JPH03249423A - Hydrostatic gas bearing - Google Patents
Hydrostatic gas bearingInfo
- Publication number
- JPH03249423A JPH03249423A JP4269090A JP4269090A JPH03249423A JP H03249423 A JPH03249423 A JP H03249423A JP 4269090 A JP4269090 A JP 4269090A JP 4269090 A JP4269090 A JP 4269090A JP H03249423 A JPH03249423 A JP H03249423A
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- depth
- slit
- slit grooves
- slit groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002706 hydrostatic effect Effects 0.000 title claims description 15
- 230000002093 peripheral effect Effects 0.000 description 7
- 230000003068 static effect Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
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- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明の静圧気体軸受は、精密工作機械等の回転部分を
支承する場合に利用するもので、本発明は、この様な静
圧気体軸受の剛性向上を図るものである。Detailed Description of the Invention (Field of Industrial Application) The hydrostatic gas bearing of the present invention is used to support rotating parts of precision machine tools, etc. This is intended to improve the rigidity of the bearing.
（従来の技術）
精密工作機械等に組み込まれ、高速で回転する回転軸等
の回転部材を、空気等の圧縮気体の力により支承する静
圧気体軸受が、従来から広く使用されている。(Prior Art) Hydrostatic gas bearings have been widely used in the past, which are incorporated into precision machine tools and support rotating members such as rotating shafts that rotate at high speed using the force of compressed gas such as air.
第９〜１０図は、この様な従来から知られている静圧気
体軸受の１例として、特公昭４５−３７６８３号公報に
記載された静圧気体軸受を示している。9 and 10 show a hydrostatic gas bearing described in Japanese Patent Publication No. 45-37683 as an example of such a conventionally known hydrostatic gas bearing.
第９図に於いて１は、内周面を円筒状の軸受面２とした
軸受部材で、この軸受部材１の内側に回転軸３を挿通し
ている。上記軸受面２の上下左右４個所位置には、それ
ぞれ凹部４ａ、４ｂ、５ａ、５ｂを形成し、各凹部４ａ
、４ｂ、５ａ、５ｂに圧縮気体を送り込む事で、上記回
転軸３を軸受部材１の内側に、非接触状態で支承する様
にしている。In FIG. 9, reference numeral 1 denotes a bearing member whose inner peripheral surface has a cylindrical bearing surface 2, and a rotary shaft 3 is inserted into the inside of this bearing member 1. Recesses 4a, 4b, 5a, and 5b are formed at four positions on the upper, lower, left, and right sides of the bearing surface 2, and each recess 4a
, 4b, 5a, and 5b, the rotating shaft 3 is supported inside the bearing member 1 in a non-contact manner.
上記４個の凹部４ａ、４ｂ、５ａ、５ｂの内、上下２個
所位置の凹部４ａ、４ｂは第一の制御絞り弁６を介して
、左右２個所位置の凹部５ａ、５ｂは第二の制御絞り弁
７を介して、それぞれコンプレッサ等の圧縮気体供給源
に通じさせている。Of the four recesses 4a, 4b, 5a, and 5b, the recesses 4a and 4b located at two positions above and below are controlled via the first control throttle valve 6, and the recesses 5a and 5b located at two positions on the left and right are controlled by the second control. Each of them is connected to a compressed gas supply source such as a compressor via a throttle valve 7.
上記第一、第二の制御絞り弁６．７は、軸受面２と回転
軸３の外周面とが同心になる様に、上下の凹部４ａ、４
ｂ、或は左右の凹部５ａ、５ｂに送る圧縮気体の量と圧
力とを調節する為のもので、例えば第１０図に示す様に
構成されている。The first and second control throttle valves 6.7 have upper and lower recesses 4a, 4 so that the bearing surface 2 and the outer peripheral surface of the rotating shaft 3 are concentric.
b, or to adjust the amount and pressure of compressed gas sent to the left and right recesses 5a, 5b, and is configured as shown in FIG. 10, for example.
第一（第二）の制御絞り弁６（７）を構成するハウジン
グ８の片面中央部に設けた第一ボート９と凹部４ａ （
５ａ）とは第一供給管１０により、他面中央部に設けた
第二ボート１１と凹部４ｂ（５ｂ）とは第二供給管１２
により、それぞれ連通させている。又、上記ハウジング
８の中間部にはダイヤフラム１５を設けて、このハウジ
ング８の内側を、第一ボート９側の第−室１３と第一ボ
ート１１側の第二室１４とに分割し、これら第、第二両
室１３．１４に、圧縮気体供給源から圧縮気体を送り込
んでいる。A first boat 9 and a recess 4a (
5a) is connected to the first supply pipe 10, and the second boat 11 provided in the center of the other side and the recessed portion 4b (5b) are connected to the second supply pipe 12.
This allows them to communicate with each other. A diaphragm 15 is provided in the middle of the housing 8 to divide the inside of the housing 8 into a first chamber 13 on the first boat 9 side and a second chamber 14 on the first boat 11 side. Compressed gas is fed into both the first and second chambers 13, 14 from a compressed gas supply source.
上記ハウジング８の内面で、第一、第二側ボート９．１
１の開口部を囲む位置は、全周に亙ってそれぞれ内方に
突出させ、上記ダイヤフラム１５の両側には、第一、第
二側ボート９．１１と第一、第二両室１３．１４との間
に、それぞれ第一、第二側絞り流路１６．１７を形成し
ている。On the inner surface of the housing 8, the first and second side boats 9.1
The positions surrounding the opening of the diaphragm 15 project inwardly over the entire circumference, and on both sides of the diaphragm 15 there are first and second side boats 9.11 and both first and second chambers 13.1. 14, first and second side throttle channels 16 and 17 are formed, respectively.
上述の様に構成される為、回転軸３の変位に基づいて、
この回転軸３の外周面と軸受面２とが同心でなくなった
場合、第一、第二の制御絞り弁６．７の作用により、凹
部４ａ、４ｂ、５ａ、５ｂに送り込まれる圧縮空気の量
と圧力とが適当に調節され、上記回転軸３の外周面と軸
受面２とが同心になる。Since it is configured as described above, based on the displacement of the rotating shaft 3,
When the outer peripheral surface of the rotating shaft 3 and the bearing surface 2 are no longer concentric, the amount of compressed air sent into the recesses 4a, 4b, 5a, 5b by the action of the first and second control throttle valves 6.7. and pressure are adjusted appropriately, and the outer circumferential surface of the rotating shaft 3 and the bearing surface 2 become concentric.
例えば、第１０図に於いて回転軸３が下方に変位した場
合、回転軸３の外周面と軸受面２との間の軸受隙間１８
の寸法が、下側で小さく、上側で大きくなる。この寸法
変化に伴ない、下側の凹部４ｂ （５ｂ）内の圧力が高
く、上側の凹部４ａ（５ａ）内の圧力が低くなり、第二
供給管１２により凹部４ｂ （５ｂ）と通じた第二ボー
ト１１内の圧力が上昇し、第一供給管１０により凹部４
ａ（５ａ）と通じた第一ボート９内の圧力が低下する。For example, when the rotating shaft 3 is displaced downward in FIG. 10, the bearing gap 18 between the outer peripheral surface of the rotating shaft 3 and the bearing surface 2
The dimensions of are smaller at the bottom and larger at the top. Along with this dimensional change, the pressure inside the lower recess 4b (5b) becomes high, the pressure inside the upper recess 4a (5a) decreases, and the second supply pipe 12 communicates with the recess 4b (5b). The pressure inside the second boat 11 increases, and the first supply pipe 10 causes the recess 4 to
The pressure in the first boat 9 communicating with a (5a) decreases.
この結果、第一、第二側ポート９．１１を仕切るダイヤ
フラム１５が上方に変位し、第二絞り流路１７が広く、
第一絞り流路１６が狭くなって、下側の凹部４ｂ （５
ｂ）内に送り込む圧縮気体の量と圧力とが犬ぎくなり、
上側の凹部４ａ（５ａ）内に送り込まれる圧縮気体の量
と圧力とが小さくなって、回転軸３が第１０図で上方に
押され、この回転軸３の変位が解消される。As a result, the diaphragm 15 that partitions the first and second side ports 9.11 is displaced upward, and the second throttle channel 17 is widened.
The first throttle channel 16 becomes narrower, and the lower recess 4b (5
b) The amount and pressure of compressed gas sent into the interior become too large,
The amount and pressure of the compressed gas sent into the upper recess 4a (5a) are reduced, and the rotating shaft 3 is pushed upward in FIG. 10, thereby eliminating the displacement of the rotating shaft 3.
（発明が解決しようとする課題）
ところが、上述の汀に構成され作用する、従来の静圧気
体軸受に１髪・では、次に述べる様な問題があった。(Problems to be Solved by the Invention) However, the conventional static pressure gas bearing that is configured and operates on the above-mentioned shore has the following problems.
即ち、従来構造の場合、軸受隙間１８に圧縮気体を供給
する為の凹部４ａ、４ｂ、５ａ、５ｂが、大きな凹みで
あった為、これらの凹部４ａ。That is, in the case of the conventional structure, the recesses 4a, 4b, 5a, and 5b for supplying compressed gas to the bearing gap 18 were large recesses, so these recesses 4a.
４ｂ、５ａ、５ｂに送り込んだ圧縮気体により、自助振
動が発生し易く、発生した場合には、静圧気体軸受を組
み込んだ工作機械等の運転を安定して行なえなくなって
しまう。The compressed gas fed into the bearings 4b, 5a, and 5b tends to cause self-support vibration, and if this occurs, it becomes impossible to stably operate a machine tool or the like incorporating the hydrostatic gas bearing.
特に、軸受剛性を高める為、各凹部４ａ、４ｂ、５ａ、
ｓｂに供給する気体の圧力を上昇させると、上述の様な
自励振動が発生し易くなるので、軸受剛性を高めるのに
限度があった。In particular, in order to increase bearing rigidity, each recess 4a, 4b, 5a,
If the pressure of the gas supplied to sb is increased, self-excited vibrations as described above are likely to occur, so there is a limit to how much the bearing rigidity can be increased.
本発明の静圧気体軸受は、上述の様な問題を解決するも
のである。The hydrostatic gas bearing of the present invention solves the above-mentioned problems.
（課題を解決する為の手段）
本発明の静圧気体軸受は、固定の軸受部材と、この軸受
部材に設けた軸受面と軸受隙間を介して対向する回転部
材と、上記軸受面に形成され、且つ供給口を通じて圧縮
気体の供給源に通しるスリット溝とから構成されている
。(Means for Solving the Problems) A hydrostatic gas bearing of the present invention comprises: a fixed bearing member; a rotating member that faces a bearing surface provided on the bearing member with a bearing gap therebetween; and a rotating member formed on the bearing surface. , and a slit groove through which the compressed gas supply source is passed through the supply port.
そして、上記スリット溝の深さｄは、軸受隙間寸法りの
３〜８倍とし、上記スリット溝の幅Ｗは、上記深さｄの
１〜５倍としている。The depth d of the slit groove is 3 to 8 times the bearing gap dimension, and the width W of the slit groove is 1 to 5 times the depth d.
（作 用）
上述の様に構成される本発明の静圧気体軸受の場合、回
転部材を支承する為の圧縮気体は、スリット溝を通じて
軸受隙間に送り込まれるが、スリット溝の形状が工夫さ
れている事により、自助振動が発生し難くなり、静圧気
体軸受を組み込んだ装置を安定した状態で運転する事が
出来、又、圧縮気体の圧力を高めて、軸受剛性を向上さ
せる事も可能となる。(Function) In the case of the hydrostatic gas bearing of the present invention configured as described above, the compressed gas for supporting the rotating member is sent into the bearing gap through the slit groove, but the shape of the slit groove is devised. This makes it difficult for self-supported vibrations to occur, allowing devices incorporating static pressure gas bearings to operate in a stable state, and also making it possible to increase the pressure of compressed gas and improve bearing rigidity. Become.
（実施例）
次に、図示の実施例を説明しつつ、本発明を更に詳しく
説明する。(Example) Next, the present invention will be explained in more detail while explaining the illustrated embodiment.
第１〜３図は本発明の第一実施例を示しており、第１図
は全体構成を示す断面図、第２図はスリット溝の形状を
示す、第１図のＡ矢視図、第３図は第２図のＢ−Ｂ断面
図である。1 to 3 show a first embodiment of the present invention, FIG. 1 is a cross-sectional view showing the overall structure, FIG. 2 is a view in the direction of arrow A in FIG. FIG. 3 is a sectional view taken along line BB in FIG. 2.
１は、内周面を円筒状の軸受面２とした軸受部材で、こ
の軸受部材１の内側に、外径が５０〜１５０ｍｍ程度の
回転軸３を挿通している。上記軸受面２の上下左右４個
所位置には、それぞれスリット溝１９ａ、１９ｂ、２０
ａ、２０ｂを形成し、各スリット溝１９ａ、１９ｂ、２
０ａ、２０ｂに圧縮気体を送り込む事で、上記回転軸３
を軸受部材１の内側に、非接触状態で支承する様にして
いる。1 is a bearing member whose inner peripheral surface is a cylindrical bearing surface 2, and a rotating shaft 3 having an outer diameter of approximately 50 to 150 mm is inserted into the inside of this bearing member 1. Slit grooves 19a, 19b, and 20 are provided at four positions on the upper, lower, left, and right sides of the bearing surface 2, respectively.
a, 20b, and each slit groove 19a, 19b, 2
By sending compressed gas to 0a and 20b, the rotating shaft 3
is supported inside the bearing member 1 in a non-contact manner.
即ち、上記各スリット溝１９ａ、１９ｂ、２０ａ、２０
ｂ内に送り込まれた圧縮気体により、上記軸受面２と回
転軸３の外周面との間に、寸法がｈの軸受隙間１８を全
周に亙って形成し、回転軸３が軸受部材１の内側で、両
部材３．１同士が互いに接触する事なく回転する様にし
ている。That is, each of the slit grooves 19a, 19b, 20a, 20
By the compressed gas sent into the bearing member 1, a bearing gap 18 having a dimension h is formed between the bearing surface 2 and the outer peripheral surface of the rotating shaft 3 over the entire circumference, and the rotating shaft 3 is connected to the bearing member 1. Inside the housing, both members 3.1 are rotated without coming into contact with each other.
又、上記４個のスリット溝１９ａ、１９ｂ、２０ａ、２
０ｂの内、上下２個所位置のスリット溝１９ａ、１９ｂ
は第一の制御絞り弁６を介して、左右２個所位置のスリ
ット溝２０ａ、２０ｂは第二の制御絞り弁７を介して、
それぞれコンプレッサ等の圧縮気体供給源に通しさせて
いる。In addition, the four slit grooves 19a, 19b, 20a, 2
0b, slit grooves 19a and 19b at two positions above and below
through the first control throttle valve 6, and the slit grooves 20a and 20b at two positions on the left and right through the second control throttle valve 7.
Each is passed through a compressed gas supply source such as a compressor.
上記第一、第二の制御絞り弁６．７は、前述した従来構
造の場合と同様に、軸受面２と回転軸３の外周面とが同
心になる様に、上下のスリット溝１９ａ、１９ｂ１或は
左右のスリット溝２０ａ１２０ｂに送る圧縮気体の量を
調節する為のもので、前述した第１０図に示す様に構成
されており、各制御絞り弁６．７の両端部にその一端を
接続された第一、第二供給管１０．１２の他端を、上記
各スリット溝１９ａ、１９ｂ、２０ａ、２０ｂの中央部
に通じさせている。The first and second control throttle valves 6.7 have upper and lower slit grooves 19a, 19b1 so that the bearing surface 2 and the outer circumferential surface of the rotating shaft 3 are concentric with each other, as in the case of the conventional structure described above. Alternatively, it is used to adjust the amount of compressed gas sent to the left and right slit grooves 20a and 120b, and is configured as shown in FIG. The other ends of the first and second supply pipes 10.12 are communicated with the center portions of the respective slit grooves 19a, 19b, 20a, 20b.
各スリット溝１９ａ、１９ｂ、２０ａ、２０ｂは、それ
ぞれ第２図に示す様にｒ田Ｊ字形に形成されている。Each of the slit grooves 19a, 19b, 20a, and 20b is formed in a J-shape as shown in FIG.
この様な各スリット溝１９ａ、１９ｂ、２０ａ、２０ｂ
の深さｄは、前記軸受隙間１８の寸法ｈ（通常５〜２０
μｍ）の３〜８倍（ｄ＝（３〜８）ｈ）とし、上記スリ
ット溝の幅Ｗは、上記深さｄの１〜５倍（ｗ＝（１〜５
）ｄ）としている。Each slit groove 19a, 19b, 20a, 20b like this
The depth d is the dimension h (usually 5 to 20 mm) of the bearing gap 18.
The width W of the slit groove is 1 to 5 times the depth d (w=(1 to 5) h).
) d).
上述の様に構成される本発明の静圧気体軸受の場合、回
転軸３を支承する為の圧縮気体は、各スリット溝１９ａ
、１９ｂ、２０ａ、２０ｂを通じて軸受隙間１８に送り
込まれ、軸受部材１の内側に回転軸３を、非接触状態で
支承すると共に、回転軸３外周面の中心と軸受面２の中
心とがずれた場合には、第一、第二の両制御絞り弁６．
７の作用により、このずれを修正する。In the case of the static pressure gas bearing of the present invention configured as described above, compressed gas for supporting the rotating shaft 3 is supplied to each slit groove 19a.
, 19b, 20a, and 20b into the bearing gap 18, and supports the rotating shaft 3 inside the bearing member 1 in a non-contact state, and the center of the outer peripheral surface of the rotating shaft 3 and the center of the bearing surface 2 are misaligned. In this case, both the first and second controlled throttle valves6.
7 corrects this deviation.
更に、本発明の静圧気体軸受の場合、スリット溝１９ａ
、１９ｂ、２０ａ、２０ｂの形状が、上述の様に工夫さ
れている事により、自助振動が発生し難くなり、静圧気
体軸受を組み込んだＰ！密工作機械等の装置を安定した
状態で運転する事が出来、又、気体の圧力を高めて、軸
受剛性を向上させる事も可能となる。この場合に於いて
、本発明の静圧気体軸受の場合、実用的な気体消費量（
例えば、１軸受当たりで５〜５０１． ／ｍｉｎ ）で
、十分な軸受剛性を得る事が出来る。Furthermore, in the case of the hydrostatic gas bearing of the present invention, the slit groove 19a
, 19b, 20a, and 20b are devised as described above, making it difficult for self-supported vibration to occur, and P! which incorporates a hydrostatic gas bearing. It is possible to operate equipment such as dense machine tools in a stable state, and it is also possible to increase the gas pressure and improve the bearing rigidity. In this case, in the case of the static pressure gas bearing of the present invention, the practical gas consumption (
For example, 5 to 501 centimeters per bearing. /min), sufficient bearing rigidity can be obtained.
尚、スリット溝１９ａ、１９ｂ、２０ａ、２０ｂの形状
を、上述の様に定める理由は、次の通りである。The reason why the shapes of the slit grooves 19a, 19b, 20a, and 20b are determined as described above is as follows.
先ず、各スリット溝１９ａ、１９ｂ、２０ａ。First, each slit groove 19a, 19b, 20a.
２０ｂの深さｄを軸受隙間１８の寸法りの３〜８倍（ｄ
＝（３〜８）ｈ）とした理由は、深さｄを隙間寸法りの
３倍よりも小さくした場合（ｄ〈３ｈ）、各スリット溝
１９ａ、１９ｂ、２０ａ、２０ｂ内に送り込まれた圧縮
気体が、溝全体に互って広がりにくく、各スリット溝１
９ａ、１９ｂ、２０ａ、２０ｂ内に存在する圧縮気体の
圧力が均一となり難い為、軸受剛性が低くなり、反対に
、深さｄを隙間寸法りの８倍よりも大きくした場合（ｄ
＞８ｈ）、各スリット溝１９ａ、１９ｂ、２０ａ、２０
ｂの容積が大きくなって、自助振動が発生し易くなる為
である。The depth d of 20b is 3 to 8 times the dimension of the bearing gap 18 (d
= (3~8)h) is because when the depth d is made smaller than three times the gap size (d<3h), the compression sent into each slit groove 19a, 19b, 20a, 20b The gas is difficult to spread across the entire groove, and each slit groove 1
Since the pressure of the compressed gas existing in 9a, 19b, 20a, and 20b is difficult to be uniform, the bearing rigidity decreases.On the contrary, if the depth d is made larger than eight times the gap size (d
>8h), each slit groove 19a, 19b, 20a, 20
This is because the volume of b becomes larger and self-help vibration is more likely to occur.
又、各スリット溝１９ａ、１９ｂ、２０ａ、２０ｂの幅
Ｗを深さｄの１〜５倍（ｗ＝（１〜５）ｄ）とした理由
は次の通りである。即ち、幅Ｗを深さｄよりも小さくし
た場合（ｗｅｄ）、スリット溝１９ａ、１９ｂ、２０ａ
、２０ｂの加工作業が難しくなり、静圧気体軸受の製作
費が徒に高くなり、又、各スリット溝１９ａ、１９ｂ、
２０ａ、２Ｏｂ内の気体の圧力が全体に亙って均一化さ
れないので、軸受剛性が低くなる。反対に、幅Ｗを深さ
ｄの５倍よりも大きくした場合（Ｗ〉５ｄ）、軸受面２
に形成するスリット溝の体積が大きくなって、自助振動
が発生し易くなる。尚、各スリット溝１９ａ、１９ｂ、
２０ａ、２０ｂの断面形状は、矩形でも、或は円弧形で
も良い。The reason why the width W of each slit groove 19a, 19b, 20a, and 20b is set to 1 to 5 times the depth d (w=(1 to 5)d) is as follows. That is, when the width W is made smaller than the depth d (wed), the slit grooves 19a, 19b, 20a
, 20b becomes difficult, the manufacturing cost of the static pressure gas bearing becomes unnecessarily high, and each slit groove 19a, 19b,
Since the pressure of the gas inside 20a and 2Ob is not made uniform throughout, the bearing rigidity decreases. On the other hand, when the width W is made larger than five times the depth d (W>5d), the bearing surface 2
The volume of the slit groove formed in the groove increases, making it easier for self-help vibration to occur. In addition, each slit groove 19a, 19b,
The cross-sectional shape of 20a and 20b may be rectangular or arcuate.
次に、第４図は本発明の第二実施例を示している。Next, FIG. 4 shows a second embodiment of the present invention.
前述の第一実施例が、スリット溝１９ａ１１９ｂ、２０
ａ、２０ｂの全体形状をｒ田１字形としていたのに対し
、本実施例の場合は、互いに平行な複数の分配溝部２１
．２１の中央部同士を、連結溝部２２で連続させた形状
としている。In the first embodiment described above, the slit grooves 19a119b, 20
While the overall shape of a and 20b was an R-shape, in the case of this embodiment, a plurality of distribution grooves 21 parallel to each other are used.
．． The central portions of 21 are connected to each other by a connecting groove portion 22.
その他の構成と作用とに就いては、スリット溝の幅や深
さも含め、前述した第一実施例の場合と同様である。The other configurations and operations, including the width and depth of the slit grooves, are the same as in the first embodiment described above.
次に、第５〜６図は本発明の第三実施例を示しており、
第５図は第６図のＣ−Ｃ断面図、第６図は第５図のＤ−
Ｄ断面図である。Next, FIGS. 5 and 6 show a third embodiment of the present invention,
Figure 5 is a sectional view taken along line C-C in Figure 6, and figure 6 is a cross-sectional view taken along line D-- in Figure 5.
It is a D sectional view.
前述した第一〜第二実施例が、本発明をラジアル軸受に
適用した実施例であフたのに対し、本実施例、及び後述
する第四実施例は、本発明をスラスト軸受に通用した実
施例である。While the first and second embodiments described above were examples in which the present invention was applied to a radial bearing, this embodiment and the fourth embodiment to be described later apply the present invention to a thrust bearing. This is an example.
回転軸２３の両端部にフランジ部２４．２４を固定した
回転部材２５の周囲には、両フランジ部２４．２４に挟
まれる様にして、円輪状の軸受部材２６が設けられてい
る。A circular bearing member 26 is provided around the rotating member 25, which has flange portions 24.24 fixed to both ends of the rotating shaft 23, so as to be sandwiched between both the flange portions 24.24.
そして、この軸受部材２６の両側面に設けられた軸受面
２８ａ、２８ｂに、それぞれ第６図に示す様に、同心円
状の溝部と放射状の溝部とを組み合わせた、スリット溝
２７ａ、２７ｂを形成し、各スリット溝２７ａ、２７ｂ
に圧縮気体を送り込む事により、各フランジ部２４．２
４が軸受部材２６と接触する事なく、回転軸２３及びフ
ランジ部２４．２４が回転する様にしている。Slit grooves 27a and 27b, which are a combination of concentric grooves and radial grooves, are formed in bearing surfaces 28a and 28b provided on both sides of the bearing member 26, respectively, as shown in FIG. , each slit groove 27a, 27b
By sending compressed gas into each flange part 24.2
The rotating shaft 23 and the flange portions 24 and 24 are made to rotate without the bearing member 26 coming into contact with the bearing member 26.
又、軸受部材２６の内側には、それぞれスリット溝２７
ａ、２７ｂの底部に通じる制御絞り弁２９を設けて、各
スリット溝２７ａ、２７ｂに供給する圧縮気体の量を調
節し、各軸受面２８ａ、２８ｂと各フランジ部２４．２
４の内面との間の軸受隙間３０の寸法が、互いに同じに
なる様にしている。Further, slit grooves 27 are formed inside the bearing member 26, respectively.
A control throttle valve 29 communicating with the bottom of each slit groove 27a, 27b is provided to adjust the amount of compressed gas supplied to each slit groove 27a, 27b, and to control the amount of compressed gas supplied to each bearing surface 28a, 28b and each flange portion 24.2.
The dimensions of the bearing gap 30 between the bearing gap 30 and the inner surface of the bearing 4 are made to be the same.
上記各スリット溝２７ａ、２７ｂの幅や深さを前述した
範囲に規制する事は、第一〜第二実施例の場合と同様で
ある。The width and depth of each of the slit grooves 27a and 27b are restricted to the ranges described above, as in the first and second embodiments.
次に、第７〜８図は本発明の第四実施例を示している。Next, FIGS. 7 and 8 show a fourth embodiment of the present invention.
本実施例の場合、軸受部材２６の軸受面２８４゜
ａ、２８ｂに形成するスリット溝２７ａ、２７ｂを、１
本の円形溝部と、この円形溝部を横切って設けられた複
数の放射溝部とから構成している。In the case of this embodiment, the slit grooves 27a and 27b formed in the bearing surfaces 284°a and 28b of the bearing member 26 are
It consists of a circular groove of the book and a plurality of radial grooves provided across the circular groove.
その他の構成と作用とに就いては、スリット溝の幅や深
さも含め、前述した第三実施例の場合と同様である。The other configurations and operations, including the width and depth of the slit grooves, are the same as in the third embodiment described above.
（発明の効果）
本発明の静圧気体軸受は、以上に述べた通り構成され作
用する為、回転部材を支承する為の圧縮気体による自動
振動が発生し難く、静圧気体軸受を組み込んだ工作機械
等の運転を安定して行なえるだけでなく、実用的な気体
消費量で、十分に軸受剛性を高める事が出来る。(Effects of the Invention) Since the hydrostatic gas bearing of the present invention is constructed and operates as described above, it is difficult for automatic vibrations to occur due to the compressed gas for supporting rotating members, and it is possible to use the hydrostatic gas bearing in a workpiece incorporating the hydrostatic gas bearing. Not only can machinery be operated stably, but bearing rigidity can be sufficiently increased with a practical amount of gas consumption.
第１〜３図は本発明の第一実施例を示しており、第１図
は全体構成を示す断面図、第２図はスリット溝の形状を
示す、第１図のＡ矢視図、第３図は第２図のＢ−Ｂ断面
図、第４図は本発明の第二実施例を示す断面図、第５〜
６図は本発明の第三実施例を示しており、第５図は第６
図のＣ−Ｃ断面図、第６図は第５図のＤ−Ｄ断面図、第
７〜８図は本発明の第四実施例を示す、第５〜６図と同
様の図、第９図は従来の静圧気体軸受の１例を示す断面
図、第１０図は制御絞り弁による制御回路を示す断面図
である。
１：軸受部材、２：軸受面、３：回転軸、４ａ、４ｂ、
５ａ、５ｂ：凹部、６．第一の制御絞り弁、７：第二の
制御絞り弁、８；ハウジング、９・第一ボート、１０：
第一供給管、１１：第二ボート、１２：第二供給管、１
３：第−室、１４：第二室、１５．ダイヤフラム、１６
：第一絞り流路、１７８第二絞り流路、１８：軸受隙間
、１９ａ、１９ｂ、２０ａ、２０ｂニスリツト溝、２１
・分配溝部、２２：連結溝部、２３：回転軸、２４ フ
ランジ部、２５：回転部材、２６：軸受部材、２７ａ、
２７ｂニスリツト溝、２８ａ、２８ｂ、軸受面、２９．
制御絞り弁、３０：軸受隙間。
第
図1 to 3 show a first embodiment of the present invention, FIG. 1 is a cross-sectional view showing the overall structure, FIG. 2 is a view in the direction of arrow A in FIG. 3 is a sectional view taken along the line BB in FIG. 2, FIG. 4 is a sectional view showing the second embodiment of the present invention, and 5-
6 shows the third embodiment of the present invention, and FIG. 5 shows the sixth embodiment.
6 is a sectional view taken along line DD in FIG. 5, FIGS. 7 and 8 are views similar to FIGS. This figure is a sectional view showing an example of a conventional static pressure gas bearing, and FIG. 10 is a sectional view showing a control circuit using a control throttle valve. 1: Bearing member, 2: Bearing surface, 3: Rotating shaft, 4a, 4b,
5a, 5b: recess, 6. First control throttle valve, 7: Second control throttle valve, 8; Housing, 9/First boat, 10:
First supply pipe, 11: Second boat, 12: Second supply pipe, 1
3: Room 1, 14: Room 2, 15. diaphragm, 16
: First throttle channel, 178 Second throttle channel, 18: Bearing gap, 19a, 19b, 20a, 20b Nislit groove, 21
- Distribution groove part, 22: Connection groove part, 23: Rotating shaft, 24 Flange part, 25: Rotating member, 26: Bearing member, 27a,
27b Nislit groove, 28a, 28b, bearing surface, 29.
Control throttle valve, 30: Bearing clearance. Diagram
Claims (1)
と軸受隙間を介して対向する回転部材と、上記軸受面に
形成され、且つ供給口を通じて圧縮気体の供給源に通じ
るスリット溝とから成り、このスリット溝の深さｄは、
軸受隙間寸法ｈの３〜８倍であり、上記スリット溝の幅
ｗは、上記深さｄの１〜５倍である静圧気体軸受。(1) A fixed bearing member, a rotating member that faces a bearing surface provided on the bearing member through a bearing gap, and a slit groove formed on the bearing surface and communicating with a supply source of compressed gas through a supply port. The depth d of this slit groove is
The hydrostatic gas bearing is 3 to 8 times the bearing gap size h, and the width w of the slit groove is 1 to 5 times the depth d.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02042690A JP3089270B2 (en) | 1990-02-26 | 1990-02-26 | Hydrostatic gas bearing |
| US07/658,777 US5064297A (en) | 1990-02-26 | 1991-02-21 | Static pressure gas bearing with throttling control valve in housing |
| GB9103921A GB2241992B (en) | 1990-02-26 | 1991-02-25 | Static pressure gas bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02042690A JP3089270B2 (en) | 1990-02-26 | 1990-02-26 | Hydrostatic gas bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03249423A true JPH03249423A (en) | 1991-11-07 |
| JP3089270B2 JP3089270B2 (en) | 2000-09-18 |
Family
ID=12643036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02042690A Expired - Fee Related JP3089270B2 (en) | 1990-02-26 | 1990-02-26 | Hydrostatic gas bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3089270B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007054437A1 (en) * | 2005-11-09 | 2007-05-18 | BSH Bosch und Siemens Hausgeräte GmbH | Compressor |
| JP2010249315A (en) * | 2009-03-25 | 2010-11-04 | Canon Inc | Static pressure gas bearing |
| JP2016148455A (en) * | 2016-04-13 | 2016-08-18 | オイレス工業株式会社 | Static pressure gas bearing and linear motion guide device using the same |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015051155A (en) * | 2013-09-06 | 2015-03-19 | 株式会社アサヒ | Work bench or wagon |
| CN107061483B (en) * | 2017-06-16 | 2019-08-27 | 江苏昊鹏机械有限公司 | A kind of automobile hub bearing and monitoring method of On-line Fault monitoring |
-
1990
- 1990-02-26 JP JP02042690A patent/JP3089270B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007054437A1 (en) * | 2005-11-09 | 2007-05-18 | BSH Bosch und Siemens Hausgeräte GmbH | Compressor |
| JP2010249315A (en) * | 2009-03-25 | 2010-11-04 | Canon Inc | Static pressure gas bearing |
| JP2016148455A (en) * | 2016-04-13 | 2016-08-18 | オイレス工業株式会社 | Static pressure gas bearing and linear motion guide device using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3089270B2 (en) | 2000-09-18 |
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