JPH03233295A - Hot isostatic pressing method - Google Patents

Abstract

PURPOSE:To shorten a cooling time and prevent an overheating of a high- pressure vessel, by calculating a temperature deviation of a pressing medium gas between an upper part and a lower part of a gap between the high-pressure vessel and a heat-insulating layer, and regulating the circulation quantity of the gas so as to obtain a preset deviation value. CONSTITUTION:Cooling rate is controlled by measuring the temperature of a pressing medium gas at an upper part and a lower part of a gap 02 between a high-pressure vessel 01 and a heat-insulating layer 03, so that a more accurate and stable control can be performed as compared to the conventional control by temperature measurement in a furnace chamber 05. In addition, the temperature measurement in the vicinity of the vessel 01 enables more secure prevention of overheating of the vessel 01. Further, because a temperature deviation between the upper part and the lower part of the gap 02 is calculated and the circulation quantity of the medium gas is regulated so as to obtain a preset deviation value, damages due to overheating of the high-pressure vessel can be prevented more securely than in the case of manual control by the operator, and the time necessary for cooling a material 06 under treatment can be shortened as compared to the case of a constant circulation flow rate control.

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a hot isostatic pressing method used for producing high-density sintered bodies of various powders and for diffusion bonding different types of plate materials. , More specifically, hot isostatic pressing can shorten the cooling time and reliably prevent excessive temperature rise of the high-pressure container in the cooling process of the object to be processed after hot isostatic pressing. Regarding the method.

[Prior Art] The apparatus used in the hot isostatic pressing method that cools the object by circulating high-temperature pressure medium gas in the furnace chamber after the hot isostatic pressing process is as follows. For example, there is a device shown in FIG. FIG. 12 is a front sectional view of a hot isostatic pressing device used in this method.

In the figure, (71) is a cylindrical pressure vessel,
An upper lid (78) is fitted into the upper opening of the pressure vessel (71), and a lower lid (79) is fitted into the lower opening of the pressure vessel (71). A high pressure vessel (70) is formed.

Inside the high-pressure container (70), there is an inverted cup-shaped heat insulating layer (73) with a gap (72) between the high-pressure container (70) and the high-pressure container (70).
) are provided. In addition, insulation 1'i! (73) has an inverted top-shaped inner casing (73c) made of metal, and an inverted top-shaped outer casing (73c) also made of metal.
a) are polymerized with a gap between them, and a heat insulating material (73b) such as ceramic fiber is interposed in the gap, and an opening vertically penetrates the heat insulating layer (73) at the top. A section (73d) is provided. Furthermore, a heater (74) is arranged inside this heat insulating layer (73), and the space inside the heat insulating layer (73) is connected to the furnace chamber (75).
).

Further, a cylinder (82) is provided on the upper surface of the upper lid (78), and a piston (83) of the cylinder (82) is provided.
) has its rond part penetrating the upper lid (78) and reaching the gap (72), and its tip part engages with the opening (73d) of the heat insulating layer (73). The opening (73d) is closed and opened. On the other hand, the lower lid (79
) has a structure in which a convex plug-shaped lower upper cover (79a) is fitted into a ring-shaped lower upper cover (79b) from below, and the two are separable.

Further, on the upper surface of the lower upper lid (79b), there is an object to be processed (76).
A mounting table (77) for placing and holding the
) is provided with a fan (81).

Next, to explain the operation of the apparatus shown in FIG. 12, the object to be processed (76) is placed in the furnace chamber (75), and the piston (
83) downward to open the opening (7
3d), high-pressure pressure medium gas is introduced into the furnace chamber (75), and the pressure medium gas is heated by the heater (74), and the high-temperature and high-pressure pressure medium gas is applied to the object to be processed (76). Hot isostatic pressure treatment is performed by applying

Next, after the hot isostatic pressure treatment, the piston (83)
is operated upward to open the opening (73d), and at the same time, the fan (81) is rotated to guide high temperature pressure medium gas from the furnace chamber (75) to the gap (72), and further to the high pressure vessel (7
0) It flows down along the inner surface and circulates and convects from the space below the heat insulating layer (73) into the furnace chamber (75) again.

Due to this convection, the high-temperature pressure medium gas is cooled by exchanging heat with the pressure vessel (71) and the upper lid (78). Note that the arrows in FIG. 12 indicate the direction of the circulating convection of the pressure medium gas.

In the past, the pressure medium gas was always circulated at a constant flow rate without adjusting the circulation flow rate, or the operator monitored the temperature inside the furnace and manually adjusted the circulation flow rate.

[Problem to be solved by the invention]

When the circulating flow rate of the pressurized gas for controlling the cooling rate is not adjusted and is circulated at a constant flow rate, the following problems occur.

That is, immediately after the start of cooling, extremely high temperature pressure medium gas flows into the gap (72) between the heat insulating layer (73) and the upper cover (78).
), so unless you keep the circulation flow rate of the pressure medium gas small, the upper! (713) or pressure vessel (7
1) may be damaged due to excessive temperature rise.

Therefore, at the beginning of cooling, it is necessary to keep the circulation flow rate of the pressure medium gas small, but if the circulation flow rate of the pressure medium gas is to be kept constant, even after the temperature of the pressure medium gas has decreased, it is necessary to keep the circulation flow rate small. There was a problem in that the constant circulation was required at a small circulation flow rate, which increased the time required for cooling. This not only reduces processing efficiency, but also
The cooling process also occupies an expensive hot isostatic pressurizing device, which poses a problem in that the operating rate of the device decreases.

On the other hand, when the temperature inside the furnace is monitored and the operator manually adjusts the circulation flow rate of the pressurized gas, the following problems occur.

In other words, in general, after hot isostatic pressure treatment and after the pressure medium gas starts circulating in the container, low temperature gas and high temperature gas coexist due to the circulating convection, which causes the temperature distribution in the furnace chamber to change. becomes unstable and uneven. For these reasons, the temperature of the pressure gas in the furnace chamber varies depending on the measurement location and the convection state of the pressure gas, so even if the temperature in the furnace chamber is measured, that temperature cannot be used as the representative temperature inside the furnace chamber. This is inaccurate, and it is difficult to derive the amount of heat released to the outside of the container over a certain period of time based on the precise temperature drop rate.

Controlling the cooling rate based on such an inaccurate representative temperature within the furnace chamber is itself inaccurate and unstable.

Furthermore, it is not only difficult to control the circulation flow rate of pressurized gas based on the inaccurate and unstable temperature, but also there is a risk of operational errors due to carelessness, etc. There is a risk of damage. In addition, in order to prevent damage to the high-pressure vessel, an excessive safety factor must be taken for its control, and as a result, the circulation flow rate of the pressure medium gas is relatively small, and even in this case, the amount required for cooling is still low. The problem was that it took a long time.

The present invention has been made in view of the problems of the prior art, and can reliably prevent damage to the top cover or pressure vessel due to excessive temperature rise, reduce the time required for cooling, improve processing efficiency, and An object of the present invention is to provide a hot isostatic pressing method that can improve the operating rate of an isostatic pressing device.

(Means for Solving the Problems) The present invention provides a high-pressure container (01) containing eight high-pressure containers (01).
A heat insulating layer (03) is disposed with a gap 1 (1) 2) between the heat insulating layer (03) and a heater (0
The object to be processed (06) is placed in the furnace chamber (05) in which the
is arranged, high-pressure pressure medium gas is introduced into the high-pressure container (01), and the high-temperature and high-pressure pressure medium gas is applied to the object to be processed (06) by heating it with the heater (04). After hot isostatic pressurization treatment, the high-temperature pressure medium gas in the furnace chamber (05) is guided from the upper part of the heat insulating layer (03) into the gap (02), and the high-pressure vessel (01 ) is caused to flow down the gap (02) and further guided into the furnace chamber (05) from the lower part of the heat insulating layer (03) to circulate the pressurized gas and cool the object to be processed (06). In order to achieve the above-mentioned objective in the hot isostatic pressing method for cooling the water, the following technical measures are taken.

That is, the invention according to claim 1 provides that the gap (0
2) The temperature of the pressure medium gas is measured at the upper and lower parts, and the deviation between the measured upper and lower temperatures is calculated as a first deviation, and the first deviation is set as a constant in advance. The method is characterized in that the circulation flow rate of the pressure medium gas is adjusted so as to reach a set deviation value.

Moreover, the invention according to claim 2 measures the temperature of the pressure medium gas in the furnace chamber (05) instead of using the deviation setting value set as a constant in advance, and measures the temperature in the cough furnace chamber (05). The deviation between the temperature and a constant value preset as the temperature of the high pressure vessel (01) is calculated as a second deviation, and the circulating flow rate of the pressure medium gas is adjusted so that the first deviation is proportional to the second deviation. It is characterized by

Further, the invention according to claim 3 provides that instead of adjusting the circulation it of the pressurized gas so that the first deviation is proportional to the second deviation, the first deviation is adjusted to approximately the 1/4th power of the second deviation. It is characterized in that the circulation flow rate of the pressure medium gas is set at a node tA so that

Moreover, the invention according to claim 4 uses the temperature measured at the upper part of the gap (02) instead of using the temperature measured in the furnace chamber (05) to calculate not only the first deviation but also the second deviation. It is characterized by being used for calculations as well.

Further, the invention according to claim 5 provides a high-pressure container (0
1) Instead of using a constant value set as the temperature,
It is characterized in that the temperature of the high-pressure container (01) is actually measured and the measured temperature is used.

Further, the invention according to claim 6 is such that the rapid cooling start temperature is set in advance to a temperature lower than the temperature at which the hot isostatic pressure treatment is performed, and the measured temperature in the furnace chamber (05) or the gap (02) is set in advance. During the period from the end of the hot isostatic pressurization process until the temperature of the upper part reaches the quenching start temperature, cooling is performed by adjusting and controlling the circulating flow rate of the pressure medium gas,
In this case, after the cooling start temperature is reached, the adjustment control of the circulation flow rate of the pressure medium gas is stopped, and the object to be treated (
06) is characterized by rapid cooling.

Further, the invention according to claim 7 is directed to the object to be treated (06).
It is characterized in that rapid cooling is performed by maximizing the circulation flow rate of pressurized gas.

Moreover, the invention according to claim 8 sets in advance a temperature lower than the temperature at which the hot isostatic pressure treatment is performed as the container extraction temperature, and the measured temperature in the furnace chamber (05) or the gap (02 ) during the period from the end of the hot isostatic pressure treatment until the temperature at the top of the container reaches the temperature at which it is taken out of the container,
Cooling is performed by adjusting and controlling the circulating flow rate of the pressure medium gas, and after reaching the temperature at which the object is taken out of the container, the object to be processed (06) is taken out of the high-pressure container (01).

Finally, the invention according to claim 9 sets a constant value in advance as the overheating detection temperature, compares the set overheating detection temperature and a first deviation, and the first deviation is the overheating detection temperature. It is characterized in that the circulation of the pressure medium gas is stopped when the detected temperature is exceeded.

[Effect]

In the hot isostatic pressing method according to the present invention, a high pressure container (01
) and the heat insulating layer (03) to control the cooling rate by measuring the temperature of the pressure medium gas at the upper and lower parts of the open gap (02) between the furnace chamber and the heat insulating layer (03). (05
), which is inaccurate and unstable if the cooling rate is controlled by the temperature of the pressurized gas within the chamber. Furthermore, since the temperature is measured near the high pressure container (Ol), excessive temperature rise in the high pressure container (01) can be more reliably prevented.

Furthermore, the deviation between the measured upper temperature and lower temperature is calculated as a first deviation, and the circulation flow rate of the pressure medium gas is adjusted so that the first deviation becomes a deviation setting value set as a constant in advance. Therefore, damage to the high-pressure container due to excessive temperature rise can be reliably prevented compared to the case where the operator controls it manually, and the cooling of the object to be processed (06) is also improved compared to the case where the circulation flow rate is controlled constant. The time required for this can be reduced.

In the invention according to claim 2, instead of using a deviation setting value set in advance as a constant, the deviation between the temperature measured in the furnace chamber (05) and a constant value set in advance as the temperature of the high pressure vessel (01) is used. Since the second deviation is calculated and the second deviation is used, the time required for cooling the object to be processed (06) can be shortened and the cooling rate can be made closer to a constant value.

In the invention according to claim 3, the deviation between the temperature measured in the furnace chamber (o5) and a constant value preset as the temperature of the high pressure vessel (01) is calculated as a second deviation, and approximately 1 of the second deviation is calculated. /
Since the circulation flow rate of the pressure medium gas is adjusted and controlled so that the above-mentioned first deviation is proportional to the fourth power, the time required for cooling the object to be processed (06) can be further reduced. Not only can the cooling rate be shortened, but also the cooling rate can be made closer to a constant value.

In the invention described in claim 4, since the temperature measured at the upper part of the gap (02) is also used for calculating the second deviation, the temperature in the furnace chamber (
05) can be omitted, resulting in a simpler and cheaper device configuration than the invention described in claim 2 or 3.

In the invention according to claim 5, instead of using a constant value set in advance as the temperature of the high pressure vessel (01),
Since the temperature of 01) is measured and the measured temperature is used,
More precise control can be performed than the invention according to claim 2 or 3.

In the invention according to claims 6 and 7, a temperature lower than the temperature at which the hot isostatic pressure treatment is performed is set in advance as the cooling start temperature, and after the quenching start temperature is reached, the pressure medium gas is At the same time as stopping the adjustment control of the circulating 2 it amount,
Since the object to be processed (06) is rapidly cooled, the object to be processed (06
) can further reduce the time required for cooling.

In the invention according to claim 8, a temperature lower than the temperature at which the hot isostatic pressure treatment is performed is set in advance as the temperature for taking out the container, and after reaching the temperature for taking out the object (
06) is taken out of the high-pressure container (01), the time that the object to be processed (06) occupies the high-pressure container (01) can be shortened, which is particularly effective in increasing the operating rate of the hot isostatic pressurizing device. It is.

In the invention described in claim 9, a constant value is set in advance as the overheating detection temperature, and when the first deviation exceeds the overheating detection temperature, the circulation of the pressure medium gas is stopped. Excessive temperature rise can be more effectively prevented.

[Example] The invention according to claim 1 will be explained using a plan view. FIG. 1 is a block diagram showing a first embodiment of the invention claimed in claim 1, FIG. 2 is a block diagram showing a second embodiment of the invention claimed in claim 1, and FIG. 7 is a block diagram showing a second embodiment of the invention claimed in claim 1. FIG. 5 is a flowchart showing the control method of
FIG. 6 is a front sectional view showing the embodiment, and FIG. 6 is a sectional view taken along the line A--A in FIG.

In FIG. 1, (01) is a high-pressure container, and the high-pressure container (01) is composed of a pressure container and upper and lower lids, as shown in FIG. 12, for example. (03) is an inverted kelp-shaped heat insulating layer having an opening (03a) at its top, and is disposed with a gap (02) between it and the high pressure container (01). Further, a heater (04) is arranged inside the heat insulating layer (03) to form a furnace chamber (05). The opening (03a) at the top of the heat insulating layer (03) has a valve device (08) that closes and opens the opening (03a) from above.
are arranged. Further, a mounting table (07) for mounting and holding the processing object (06) is arranged at the lower part of the furnace chamber (05), and a motor (09) is placed below the mounting table (07). ) is arranged.

A gap upper temperature measuring means (11) composed of a thermocouple or the like is arranged above the gap VXC02), and a temperature signal measured by the gap upper temperature measuring means (11) is arranged.

is a gap upper temperature detection means (12
), which is converted into a linear processable electric signal T by the gap upper temperature detection means (12), and outputted to the first deviation calculation means (15). Also, at the lower part of the gap (02), a lower gap temperature measuring means (13) consisting of a thermocouple or the like is provided.
), and the temperature signal t measured by the gap lower temperature measuring means (13) is output to the gap lower temperature detecting means (14) comprising an operational amplifier, etc. Electric signal T4 that can be linearly processed by (14)
and output to the first deviation calculation means (15).

The first deviation calculating means (15) calculates the deviation between the temperature signal T at the upper part of the gap (02) and the temperature signal T4 at the lower part as a first deviation according to the following formula (1), and calculates the first deviation signal ε1. Output to comparison means (17).

ε, :Tu-Td ------Q) Comparison means (17
) compares and calculates the first deviation signal ε1 and the deviation set value C1 preset by the deviation set value setting means (16) constituted by a volume etc. according to the following formula (2), and calculates the result of the calculation. α is output to fan rotation speed setting means (18) comprising an operational amplifier or the like.

α-CI-ε, ---12) The fan rotation speed setting means (18) multiplies the above po by a predetermined gain g, and adds it to the reference rotation speed β, according to the following equation (3), The result a is output to fan rotation speed control means (19) comprising a servo amplifier or the like.

a-β+αX g + (3) The fan rotation speed control means (I9) controls the rotation speed of the fan (10) based on the output of the fan rotation speed setting means (18).

Note that the arrows in FIG. 1 indicate the direction of circulating convection of the pressure medium gas in the cooling process after the hot isostatic pressurization process.

Here, the gap upper temperature measuring means (11) and the gap lower temperature measuring means (13) may be placed substantially above and below the gap (02), but the heat exchanger of the high pressure vessel In order to cover the entire range of the part and improve the cleanliness of control, the gap lower temperature measuring means (11) is preferably located near the opening (03a) of the heat insulating layer (03). )
is preferably near the lower edge of the inverted kelp-shaped heat insulating layer (03).

To explain the operation of the apparatus shown in FIG. 1 using the flowchart in FIG. 7, first, the deviation set value C1 is set by the deviation set value setting means (I6) (STεpH: hereinafter referred to as
Abbreviated as SLL].

Next, after placing the object to be processed (06) in the furnace chamber (05), the valve device (08) is operated downward to remove the heat insulating layer (03).
The opening (03a) of the heater (04) is closed, and high-pressure pressure medium gas is introduced into the furnace chamber (05).
), and a hot isostatic pressurization process is performed by applying high temperature and high pressure pressure medium gas to the object to be processed (06). After the hot isostatic pressurization process is completed, the valve device (08) is operated upward to open the opening (03a) of the heat insulating layer (03), and the fan (10) is rotated to remove the high-temperature pressure medium. gas into the furnace chamber (05
) into the gap (02), and then flowed down along the inner surface of the high-pressure vessel (01), and circulated and convected again from the space below the heat insulating layer (03) into the furnace chamber (05).

By this circulating convection, the following 5TEP12 to 5TEP16 (hereinafter abbreviated as S12 to 516) are controlled in cooling the object to be processed (06).

That is, the temperature of the pressure medium gas at the top of the gap (02) is measured by the gap top temperature measuring means (11), and the temperature T of the pressure medium gas at the top of the gap (02) is measured by the gap top temperature detection means (12). , C312).

On the other hand, the temperature of the pressure medium gas at the bottom of the gap (02) is measured by the gap bottom temperature measuring means (13), and the temperature Td of the pressure medium gas at the bottom of the gap (02) is measured by the gap bottom temperature detection means (14). (S13).

The first deviation calculation means (1
5), the calculation is performed according to the above equation (1) (314).

This first deviation signal ε1 and deviation set value setting means (16)
The comparison means (17) compares and calculates the deviation set value C1 set in step (515) according to (2) 2 above.

Based on the result α of this comparison calculation, the fan rotation speed control means (19) controls the rotation speed of the fan (10) at the rotation speed set by the fan rotation speed setting means (18) (S16).

To explain the above control qualitatively, when the temperature of the pressure medium gas is high immediately after the start of cooling, the temperature difference between the upper and lower parts of the gap becomes large, and the first deviation No. 13 ε becomes higher than the deviation set value C1. As a result, α becomes negative as a result of the comparison operation. Therefore, the rotational speed of the fan decreases, and the circulating flow rate of the pressurized gas decreases. On the other hand, when a considerable amount of time has passed since the start of cooling and the temperature of the pressure medium gas has become low, the temperature difference between the upper and lower parts of the gap is small, so the first deviation signal ε is set to the deviation set value. C1, and α becomes positive as a result of the comparison calculation.Therefore, the output of the comparison means (17) increases, the rotational speed of the fan increases, and the circulating flow rate of the pressurized gas increases.

Next, a second embodiment of the invention set forth in claim 1 will be described using FIG. 2. FIG. 2 is a block diagram showing a second embodiment of the invention according to claim 1. In this figure, the same numbers as those in FIG. 1 are the same, so the explanation will be omitted. Valve device (2
5) is composed of a cylinder (21) and a piston (24), and a heat insulating layer (03) is provided at the tip of the piston (24).
) is provided with a valve body (20) that closes and opens the opening (03a). On the other hand, this piston (24) is equipped with a piston position detector (22) that detects its vertical position.
) is provided, and the piston position detection) S(22)
The position signal of the piston (24) detected by the piston (24) is used as a feed hack signal, and the vertical position of the piston (24) is controlled by the piston position control means (2) consisting of a servo mechanism.
3) to adjust the opening degree of the opening (03a). In the second embodiment, instead of controlling the rotational speed of the fan, the circulating flow rate of the pressurized gas is controlled by adjusting the opening degree of the opening (03a) of the heat insulating layer (03).

Furthermore, in the embodiments shown in FIGS. 1 and 2, the reference rotational speed β is used as an offset, and a value obtained by comparing the first deviation with the reference value multiplied by a predetermined gain is added or subtracted from this. However, it goes without saying that other control methods may be used as long as feedback control is performed to keep the first deviation constant. That is, control may be performed by subtracting the first deviation from a certain offset.

Next, a third embodiment of the invention according to claim 1 will be described with reference to the drawings. FIG. 5 is a front sectional view showing a third embodiment of the invention as claimed in claim 1, and FIG. 6 is a sectional view taken along the line AA in FIG.

In these figures, (41) is a high-pressure container, and inside the high-pressure container (41) is an inverted kelp-shaped heat insulating layer (43).
) is arranged with a gap (42) between it and the high pressure vessel (41). Also, insulation! At the top of (43),
A heat insulating layer top plate (43b) having the same shape as the upper bottom plate of the heat insulating layer (43) is mounted.
At the top of b), a heat insulating layer top plate (43d) is held by a plurality of supports with a gap (43c).

Further, the heat insulating layer (43) and the heat insulating layer top plate (43b) are provided with an opening (43a) that vertically passes through them. Further, the lower end of the heat insulating layer (43) connects the space between the high pressure vessel (41) and the heat insulating layer (43) over the entire surface, and the gap (42) is connected to other parts of the high pressure vessel (41). There is a partition board (4th) dividing the area.
The partition plate (48) is provided with a plurality of gas holes (50) that communicate the gap (42) with the lower space inside the high-pressure container, and a gas hole (50) is provided at the bottom of each of the gas holes (50). teeth,
A piston (49b) that closes and opens the gas hole (50)
and a cylinder (4) that operates the piston (49b).
9a) is installed.

Furthermore, a heater (44) is disposed inside the heat insulating layer (43), and the space inside the inverted cup-shaped heat insulating layer (43) is defined as a furnace chamber (45). At the top of the mounting table (47) installed! Object to be processed (46)
is subjected to hot isostatic pressure treatment. Note that the dotted arrows in FIG. 5 indicate the direction of circulating convection of the pressurized gas during cooling.

In this third embodiment, the circulation flow rate of the pressurized gas is adjusted and controlled by adjusting the opening degree of the piston (49b) or by adjusting the number of pistons (49b) that open and close.

In the first embodiment, a fan was used to control the circulation flow rate of the pressurized gas, and in the second and third embodiments, a piston was used, but it goes without saying that this control is not limited to these. . For example, a slit or the like may be used.

Next, the invention according to claim 2 will be explained using the drawings. FIG. 3 is a block diagram showing an embodiment of the invention as claimed in claim 2, and FIG. 8 is a flowchart showing a control method of the invention as claimed in claim 2. Note that in FIG. 3, the same numbers as those in FIG. 1 are the same, so a description thereof will be omitted.

In FIG. 3, reference numeral (31) denotes a temperature measuring means in the furnace chamber composed of a thermocouple, etc.;
1) Temperature signal inside the furnace chamber (05) measured by 1. is outputted to the furnace chamber temperature detection means (32) composed of an amplifier, etc., which converts it into a linear processable electric signal T, and then outputs it to the second deviation calculation means (3).
4) is output. The second deviation calculating means (34) is a high pressure vessel temperature setting means (33) consisting of a temperature signal T in the furnace chamber (05), a volume, etc.
The deviation from the setting signal C2 set as the temperature is calculated as a second deviation according to the following equation (4), and the second deviation signal ε2 is outputted to the comparison means (35).

εz = T t c z −−−−−(4)
The comparison means (35) compares the second deviation signal ε2 and the first deviation signal ε1 calculated by the first deviation calculation means (15).
A comparison calculation is performed according to the following equation (5), and the calculation result α° is outputted to the fan rotation speed control means (19) composed of a servo amplifier or the like via the fan rotation speed setting means (36), and the fan rotation speed is The rotation speed control means (19) sets the rotation speed of the fan (10) to the fan rotation speed setting means (36).
control based on the output of

α −ε2−ε, −−−−−−(5) The operation of the apparatus shown in FIG. 3 will be explained using the flowchart of FIG. 8. In the figure, 321 to S24 are the same as SL1 to S14 in FIG. 7, so the explanation will be omitted.

After the completion of S24, the temperature inside the furnace is measured by the temperature measuring means (3 steps).
The temperature of the pressure medium gas in the furnace chamber (05) is measured and detected as the temperature Tt of the pressure medium gas in the furnace chamber (05) by the furnace chamber temperature detection means (32) (S25).

The deviation between the temperature signal T in the furnace chamber detected in S25 and the set value C2 set by the high pressure vessel temperature setting means (33) is used as the second deviation ε2 by the second deviation calculation means (34) to calculate the above (4). ) is calculated according to the formula (S26).

The comparison means (35) calculates the deviation between the second deviation signal ε2 and the first deviation signal ε1 calculated in S24 according to the above (5).
A comparison operation is performed according to the formula [S27].

Based on the result α′ of this comparison calculation, the fan rotation speed control means (19) controls the rotation speed of the fan (10) [328].

Next, the invention according to claim 3 will be explained using the drawings. FIG. 4 is a block diagram showing an embodiment of the invention according to claim 3. In FIG. 4, parts with the same numbers as in FIG. 1 or 2 are the same, so a description thereof will be omitted.

In FIG. 4, (37) is the second deviation calculation means (34)
The calculation means (37) outputs the calculation result to the comparison means (38). The comparison means (38) compares the signal calculated by the calculation means (37) and the first deviation signal ε1 calculated by the first deviation calculation means (15), and calculates the calculation result α'' as follows. Fan rotation speed setting means (3
9) to a fan rotation speed control means (19) composed of a servo amplifier or the like, and the fan rotation speed control means (19) outputs the rotation speed of the fan (10) to a fan rotation speed setting means. Control is performed based on the output of (39).

To explain the operation of the apparatus shown in FIG. 4, in the flowchart of FIG. 8, a step of raising the second deviation signal to the 1/4th power by the calculation means (37) is added between S26 and 327. good.

The invention according to claim 4 is such that the gap upper temperature measuring means (11) is used as the furnace chamber temperature measuring means in place of the furnace chamber temperature measuring means (31) in FIG. 3 or 4. .

In the invention as set forth in claim 5, instead of setting a constant value in the high pressure container temperature setting means (33) in FIG. 3 or 4, the temperature of the high pressure container (OL) is actually measured and the temperature is determined as It is used for control.

The temperature of the high pressure volume ri (01) is lower than the temperature inside the furnace chamber (05) and has less fluctuation. Also, high pressure container (01)
In some cases, the temperature of the high-pressure container (Ol) can be controlled to a constant value by fitting a cooling jacket on the outside of the container, and this can also be controlled as a constant value (Claims 2 and 3). This allows for more precise control.

Next, the invention according to claim 6 will be explained using the drawings. FIG. 9 is a flowchart showing a control method when the invention according to claim 6 is applied to the invention according to claim 1. In FIG. 9, S61 is the same as S11, and S61 is the same as S11.
Since steps 63 to S67 are the same as steps S12 to S16, their explanation will be omitted. In the same figure, in S62, the cooling start temperature is set. The quenching start temperature is set to a temperature at which quenching does not affect the quality of the product, for example, in the case of processing at 1200'C, about 600°C.

After the hot isostatic pressurization process is completed and the cooling control in the furnace chamber is started, in the loop control from 363 to S67,
It is monitored whether the temperature of the pressure medium gas measured at the upper part of the gap has reached the set quenching start temperature, and when it reaches the set temperature, the process shifts to cooling control [56B].

S69 is a step for performing rapid cooling control. The oil cooling control may be performed by operating the fan at full power.

Further, a cooling means exclusively for rapid cooling may be provided in the high-pressure container.

Note that the invention described in claim 6 or 7 can be similarly applied to the inventions described in claims 2 to 5.

In addition, claim 6 or 7 may be added to the invention described in claim 2 or 3.
In applying the described invention, as described above, the temperature above the gap (02) may be used to detect the quenching start temperature, or the temperature inside the furnace chamber (05) may be used.

In the invention as claimed in claim 8, step S6 in the above-mentioned FIG.
9, the object to be processed (06) is taken out of the pressure vessel (01). This extraction is
For example, using the device shown in Fig. 12, the upper and lower! (79a
) are separated from the upper and lower M (79b), and the object to be processed is separated from the upper and lower M (79b).
This can be done by taking it out downward integrally with 79a). Further, the temperature at which the product is taken out of the container is set at a temperature at which exposing the object to be processed to the outside air does not cause deterioration of the product.

Finally, the invention according to claim 9 will be explained using the drawings.

FIG. 4 is a schematic diagram showing a case where the invention according to claim 9 is applied to the invention according to claim 3. In the same figure, (
51) is an over-temperature detection means consisting of an operational amplifier, etc., which compares the setting signal C3 set by the over-temperature detection value setting means (52) with the first deviation signal ε, and determines the first deviation. When the signal ε exceeds the set signal C3, it is detected that the temperature of the high-pressure container has risen excessively, and a stop signal is output to the fan rotation speed setting means (39) to stop the rotation of the fan (10). , the valve device (08) is lowered to close the opening (03a) of the heat insulating layer (03). At the same time, an overheating signal is output to the overheating display means (53). The cough excessive temperature rise display means (53) performs an alarm display, a buzzer alarm, etc. upon receiving the excessive temperature rise signal.

It goes without saying that the invention of claim 9 is applicable not only to the invention of claim 3 but also to the inventions of other claims.

Here, in FIGS. 1 to 4, each function realizing means is shown as an independent block, but it may be realized all at once by a microprocessor or the like.

Further, in each of the embodiments shown in FIGS. 7 to 9, each step is controlled sequentially for convenience of explanation, but each of these steps may be processed in parallel as appropriate.

Furthermore, in the invention of claim 2 and below, the first to third of claim 1
It goes without saying that the embodiments can be combined.

〔Effect of the invention〕

According to the present invention, the temperature of the pressure medium gas is measured at the upper and lower parts of the gap between the high pressure container and the heat insulating layer, and the difference between the measured temperature at the upper part and the temperature at the lower part is used to By adjusting the circulation flow rate, it is possible to reliably prevent damage to the high-pressure container due to excessive temperature rise, and by shortening the cooling time, it is possible to increase processing efficiency and improve the operating rate of the apparatus.

Here, regarding the effect of the present invention regarding cooling time reduction,
This will be explained using FIGS. 10 and 11. FIG. 10 is a graph illustrating the effects of the invention according to claims 1 and 3, and FIG. 11 is a graph illustrating the effects according to the invention according to claim 6.

Figures 10 and 11 are graphs in which time is plotted on the horizontal axis and temperature of the pressure medium gas is plotted on the vertical axis. It shows a constant cooling rate line that can be cooled without cooling. Further, T indicates the hot isostatic pressurization temperature, and Tc indicates the cooling target temperature. Also, t.

indicates the cooling time required when cooling at a constant cooling rate.

In FIG. 10, (a) is a cooling rate curve when the circulating flow rate of the pressurized gas is constant, and the time required for cooling in this case is t. In this case, the circulating flow rate of the pressurized gas is set to a small value of 2 itt so that the high pressure vessel does not rise excessively in the high temperature state of the pressurized gas immediately after the start of cooling, so t is a relatively large value. Become. (b) Circulation of pressurized gas according to the invention according to claim 1 2i! This is a cooling rate curve when LI is controlled, and (c) is a cooling rate curve when pressurized gas circulation fit is controlled according to the third aspect of the invention. 12.1. The time required for cooling in these cases. Then, the time required for cooling is
13> Begz ) t I ) t O.

In Figure 11, T1 indicates the temperature at which sudden cooling begins.
is a cooling rate curve when the circulation flow rate of the pressurized gas is controlled and the quenching control is performed according to the sixth aspect of the invention. The time required for cooling in this case is L4. Since cooling is performed after the rapid cooling start temperature T is reached, the time required for cooling can be reduced compared to when the circulation flow rate of the pressurized gas is controlled by the invention according to claim 1 (b). -(ta<tz).

[Brief explanation of drawings]

Fig. 1 is a block diagram showing a first embodiment of the invention as claimed in claim 1, Fig. 2 is a front diagram showing a second embodiment of the invention as claimed in claim 1, and Fig. 3 is a block diagram showing the invention as claimed in claim 2. FIG. 4 is a block diagram showing an embodiment of the invention as claimed in claim 3; FIG. 5 is a front sectional view showing a third embodiment of the invention as claimed in claim 1; FIG. is a sectional view taken along the line A-A in FIG. 5, FIG. 7 is a flowchart showing the control method of the invention according to claim 1, FIG. 8 is a flowchart showing the control method according to the invention according to claim 2, and FIG. is a flowchart showing a control method when the invention of claim 6 is applied to the invention of claim 1; FIG. 10 is a graph explaining the effects of the inventions of claims 1 and 3; FIG. 11 FIG. 12 is a front sectional view of a hot isostatic pressing device used in the conventional method. (OIL-high pressure vessel, (02)-gap, (03)-insulation layer, (04)--heater, (05)-furnace chamber, (06)-
Processed object, (08) - one valve device, (10) - fan,
(IIL-gap upper temperature measuring means, (13L-gap lower temperature measuring means, (15)-first deviation calculation means, (16L-deviation set value setting means, (17) (35)-one comparison means, (1
8), (39) - Fan rotation speed setting means, (1
9) - Fan rotation speed control means, (31) Furnace chamber temperature measuring means, (34L- second deviation calculation means, (51) - excessive temperature rise detection means.

Claims (9)

[Claims] (1) A heat insulating layer (03) is provided in the high pressure vessel (01) with a gap (02) between the high pressure vessel (01) and a heater (03) is provided inside the heat insulating layer (03). An object to be processed (06) is placed in a furnace chamber (05) in which a furnace (04) is arranged, and a high-pressure pressure medium gas is introduced into the high-pressure container (01), and the object is heated by the heater (04). By doing so, after performing hot isostatic pressurization treatment by applying high temperature and high pressure pressure medium gas to the object to be processed (06), the high temperature pressure medium gas in the furnace chamber (05) is The gap (0
2), flow down the gap (02) along the inner wall of the high pressure vessel (01), and further guide the pressure medium gas into the furnace chamber (05) from the lower part of the heat insulating layer (03). In the hot isostatic pressurization method in which the object to be processed (06) is cooled by circulation, the temperature of the pressure medium gas is measured at the upper and lower parts of the gap (02), and the measured temperature at the upper part is and the temperature of the lower part is calculated as a first deviation, and the circulating flow rate of the pressure medium gas is adjusted so that the first deviation becomes a deviation set value set as a constant in advance. Isostatic pressurization method. (2) A heat insulating layer (03) is provided in the high pressure vessel (01) with a gap (02) between the high pressure vessel (01) and a heater (03) is provided inside the heat insulating layer (03). An object to be processed (06) is placed in a furnace chamber (05) in which a furnace (04) is arranged, and a high-pressure pressure medium gas is introduced into the high-pressure container (01), and the object is heated by the heater (04). By doing so, after performing hot isostatic pressurization treatment by applying high temperature and high pressure pressure medium gas to the object to be processed (06), the high temperature pressure medium gas in the furnace chamber (05) is The gap (0
2), flow down the gap (02) along the inner wall of the high pressure vessel (01), and further guide the pressure medium gas into the furnace chamber (05) from the lower part of the heat insulating layer (03). In the hot isostatic pressurization method in which the object to be processed (06) is cooled by circulation, the temperature of the pressure medium gas is measured at the upper and lower parts of the gap (02), and the measured temperature at the upper part is In addition to calculating the deviation between the temperature of A hot work etc. characterized in that a deviation from a constant value preset as temperature is calculated as a second deviation, and the circulating flow rate of the pressure medium gas is adjusted so that the first deviation is proportional to the second deviation. Direct pressure method. (3) Instead of adjusting the circulating flow rate of pressure gas so that the first deviation is proportional to the second deviation, the pressure gas is circulated so that the first deviation is proportional to approximately 1/4th power of the second deviation. 3. The hot isostatic pressing method according to claim 2, wherein the flow rate is adjusted. (4) Instead of using the temperature measured in the furnace chamber (05), the temperature measured at the top of the gap (02) is used not only for calculating the first deviation but also for calculating the second deviation. The hot isostatic pressing method according to claim 2 or 3. (5) Instead of using a constant value set in advance as the temperature of the high-pressure vessel (01), the temperature of the high-pressure vessel (01) is measured and the measured temperature is used.
or the hot isostatic pressing method described in 3. (6) Set in advance a temperature lower than the temperature at which hot isostatic pressure processing is performed as the quenching start temperature, and set the temperature in the furnace chamber (
05) or the temperature at the upper part of the gap (02) after the end of the hot isostatic pressure treatment until it reaches the quenching start temperature, the circulating flow rate of the pressure medium gas is adjusted and controlled. Claims 1 to 5, characterized in that after cooling is performed and the rapid cooling start temperature is reached, the adjustment control of the circulation flow rate of the pressure medium gas is stopped, and the object to be processed (06) is rapidly cooled. Hot isostatic pressing method described. (7) The hot isostatic pressing method according to claim 6, wherein the rapid cooling of the object to be processed (06) is carried out by maximizing the circulation flow rate of the pressure medium gas. (8) Set in advance a temperature lower than the temperature at which the hot isostatic pressure treatment is performed as the temperature for taking out the container, and the measured temperature inside the furnace chamber (05) or the temperature at the upper part of the gap (02)
From the end of the hot isostatic pressure treatment until the temperature at which the container is taken out is reached, cooling is performed by adjusting and controlling the circulating flow rate of the pressure medium gas, and after the temperature at which the container is taken out is reached. 6. The hot isostatic pressing method according to claim 1, wherein the object to be processed (06) is taken out of the high pressure container (01). (9) Set a constant value in advance as the overheating detection temperature, compare the set overheating detection temperature with the first deviation, and when the first deviation exceeds the overheating detection temperature, the pressure 9. The hot isostatic pressurization method according to claim 1, wherein the gas circulation is stopped.