JPS62186429U - - Google Patents
Info
- Publication number
- JPS62186429U JPS62186429U JP7425586U JP7425586U JPS62186429U JP S62186429 U JPS62186429 U JP S62186429U JP 7425586 U JP7425586 U JP 7425586U JP 7425586 U JP7425586 U JP 7425586U JP S62186429 U JPS62186429 U JP S62186429U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- tapered
- utility
- cross
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7425586U JPS62186429U (da) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7425586U JPS62186429U (da) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186429U true JPS62186429U (da) | 1987-11-27 |
Family
ID=30919299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7425586U Pending JPS62186429U (da) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186429U (da) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5966199A (ja) * | 1982-10-08 | 1984-04-14 | 株式会社日立製作所 | パツケ−ジ搬送機構 |
-
1986
- 1986-05-16 JP JP7425586U patent/JPS62186429U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5966199A (ja) * | 1982-10-08 | 1984-04-14 | 株式会社日立製作所 | パツケ−ジ搬送機構 |