JPH0326038U - - Google Patents
Info
- Publication number
- JPH0326038U JPH0326038U JP8586789U JP8586789U JPH0326038U JP H0326038 U JPH0326038 U JP H0326038U JP 8586789 U JP8586789 U JP 8586789U JP 8586789 U JP8586789 U JP 8586789U JP H0326038 U JPH0326038 U JP H0326038U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- wall surface
- melting point
- spaced apart
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
Description
第1図はこの考案の一実施例のプラズマ発生装
置のプラズマ生成容器の構成を示す簡略化した断
面図、第2図は従来技術を示す簡略化した断面図
である。 11……プラズマ生成容器、11a……内壁面
、12……内張り。
置のプラズマ生成容器の構成を示す簡略化した断
面図、第2図は従来技術を示す簡略化した断面図
である。 11……プラズマ生成容器、11a……内壁面
、12……内張り。
Claims (1)
- プラズマ生成容器の内壁面を鏡面とし、この内
壁面に沿つて高融点材料からなる内張りを離隔配
置したプラズマ発生装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8586789U JPH0326038U (ja) | 1989-07-21 | 1989-07-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8586789U JPH0326038U (ja) | 1989-07-21 | 1989-07-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0326038U true JPH0326038U (ja) | 1991-03-18 |
Family
ID=31635216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8586789U Pending JPH0326038U (ja) | 1989-07-21 | 1989-07-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0326038U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013211232A (ja) * | 2012-03-30 | 2013-10-10 | Sumitomo Heavy Ind Ltd | マイクロ波イオン源 |
-
1989
- 1989-07-21 JP JP8586789U patent/JPH0326038U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013211232A (ja) * | 2012-03-30 | 2013-10-10 | Sumitomo Heavy Ind Ltd | マイクロ波イオン源 |