JPS6349232U - - Google Patents

Info

Publication number
JPS6349232U
JPS6349232U JP14298586U JP14298586U JPS6349232U JP S6349232 U JPS6349232 U JP S6349232U JP 14298586 U JP14298586 U JP 14298586U JP 14298586 U JP14298586 U JP 14298586U JP S6349232 U JPS6349232 U JP S6349232U
Authority
JP
Japan
Prior art keywords
wafer
rotating brush
wafer cleaning
rotating
reciprocating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14298586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14298586U priority Critical patent/JPS6349232U/ja
Publication of JPS6349232U publication Critical patent/JPS6349232U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP14298586U 1986-09-17 1986-09-17 Pending JPS6349232U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14298586U JPS6349232U (fr) 1986-09-17 1986-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14298586U JPS6349232U (fr) 1986-09-17 1986-09-17

Publications (1)

Publication Number Publication Date
JPS6349232U true JPS6349232U (fr) 1988-04-04

Family

ID=31052241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14298586U Pending JPS6349232U (fr) 1986-09-17 1986-09-17

Country Status (1)

Country Link
JP (1) JPS6349232U (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216163A (en) * 1975-07-30 1977-02-07 Hitachi Ltd Waste removal method
JPS59121939A (ja) * 1982-12-28 1984-07-14 Fujitsu Ltd ウエ−ハのブラツシング方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216163A (en) * 1975-07-30 1977-02-07 Hitachi Ltd Waste removal method
JPS59121939A (ja) * 1982-12-28 1984-07-14 Fujitsu Ltd ウエ−ハのブラツシング方法

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