JPH0324248U - - Google Patents
Info
- Publication number
- JPH0324248U JPH0324248U JP8528789U JP8528789U JPH0324248U JP H0324248 U JPH0324248 U JP H0324248U JP 8528789 U JP8528789 U JP 8528789U JP 8528789 U JP8528789 U JP 8528789U JP H0324248 U JPH0324248 U JP H0324248U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- aperture
- particle beam
- passage
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8528789U JPH0324248U (enExample) | 1989-07-20 | 1989-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8528789U JPH0324248U (enExample) | 1989-07-20 | 1989-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0324248U true JPH0324248U (enExample) | 1991-03-13 |
Family
ID=31634339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8528789U Pending JPH0324248U (enExample) | 1989-07-20 | 1989-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0324248U (enExample) |
-
1989
- 1989-07-20 JP JP8528789U patent/JPH0324248U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0324248U (enExample) | ||
| JPH0392098U (enExample) | ||
| JPS6314358U (enExample) | ||
| JPS6071064U (ja) | 分析電子顕微鏡 | |
| JPH0453549U (enExample) | ||
| JPH0289400U (enExample) | ||
| JPH0323374U (enExample) | ||
| JPH0348854U (enExample) | ||
| JPS5945849U (ja) | イオン注入装置 | |
| JPS62162660U (enExample) | ||
| JPH031172U (enExample) | ||
| JPS5863515U (ja) | 微小孔のコリメ−タを有するｘ線膜厚計 | |
| JPS61194951U (enExample) | ||
| JPH02133859U (enExample) | ||
| JPS5961462U (ja) | 荷電粒子線のエネルギ−分析装置 | |
| JPS60146919U (ja) | 磁気記録媒体の製造装置 | |
| JPS63147816U (enExample) | ||
| JPH0459049U (enExample) | ||
| JPS6095676U (ja) | 硬貨識別装置 | |
| JPH01173875U (enExample) | ||
| JPS58184658U (ja) | 自動超音波探傷装置 | |
| JPS5991360U (ja) | 反応性蒸着膜形成装置 | |
| JPS63121438U (enExample) | ||
| JPH0176034U (enExample) | ||
| JPS58130707U (ja) | 合成樹脂シ−トの粉砕装置 |