and metal, the shape of the fibrous body, and the intended use, but it is usually 500 to 100 mm.
It is within the range of about 0,000 people.
本発明による金属薄膜を有する繊維体は、従来品には存
在しなかった特異な風合い、色調などを有しているので
、スポーツウェア、カジュアルウエア、フォーマルウェ
ア、和装衣料、シャツ、ブラウス、コート、帽子、手袋
、鞄、靴などの広範囲の衣料用材料として、有用である
。The fibrous body having a metal thin film according to the present invention has a unique texture, color tone, etc. that did not exist in conventional products, so it can be used in sportswear, casual wear, formal wear, Japanese clothing, shirts, blouses, coats, etc. It is useful as a material for a wide range of clothing such as hats, gloves, bags, and shoes.
発明の効果 本発明によれば、下記の様な顕著な効果が達成される。Effect of the invention According to the present invention, the following remarkable effects are achieved.
(1)自然の天然繊維とは全く異なった風合いを有する
天然繊維体が得られる。(1) A natural fiber body having a texture completely different from that of natural fibers can be obtained.
(2)金属薄膜の厚さが小さく、且つ主として起毛部分
に形成されるので、天然繊維本来の特性は、殆ど変化し
ない。(2) Since the thickness of the metal thin film is small and is mainly formed on the raised portion, the original characteristics of the natural fiber hardly change.
(3)従来存在しなかった金属的な色調(色および光沢
)を有する天然繊維が得られる。(3) Natural fibers with a metallic tone (color and luster) that did not previously exist can be obtained.
(4)新しい金属的な色調と従来の染色方法とを組合わ
せることにより、より多彩な色調が表現できる。(4) By combining new metallic tones with conventional dyeing methods, a greater variety of tones can be expressed.
(5)その他にも、金属薄膜の存在により、難燃性の向
上、帯電防止、熱線反射にょる昇温防止、耐候性の改善
、防汚性の改善などの効果も、達成される。(5) In addition, the presence of the metal thin film also achieves effects such as improved flame retardancy, antistatic properties, prevention of temperature rise due to reflection of heat rays, improved weather resistance, and improved antifouling properties.
実施例
以下に実施例を示し、本発明の特徴とするところをより
一層明確にする。EXAMPLES Examples will be shown below to further clarify the features of the present invention.
実験例1〜8
羊毛93%およびポリアミド7%からなる紡毛糸1/1
4を使用して得られた織布(密度・・・タテ−24本/
cm 、ヨコ−20本/ cmの3/3綾織り布はく
)を直径1.5m、高さ1mのマルチターゲット方式の
DCマグネトロンスパッタ装置(三容真空工業(株)製
)内に配置し、CuおよびTiをターゲットとして、金
属薄膜の形成を試みた。下記第1表に(I)排気系、(
If)排気時間(分)、(m)ターゲットおよび(IV
)放電状況を示す。Experimental Examples 1 to 8 Woolen yarn 1/1 consisting of 93% wool and 7% polyamide
Woven fabric obtained using 4 (density...24 vertical pieces/
cm, 3/3 twill weave fabric (20 pieces/cm) was placed in a multi-target type DC magnetron sputtering device (manufactured by Sanyo Shinku Kogyo Co., Ltd.) with a diameter of 1.5 m and a height of 1 m. We attempted to form metal thin films using , Cu, and Ti as targets. Table 1 below shows (I) exhaust system, (
If) pumping time (min), (m) target and (IV
) Indicates the discharge status.
第
1表
実験例 (I) (II)
(III) (TV)I DP+M
B+RP 20 Cu 良好2 C
P+DP+MB+RP 15 Cu 良好3
DP+MB+RP 60 Cu
不良(圧力上昇が著しく
直ぐに放電停止 )
4 CP十叶+MB+RP 25 Cu
やや良好(圧力が徐々に上昇
し放電不安定)
5 DP十龍+RP 20 Ti
良好6 CP+DP+MB+RP 15 T
i 良好7 DP+MB+RP 60
Ti やや良好(圧力上昇し放電不
安定)
8 CP+DP+MB+RP 25 T i
良好なお、実験例1〜2.5〜6は、羊毛織布を
使用すること無く、スパッタのみを行なった場合の結果
を示す。Table 1 Experimental examples (I) (II)
(III) (TV)I DP+M
B+RP 20 Cu Good 2 C
P+DP+MB+RP 15 Cu Good 3
DP+MB+RP 60 Cu
Defective (pressure rises significantly and discharge stops immediately) 4 CP Toko + MB + RP 25 Cu
Fairly good (pressure gradually increases and discharge becomes unstable) 5 DP Juryu + RP 20 Ti
Good 6 CP+DP+MB+RP 15 T
i Good 7 DP+MB+RP 60
Ti Slightly good (pressure rises and discharge becomes unstable) 8 CP+DP+MB+RP 25 T i
Experimental Examples 1 to 2.5 to 6 show the results when only sputtering was performed without using woolen fabric.
また、第1表における各記号などは、それぞれ以下のも
のおよび状態を意味する。Furthermore, each symbol in Table 1 means the following items and conditions.
DP・・・拡散ポンプ 26インチ 排気速度−185
001/秒
MB・・・メカニカルブースターポンプ 排気速度=1
500m3/時間
RP・・・回転ポンプ 排気速度=35001 /分C
P・・・冷却パネル 排気速度= 150001/秒排
気時間・・・I X 1O−5Torrに達するまでの
時間放電状況・・・スパッタガス=Ar、スパッタガス
圧力= I X 10−3Torr、放電電圧=400
V/1ターゲット、放電電流=
A
第1表に示す結果から明らかな様に、冷却パネルを併用
し、且つゲッター作用のあるTiの様な金属を使用する
ことにより(実験例Nα8)、金属薄膜形成のための放
電を安定して行なうことができる。DP...Diffusion pump 26 inches Pumping speed -185
001/sec MB...Mechanical booster pump pumping speed = 1
500m3/hour RP...Rotary pump pumping speed = 35001/minC
P... Cooling panel Pumping speed = 150001/sec Pumping time... Time to reach I x 10-5 Torr Discharge status... Sputter gas = Ar, Sputter gas pressure = I x 10-3 Torr, Discharge voltage = 400
V/1 target, discharge current = A As is clear from the results shown in Table 1, by using a cooling panel and a metal such as Ti that has a getter function (experimental example Nα8), a thin metal film can be formed. The discharge for formation can be performed stably.
実施例1
実験例1で使用したものと同様の羊毛織布を使用して、
金属薄膜を形成させた。Example 1 Using a woolen fabric similar to that used in Experimental Example 1,
A metal thin film was formed.
まず、羊毛織布の表側を起毛した後、せん毛して毛羽を
揃え、石油系ドライクリーニング液により洗浄し、10
0℃で1昼夜乾燥した。First, the front side of the wool woven fabric is raised, then fluffed to even out the fuzz, washed with a petroleum-based dry cleaning solution, and washed for 10 minutes.
It was dried at 0°C for one day and night.
上記の処理を終えた羊毛織布を実験例1で使用したマル
チターゲット方式のマグネトロンスパッタ装置内に配置
し、チタンによるゲッター作用と冷却パネルによる冷却
作用とを利用して気体成分を除去しつつ、下記の条件下
にスパッタリング処理した。The wool woven fabric that had undergone the above treatment was placed in the multi-target magnetron sputtering device used in Experimental Example 1, and gas components were removed using the getter action of titanium and the cooling action of the cooling panel. Sputtering treatment was carried out under the following conditions.
ターゲット・・・Ti
スパッタガス・・・アルゴン
スパッタ圧力・・・I X 10−3Torr放電電圧
・・・400V/1ターゲツト、放電電流・・・3A
スパッタリング処理終了後、羊毛織布を柔軟剤で処理し
、毛羽を揃えた後、乾燥およびポリッシング処理した。Target: Ti Sputtering gas: Argon Sputtering pressure: I After smoothing out the fluff, it was dried and polished.
得られた繊維体の色調は、チタンの金属色を呈していた
。また、繊維体の風合いは、従来の羊毛織布とは異なる
感触を示した。The color tone of the obtained fibrous body was the metallic color of titanium. In addition, the texture of the fibrous body was different from that of conventional wool woven fabrics.
さらに、得られた繊維体の染色堅牢度を第2表に示す試
験方法により、測定した。その結果を第3表に示す。Furthermore, the color fastness of the obtained fibrous bodies was measured according to the test method shown in Table 2. The results are shown in Table 3.
実施例2
JIS L 0803(染色堅牢度試験用添付白布
)の絹布はくを実施例1と同様にして、スパッタリング
処理し、ポリッシング処理した。Example 2 A silk cloth foil of JIS L 0803 (attached white cloth for color fastness test) was sputtered and polished in the same manner as in Example 1.
得られた繊維体の色調は、チタンの金属色を呈していた
。また、繊維体の風合いは、従来の絹布とは異なる感触
を示した。The color tone of the obtained fibrous body was the metallic color of titanium. In addition, the texture of the fibrous body was different from that of conventional silk cloth.
さらに、得られた繊維体の各種の特性を第2表に示す試
験方法により、測定した。その結果を第3表に併せて示
す。Furthermore, various properties of the obtained fibrous bodies were measured according to the test methods shown in Table 2. The results are also shown in Table 3.
第2表
染色堅牢度試験
項目
試
験
機
洗濯 JIS L 0844 A−2法汚染布 綿 絹
スガ試験機(株)製
洗濯試験機Lト85
摩擦
JIS
844
■型
スガ試験機(株)製
摩擦試験機■型FR−2
耐光
JIS L 0842 カーボンアーク灯光
20時間照射
JISLO842A法
汚染布 綿 絹
スガ試験機(株)
紫外線ロングライフフェト
メータFAL−5
スガ試験機(株)
s−v
製
製
第
試験項目
洗濯
変退色
汚染二線
汚染:絹
摩擦
乾:
湿:
耐光
汗
酸:変退色
汚染;綿
汚染;絹
アルカリ:変退色
汚染;綿
汚染;絹
羊毛
3〜4
4以上
3〜4
4以上
実施例3〜4
実施例1で使用したものと同様の羊毛織布を使用して、
酸化チタン薄膜および窒化チタン薄膜をそれぞれ形成さ
せた。Table 2 Color fastness test items Test machine Washing JIS L 0844 A-2 method contaminated fabric Cotton Washing test machine manufactured by Kinu Suga Test Instruments Co., Ltd. L-85 Friction JIS 844 ■ Friction test machine manufactured by Suga Test Instruments Co., Ltd. ■Type FR-2 Light resistance JIS L 0842 Carbon arc lamp light
20-hour irradiation JISLO842A method contaminated cloth Cotton Kinu Suga Test Instruments Co., Ltd. Ultraviolet Long Life Fetometer FAL-5 Manufactured by Suga Test Instruments Co., Ltd. s-v First test item Washing Discoloration Fading Contamination Two-line contamination: Silk friction drying: Wet : Photoperspiric acid resistance: discoloration and fading stain; cotton stain; silk alkali: discoloration and fading stain; cotton stain; silk wool 3 to 4 4 or more 3 to 4 4 or more Examples 3 to 4 Wool similar to that used in Example 1 using woven fabric,
A titanium oxide thin film and a titanium nitride thin film were respectively formed.
まず、羊毛織布の表側を起毛した後、せん毛して毛羽を
揃え、石油系ドライクリーニング液により洗浄し、10
0℃で1昼夜乾燥した。First, the front side of the wool woven fabric is raised, then fluffed to even out the fuzz, washed with a petroleum-based dry cleaning solution, and washed for 10 minutes.
It was dried at 0°C for one day and night.
上記の処理を終えた羊毛織布を実験例1で使用したマル
チターゲット方式のマグネトロンスパッタ装置内に配置
し、下記の条件下にそれぞれスパッタリング処理した。The wool woven fabrics treated as described above were placed in the multi-target magnetron sputtering apparatus used in Experimental Example 1, and sputtered under the following conditions.
[実施例3] :
ターゲット・・・Ti
スパッタガス・・・アルゴンおよびアルゴン70%+酸
素30%
スパッタ圧力・・・I X 10−3Torr放電電圧
・・・400V/1ターゲツト、放電電流・・・3A
膜厚・・・チタン−800人十酸化チタン=700人[
実施例4] :
ターゲット・・・Ti
スパッタガス・・・アルゴンおよびアルゴン70%+窒
素30%
スパッタ圧力−I X 10−3Torr放電電圧・・
・400V/1ターゲツト、放電電流・・・3A
膜厚・・・チタン−800人士窒化チタン=700人い
ずれの場合にも、当初は、アルゴンガス中で金属チタン
をスパッタし、ゲッター作用を利用して気体成分を除去
しつつ、チタン膜を形成した後、反応ガスに酸素または
窒素を加えてスパッタを継続し、チタン膜上に酸化チタ
ン膜または窒化チタン膜を形成させた。[Example 3] Target: Ti Sputtering gas: Argon and 70% argon + 30% oxygen Sputtering pressure: IX 10-3 Torr Discharge voltage: 400V/1 target, discharge current... 3A Film thickness...Titanium - 800 people Titanium decaoxide = 700 people [
Example 4]: Target: Ti Sputtering gas: Argon and 70% argon + 30% nitrogen Sputtering pressure: I x 10-3 Torr Discharge voltage:
・400V/1 target, discharge current: 3A Film thickness: Titanium - 800 people Titanium nitride = 700 people In either case, initially, metallic titanium was sputtered in argon gas and the getter action was used. After forming a titanium film while removing gas components, sputtering was continued by adding oxygen or nitrogen to the reaction gas to form a titanium oxide film or a titanium nitride film on the titanium film.
酸化チタン薄膜を形成した羊毛布はく (実施例3)の
色相は、濃青色を呈しており、一方、窒化チタン薄膜を
形成した羊毛布はく(実施例4)の色相は、赤みがかっ
た黄色を呈していた。The woolen fabric foil (Example 3) on which a titanium oxide thin film was formed had a deep blue hue, while the woolen fabric foil on which a titanium nitride thin film was formed (Example 4) had a reddish yellow hue. It was exhibiting.
実施例5〜6
実施例1で使用したものと同様の羊毛織布を使用して、
金属ジルコニウム薄膜および炭化ジルコニウム薄膜をそ
れぞれ形成させた。Examples 5-6 Using woolen fabric similar to that used in Example 1,
A metallic zirconium thin film and a zirconium carbide thin film were respectively formed.
まず、羊毛織布の表側を起毛した後、せん毛して毛羽を
揃え、石油系ドライクリーニング液により洗浄し、10
0℃で1昼夜乾燥した。First, the front side of the wool woven fabric is raised, then fluffed to even out the fuzz, washed with a petroleum-based dry cleaning solution, and washed for 10 minutes.
It was dried at 0°C for one day and night.
上記の処理を終えた羊毛織布を実験例1で使用したマル
チターゲット方式のマグネトロンスパッタ装置内に配置
し、下記の条件下にそれぞれスパッタリング処理した。The wool woven fabrics treated as described above were placed in the multi-target magnetron sputtering apparatus used in Experimental Example 1, and sputtered under the following conditions.
[実施例5コ :
ターゲット・・・ジルコニウム
スパッタガス・・・アルゴン
スパッタ圧力・・・lX10づTorr放電電圧・・・
400V/1ターゲツト、放電電流・・・3A
膜厚800人
[実施例6] :
ターゲット・・・ジルコニウム
スパッタガス・・・アルゴンおよびアルゴン75%+ア
セチレン25%
スパッタ圧力・・・I X 10−3Torr放電電圧
・・・400V/1ターゲツト、放電電流・・・3A
膜厚・・・ジルコニウム−800人士炭化ジルコニウム
1800人
実施例5の場合には、アルゴンガス中で金属ジルコニウ
ムをスパッタし、ゲッター作用と冷却パネルによる冷却
作用を利用して気体成分を除去しつつジルコニウム膜を
形成した。[Example 5] Target: Zirconium sputtering gas: Argon sputtering pressure: lx10 Torr discharge voltage...
400V/1 target, discharge current...3A, film thickness 800 people [Example 6]: Target...Zirconium sputtering gas...Argon and 75% argon + 25% acetylene Sputtering pressure...I x 10-3 Torr Discharge voltage...400V/1 target, discharge current...3A Film thickness...Zirconium - 800 people Zirconium carbide 1800 people In the case of Example 5, metallic zirconium was sputtered in argon gas to create a getter effect. A zirconium film was formed while removing gaseous components using the cooling effect of the cooling panel.
実施例6の場合には、当初は、アルゴンガス中で金属ジ
ルコニウムをスパッタし、ゲッター作用と冷却パネルに
よる冷却作用を利用して気体成分を除去しつつジルコニ
ウム膜を形成した後、反応ガスにアセチレンを加えてス
パッタを継続し、ジルコニウム膜上に炭化ジルコニウム
膜を形成させた。In the case of Example 6, metal zirconium was initially sputtered in argon gas, a zirconium film was formed while removing gas components using the getter action and the cooling action of the cooling panel, and then acetylene was added to the reaction gas. was added and sputtering was continued to form a zirconium carbide film on the zirconium film.
金属ジルコニウム薄膜を形成した羊毛布はく(実施例5
)および炭化ジルコニウム薄膜を形成した羊毛布はく
(実施例6)は、いずれも金属ジルコニウムの色を呈し
ていたー。Wool cloth foil with metal zirconium thin film formed (Example 5)
) and woolen cloth foil with zirconium carbide thin film formed.
(Example 6) all exhibited the color of metallic zirconium.
また、いずれの羊毛布はくの洗濯堅牢度も、実施例1で
得られたチタン薄膜を有する羊毛布はくと同程度であっ
た。Furthermore, the washing fastness of each of the woolen fabric foils was comparable to that of the woolen fabric foil having the titanium thin film obtained in Example 1.
試験例I
JIS L 1091 A−1に規定する方法(
45’ ミクロバーナー法)に従って、実施例1で得た
チタン薄膜を有する羊毛布はくを燃焼試験に供した。燃
焼試験に際しては、1分間加熱を行なった(ただし着炎
後は加熱停止)。また、接炎面は、チタン薄膜形成面で
ある。Test Example I Method specified in JIS L 1091 A-1 (
The woolen fabric foil with the titanium film obtained in Example 1 was subjected to a combustion test according to the 45' microburner method). During the combustion test, heating was performed for 1 minute (however, heating was stopped after ignition of flame). Further, the flame contact surface is the titanium thin film forming surface.
結果は、試料No、 1〜4として第4表に示す通りで
ある。なお、第4表には、金属薄膜を形成しない試料N
015〜7についての結果を併せて示す。The results are shown in Table 4 as samples No. 1 to 4. In addition, Table 4 shows sample N on which no metal thin film is formed.
The results for 015-7 are also shown.
第4表
試料 炭化面積 残炎時間 炭化距離(C♂)
(秒) (cm)1 74
.9 107.6 20.42 70
、2 125.2 20.43 61.
7 116.4 20.34 57.
3 106.5 20.25 全焼
51.2 全焼6 全焼 48.
9 全焼7 全焼 48.0 全
焼本発明による試料Nα1〜4の場合には、ホールダー
上端まで燃焼した後、燃焼停止した。Table 4 Sample Carbonization area Afterflame time Carbonization distance (C♂)
(seconds) (cm) 1 74
.. 9 107.6 20.42 70
, 2 125.2 20.43 61.
7 116.4 20.34 57.
3 106.5 20.25 Burnt down
51.2 Completely burnt down 6 Completely burned down 48.
9 Total combustion 7 Total combustion 48.0 Total combustion In the case of samples Nα1 to Nα4 according to the present invention, combustion stopped after burning up to the upper end of the holder.
これに対し、金属薄膜を有しない比較試料No、 5〜
7の場合には、完全に燃焼してしまった。On the other hand, comparative sample No. 5~ which does not have a metal thin film
In the case of 7, it was completely burnt out.
第1図は、本発明方法で使用する薄膜形成装置の一例の
概要を示す断面図である。
(1)・・・真空槽
(3)・・・不活性ガス供給ライン
(5)・・・反応性ガス供給ライン
(7)・・・金属ターゲット
(9)・・・電源
(11)・・・繊維体
(13)・・・供給ローラー
(15)・・・巻取ローラー
(17)・・・冷却パネル
(以 上)FIG. 1 is a sectional view schematically showing an example of a thin film forming apparatus used in the method of the present invention. (1)...Vacuum chamber (3)...Inert gas supply line (5)...Reactive gas supply line (7)...Metal target (9)...Power source (11)... - Fibrous body (13)... Supply roller (15)... Take-up roller (17)... Cooling panel (and above)
Claims (2)
繊維からなる繊維体。(1) A fibrous body mainly made of natural fibers, characterized by having a metal thin film.
状態に維持し、ゲッター作用を有する金属をターゲット
として金属蒸着処理を行ない、繊維体から発生する気体
成分を金属による吸着作用および冷却凝縮により除去し
つつ、繊維体表面に金属薄膜を形成させることを特徴と
する金属薄膜を有する繊維体の製造方法。(2) The fibrous body, which is mainly made of natural fibers, is maintained in a reduced pressure or vacuum state, and a metal vapor deposition process is performed using a metal that has a getter effect as a target, and the gas components generated from the fibrous body are removed by the adsorption effect of the metal and cooling condensation. A method for producing a fibrous body having a metal thin film, the method comprising: forming a metal thin film on the surface of the fibrous body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7386690A JPH03279469A (en) | 1990-03-22 | 1990-03-22 | Fiber having metallic thin film and production thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7386690A JPH03279469A (en) | 1990-03-22 | 1990-03-22 | Fiber having metallic thin film and production thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03279469A true JPH03279469A (en) | 1991-12-10 |
JPH0583665B2 JPH0583665B2 (en) | 1993-11-29 |
Family
ID=13530530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7386690A Granted JPH03279469A (en) | 1990-03-22 | 1990-03-22 | Fiber having metallic thin film and production thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03279469A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000059156A (en) * | 2000-07-19 | 2000-10-05 | 손태원 | Skin-core short fiber comprising metal and cellulose |
KR20010019394A (en) * | 1999-08-23 | 2001-03-15 | 박명식 | A method for fixing mold release of textile or skin |
WO2005073456A1 (en) * | 2004-01-30 | 2005-08-11 | Yoshiaki Maeda | Antibacterial nonwoven fabric |
WO2006058722A1 (en) * | 2004-12-03 | 2006-06-08 | Mascioni S.P.A. | Process of surface finishing and colouration of an article |
CN108625152A (en) * | 2017-03-20 | 2018-10-09 | 香港纺织及成衣研发中心有限公司 | A kind of functional curtain fabric and preparation method thereof with anhydrous coating |
CN110042357A (en) * | 2019-05-22 | 2019-07-23 | 河南理工大学 | Wireless charging alloy wire preparation method and the multi-target magnetic control sputtering device of preparation |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS574769A (en) * | 1980-06-11 | 1982-01-11 | Hitachi Ltd | Elastic body and its manufacture |
JPS61146869A (en) * | 1984-12-21 | 1986-07-04 | 平岡織染株式会社 | Surface metallization of fibrous base cloth |
JPS62191570A (en) * | 1986-02-13 | 1987-08-21 | 東レ株式会社 | Production of metal composite fiber sheet like article |
JPS62191893U (en) * | 1986-05-22 | 1987-12-05 |
-
1990
- 1990-03-22 JP JP7386690A patent/JPH03279469A/en active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS574769A (en) * | 1980-06-11 | 1982-01-11 | Hitachi Ltd | Elastic body and its manufacture |
JPS61146869A (en) * | 1984-12-21 | 1986-07-04 | 平岡織染株式会社 | Surface metallization of fibrous base cloth |
JPS62191570A (en) * | 1986-02-13 | 1987-08-21 | 東レ株式会社 | Production of metal composite fiber sheet like article |
JPS62191893U (en) * | 1986-05-22 | 1987-12-05 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010019394A (en) * | 1999-08-23 | 2001-03-15 | 박명식 | A method for fixing mold release of textile or skin |
KR20000059156A (en) * | 2000-07-19 | 2000-10-05 | 손태원 | Skin-core short fiber comprising metal and cellulose |
WO2005073456A1 (en) * | 2004-01-30 | 2005-08-11 | Yoshiaki Maeda | Antibacterial nonwoven fabric |
JPWO2005073456A1 (en) * | 2004-01-30 | 2007-09-13 | 前田 芳聰 | Antibacterial nonwoven fabric |
WO2006058722A1 (en) * | 2004-12-03 | 2006-06-08 | Mascioni S.P.A. | Process of surface finishing and colouration of an article |
CN108625152A (en) * | 2017-03-20 | 2018-10-09 | 香港纺织及成衣研发中心有限公司 | A kind of functional curtain fabric and preparation method thereof with anhydrous coating |
CN108625152B (en) * | 2017-03-20 | 2021-01-12 | 香港纺织及成衣研发中心有限公司 | Functional curtain fabric with anhydrous coating and preparation method thereof |
CN110042357A (en) * | 2019-05-22 | 2019-07-23 | 河南理工大学 | Wireless charging alloy wire preparation method and the multi-target magnetic control sputtering device of preparation |
Also Published As
Publication number | Publication date |
---|---|
JPH0583665B2 (en) | 1993-11-29 |
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