JPH0326901B2 - - Google Patents
Info
- Publication number
- JPH0326901B2 JPH0326901B2 JP25695884A JP25695884A JPH0326901B2 JP H0326901 B2 JPH0326901 B2 JP H0326901B2 JP 25695884 A JP25695884 A JP 25695884A JP 25695884 A JP25695884 A JP 25695884A JP H0326901 B2 JPH0326901 B2 JP H0326901B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- grid
- surface potential
- scintillator
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 14
- 230000000903 blocking effect Effects 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 9
- 230000035945 sensitivity Effects 0.000 claims 5
- 230000000694 effects Effects 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000005036 potential barrier Methods 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 230000004888 barrier function Effects 0.000 claims 1
- 230000002542 deteriorative effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Current Or Voltage (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25695884A JPS61135035A (ja) | 1984-12-05 | 1984-12-05 | 電子ビ−ムテスタ用表面電位測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25695884A JPS61135035A (ja) | 1984-12-05 | 1984-12-05 | 電子ビ−ムテスタ用表面電位測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61135035A JPS61135035A (ja) | 1986-06-23 |
| JPH0326901B2 true JPH0326901B2 (fr) | 1991-04-12 |
Family
ID=17299728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25695884A Granted JPS61135035A (ja) | 1984-12-05 | 1984-12-05 | 電子ビ−ムテスタ用表面電位測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61135035A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1703538B1 (fr) | 2005-03-17 | 2008-11-12 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Dispositif à faisceau de particules chargées pour haute résolution spatiale et pour imagerie en perspectives multiples |
| DE102006043895B9 (de) * | 2006-09-19 | 2012-02-09 | Carl Zeiss Nts Gmbh | Elektronenmikroskop zum Inspizieren und Bearbeiten eines Objekts mit miniaturisierten Strukturen |
| EP2124245A1 (fr) | 2008-05-21 | 2009-11-25 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh | Outil de mesure à précision très élevée |
-
1984
- 1984-12-05 JP JP25695884A patent/JPS61135035A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61135035A (ja) | 1986-06-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |