JPH0325555U - - Google Patents
Info
- Publication number
- JPH0325555U JPH0325555U JP8637189U JP8637189U JPH0325555U JP H0325555 U JPH0325555 U JP H0325555U JP 8637189 U JP8637189 U JP 8637189U JP 8637189 U JP8637189 U JP 8637189U JP H0325555 U JPH0325555 U JP H0325555U
- Authority
- JP
- Japan
- Prior art keywords
- introduction port
- vacuum chamber
- vacuum
- sample
- sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の実施例に係る真空蒸着装置の
要部を示す断面図、第２図は従来の真空蒸着装置
の要部を示す断面図である。
１……真空蒸着装置、２……真空チヤンバ、４
……試料、６……蒸発源、８……第１導入ポート
、１０……第２導入ポート、１２……透明ガラス
、１６……反射手段、１８……回転ドラム、２０
……反射ミラー。
FIG. 1 is a sectional view showing the main parts of a vacuum evaporation apparatus according to an embodiment of the present invention, and FIG. 2 is a sectional view showing the main parts of a conventional vacuum evaporation apparatus. 1... Vacuum evaporation device, 2... Vacuum chamber, 4
... Sample, 6 ... Evaporation source, 8 ... First introduction port, 10 ... Second introduction port, 12 ... Transparent glass, 16 ... Reflection means, 18 ... Rotating drum, 20
...reflection mirror.
Claims (1)
バを備えた真空蒸着装置において、 前記真空チヤンバには前記試料あるいは蒸発源
に光を導く第１導入ポートが突設され、この第１
導入ポートにはこれに略直交して第２導入ポート
の一端部が連設され、この第２導入ポートの他端
部は透明ガラスで封止される一方、前記第１導入
ポートと第２導入ポートの交差部には光源から第
２導入ポートを通つて入射される光を前記真空チ
ヤンバ内に向けて屈折させる反射手段が設けられ
、この反射手段は、回転ドラムの周壁に複数枚の
反射ミラーを取り付けて構成されていることを特
徴とする真空蒸着装置。[Claims for Utility Model Registration] A vacuum evaporation apparatus equipped with a vacuum chamber in which a sample and an evaporation source are disposed, the vacuum chamber having a first introduction port protruding from the vacuum chamber to guide light to the sample or the evaporation source. and this first
One end of a second introduction port is connected to the introduction port substantially orthogonally thereto, and the other end of the second introduction port is sealed with transparent glass, while the first introduction port and the second introduction port are sealed with transparent glass. Reflection means is provided at the intersection of the ports to refract the light incident from the light source through the second introduction port into the vacuum chamber, and this reflection means includes a plurality of reflection mirrors on the peripheral wall of the rotating drum. A vacuum evaporation device characterized in that it is configured by attaching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8637189U JPH0325555U (en) | 1989-07-20 | 1989-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8637189U JPH0325555U (en) | 1989-07-20 | 1989-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325555U true JPH0325555U (en) | 1991-03-15 |
Family
ID=31635896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8637189U Pending JPH0325555U (en) | 1989-07-20 | 1989-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325555U (en) |
-
1989
- 1989-07-20 JP JP8637189U patent/JPH0325555U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0325555U (en) | ||
| JPH0164637U (en) | ||
| JPS62135116U (en) | ||
| JPH0422709U (en) | ||
| JPS6192835U (en) | ||
| JPH0621268Y2 (en) | Equipment for testing semiconductor lasers | |
| JPH0310249U (en) | ||
| JPS6436808U (en) | ||
| JPS6237709U (en) | ||
| JPS6026155U (en) | Photoelectric switch | |
| JPS6240762U (en) | ||
| JPH01174845U (en) | ||
| JPS6347331U (en) | ||
| JPH01143557U (en) | ||
| JPH043315U (en) | ||
| JPH0230048U (en) | ||
| JPH0352909U (en) | ||
| JPS63128417U (en) | ||
| JPS636444U (en) | ||
| JPS61174640U (en) | ||
| JPH022783U (en) | ||
| JPH0260856U (en) | ||
| JPH02146608U (en) | ||
| JPS6333416U (en) | ||
| JPH0393746U (en) |