JPH032630U - - Google Patents
Info
- Publication number
- JPH032630U JPH032630U JP6355289U JP6355289U JPH032630U JP H032630 U JPH032630 U JP H032630U JP 6355289 U JP6355289 U JP 6355289U JP 6355289 U JP6355289 U JP 6355289U JP H032630 U JPH032630 U JP H032630U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- sloped
- storage hole
- placing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6355289U JPH032630U (da) | 1989-05-31 | 1989-05-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6355289U JPH032630U (da) | 1989-05-31 | 1989-05-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH032630U true JPH032630U (da) | 1991-01-11 |
Family
ID=31593706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6355289U Pending JPH032630U (da) | 1989-05-31 | 1989-05-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH032630U (da) |
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1989
- 1989-05-31 JP JP6355289U patent/JPH032630U/ja active Pending