JPH03232172A - Floating type magnetic head - Google Patents
Floating type magnetic headInfo
- Publication number
- JPH03232172A JPH03232172A JP2768590A JP2768590A JPH03232172A JP H03232172 A JPH03232172 A JP H03232172A JP 2768590 A JP2768590 A JP 2768590A JP 2768590 A JP2768590 A JP 2768590A JP H03232172 A JPH03232172 A JP H03232172A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- floating
- film layer
- magnetic head
- bottom face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 22
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- 239000011347 resin Substances 0.000 abstract description 4
- 229920005989 resin Polymers 0.000 abstract description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000001050 lubricating effect Effects 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000001476 alcoholic effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光磁気ディスク装置等の磁気記録再生装置で
使用される浮上型磁気ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a floating magnetic head used in a magnetic recording/reproducing device such as a magneto-optical disk device.
〔従来の技術]
光磁気ディスク装置において、オーバーライドによる高
速データ記録を行う場合、磁界変調記録方式が最有力で
あるが、このためには、光磁気ディスクに高速反転磁界
を効率的に印加する必要があり、ハードディスク装置で
実績のある浮上型磁気ヘッドが採用されている。[Prior Art] When performing high-speed data recording by override in a magneto-optical disk device, the magnetic field modulation recording method is most effective, but for this purpose, it is necessary to efficiently apply a high-speed reversal magnetic field to the magneto-optical disk. It uses a floating magnetic head, which has a proven track record in hard disk drives.
ハードディスク装置の浮上型磁気ヘッドは、第2図に示
すように、浮上圧を受けるスライダー部1と導線3が巻
かれたコイル部2から主に構成されている。磁気ディス
クを高速回転させると、スライダー部1と磁気ディスク
の間を流れる空気流により、浮上型磁気ヘッドは上向き
の力(浮上刃)を受けて磁気ディスク上に浮上するよう
になっており、その浮上量は、サスペンションによる下
向きの力とのバランスで決まり、通常サブミクロンのオ
ーダーである。また、スライダー部1の底面中央部には
、深さDが200〜300μmの溝5が設けられ、浮上
刃を左右に分割して浮上状態を安定させるように工夫さ
れている。As shown in FIG. 2, a floating magnetic head for a hard disk drive mainly consists of a slider section 1 that receives floating pressure and a coil section 2 around which a conducting wire 3 is wound. When the magnetic disk is rotated at high speed, the floating magnetic head receives an upward force (floating blade) due to the airflow flowing between the slider section 1 and the magnetic disk, causing it to levitate above the magnetic disk. The flying height is determined by the balance with the downward force from the suspension, and is usually on the order of submicrons. Further, a groove 5 having a depth D of 200 to 300 μm is provided in the center of the bottom surface of the slider portion 1, and the floating blade is divided into left and right sides to stabilize the floating state.
ところで、光磁気ディスク装置のように、ディスク交換
ができる装置では、ゴミの付着等によるヘッドクラッシ
ュを避けるために、通常5μm以上の浮上量が必要とさ
れる。Incidentally, in a device such as a magneto-optical disk device in which disks can be replaced, a flying height of 5 μm or more is usually required to avoid head crashes due to adhesion of dust or the like.
第1表は、浮上量を5μmとしたときの、浮上刃と溝5
の深さDの関係を示している。なお、測定に使用された
浮上型磁気ヘッドは、第2図に示すように、長さLが6
mm、幅Bが4mm、溝5の幅Gが0.5mmのもので
ある。この表から、溝5の深さDを大きくすると浮上刃
は急、激に減少し、また、浮上型磁気ヘッドと磁気ディ
スクの相対速度■に比例して浮上刃は増大することがわ
かる。そして、溝5の深さDを10〜50μmにすれば
、浮上刃は大きく減少せず、かつ、浮上刃は左右に分割
されて安定した浮上が行われることがわかる。Table 1 shows the floating blade and groove 5 when the floating height is 5 μm.
It shows the relationship between depth D. The floating magnetic head used in the measurement has a length L of 6 as shown in FIG.
mm, the width B is 4 mm, and the width G of the groove 5 is 0.5 mm. From this table, it can be seen that as the depth D of the groove 5 is increased, the number of floating blades decreases rapidly and sharply, and the number of floating blades increases in proportion to the relative speed (2) between the floating magnetic head and the magnetic disk. It can be seen that if the depth D of the groove 5 is set to 10 to 50 μm, the number of floating blades does not decrease significantly, and the floating blades are divided into left and right sides, and stable floating is performed.
ところが、上記従来の構成では、溝5はスライダー部1
の底面を機械的に加工することにより形成されているた
め、溝5の深さDを10μm程度に精度よく加工するこ
とは可能ではあるが、精度の高い工作機械を必要とし、
製造管理も大変であるという問題点がある。However, in the conventional configuration described above, the groove 5 is located in the slider portion 1.
Since it is formed by mechanically processing the bottom surface of the groove 5, it is possible to precisely machine the depth D of the groove 5 to about 10 μm, but it requires a highly accurate machine tool.
There is also the problem that manufacturing management is difficult.
本発明の浮上型磁気ヘッドは、上記の課題を解決するた
めに、スライダー部の底面に浮上状態安定用の溝を設け
た浮上型磁気ヘッドにおいて、上記溝はスライダー部の
底面に部分的に薄膜層を形成することにより設けられて
いることを特徴としている。In order to solve the above problems, the floating magnetic head of the present invention is a floating magnetic head in which a groove for stabilizing the flying state is provided on the bottom surface of the slider section, and the groove is formed by partially forming a thin film on the bottom surface of the slider section. It is characterized in that it is provided by forming layers.
上記の構成によれば、スライダー部の底面に部分的に薄
膜層を形成することにより溝を設けたので、薄膜層の厚
さを薄くすることにより、容易に浅い溝が設けられる。According to the above configuration, the grooves are provided by partially forming a thin film layer on the bottom surface of the slider portion, so that shallow grooves can be easily provided by reducing the thickness of the thin film layer.
これにより、大きな浮上刃が得られ、しかも、安定した
浮上状態が実現される浮上型磁気ヘッドを容易に製作で
きる。As a result, it is possible to easily manufacture a flying magnetic head that provides a large flying blade and achieves a stable flying state.
第1図は、本発明の一実施例を示すものであり、光磁気
ディスク装置で使用される浮上型磁気へンドの概略の構
成を示す斜視図である。なお、従来例の図面で示した部
材と同一の機能を有する部材には、同一の符号を付記す
る。FIG. 1 shows one embodiment of the present invention, and is a perspective view showing a schematic configuration of a floating magnetic head used in a magneto-optical disk device. Note that members having the same functions as those shown in the drawings of the conventional example are given the same reference numerals.
本発明の浮上型磁気ヘッドは、浮上圧を受けるスライダ
ー部1と導線3が巻かれたコイル部2から主に構成され
ている。スライダー部1の底面両端部には、厚さ5μm
のフッ素系樹脂からなる薄膜層4・4が左右対称に形成
されており、これによって、薄膜層4が形成されていな
い底面中央部に薄膜層4の厚さと等しい深さの溝5が作
られるようになっている。したがって、薄膜層4の厚さ
を薄くすることにより、容易に浅い溝5をスライダー部
1の底面に設けることができる。The floating magnetic head of the present invention mainly comprises a slider section 1 that receives floating pressure and a coil section 2 around which a conducting wire 3 is wound. A thickness of 5 μm is provided at both ends of the bottom surface of the slider section 1.
Thin film layers 4 made of fluororesin are formed symmetrically, thereby creating a groove 5 having a depth equal to the thickness of the thin film layer 4 at the center of the bottom surface where the thin film layer 4 is not formed. It looks like this. Therefore, by reducing the thickness of the thin film layer 4, the shallow groove 5 can be easily provided on the bottom surface of the slider portion 1.
上記薄膜層4は、以下のようにして形成される。すなわ
ち、スライダー部1の底面の溝5になる部分をマスキン
グし、底面全体に液状のフッ素系樹脂をスプレー法やデ
ィッピング法により塗布した後、UV照射、加熱加温あ
るいは乾燥等、所定の方法で硬化させることによって形
成される。The thin film layer 4 is formed as follows. That is, after masking the part of the bottom surface of the slider part 1 that will become the groove 5 and applying liquid fluororesin to the entire bottom surface by a spraying method or dipping method, it is applied by a predetermined method such as UV irradiation, heating, or drying. Formed by curing.
薄膜層4には、潤滑特性さえ優れておれば、フッ素系樹
脂に限らず、どの樹脂を使用してもかまわない。潤滑特
性の目安としては、樹脂とディスク表面の間の静摩擦係
数が1以下であればよい。For the thin film layer 4, any resin other than fluororesin may be used as long as it has excellent lubricating properties. As a guideline for the lubrication properties, it is sufficient that the coefficient of static friction between the resin and the disk surface is 1 or less.
なお、潤滑特性の劣る樹脂であっても、薄膜層4の形成
後、パーフルオロポリエーテル等の潤滑剤を塗布して、
潤滑特性を改善すれば使用できる。Even if the resin has poor lubricating properties, a lubricant such as perfluoropolyether may be applied after forming the thin film layer 4.
It can be used if the lubrication properties are improved.
また、薄膜層4に、SiO□あるいはカーボン等の無機
材料を使用してもよい。Sin、の薄膜層4を形成する
場合は、上記と同様にマスキングし、底面全体にテトラ
ヒドロキシシランのアルコール溶液を塗布した後、乾燥
、焼成させる。また、カーボンの薄膜層4を形成する場
合は、マスキング後、スパッタリング法、蒸着法、CV
D法等により成膜される。なお、これらの無機材料を使
用する場合、潤滑特性を向上させるために、薄膜層4の
形成後、潤滑剤を塗布しておくことが望ましい。Further, the thin film layer 4 may be made of an inorganic material such as SiO□ or carbon. When forming the thin film layer 4 of Sin, masking is performed in the same manner as described above, and an alcoholic solution of tetrahydroxysilane is applied to the entire bottom surface, followed by drying and baking. In addition, when forming the carbon thin film layer 4, after masking, sputtering method, vapor deposition method, CV
The film is formed by the D method or the like. Note that when using these inorganic materials, it is desirable to apply a lubricant after forming the thin film layer 4 in order to improve the lubricating properties.
上記の浮上型磁気ヘッドを備えた光磁気ディスク装置に
おいて、光磁気ディスクを高速回転させると、スライダ
ー部1と光磁気ディスクの間を流れる空気流により、浮
上型磁気ヘッドは上向きの力(浮上刃)を受けて光磁気
ディスク上に浮上する。そして、浮上量が約5μmにな
った位置で、浮上刃はサスペンションによる下向きの力
とバランスするようになる。このとき、溝5によって浮
上刃は左右に分割され、安定した浮上状態が得られる。In the magneto-optical disk device equipped with the above-mentioned floating magnetic head, when the magneto-optical disk is rotated at high speed, the airflow flowing between the slider section 1 and the magneto-optical disk causes the floating magnetic head to be moved by an upward force (floating blade ) and floats above the magneto-optical disk. Then, at a position where the flying height reaches approximately 5 μm, the floating blade becomes balanced with the downward force exerted by the suspension. At this time, the floating blade is divided into left and right sides by the groove 5, and a stable floating state is obtained.
そして、情報記録時、一定光量のレーザービームを光磁
気ディスクに照射して磁性膜の温度をキュリー点近傍以
上、もしくは補償点近傍に加熱し、レーザービーム照射
部の保磁力をゼロ、又はほぼゼロとした上で、記録信号
に応して高速反転する磁界設定電流をコイル部2の導線
3に流すことにより、高速反転磁界を効率的に印加して
、オーバーライドによる高速データ記録を行うことがで
きる。When recording information, a laser beam of a certain amount of light is irradiated onto the magneto-optical disk to heat the magnetic film to a temperature above the Curie point or near the compensation point, and the coercive force of the laser beam irradiated area is reduced to zero or almost zero. Then, by flowing a magnetic field setting current that rapidly reverses in response to the recording signal through the conductor 3 of the coil section 2, a high-speed reverse magnetic field can be efficiently applied and high-speed data recording by override can be performed. .
以上の実施例では、光磁気ディスク装置に備えられる浮
上型磁気ヘッドについて説明したが、他のディスク交換
可能な磁気記録装置等の浮上型磁気ヘッドにも応用でき
る。In the above embodiments, a floating magnetic head provided in a magneto-optical disk device has been described, but the present invention can also be applied to floating magnetic heads in other disk-exchangeable magnetic recording devices.
本発明の浮上型磁気ヘッドは、以上のように、スライダ
ー部の底面に部分的に薄膜層を形成することにより溝を
設けたので、薄膜層の厚さを薄くすることにより、容易
に浅い溝が設けられる。これにより、高精度の工作機械
を用いなくても、大きな浮上刃が得られ、しかも、浮上
刃が左右に分割されて安定した浮上状態が実現される浮
上型磁気ヘット′を容易に製作できる。As described above, in the floating magnetic head of the present invention, the grooves are formed by partially forming a thin film layer on the bottom surface of the slider portion. will be provided. As a result, it is possible to easily manufacture a floating magnetic head' which can obtain a large floating blade without using a high-precision machine tool, and which can achieve a stable floating state by dividing the floating blade into left and right sides.
第1図は、本発明の一実施例を示すものであり、浮上型
磁気ヘッドの概略の構成を示す斜視図である。
第2図は、従来例を示すものであり、ハードディスク装
置用の浮上型磁気ヘッドの概略の構成を示す斜視図であ
る。
1はスライダー部、2はコイル部、3は導線、4は薄膜
層、5は溝である。FIG. 1 shows one embodiment of the present invention, and is a perspective view showing the general structure of a floating magnetic head. FIG. 2 shows a conventional example, and is a perspective view showing a schematic structure of a floating magnetic head for a hard disk drive. 1 is a slider part, 2 is a coil part, 3 is a conducting wire, 4 is a thin film layer, and 5 is a groove.
Claims (1)
浮上型磁気ヘッドにおいて、 上記溝はスライダー部の底面に部分的に薄膜層を形成す
ることにより設けられていることを特徴とする浮上型磁
気ヘッド。[Claims] 1. In a floating magnetic head in which a groove for stabilizing the floating state is provided on the bottom surface of the slider portion, the groove is provided by partially forming a thin film layer on the bottom surface of the slider portion. A floating magnetic head characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2027685A JP2945429B2 (en) | 1990-02-07 | 1990-02-07 | Flying magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2027685A JP2945429B2 (en) | 1990-02-07 | 1990-02-07 | Flying magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03232172A true JPH03232172A (en) | 1991-10-16 |
JP2945429B2 JP2945429B2 (en) | 1999-09-06 |
Family
ID=12227823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2027685A Expired - Lifetime JP2945429B2 (en) | 1990-02-07 | 1990-02-07 | Flying magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2945429B2 (en) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5625229A (en) * | 1979-08-08 | 1981-03-11 | Nec Corp | Manufacture of floating head slider |
JPS5647956A (en) * | 1979-08-08 | 1981-04-30 | Hitachi Ltd | Magnetic head |
JPS5744257A (en) * | 1980-08-29 | 1982-03-12 | Nec Corp | Production of negative pressure slider |
JPS6177163A (en) * | 1984-09-21 | 1986-04-19 | Fujitsu Ltd | Magnetic head |
JPS61120329A (en) * | 1984-11-16 | 1986-06-07 | Yokogawa Electric Corp | Manufacture of head slider |
JPS629572A (en) * | 1985-07-05 | 1987-01-17 | Mitsubishi Electric Corp | Manufacture of negative pressure type floating head slider |
JPH01236412A (en) * | 1988-03-17 | 1989-09-21 | Hitachi Maxell Ltd | Magneto-optical head |
-
1990
- 1990-02-07 JP JP2027685A patent/JP2945429B2/en not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5625229A (en) * | 1979-08-08 | 1981-03-11 | Nec Corp | Manufacture of floating head slider |
JPS5647956A (en) * | 1979-08-08 | 1981-04-30 | Hitachi Ltd | Magnetic head |
JPS5744257A (en) * | 1980-08-29 | 1982-03-12 | Nec Corp | Production of negative pressure slider |
JPS6177163A (en) * | 1984-09-21 | 1986-04-19 | Fujitsu Ltd | Magnetic head |
JPS61120329A (en) * | 1984-11-16 | 1986-06-07 | Yokogawa Electric Corp | Manufacture of head slider |
JPS629572A (en) * | 1985-07-05 | 1987-01-17 | Mitsubishi Electric Corp | Manufacture of negative pressure type floating head slider |
JPH01236412A (en) * | 1988-03-17 | 1989-09-21 | Hitachi Maxell Ltd | Magneto-optical head |
Also Published As
Publication number | Publication date |
---|---|
JP2945429B2 (en) | 1999-09-06 |
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