JPH0323651Y2 - - Google Patents
Info
- Publication number
- JPH0323651Y2 JPH0323651Y2 JP11843886U JP11843886U JPH0323651Y2 JP H0323651 Y2 JPH0323651 Y2 JP H0323651Y2 JP 11843886 U JP11843886 U JP 11843886U JP 11843886 U JP11843886 U JP 11843886U JP H0323651 Y2 JPH0323651 Y2 JP H0323651Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample holder
- lead wire
- semiconductor
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 17
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 15
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000001073 sample cooling Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 4
- 239000010979 ruby Substances 0.000 claims description 4
- 229910001750 ruby Inorganic materials 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 230000007547 defect Effects 0.000 description 5
- 239000010949 copper Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11843886U JPH0323651Y2 (ko) | 1986-08-01 | 1986-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11843886U JPH0323651Y2 (ko) | 1986-08-01 | 1986-08-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6325456U JPS6325456U (ko) | 1988-02-19 |
| JPH0323651Y2 true JPH0323651Y2 (ko) | 1991-05-23 |
Family
ID=31004889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11843886U Expired JPH0323651Y2 (ko) | 1986-08-01 | 1986-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323651Y2 (ko) |
-
1986
- 1986-08-01 JP JP11843886U patent/JPH0323651Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6325456U (ko) | 1988-02-19 |
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