JPH07153215A - Floating type magnetic head device - Google Patents

Abstract

PURPOSE:To facilitate management at the time of production and to improve productivity by suppressing a change in the flatness of a slider at the time of producing a floating type magnetic head device. CONSTITUTION:The slider fixing surface 4b side of a slider fixing part 4 of a suspension 2 supporting the slider 1 incorporating a magnetic head element is provided with half etching parts 6a, 6b of a depth D confined to a range of 0.005mm<=D<=0.020mm. The shapes of these half etching parts 6a, 6b, when, for example, shown as a half etching part 6a, are approximately rectangular shapes arched on the short sides 6a2 of major axes 6a1. The half etching parts 6a, 6b may also be formed approximately orthogonally with the longitudinal direction of air bearing surfaces 1b of the slider 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a levitation type magnetic head device used in a hard disk drive device or the like, and more particularly to a fixing part of a levitation type magnetic head device in which a slider incorporating a magnetic head element is fixed to a suspension. The present invention relates to an improved flying type magnetic head device.

[0002]

2. Description of the Related Art In a hard disk drive device for recording / reproducing information on / from a hard disk or the like, in order to avoid frictional damage due to contact between the magnetic head and the surface of the magnetic disk, the magnetic head contacts the magnetic disk at the time of starting and stopping, A so-called contact start / stop type floating magnetic head device is used, in which the magnetic head is levitated at a minute distance from the surface of the magnetic disk by the airflow generated on the surface of the magnetic disk rotating at high speed during recording and reproduction. ing.

In the above contact start / stop type floating magnetic head device, a magnetic head element for recording / reproducing information is mounted on a slider having an air bearing surface which is a surface for receiving an air flow generated on the surface of a magnetic disk. The slider is built in, the slider is supported by a suspension configured by a leaf spring, and the suspension is supported by a support body. Then, at the time of recording / reproducing, a slider in which a magnetic head element that floats upon receiving an air current generated on the surface of the magnetic disk is incorporated is moved by a support in a plane parallel to the surface of the magnetic disk, and a predetermined recording track of the magnetic disk is obtained. Recording and reproduction of information is performed.

At this time, the slider is fixed to the suspension by a thermosetting resin or the like in a state in which the slider can be rotated back and forth (pitch direction) and left and right (roll direction) around the fixing portion. The slider fixing portion of the suspension is often fixed to a flat surface or a surface having a half-etched portion that functions as a resin reservoir and has a depth of about 0.03 mm.

As a method of forming a step having a complicated and highly accurate depth like the half-etched portion, there may be mentioned a method such as powder beam etching, ion etching, or oil discharge. When the half-etched portion is formed by these methods, the portion that cannot be etched is protected by a UV-curable resin or the like, the half-etched portion is etched and then washed with an organic solvent to remove the resin. Further, the depth of the half-etched portion can be regulated by controlling the powder injection pressure, the injection time, the ion concentration in the liquid, the shape of the electrode, and the like.

[0006]

However, in the floating magnetic head device in which the slider is fixed to the suspension as described above, the following disadvantages occur.

When the slider and the suspension are fixed to each other with a thermosetting resin or the like as described above, the thermosetting resin is supplied to the fixing surface of the slider, and the suspension is superposed on the fixing surface at a predetermined position and heated. The thermosetting resin is cured and fixed.

At this time, for example, if the fixing surface of the slider fixing portion of the suspension is a flat surface as described above, the thermosetting resin supplied to the fixing surface of the slider is easily pushed out to the outside when the suspensions are stacked. , A very small amount of resin remains between the slider and the suspension, and unevenness occurs in the fixing surface.

When the slider and suspension in which an extremely small amount of thermosetting resin remains are heated to cure the thermosetting resin and fix them, the thermal expansion coefficients of the slider and suspension differ. Therefore, when the slider and the suspension are thermally expanded by heating and then contracted by cooling, a compressive stress is applied to the fixing surface side of the slider and a tensile stress is applied to the air bearing surface side of the slider. As a result, the slider is bent, and the air bearing surface has a shape in which the central portion is significantly protruded (hereinafter, referred to as convex). As the residual amount of the thermosetting resin between the slider and the suspension decreases, the amount of deflection of the slider after heating increases, and the air bearing surface becomes more convex.

Further, even if the thermosetting resin on the fixing surface of the slider has the same coating amount, a portion where the coating thickness becomes thicker and a portion where the coating thickness becomes thinner occur (unevenness occurs in the fixing surface). When heating is performed to fix the slider, the stress applied to the slider is not constant, and the amount of deflection of the slider after heating remarkably varies.

As described above, if the air bearing surface of the slider is significantly convex or the amount of flexure of the slider is significantly varied, the flying posture of the slider during recording and reproduction is also greatly affected, and the flying distance is stabilized. It will hinder conversion. In addition, the slider air
It is difficult to control the shape of the bearing surface and the amount of deflection of the slider during manufacturing.

On the other hand, when the fixing surface of the slider fixing portion of the suspension is a surface having a half-etched portion with a depth of about 0.030 mm or more, as shown in FIG. Face 10
The thermosetting resin 102 applied to 1a is a half-etched portion 104 provided on the fixing surface 103a of the suspension 103 when the suspension 103 is superposed.
Flows in.

However, the half etching section 104 is
Since the depth of the thermosetting resin is about 0.030 mm or more, the thermosetting resin 10 is
2 is not always completely filled, and as a result, unevenness in the fixing surface occurs in the thermosetting resin remaining between the slider and suspension, the deflection amount of the slider after heating remarkably varies, and the flying distance of the slider Stabilization is hindered.

In order to confirm the above, the relationship between the depth of the half-etched portion provided in the suspension and the void generation rate in the half-etched portion when the suspension and the slider are fixed is investigated, and the result is shown in FIG. I got such a result. In FIG. 9, the horizontal axis represents the depth of the half-etched portion, and the vertical axis represents the void generation rate. As can be seen from the result of FIG. 9, the depth of the half-etched portion is 0.03.
When it is deeper than 0 mm, the void generation rate is high, it becomes difficult to fill the half-etched portion with the thermosetting resin, and the thermosetting resin remaining between the slider and the suspension has unevenness in the fixing surface. confirmed.

Furthermore, in order to reduce the stress on the slider caused by the difference in the coefficient of thermal expansion between the slider and the suspension when the thermosetting resin is heated, and to prevent the air bearing surface of the slider from becoming convex, Although it has been proposed to carry out the curing at room temperature, this method requires a long curing time and the productivity is not good.

Therefore, the present invention has been proposed in view of the actual situation of the prior art, and it is difficult for convexity of the air bearing surface of the slider and variations in the deflection amount of the slider to occur, and for easy management during manufacturing, It is an object of the present invention to provide a flying type magnetic head device with good productivity.

[0017]

In order to achieve the above-mentioned object, the present invention provides a flying magnetic head device in which a slider in which a magnetic head element is incorporated is fixed to a suspension. A half-etched portion having a depth D in the range of 0.005 mm ≦ D ≦ 0.020 mm is provided.

Further, according to the present invention, in the flying magnetic head device as described above, the shape of the half-etched portion is a substantially rectangular shape whose short side on the major axis is arcuate, and the half-etched portion is a slider. One or more may be provided substantially orthogonal to the longitudinal direction of the medium facing surface facing the medium.

[0019]

In the present invention, the depth D is 0.005 mm≤D≤0.020 in the slider fixing portion of the suspension.
Since the half-etched part is provided in the range of mm, when the suspension is overlapped at a predetermined position after applying the adhesive such as thermosetting resin on the fixing surface of the slider, the adhesive is pushed out to the outside. Flow into the half-etched portion without being evenly filled, and the half-etched portion is uniformly filled. Therefore, after that, even if the thermosetting resin is heated and cured to fix the slider and the suspension, the adhesive is sufficiently evenly arranged between the slider and the suspension as described above. The difference in mutual contraction due to the difference in thermal expansion between the slider and the suspension during heating is absorbed by the adhesive layer, and the change in flatness of the air bearing surface of the slider is suppressed.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described below with reference to the drawings. As shown in FIG. 1, the floating magnetic head device of the present embodiment has an air bearing surface which is a surface on which an unillustrated magnetic head element is mounted on one end side and which receives an air flow generated by rotation of a magnetic recording medium. A slider 1 having 1b is supported by a suspension 2 which is a leaf spring, and the suspension 2 is supported by a head arm 3.

On one end side of the suspension 2, a slider fixing portion 4 is provided as a low convex portion by punching. Then, the slider fixing portion 4 is fixed to the slider 1 by an adhesive such as a thermosetting resin. Further, as shown in FIG. 2, a connecting portion 4a is provided around the slider fixing portion 4 in the roll direction and the pitch direction.
A through groove portion 5 having a concentric circle shape is provided, and the slider 1 fixed to the slider fixing portion 4 can be rotated in the roll and pitch directions by spring elasticity. Further, the other end of the suspension 2 is supported by the base plate 3.

At this time, in the flying magnetic head device of this embodiment, as shown in FIG. 3, in particular, the slider fixing surface 4b of the slider fixing portion 4 of the suspension 2 described above.
On the side, slider 1, air bearing surface 1
Two substantially rectangular half-etched portions 6a and 6b are provided substantially parallel to each other in a direction orthogonal to the longitudinal direction of b.
The shape of the half-etched portions 6a, 6b is, for example, shows the half-etching portion 6a, a substantially rectangular shape in which the short sides 6a ₂ on the long axis 6a ₁ is made arcuate. The depth D of these half-etched portions 6a and 6b is
The range is 0.005 mm ≦ D ≦ 0.020 mm.

In the floating magnetic head device of this embodiment, as shown in FIGS. 4 and 5, the thermosetting resin 7 disposed between the slider 1 and the slider fixing portion 4 of the suspension 2 is A suspension fixing surface 1a, which is a main surface of the slider 1 opposite to the air bearing surface 1b, and a slider fixing portion 4 of the suspension 2.
Between the suspension fixing surfaces 4b and between the suspension fixing surface 1a and the half-etched portions 6a and 6b are sufficiently filled.

When manufacturing the floating magnetic head device of this embodiment, as shown in FIG. 2, after the thermosetting resin 7 is applied to the suspension fixing surface 1a of the slider 1 according to the bonding area. After the slider 1 and the slider fixing portion 4 of the suspension 2 are aligned with each other and the slider 1 and the suspension 2 are overlapped with each other, the thermosetting resin 7 is cured by heating to fix the slider 1 and the suspension 2. To do.

At this time, in the flying type magnetic head device of this embodiment, the half-etched portions 6a, 6b are provided on the slider fixing surface 4b side of the slider fixing portion 4 of the suspension 2 as described above. The thermosetting resin 7 applied to the suspension fixing surface 1a of the slider 1 is filled into the half-etched portions 6a and 6b without being extruded to the outside. Further, the depth D of the half-etched portions 6a and 6b is 0.005 mm ≦ D.
Since it is within the range of ≦ 0.020 mm, no holes are generated in the half-etched portions 6a and 6b, and the thermosetting resin 7 is evenly and fully filled in the half-etched portions 6a and 6b. It

That is, the thermosetting resin 7 is sufficiently uneven between the suspension fixing surface 1a of the slider 1 and the slider fixing surface 4b of the slider fixing portion 4 of the suspension 2 and between the suspension fixing surface 1a and the half-etched portions 6a and 6b. It will be filled without. In other words,
A layer made of a thermosetting resin 7 having a thickness of about 0.002 mm is formed between the suspension fixing surface 1a and the slider fixing surface 4b, and a thickness of 0.005 mm to 0 is provided between the suspension fixing surface 1a and the half-etched portions 6a and 6b. 0.020 m
A layer of about m of thermosetting resin 7 is formed.

Therefore, in the levitation type magnetic head device of this embodiment, when the thermosetting resin 7 is hardened by heating to fix the slider 1 and the suspension 2 to each other, the thermal expansion of the slider and the suspension at the time of heating. The difference in mutual shrinkage due to the difference between the two can be absorbed by the layer made of thermosetting resin 7, and the air bearing
It is possible to suppress changes in the flatness of the surface 1b.

In the flying magnetic head device of this embodiment, the half-etched portions 6a and 6b provided on the slider fixing portion 4 of the suspension 2 are orthogonal to the longitudinal direction of the air bearing surface 1b of the slider 1. Since it is provided in the direction, the effect of suppressing the flatness change of the slider 1 is also high.

In the flying type magnetic head device of this embodiment, since the change in the flatness of the air bearing surface 1b of the slider 1 is suppressed, it is easy to manage at the time of manufacture.

Further, the floating magnetic head device of the present embodiment is manufactured because it is not necessary to cure the resin by leaving it to stand at room temperature as in the conventional case, and the manufacturing can be performed without largely changing the conventional manufacturing method. The property is also good.

Next, in order to confirm the effect of the floating magnetic head device of this embodiment, the following experiment was conducted. That is, the floating magnetic head device of this example and a conventional floating magnetic head device were manufactured, and the difference in flatness of the air bearing surfaces of the sliders of these floating magnetic head devices was evaluated.

As the flying type magnetic head device of this embodiment,
The depth D of the half etchings 6a and 6b of the slider fixing portion 4 of the suspension 2 as described above is 0.020 mm.
And a sample of 0.005 mm were prepared as execution samples 1 and 2, and a conventional flying type magnetic head device in which the slider fixing portion of the suspension was a flat surface was prepared as a comparative sample 1.

The processing range of the half-etched portions 6a and 6b in the slider fixing portion 4 of the suspension 2 is set to be a range narrower than that of the suspension fixing surface 1a of the slider 1 in both of the working samples 1 and 2, and the thermosetting resin heat curing is performed. The conditions were the same for all the execution samples 1 and 2 and the comparative sample 1.

The air bearing of each sample
The difference in the flatness of the surface was evaluated as follows. That is, as shown in FIG. 6, the distance L from the air bearing surface 1b of the slider 1 to the reference line M in the slider 1 is sequentially measured from the highest point of the air bearing surface 1b in the longitudinal direction. The difference between the distance L at the measurement point and the distance L at the highest point was calculated and evaluated.

The measurement results are shown in FIG. In FIG. 7, the horizontal axis indicates the distance from the highest point of each measurement point, the vertical axis indicates the difference between the distance L at each measurement point and the distance L at the highest point, and the solid line in the figure indicates the result of the execution sample 1. In the figure, the broken line shows the result of the execution sample 2, and the dashed line in the figure shows the result of the comparative sample 1. In the figure, ◯ indicates the average value of the practical sample 1, Δ indicates the average value of the practical sample 2, and □ indicates the average value of the comparative sample 1.

As can be seen from the result shown in FIG. 7, the slider fixed portion of the suspension has a thickness of 0.005 mm to 0.02.
The change in flatness of the working samples 1 and 2 having the 0 mm half-etched portion was a considerably small value as compared with the comparative sample 1 in which the slider fixing portion was not processed.

This is because when the suspension is provided with a half-etched portion having an appropriate depth as in the practical samples 1 and 2, the sliders having different thermal expansion coefficients,
This is probably because a layer made of thermosetting resin having an appropriate thickness is formed between the suspensions, and the layer made of the thermosetting resin absorbs the mutual contraction difference between the slider and the suspension during heating. Therefore, the effect of the floating magnetic head device of this example was confirmed.

[0038]

As is apparent from the above description, in the present invention, the slider fixing portion of the suspension is
Since the half-etched portion having the depth D in the range of 0.005 mm ≦ D ≦ 0.020 mm is provided, after applying an adhesive such as a thermosetting resin to the fixing surface of the slider, the suspension is placed at a predetermined position. When they are superposed on each other, the adhesive uniformly flows into the half-etched portion without being pushed out to the outside, and is uniformly filled in the half-etched portion. Therefore, after that, even if the thermosetting resin is heated and cured to fix the slider and the suspension, the adhesive is sufficiently evenly arranged between the slider and the suspension as described above, The mutual contraction difference due to the difference in thermal expansion between the slider and the suspension during heating is absorbed by the adhesive layer, and the flatness change of the slider air bearing surface can be suppressed. Therefore, in the floating magnetic head device of the present invention, stabilization of the slider flying distance is achieved.

Further, according to the present invention, in the floating magnetic head device as described above, the shape of the half-etched portion is a substantially rectangular shape whose short side on the major axis is arcuate, and the half-etched portion is a slider. One or more may be provided substantially orthogonal to the longitudinal direction of the medium facing surface facing the medium of
A higher effect can be obtained, and a higher quality flying type magnetic head device can be obtained.

Further, in the flying type magnetic head device of the present invention, since the change in the flatness of the air bearing surface of the slider can be suppressed, the control at the time of manufacture is easy.

Further, in the floating magnetic head device of the present invention, the mutual contraction difference between the slider and the suspension during heating can be absorbed by the adhesive layer disposed between the slider and the suspension. Therefore, it is not necessary to cure the resin, the production conditions can be relaxed, and the production can be performed without significantly changing the conventional production method, so that the productivity is also good.

Further, the present invention can be applied not only to the floating magnetic head device but also to fixing various minute parts, and its industrial value is very high.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of a floating magnetic head device to which the present invention is applied.

FIG. 2 is an exploded perspective view of essential parts showing a slider and a suspension of an embodiment of a floating magnetic head device to which the present invention is applied.

FIG. 3 is an exploded perspective view of an essential part showing an enlarged slider and suspension fixing portion of an embodiment of a floating magnetic head device to which the present invention is applied.

FIG. 4 is a sectional view showing a fixed portion of a slider and a suspension of an embodiment of a floating magnetic head device to which the present invention is applied.

FIG. 5 is an enlarged cross-sectional view showing a fixed portion of a slider and a suspension of an embodiment of a floating magnetic head device to which the present invention is applied.

FIG. 6 is a perspective view schematically showing a method for measuring the difference in flatness of the air bearing surface of the slider.

FIG. 7 is a view showing a measurement result of a difference in flatness between air bearing surfaces of sliders.

FIG. 8 is an enlarged sectional view showing a fixing portion of a slider and a suspension of a conventional flying type magnetic head device.

FIG. 9 is a diagram showing a relationship between a depth of a half-etched portion and a void generation rate in a conventional floating magnetic head device.

[Explanation of symbols]

 1-Slider 1a --- Suspension fixing surface 1b-Air bearing surface 2-Suspension 3-Head arm 4-Slider fixing portion 4a・ ・ ・ Connecting part 4b ・ ・ ・ ・ Slider fixing surface 5 ・ ・ ・ Through groove parts 6a, 6b ・ ・ ・ ・ Half etching part 7 ・ ・ ・ Thermosetting resin

Claims (2)

[Claims] 1. A flying-type magnetic head device in which a slider incorporating a magnetic head element is fixed to a suspension, wherein a depth D is in the range of 0.005 mm ≦ D ≦ 0.020 mm in the slider fixing portion of the suspension. And a half-etched part that is formed. 2. The half-etched portion has a substantially rectangular shape in which the short side on the major axis has an arc shape, and the half-etched portion is substantially in the longitudinal direction of the medium facing surface of the slider which faces the medium. 2. The floating magnetic head device according to claim 1, wherein one or more are provided orthogonally to each other.