JPH0327335U - - Google Patents

Info

Publication number
JPH0327335U
JPH0327335U JP8698489U JP8698489U JPH0327335U JP H0327335 U JPH0327335 U JP H0327335U JP 8698489 U JP8698489 U JP 8698489U JP 8698489 U JP8698489 U JP 8698489U JP H0327335 U JPH0327335 U JP H0327335U
Authority
JP
Japan
Prior art keywords
valve
pump
high vacuum
vacuum pump
exhaust system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8698489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8698489U priority Critical patent/JPH0327335U/ja
Publication of JPH0327335U publication Critical patent/JPH0327335U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP8698489U 1989-07-25 1989-07-25 Pending JPH0327335U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8698489U JPH0327335U (enrdf_load_html_response) 1989-07-25 1989-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8698489U JPH0327335U (enrdf_load_html_response) 1989-07-25 1989-07-25

Publications (1)

Publication Number Publication Date
JPH0327335U true JPH0327335U (enrdf_load_html_response) 1991-03-19

Family

ID=31636639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8698489U Pending JPH0327335U (enrdf_load_html_response) 1989-07-25 1989-07-25

Country Status (1)

Country Link
JP (1) JPH0327335U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180033579A (ko) * 2015-08-31 2018-04-03 시마쯔에미트 가부시키가이샤 헬륨 리크 디텍터

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57169647A (en) * 1981-04-13 1982-10-19 Ulvac Corp He reverse diffusion type leakage detector using turbo molecular pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57169647A (en) * 1981-04-13 1982-10-19 Ulvac Corp He reverse diffusion type leakage detector using turbo molecular pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180033579A (ko) * 2015-08-31 2018-04-03 시마쯔에미트 가부시키가이샤 헬륨 리크 디텍터

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