JPH03243800A - Surface treatment of metallic member - Google Patents
Surface treatment of metallic memberInfo
- Publication number
- JPH03243800A JPH03243800A JP4018190A JP4018190A JPH03243800A JP H03243800 A JPH03243800 A JP H03243800A JP 4018190 A JP4018190 A JP 4018190A JP 4018190 A JP4018190 A JP 4018190A JP H03243800 A JPH03243800 A JP H03243800A
- Authority
- JP
- Japan
- Prior art keywords
- stainless steel
- pipeline member
- metallic material
- treatment
- steel piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004381 surface treatment Methods 0.000 title claims description 8
- 238000000034 method Methods 0.000 claims abstract description 15
- 238000005498 polishing Methods 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims description 22
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 19
- 239000010935 stainless steel Substances 0.000 abstract description 19
- 229910021642 ultra pure water Inorganic materials 0.000 abstract description 9
- 239000012498 ultrapure water Substances 0.000 abstract description 9
- 239000012535 impurity Substances 0.000 abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
- 239000003792 electrolyte Substances 0.000 abstract description 2
- 239000007769 metal material Substances 0.000 abstract 3
- 238000005406 washing Methods 0.000 abstract 2
- 238000012545 processing Methods 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 239000008151 electrolyte solution Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004128 high performance liquid chromatography Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004255 ion exchange chromatography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- -1 nitrate ions Chemical class 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】 ［発明の目的コ （産業上の利用分野） 本発明は、金属部材の表面処理方法に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a method for surface treatment of metal members.
（従来の技術）
従来から、クリーンな処理雰囲気を必要とする装置、例
えば半導体製造装置を構成する管材や板材等の金属部材
においては、ガスの吸着や塵埃の付着を抑制するために
、金属部材の表面を平滑に仕上るための前処理が行われ
ている。(Prior Art) Conventionally, metal members such as pipes and plates constituting equipment that requires a clean processing atmosphere, such as semiconductor manufacturing equipment, have been used to prevent gas adsorption and dust adhesion. Pretreatment is performed to make the surface smooth.
すなわち、例えば高真空雰囲気下で処理を実施するイオ
ン注入装置等や、高純度のガスを用いて成膜を行う成膜
装置等においては、金属部材の表面に吸着しているガス
が処理雰囲気中に混入する等の問題か生じる。このため
、従来からこのような金属部材には、組み立て前に表面
に電解研磨を施し、金属部材の表面を平滑に仕上る前処
理が実施されている。In other words, for example, in ion implantation equipment that performs processing in a high vacuum atmosphere, or film deposition equipment that performs film formation using high-purity gas, the gas adsorbed on the surface of the metal member may be absorbed into the processing atmosphere. Problems such as contamination may occur. For this reason, such metal members have heretofore been subjected to pretreatment in which the surface of the metal member is electrolytically polished to make the surface smooth before assembly.
（発明か解決しようとする課題）
しかしながら、本発明者等が詳査したところ、上述した
従来の金属部材の表面処理方法では、次のような問題が
あることが判明した。(Problems to be Solved by the Invention) However, upon detailed investigation by the present inventors, it was found that the conventional surface treatment method for metal members described above has the following problems.
すなわち、一般に、電解研磨を実施する際には、電解液
を用いるが、この電解液成分（例えば塩素イオン、リン
酸イオン、硝酸イオン等）が金属部材に残留しており、
この電解液成分が金属部材表面から離脱して、不純物と
して処理雰囲気中等に混入する可能性があることが判明
した。That is, in general, an electrolytic solution is used when performing electrolytic polishing, but components of this electrolytic solution (for example, chloride ions, phosphate ions, nitrate ions, etc.) remain on the metal member,
It has been found that this electrolyte component may be separated from the surface of the metal member and mixed into the processing atmosphere as an impurity.
本発明は、かかる知見に基いてなされたもので、その目
的は、金属部材の表面から生じる不純物の発生量を従来
に較べて大幅に減少させることのできる金属部材の表面
処理方法を提供しようとするものである。The present invention has been made based on this knowledge, and its purpose is to provide a surface treatment method for metal members that can significantly reduce the amount of impurities generated from the surface of the metal member compared to the conventional method. It is something to do.
［発明の構成〕
（課題を解決するための手段）
すなわち本発明は、金属部材に電解研磨処理を施し、こ
の後前記金属部材に、超音波洗浄処理を施すことを特徴
とする。[Structure of the Invention] (Means for Solving the Problems) That is, the present invention is characterized in that a metal member is subjected to electrolytic polishing treatment, and then the metal member is subjected to ultrasonic cleaning treatment.
（作 用）
本発明の金属部材の表面処理方法では、金属部材に電解
研磨処理を施し、この後、超音波洗浄処理を施す。(Function) In the method for surface treatment of a metal member of the present invention, the metal member is subjected to electrolytic polishing treatment, and then subjected to ultrasonic cleaning treatment.
したがって、電解研磨に用いた電解液成分が金属部材に
残留することを抑制することができ、金属部材の表面か
ら生しる不純物の発生量を従来に較べて大幅に減少させ
ることができる。Therefore, it is possible to suppress the electrolytic solution components used in electrolytic polishing from remaining on the metal member, and the amount of impurities generated from the surface of the metal member can be significantly reduced compared to the conventional method.
（実施例）
以下、本発明の金属部材の表面処理方法を、半導体製造
装置等に用いるステンレス製配管部材の前処理に適用し
た一実施例を図面を参照して説明する。(Example) Hereinafter, an example in which the method for surface treatment of metal members of the present invention is applied to pretreatment of stainless steel piping members used in semiconductor manufacturing equipment and the like will be described with reference to the drawings.
この実施例では、ステンレス製配管部材に周知の方法に
より電解研磨を施した後、第１図に示すように、ステン
レス製配管部材１を、超音波洗浄槽２内に設けられた例
えば石英ガラスあるいはテフロン等から構成された超純
水槽３内の超純水４に浸漬し内部に超純水を流量例えば
１ｍ ｉ ／ ｒＡｉｎで流通しながら、超音波（３［
１ＫＨｚ ）を与え約１時間洗浄を行った。In this embodiment, after electrolytically polishing a stainless steel piping member 1 by a well-known method, the stainless steel piping member 1 is placed in an ultrasonic cleaning tank 2, such as a quartz glass or It is immersed in ultrapure water 4 in an ultrapure water tank 3 made of Teflon, etc., and ultrasonic waves (3 [
1 KHz) for about 1 hour.
この後、ステンレス製配管部材１の内部に不活性ガス例
えば窒素ガスを流量例えば５Ｊ２／ｌｌ１ｉｎで流通さ
せながら、ステンレス製配管部材１の外部に設けた加熱
機構例えばテープヒータによりステンレス製配管部材１
を例えば８０〜１００度に加熱し、ベーキングおよび乾
燥を行った。Thereafter, while an inert gas such as nitrogen gas is flowing inside the stainless steel piping member 1 at a flow rate of, for example, 5J2/11 inch, the stainless steel piping member 1 is heated by a heating mechanism such as a tape heater provided outside the stainless steel piping member 1.
was heated to, for example, 80 to 100 degrees for baking and drying.
次に、このようにして前処理を実施したこの実施例によ
るステンレス製配管部材内壁の付着物と、従来方法によ
り電界研磨のみを実施したステンレス製配管部材内壁の
付着物とを比較した結果を第１表に示す。Next, the results of comparing the deposits on the inner wall of the stainless steel piping member according to this example, which was pretreated in this way, and the deposits on the inner wall of the stainless steel piping member, which was subjected only to electric field polishing using the conventional method, are as follows. It is shown in Table 1.
なお、このステンレス製配管部材内壁の付着物の量の測
定は、次のようにして行った。The amount of deposits on the inner wall of the stainless steel piping member was measured as follows.
すなわち、第２図に示すように、処理後のステンレス製
配管部材１内に超純水６ｍｎを注入し、両端をスウエー
ジにて封した状態で、第１図と同様な超音波法＃Ｉ’！
２内に設けられた超純水槽３内に浸漬し、超音波（３６
ＫＨｚ ）を約１時間与えた。That is, as shown in FIG. 2, 6 mL of ultrapure water is injected into the stainless steel piping member 1 after treatment, and with both ends sealed with a swage, the same ultrasonic method #I' as shown in FIG. !
It is immersed in an ultrapure water tank 3 provided in
KHz) was applied for about 1 hour.
この後、ステンレス製配管部材１内の超純水を取り出し
、イオンクロマトグラフィーを用いた高速液体クロマト
グラフィー装置により分析、定量を行った。Thereafter, the ultrapure water in the stainless steel piping member 1 was taken out and analyzed and quantitatively determined using a high performance liquid chromatography device using ion chromatography.
（以下余白）
上記第１表に示されるように、この実施例によれば、ス
テンレス製配管部材内壁の付着物、特にＰＯ４３−の量
を、従来方法に較べて大幅に減少させることかでき−る
。(Left below) As shown in Table 1 above, according to this example, the amount of deposits on the inner walls of stainless steel piping members, especially the amount of PO43-, can be significantly reduced compared to the conventional method. Ru.
したかって、この実施例方法により前処理を行ったステ
ンレス製配管部材１を、例えばイオン注入装置等、高真
空雰囲気とされる装置に組み込んでも、高真空雰囲気に
さらされることによるアウトガスの発生を従来に較へて
大幅に減少させることかでき、処理雰囲気中に混入する
不純物の量を従来に較へて大幅に低点することかできる
。このため、所望の処理雰囲気で、所望の処理を実施す
ることか可能となる。Therefore, even if the stainless steel piping member 1 that has been pretreated by the method of this embodiment is installed in a device that operates in a high vacuum atmosphere, such as an ion implantation device, the generation of outgas due to exposure to the high vacuum atmosphere will be prevented. The amount of impurities mixed into the processing atmosphere can be significantly reduced compared to the conventional method. Therefore, it becomes possible to perform desired processing in a desired processing atmosphere.
なお、上記実施例では、電解研磨処理の後に、超音波洗
浄処理とベーキンク処理を実施した例について説明した
が、電解研磨処理の後に、超音波洗浄処理およびベーキ
ンク処理のどちらか一方の処理のみを行ってもある程度
の効果を得ることができる。ここで、ベーキンク処理の
効果は、例えば被処理体を高温に上昇させると、この被
処理体に付着している例えばＰ等が上記被処理体に吸着
している力より強いエネルギーが加えられるので、被処
理体から離れる。また、上記実施例では、本発明方法を
ステンレス製配管部材の前処理に適用した例について説
明したが、その他の材質および板材等にも同様にして適
用することかできることはもちろんである。In addition, in the above example, an example was explained in which ultrasonic cleaning treatment and baking treatment were performed after electrolytic polishing treatment, but it is also possible to perform only one of ultrasonic cleaning treatment and baking treatment after electrolytic polishing treatment. Even if you do, you can get some results. Here, the effect of baking treatment is that, for example, when the object to be processed is raised to a high temperature, energy that is stronger than the force that is applied to the object, such as P, adhering to the object, is applied. , away from the object to be processed. Further, in the above embodiments, an example in which the method of the present invention is applied to the pretreatment of stainless steel piping members has been described, but it goes without saying that the method can be similarly applied to other materials, plates, etc.
［発明の効果］
以上説明したように、本発明の金属部材の表面処理方法
によれば、金属部材の表面から生じる不純物の発生量を
従来に較べて大幅に減少させることができる。[Effects of the Invention] As explained above, according to the method for surface treatment of a metal member of the present invention, the amount of impurities generated from the surface of the metal member can be significantly reduced compared to the conventional method.
第１図は本発明方法を半導体製造装置等に用いるステン
レス製配管部材の前処理に適用した一実施例方法を説明
するための図、第２図はステンレス製配管部材内壁に付
着した不純物量の測定方法を説明するための図である。
１・・・・・ステンレス製配管部材、２・・・・・・超
音波洗浄槽、３・・・・・超純水槽、４・・・・・・超
純水。Figure 1 is a diagram for explaining an example method in which the method of the present invention is applied to the pretreatment of stainless steel piping members used in semiconductor manufacturing equipment, etc., and Figure 2 is a diagram for explaining the amount of impurities attached to the inner wall of the stainless steel piping members. FIG. 3 is a diagram for explaining a measurement method. 1... Stainless steel piping members, 2... Ultrasonic cleaning tank, 3... Ultra pure water tank, 4... Ultra pure water.
Claims (1)
部材に、超音波洗浄処理を施すことを特徴とする金属部
材の表面処理方法。(1) A method for surface treatment of a metal member, characterized in that the metal member is subjected to electrolytic polishing treatment, and then the metal member is subjected to ultrasonic cleaning treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4018190A JPH03243800A (en) | 1990-02-20 | 1990-02-20 | Surface treatment of metallic member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4018190A JPH03243800A (en) | 1990-02-20 | 1990-02-20 | Surface treatment of metallic member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03243800A true JPH03243800A (en) | 1991-10-30 |
Family
ID=12573614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4018190A Pending JPH03243800A (en) | 1990-02-20 | 1990-02-20 | Surface treatment of metallic member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03243800A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6425954B1 (en) * | 1999-01-04 | 2002-07-30 | Kabushiki Kaisha Sankyo Seiki Seisakusho | Hole processing apparatus and method thereof and dynamic pressure bearings cleaning method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58127000A (en) * | 1982-01-25 | 1983-07-28 | Toshiba Corp | Electrolytic polishing decontamination device |
| JPS6426000A (en) * | 1987-07-20 | 1989-01-27 | Kobe Steel Ltd | Apparatus for electropolishing inside of long-sized tube of small diameter |
-
1990
- 1990-02-20 JP JP4018190A patent/JPH03243800A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58127000A (en) * | 1982-01-25 | 1983-07-28 | Toshiba Corp | Electrolytic polishing decontamination device |
| JPS6426000A (en) * | 1987-07-20 | 1989-01-27 | Kobe Steel Ltd | Apparatus for electropolishing inside of long-sized tube of small diameter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6425954B1 (en) * | 1999-01-04 | 2002-07-30 | Kabushiki Kaisha Sankyo Seiki Seisakusho | Hole processing apparatus and method thereof and dynamic pressure bearings cleaning method |
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