JPH03257091A - Crystal growing device - Google Patents

Abstract

PURPOSE:To prevent the mistaking of a moving quantity and to obtain a good crystal by having a time limit control section of a moving mechanism which operates the moving mechanism for a prescribed period of time at a prescribed speed. CONSTITUTION:An operator operates the time limit control section 119 and operates a power source 118 in order to operate the moving mechanism 1 or moving mechanism 2 in such a manner that a floating zone 108 attains an optimum shape by viewing the video of a floating zone 108 projected on a monitor TV 112. The operation is made for the prescribed period of time in this way and the mistaking of the moving quantity by an operation error is obviated. The good quality crystal is thus obtd.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a crystal growth apparatus used for crystal growth, etc.
In particular, it relates to a crystal growth apparatus using the floating zone method.

[Conventional technology]

Conventional crystal growth equipment places a heat source at the first focal point of a reflecting mirror made of a spheroidal surface, places a crystal material at the second focal point, concentrates the infrared rays, and heats and melts the crystal material to form a crystal. It is about growth. This device includes a single ellipsoid type in which the reflecting mirror is composed of only one spheroidal surface, a bielliptic type in which the reflecting mirror is composed of a combination of two spheroidal surfaces and shares a second focal point, Furthermore, there is a multi-circular type in which the reflecting mirror is composed of a combination of three or more spheroidal surfaces and shares a second focal point.

Next, a conventional crystal growth apparatus will be described in detail with reference to the drawings. FIG. 2 is a sectional view showing a single elliptical crystal growth apparatus among conventional crystal growth apparatuses, in which 200 is a spheroidal reflector, 201 is a polycrystalline material, and 202 is a single crystalline material. Each of these crystal materials is chuck (top) 2
03, Shaft (top) by 204 (bottom)
205, attached to the shaft (lower) 206, supplies energy to a heat source 207 such as a xenon lamp or a halogen lamp, and when the heat source 207 generates infrared rays, crystal growth occurs between the polycrystalline material 201 and the single crystal material 202. A floating zone 208 is formed in the second focal portion of the device. 209 is a furnace for protecting the spheroidal reflector from gas generated from the polycrystalline material 201 and the single-crystalline material 202, and for creating a vacuum around the polycrystalline material 201 and the single-crystalline material 202 or filling it with inert gas or the like. It is a core tube. Reference numeral 210 is an observation window opened in a part of the crystal growth apparatus to observe the floating zone 208. Light emitted from the floating zone 208 passes through the observation window 210, is captured by a camera 211, and is reflected on a monitor TV 212. 208 images can be viewed. Crystal growth is performed by moving the floating zone 208 in the direction of the polycrystalline material 201 by the moving mechanism (1) 213, that is, by moving the spheroidal reflecting mirror 200 in the direction of the polycrystalline material 201. Rotating mechanism (top) 2
14 and rotation mechanism (lower) 215 are rotation mechanisms and moving mechanisms (
2) 216 is a moving mechanism for adjusting the size of the floating zone 208, 217 is a moving mechanism (1) 21
B. Rotation mechanism (top) 214, rotation mechanism (bottom) 215, movement mechanism (2>216 control unit. 218 is the heat source 20
This is a power source that supplies energy to 7. When performing crystal growth, the operator watches the image of the floating zone 208 displayed on the monitor TV 212 and moves the moving mechanism (1) so that the floating zone 208 has an optimal shape.
The controller 217 is operated and the power source 218 is operated in order to operate the moving mechanism (2).

[Problem to be solved by the invention]

However, in the past, workers had to use a moving machine ellipse (
1) When operating the control unit 217 to operate the movement mechanisms (1) 216 and the movement mechanisms (1) 213,
3 or the moving mechanism (2) 216 is often clear, the control section 217 is operated by turning it on and off using a switch. In this case, there would be no problem if the operation could be performed as intended by the operator, but there were cases where the operator made a mistake in the amount of movement due to an operational error. Therefore, good quality crystals could not be obtained.

An object of the present invention is to eliminate such conventional drawbacks and provide a crystal growth apparatus for growing high-quality single crystals.

[Means to solve the problem]

In the crystal growth apparatus of the first invention, a heat source is provided at a first focal point of a spheroidal reflector movable by a moving mechanism, and a shaft rotatable by a rotation mechanism is provided at a second focal point of the spheroidal reflector. In a crystal growth apparatus using a floating zone method, a crystal material attached to the tip of a crystal material is provided, and infrared rays emitted from the heat source are concentrated to melt the crystal material and grow the crystal.
It has a time control section for the moving mechanism that operates at a predetermined speed.

The crystal growth apparatus of the second invention has a rotating mechanism for a predetermined period of time,
It has a time control section for the rotation mechanism that operates at a predetermined speed.

〔Example〕

An embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view showing an embodiment of a crystal growth apparatus according to the present invention. In FIG.
01 is a polycrystalline material, and 102 is a single-crystalline material. These crystal materials are attached to a shaft (top) 105 and a shaft (bottom) 106 by a chuck (top) 103 and a chuck (bottom) 104, respectively, and supply energy to a heat source 107 such as a xenon lamp or a halogen lamp. When infrared radiation is generated from 107, a floating zone 108 is formed between the polycrystalline material 101 and the single crystal material 102, that is, at the second focal point of the crystal growth apparatus. 1
09 is a furnace for protecting the spheroidal reflector from gas generated from the polycrystalline material 101 and the single-crystalline material 102, and for creating a vacuum around the polycrystalline material 101 and the single-crystalline material 102 or filling it with inert gas or the like. It is a core tube. 110 is an observation window opened in a part of the crystal growth apparatus for observing the floating zone 108, and the light emitted from the floating zone 108 passes through the observation window 110 and reaches the camera 11.
1 and displayed on the monitor TV 112, the image of the floating zone 108 can be viewed. Crystal growth is performed by moving the floating zone 108 in the direction of the polycrystalline material 101 by the moving mechanism (1) 113, that is, by moving the spheroidal reflector 100 in the direction of the polycrystalline material 101. ) 114 and rotation mechanism (bottom) 115 are rotation mechanisms and movement mechanisms (2) for rotating the floating zone 108 to make the temperature distribution in the circumferential direction of the floating zone 108 uniform and for stirring the inside of the floating zone 108. 116 is a moving mechanism for adjusting the size of the floating zone 108, 117 is a moving mechanism (1) 11B, and a rotating mechanism (
Top) 114, rotation mechanism (bottom) 115, movement mechanism (2)
116 control unit. 118 is a power source that supplies energy to the heat source 107; Reference numeral 119 denotes a time control unit that operates the moving mechanism (1) and moving mechanism (2) connected to the control unit 117 for a predetermined time. When performing crystal growth, the operator watches the image of the floating zone 108 displayed on the monitor TV 112 and moves the moving mechanism (1) and moving mechanism (2) in a predetermined manner so that the floating zone 108 has an optimal shape. In order to operate for a certain amount of time, the time control section 119 is operated and the power supply 118 is operated.

Although a crystal growth apparatus having a time control section in the moving mechanism has been described here, the present invention can be implemented in the same way in a crystal growth apparatus having a time control section in the rotating mechanism, and The present invention can be similarly implemented with respect to a crystal growth apparatus having a time control section.

In addition, although this article has explained a type of crystal growth apparatus that grows crystals by moving a spheroidal reflector, this book also describes a type of crystal growth apparatus that grows crystals by moving a shaft to which a crystal material is attached. The invention can be practiced similarly. Furthermore, although a single-vessel circular crystal growth apparatus has been described here, the present invention can be implemented in the same manner with a bielliptical or multi-vessel circular crystal growth apparatus.

As the heat source described in the above explanation, the present invention can be implemented in the same manner using any heat source such as a xenon lamp or a halogen lamp.

[Effects of the Invention] The crystal growth apparatus according to the present invention has a time limit control section in which the moving mechanism operates only for a predetermined period of time, and can operate for only a predetermined period of time as intended by the operator, thereby preventing operational errors. This eliminates the need to make mistakes in the amount of movement, making it possible to obtain high-quality crystals.

FIG. 1 is a sectional view showing an embodiment of a crystal growth apparatus according to the present invention, and FIG. 2 is a sectional view showing a conventional example.

100.200...Spheroidal reflector, 101°201
... Polycrystalline material, 102,202... Single crystal material,
103.203...Chuck (top), 104°204
...Chuck (lower>, 105,205...Shaft (upper), 106,206...Shaft (lower), 107
．． 207...Heat source, 108,208...Floating zone, 109.209...Furnace core tube, 11021
0... Observation window, 111, 211... Camera, 112
．． 212... Monitor TV, 113, 213... Moving mechanism (1), 114, 214... Rotating mechanism (top), 1
15.215... Rotating mechanism (bottom), 116,216.
...Movement mechanism (2) 117.217...Control unit,
118.218...Power supply, 119...Time control section.

Claims (1)

[Claims] 1. A heat source is provided at a first focal point of a spheroidal reflector that is movable by a moving mechanism, and a tip of a shaft that is rotatable by a rotation mechanism is provided at a second focal point of the spheroidal reflector. In a crystal growth apparatus using a floating zone method, a crystal material attached to the crystal material is provided, and infrared rays emitted from the heat source are concentrated to melt the crystal material and grow the crystal,
A crystal growth apparatus comprising: a time control section for a moving mechanism that operates the moving mechanism at a predetermined speed for a predetermined time. 2. The crystal growth apparatus according to claim 1, further comprising a time control section for the rotation mechanism that causes the rotation mechanism to operate at a predetermined speed for a predetermined time.