JPH032496Y2 - - Google Patents

Info

Publication number
JPH032496Y2
JPH032496Y2 JP1984199535U JP19953584U JPH032496Y2 JP H032496 Y2 JPH032496 Y2 JP H032496Y2 JP 1984199535 U JP1984199535 U JP 1984199535U JP 19953584 U JP19953584 U JP 19953584U JP H032496 Y2 JPH032496 Y2 JP H032496Y2
Authority
JP
Japan
Prior art keywords
slider
guide
wafer
inside guide
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984199535U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61110623U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984199535U priority Critical patent/JPH032496Y2/ja
Publication of JPS61110623U publication Critical patent/JPS61110623U/ja
Application granted granted Critical
Publication of JPH032496Y2 publication Critical patent/JPH032496Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Reciprocating Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Transmission Devices (AREA)
JP1984199535U 1984-12-26 1984-12-26 Expired JPH032496Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984199535U JPH032496Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-26 1984-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984199535U JPH032496Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-26 1984-12-26

Publications (2)

Publication Number Publication Date
JPS61110623U JPS61110623U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-12
JPH032496Y2 true JPH032496Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-01-23

Family

ID=30759548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984199535U Expired JPH032496Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-26 1984-12-26

Country Status (1)

Country Link
JP (1) JPH032496Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58144009A (ja) * 1982-02-18 1983-08-27 Aisaku Tekko Kk 往復搬送装置

Also Published As

Publication number Publication date
JPS61110623U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-12

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