JPH0325234U - - Google Patents
Info
- Publication number
- JPH0325234U JPH0325234U JP8600589U JP8600589U JPH0325234U JP H0325234 U JPH0325234 U JP H0325234U JP 8600589 U JP8600589 U JP 8600589U JP 8600589 U JP8600589 U JP 8600589U JP H0325234 U JPH0325234 U JP H0325234U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- rotating brush
- brush
- retracted position
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000005201 scrubbing Methods 0.000 claims description 4
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 3
- 239000000428 dust Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Brushes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600589U JPH0325234U (fr) | 1989-07-21 | 1989-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600589U JPH0325234U (fr) | 1989-07-21 | 1989-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325234U true JPH0325234U (fr) | 1991-03-15 |
Family
ID=31635413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8600589U Pending JPH0325234U (fr) | 1989-07-21 | 1989-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325234U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003058955A (ja) * | 2001-08-20 | 2003-02-28 | Dainippon Printing Co Ltd | キャッシュアウト機能と連動したポイントサービスシステム |
-
1989
- 1989-07-21 JP JP8600589U patent/JPH0325234U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003058955A (ja) * | 2001-08-20 | 2003-02-28 | Dainippon Printing Co Ltd | キャッシュアウト機能と連動したポイントサービスシステム |