JPH0510680A - Hot isotropic pressurizing apparatus - Google Patents

Abstract

PURPOSE:To eliminate irregularities in upper and lower temperatures of a material to be treated and to accelerate a cooling speed by forming a gas subpassage between a plurality of guide cylinders, and variously altering a height in which pressure medium gas is brought into contact with the material to be treated by passage switching means. CONSTITUTION:A valve body 32 of passage switching means 30 is gradually displaced upward to switch the position of the body 32, and a passage of pressure medium gas 7 is switched from a gas main passage 21 to a gas subpassage 22. Then, since the upper part of a material 24 to be treated is brought into direct contact with part of the cooled gas 7, a decrease in a cooling speed is prevented. On the other hand, the gas 7 rising in the subpassage 22 is shorter at its rising stroke than the passage 21, its temperature does not rise even it reaches near the upper end of a second guide cylinder 20, and the passage 2 is nearer to the material 24 to be treated. Thus, a density flow is generated near the upper end of the cylinder 20, and part of the gas 7 in the subpassage 22 flows down into a treating chamber 25 to cool the material 24 to be treated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hot isostatic pressing (hereinafter abbreviated as HIP) apparatus, which is used for pressure sintering of various powders, removal of defects in sintered products and cast products, and different materials. It is used for diffusion bonding and the like.

[0002]

2. Description of the Related Art In such a HIP apparatus, since the cooling time of the object to be processed after the HIP processing determines the cycle time of the entire HIP processing, the pressure medium gas in the high pressure vessel is circulated by natural convection or forcedly, There is known a technique for increasing the cooling rate as much as possible by promoting heat exchange between the object to be processed and the high-pressure container through the circulating flow of the pressure medium gas (for example, Japanese Patent Laid-Open No. 59-59). -87032, Gazette of Shokai 63
(See Japanese Patent No. 123999).

Among these, in the technique disclosed in Japanese Patent Laid-Open No. 59-87032, as shown in FIG. 5, the pressure medium gas 48 for cooling the object 47 to be processed rises around the object 47 to be processed. Because of such circulation, it is cooled from the lower part of the object to be processed, which has a relatively low temperature, and there is a drawback that the internal composition becomes nonuniform due to the difference in vertical temperature inside the object to be processed 47. On the other hand, the technique disclosed in Japanese Utility Model Laid-Open No. 63-123999 is devised to solve the above-mentioned inconvenience.

That is, in this technique, as shown in FIG.
Inside the inverted cup-shaped heat insulating layer 50 in the high-pressure container 49, a guide tube 53 having an open upper end and an inside serving as a processing chamber 52 of the object 51 to be processed is arranged, and is insulated from the guide tube 53. A gas channel 55 for the pressure medium gas 54 is formed between the layer 50 and the layer 50 in order to raise the pressure medium gas 54 for cooling the object 51 to be processed outside the guide cylinder 53. A fan 56 is provided below the guide cylinder 53 to draw the pressure medium gas 54 that has risen to the upper end of the guide cylinder 53 into the space between the guide cylinder 53 and the object 51 to be processed.

Therefore, according to this technique, the pressure medium gas 54 can enter from the outer side to the inner side of the guide cylinder 53, and the object 51 to be processed can be cooled from the upper part having a relatively high temperature. It is said that rapid cooling after HIP treatment is possible without causing nonuniformity of the internal composition.

[0006]

However, in the above-mentioned conventional technique, the height of the guide tube 53 is constant, and therefore the object 51 to be processed is always cooled from the upper end side thereof. Even if there is no difference in the vertical temperature of the object to be processed 51, the lower part may become hotter as the cooling process progresses rapidly, which completely solves the uneven temperature in the vertical direction of the object to be processed 51. It is not what was done.

In view of the above situation, it is an object of the present invention to almost completely prevent the unevenness of the upper and lower temperatures of the object to be processed and to shorten the cooling time after the HIP processing as compared with the conventional case.
That is, more specifically, the first object of the present invention is to configure the flow path of the pressure medium gas between the plurality of guide cylinders, and to determine the height at which the circulating pressure medium gas first contacts the object to be processed. By making various changes, it is possible to eliminate the unevenness of the vertical temperature of the object to be processed.

A second object of the present invention is to measure the temperature of each pressure medium gas in each flow passage, and to use a flow passage switching means provided below the guide cylinder, which is most suitable for cooling the object to be processed. It is intended to improve the cooling efficiency and shorten the cooling time by automatically selecting the path.

[0009]

[Means for Solving the Problems] In order to achieve the above object,
The present invention has taken the following technical means. That is, according to the invention of claim 1, an inverted cup-shaped heat insulating layer 6 having a gas passage hole 16 in the upper plate portion 15 is arranged in the high pressure chamber 5 defined by the high pressure container 1, and the heat insulating layer 6 is provided. A heater 9 is provided around the inside of the heater 9, and inside the heater 9, a guide cylinder having an open upper end and an inside serving as a processing chamber 25 of the object to be processed 24 is arranged at a distance from the heat insulating layer 6, A hot isotropic pressurizing device in which a main gas passage 21 for the pressure medium gas 7 communicating with the gas flow hole 16 from below the heat insulating layer 6 is formed between the guide cylinder and the heat insulating layer 6. In the above, the guide cylinders are arranged in a plurality of layers at intervals in the radial direction, and the interval between the guide cylinders 19 and 20 serves as a sub gas flow path 22 for the pressure medium gas 7. The inner one is formed so that its height becomes lower than that of the outer one in sequence, and the flow path of the pressure medium gas 7 is provided below the guide tubes 19 and 20. Passage 21 or Sabugasu passage 22
It is characterized in that a flow path switching means 30 for switching to is provided.

Further, in the invention according to claim 2, the flow path switching means 30 is constructed so that the flow rate of the pressure medium gas 7 to the main gas flow path 21 and the sub gas flow path 22 can be adjusted at an arbitrary ratio. It is characterized by being In the invention according to claim 3, temperature sensors 38 and 39 are provided respectively on the inner upper part and the inner lower part of all or part of the guide tubes 19 and 20, and the temperature sensors 38 and 39 are detected on the outside of the high-pressure vessel 1. A control device 40 for switching the flow path of the pressure medium gas 7 to the flow path switching means 30 based on the difference between the temperatures T _{1 and} T ₂ is set.

Further, the invention according to claim 4 is characterized in that a pump 44 for exciting the rise of the pressure medium gas 7 is provided below the flow path switching means 30 and outside the heat insulating layer 6. .

[0012]

In the present invention, in the initial stage of the cooling process after the HIP process, as shown in FIG.
The pressure medium gas 7 for cooling 24 is set so as to pass through the main gas passage 21. Then, the pressure medium gas 7 is pushed by the pressure medium gas that flows down subsequently, rises in the main gas flow path 21, and reaches the upper end of the outermost guide cylinder (first guide cylinder) 19. Part of the material flows into the processing chamber 25
Is cooled from the top. The pressure medium gas into the processing chamber 25
The inflow of 7 can be performed using the fan 56 as in the conventional example shown in FIG. 6, but the present invention is not particularly limited to this. That is, as described in detail in Examples below, the guide tube
19 Since the density flow is generated due to the density difference caused by the temperature difference of the pressure medium gas 7 in the vertical direction inside (arrow A in FIG. 2), even if the fan 56 is not provided, the pressure medium gas for cooling can be introduced into the processing chamber 25.
This is because it is possible to sufficiently inflow 7.

When the pressure medium gas 7 is circulated by natural convection without providing the fan 56, in order to generate the density flow, the temperature of the inner lower portion of the guide cylinder 19 is set to the inner upper portion of the guide cylinder 19. Although it is necessary that the temperature is higher than the temperature, in the present invention, in order to maintain this condition, the flow path of the pressure medium gas 7 is switched as follows. That is, as the cooling process progresses, the flow rate of the pressure medium gas 7 circulating outside the heat insulating layer 6 decreases, so that the pressure medium gas 7 rising in the main gas passage 21 reaches the upper end of the outermost guide cylinder 19. Warmed up to
There is a point at which density flow no longer occurs near the upper end of the outermost guide cylinder 19. Therefore, in the present invention, as shown in FIG. 3, the flow path of the pressure medium gas 7 is switched to the sub gas flow path 22 at this time. The sub gas passage 22 is formed along the outer side of the inner guide cylinder (second guide cylinder) 20 and has a shorter rising stroke than the main gas passage 21. Therefore, the pressure medium gas 7 does not become much hotter than when it rises in the main gas flow path 21, and the inner guide tube
Since it reaches the upper end of 20 and the sub gas flow path 22 is closer to the object to be processed 24 and the temperature difference between the inside of the processing chamber 25 is significant, a part of the pressure medium gas 7 is in the second guide cylinder 20. In the vicinity of the upper end, the density flow causes the gas to flow into the processing chamber 25. On the other hand, the remaining pressure medium gas 7 that does not flow into the processing chamber 25 rises while coming into contact with the upper part of the object to be processed 24 (above the upper end of the inner guide cylinder 20) and directly cools it.

Further, in the present invention, the above-mentioned flow path switching timing is performed based on the temperature differences T _1, T ₂ detected by the temperature sensors 38, 39 provided on the inner upper part and the inner lower part of the guide cylinder 19. That is, the temperature T ₁ by the temperature sensor 38 provided on the upper side and the temperature T ₁ by the temperature sensor 39 provided on the lower side
If there is not much difference with ₂ , the temperature sensor 38,39
Since there is no significance to pass pressure medium gas 7 at the outside of the guide tube 19 provided with, when the temperature difference T ₂ -T ₁ is below the temperature ΔT set in advance, switching more to the inside of the flow path To do so. Since this temperature difference ΔT varies depending on the components of the pressure medium gas, the size of the high-pressure container 1, and the like, it may be set in advance by experiments or the like.

Further, in the present invention, since the flow passage switching means 30 can arbitrarily adjust the flow rate of the pressure medium gas 7 to each of the flow passages 21 and 22, the upper end of the outer higher guide cylinder 19 is treated. Since the flow rate of the relatively high temperature gas flowing into the chamber 25 and the flow rate of the relatively low temperature gas flowing into the processing chamber 25 from the lower end of the inner guide cylinder 20 can be adjusted steplessly, It is possible to cool to a relatively low temperature range at a constant cooling rate while maintaining the temperature uniformity.

Further, when the gas is circulated by a pump, there may be a case where the circulation flow rate is kept low, or conversely, a rapid flow rate is used for the rapid cooling. Since the gas flow rate to the guide tube can be adjusted steplessly, it is possible to cope with various cooling rate levels.

[0017]

Embodiments of the present invention will now be described in detail with reference to the drawings. 1 to 3 show a HI which is a first embodiment of the present invention.
The outline of P apparatus is shown. In the figure, the high-pressure container 1
Is a high-pressure cylinder 2 forming its side portions, and an upper lid 3 and a lower lid 4 that hermetically cover the upper and lower end openings of the high-pressure cylinder 2, respectively.
And the inner surfaces of the high pressure cylinder 2, the upper lid 3 and the lower lid 4 define a high pressure chamber 5.

In the high-pressure chamber 5, an inverted cup-shaped heat-insulating layer 6 is arranged at a distance from the high-pressure container 1,
As a result, the outer gas flow path 8 for the pressure medium gas 7 is formed between the high-pressure container 1 and the heat insulating layer 6. A heater 9 is provided inside the heat insulating layer 6, and a furnace chamber 10 is provided inside the heat insulating layer 6. The heat-insulating layer 6 is constructed by stacking inverted cup-shaped inner and outer casings 11 and 12 in a double manner, and fixing a ring member 13 to the lower end of the casings 11 and 12, and between the inner and outer casings 11 and 12. It is filled with a heat insulating material 14. A gas circulation hole 16 for the pressure medium gas 7 is formed in the center of the upper plate portion 15 of the heat insulating layer 6, and this gas circulation hole 16 is opened and closed via a rod 18 which is vertically moved by a cylinder 17 mounted on the upper lid 3. It is freely configured.

In this embodiment, inside the heater 9, two-layer guide cylinders 19 and 20 having different diameters are arranged at regular intervals in the radial direction, and these guide cylinders 19 and 20 are provided.
Both have their upper ends open. This two-layer guide tube
Of the 19,20, the first guide tube 19 which is the outer layer is arranged at a distance from the heat insulating layer 6 at the upper end and the periphery thereof, whereby the first guide tube 19 and the heat insulating layer 6 are provided. And the gas circulation hole 16 from below the heat insulating layer 6.
A main gas flow path 21 for the pressure medium gas 7 is formed up to. Further, in this embodiment, the first and second guide tubes 19, 2 are
One sub gas passage 22 for the pressure medium gas 7 is formed at intervals of 0.

On the other hand, the lower end of the second guide cylinder 20 forming the inner layer is sealed by the bottom plate 23, and the inside is the processing chamber 25 of the object 24 to be processed.
Under the bottom plate 23 of the second guide cylinder 20, a processing table 27 having a heat insulating material 26 filled therein is provided.
The lower end of the processing table 27 has a flow path switching means 30 which will be described in detail later.
Is fixed to the upper end of the valve box 31 that constitutes
Is supported by the lower lid 4 of the high-pressure container 1 via a support base 28. The HIP device shown in FIG. 1 is of a so-called downward extraction type. Therefore, when the lower cover 4 is released from the high pressure cylinder 2 by releasing the press frame (not shown), the HIP device is supported by the lower cover 4. Valve box 31, processing table 27 and guide tubes 19, 20
Can be pierced with its lower lid 4. The lower end of the first guide cylinder 19 is airtightly fixed to the side surface of the valve box 31 via a ring-shaped flange 29.

Further, the second guide cylinder 20 is formed so that its height is lower than the height of the first guide cylinder 19, and in this embodiment, the height of the second guide cylinder 20 from the bottom plate 23 is smaller. When compared in terms of height, the height of the first guide cylinder 19 is set to be approximately twice the height of the second guide cylinder 20. It should be noted that, as shown in FIG. 1, the object 24 to be subjected to the HIP processing in this embodiment has its upper end positioned slightly lower than the upper end of the first guide cylinder 19 when set in the processing chamber 25. Has been adopted.

The flow path switching means 30 employed in the present embodiment is a valve box 31 made of a metal bottomed tubular body, and a hollow tubular body internally slidably mounted inside the valve box 31. And a valve body 32,
The valve body 32 is configured to be vertically moved by an actuator 34 provided on a lower plate 33 of the valve box 31. Valve box 31
The gas holes 35 and 36 are vertically spaced apart from each other, and the lower first gas hole 35 is lower than the flange portion 29 of the first guide cylinder 19. And the second gas hole 36 located on the upper side is arranged on the upper side of the flange portion 29. Further, a gas hole 37 is also provided on the side of the valve body 32, and this gas hole 37 communicates with the first gas hole 35 or the second gas hole 36 as the valve body 32 moves up and down. The flow path of the medium gas 7 can be switched to either the main gas flow path 21 or the sub gas flow path 22.

Further, in the present embodiment, the gas hole 37 on the side of the valve body 32 is opened larger than the vertical distance between the first and second gas holes 35, 36 on the side of the valve box 31. By arranging the valve element 32 in the middle and finely adjusting the height, the flow rate of the pressure medium gas 7 to the main gas passage 21 and the sub gas passage 22 can be adjusted at an arbitrary ratio. ing.

Upper inner part and lower inner part of the first guide cylinder 19
In this section, the temperature of the pressure medium gas 7 in the sub gas flow path 22 is measured.
Temperature sensors (thermocouples) 38 and 39 for mounting
The temperature sensor is installed outside the high-pressure vessel 1.
Temperature T detected by 38,39_1,T ₂The flow path based on the difference of
A control device 40 for optimally controlling the switching means 30 is provided.
It

The control unit 40 takes a difference between the measuring unit 41 for digitizing the signals from the temperature sensors 38, 39 and the digitized temperature data T _1, T ₂ and presets the difference. The operating unit 43 is provided for comparing the temperature ΔT with the operating temperature 43, and the operating unit 43 for operating the actuator 34 to adjust the vertical position of the valve body 32 based on the evaluation of the operation result of the operating unit 42. The temperature sensors 38,3 that can withstand the HIP processing temperature
As 9, a thermocouple of W-Re 5% / 26% or JIS standard B type is known.

In the present embodiment having the above structure, the HIP
The cooling process that can be performed after the processing is described. First, after the HIP treatment is completed, when the gas circulation hole 16 of the heat insulation layer 6 is opened, the pressure medium gas 7 in the furnace chamber 10 flows out from the gas circulation hole 16 to the outside of the heat insulation layer 6 by the convection action, and While being cooled through heat exchange with the upper lid 3 and high pressure cylinder 2,
It flows down through the outer gas flow path 8 and reaches below the heat insulating layer 6.

At the initial stage of cooling, the flow path switching means 30 is set in a state where the valve body 32 is located at the lowermost position (the state shown in FIG. 2), and is therefore cooled by heat exchange below the heat insulating layer 6. The pressure medium gas 7 passes through the first gas holes 35 of the valve box 31 and rises in the main gas passage 21. The pressure medium gas 7 that has reached the upper end of the first guide cylinder 19 through the main gas passage 21 has a temperature near the upper end of the first guide cylinder 19 as compared with the pressure medium gas 7 in the processing chamber 25. Processing room because it is low
Since the density is higher than that of the pressure medium gas in 25, a density flow due to the difference in gas density occurs near the upper end of the first guide cylinder 19,
As shown by an arrow A in FIG. 2, a part of the cooled pressure medium gas 7 naturally flows down into the processing chamber 25.

After that, the pressure medium gas 7 flowing into the processing chamber 25
While being mixed with the pressure medium gas in the processing chamber 25,
Is cooled from the top. Then, the pressure medium gas 7 that has been warmed in the opposite direction by heat exchange with the object to be processed 24 has a lower density this time, and is pushed out by the pressure medium gas 7 for cooling that subsequently flows in, In the processing chamber 25, it changes to an upward flow and rises toward the gas flow holes 16 of the heat insulating layer 6.

Next, when the cooling process progresses to some extent, the temperature difference between the pressure medium gas 7 circulating in the main gas passage 21 and the pressure medium gas in the first guide cylinder 19 becomes small as described above. Most of the flow does not flow down into the first guide cylinder 19 but flows out of the heat insulating layer 6. As a result, in this state, the cooling rate of the object to be processed 24 in the first guide cylinder 19 is remarkably reduced, and the convective stirring vertically in the processing chamber 25 does not sufficiently occur. There is a temperature difference between the upper and lower sides.

Therefore, in the present embodiment, before such a situation occurs, the valve body 32 of the flow path switching means 30 is gradually displaced upward, and the position of the valve body 32 is changed from the state of FIG. 2 to the state of FIG. The flow path of the pressure medium gas 7 is switched from the main gas flow path 21 to the sub gas flow path 22. Then, as shown in FIG. 3, the upper portion of the object to be processed 24 comes into direct contact with a part of the cooled pressure medium gas 7, so that the cooling rate can be prevented from decreasing. On the other hand, this sub gas passage 22
Since the pressure medium gas 7 that rises above has a shorter ascending stroke than the main gas passage 21, the temperature does not rise so much even when it reaches the vicinity of the upper end of the second guide cylinder 20, and the sub gas passage 22 The density flow (arrow B in FIG. 3) is generated in the vicinity of the upper end of the second guide cylinder 20 in the same manner as described above from the two points that it is closer to the object to be processed 24 compared to the main gas flow path 21, and the sub gas flow is generated. A part of the pressure medium gas 7 in the passage 22 flows down into the processing chamber 25 and cools the object to be processed 24.

Further, in this embodiment, the flow of the pressure medium gas 7 is
The judgment of the switching of the road is made by the temperature sensor provided in the first guide cylinder 19.
-Based on the temperature detected by 38, 39. That is, yes
For example, the temperature measured by the upper temperature sensor 38 is set to T₁,under
The temperature measured by the temperature sensor 39 on the side is T₂And then those
Temperature difference, ie T₂-T₁The larger is the above density
It is clear that the flow tends to occur, and the smaller the flow, the harder it occurs.
It has been overlooked. So T₂-T₁How low
It is preliminarily tested by experiments to see if density flow will stop when it is lowered.
Then, the temperature is input to the calculation unit 42 as ΔT.
And T₂-T ₁The main gas flow path 21 should be
Adopted, T₂-T₁Sub gas passage 22 when ≦ ΔT
Should be adopted.

The valve element 32 of the flow path switching means 30 employed in this embodiment is capable of steplessly adjusting the switching to the main gas flow path 21 and the sub gas flow path 22. The switching does not have to be performed all at once, and the flow rate of the pressure medium gas 7 to the sub gas passage 22 can be gradually increased.
In this case, since the flow rate to each of the flow paths 21 and 22 can be adjusted steplessly, it is possible to prevent an excessive temperature change that tends to occur at the time of switching the flow paths and to maintain the temperature uniformity in the processing chamber 25 at a low temperature. It is possible to cool to the region while keeping the cooling rate almost constant.

Next, FIG. 4 shows a second embodiment of the present invention. This HIP device differs from the first embodiment in that it is below the flow path switching means 30 and outside the heat insulating layer 6.
A pump 44 for exciting the rise of the pressure medium gas 7 is provided. The pump 44 is composed of, for example, a centrifugal fan, and is supported by an electric motor 45 installed in a recess provided on the upper surface of the lower lid 4. The rotation speed of the electric motor 45 is variable and can be controlled from outside the high-pressure container 1. The other points of this embodiment are the same as those of the first embodiment. Further, in FIG. 4, the depiction of the control device 40 and the temperature sensors 38, 39 is omitted.

According to this second embodiment, the circulation of the pressure medium gas 7 is increased by the pump 44, so that more rapid cooling is possible. Further, since the pump 44 is provided outside the heat insulating layer 6, the influence of high temperature during the HIP process is difficult to be transmitted, and the durability of the pump 44 itself can be improved. Although the embodiment of the present invention has been described in detail above, the present invention is not limited to this, and for example, the guide cylinder may be provided in three or more layers. That is, when the high-pressure container 1 and the object to be processed 24 are large and vertically long, three or more layers of guide cylinders whose height gradually decreases from the outside are arranged, and a plurality of sub gas passages 22 having different heights are formed. It is preferable to increase the number of pressure medium gas passages that can be selected. In this case, it is preferable that the pair of upper and lower temperature sensors 38, 39 be provided inside each guide tube to examine whether or not a density flow is generated in each sub gas passage 22.

[0035]

As described above, according to the present invention,
Since the sub gas flow path 22 is formed between the plurality of guide cylinders 19 and 20, and the height at which the pressure medium gas 7 contacts the object to be processed 24 can be changed variously by the flow path switching means 30, the object to be processed can be changed. The cooling rate can be increased without causing non-uniformity of the upper and lower temperatures of 24.

[Brief description of drawings]

FIG. 1 is a front sectional view of a HIP device showing a first embodiment of the present invention.

FIG. 2 is an enlarged sectional view of the same.

FIG. 3 is an enlarged sectional view of the same.

FIG. 4 is a front sectional view of a HIP device showing a second embodiment of the present invention.

FIG. 5 is a front sectional view of a conventional HIP device.

FIG. 6 is a front sectional view of the same.

[Explanation of symbols] 1 high pressure vessel 5 High pressure chamber 6 Insulation layer 7 Pressure medium gas 9 heater 15 Upper plate 16 Gas distribution hole 19 (First) Guide tube 20 (Second) Guide tube 21 Main gas flow path 22 Sub gas flow path 24 Object 25 Processing room 30 Flow path switching means 38 Temperature sensor 39 Temperature sensor 40 controller 44 pumps

Claims (4)

[Claims] 1. An inverted cup-shaped heat insulation layer (6) having a gas flow hole (16) in the upper plate (15) is arranged in a high pressure chamber (5) defined by the high pressure container (1). , A heater inside the heat insulation layer (6)
(9) is provided around the inside of the heater (9), the upper end of which is open, and the inside of which is a processing chamber (25) for the object to be processed (25), and a guide tube is spaced apart from the heat insulating layer (6). Between the guide cylinder and the heat insulating layer (6), the main gas flow of the pressure medium gas (7) communicating with the gas flow hole (16) from below the heat insulating layer (6). In the hot isostatic pressurizing device in which the passage (21) is formed, the guide tubes are arranged in a plurality of layers at intervals in the radial direction, and the intervals between the guide tubes (19) and (20) are compressed. It is used as a sub gas flow path (22) for the medium gas (7), and each of the guide tubes (19) (20) is formed so that the inner one is gradually lower in height than the outer one. (19) Below the (20), a flow path switching means (30) for switching the flow path of the pressure medium gas (7) to the main gas flow path (21) or the sub gas flow path (22) is provided. A hot isostatic pressing device characterized by the above. 2. The flow path switching means (30) comprises a main gas flow path (2).
The hot isostatic pressurization device according to claim 1, characterized in that the flow rate of the pressure medium gas (7) to the sub gas flow channel (22) and the sub gas flow channel (22) can be adjusted at an arbitrary ratio. . 3. A temperature sensor (38) (39) is provided on the inside upper part and the inside lower part of all or part of the guide tubes (19) (20), and the temperature sensor is provided outside the high-pressure container (1). (38) (3
Control device for switching the flow path of the pressure medium gas (7) to the flow path switching means (30) based on the difference in temperature (T ₁ ) (T ₂ ) detected by 9)
(40) is provided, Claim 1 or 2 characterized by the above-mentioned.
The hot isostatic pressing device described. 4. A heat insulating layer below the flow path switching means (30)
External to (6), a pump (4
4. The hot isostatic pressing device according to claim 1, wherein the hot isostatic pressing device is provided with 4).