JPH0322646B2 - - Google Patents

Info

Publication number
JPH0322646B2
JPH0322646B2 JP60020811A JP2081185A JPH0322646B2 JP H0322646 B2 JPH0322646 B2 JP H0322646B2 JP 60020811 A JP60020811 A JP 60020811A JP 2081185 A JP2081185 A JP 2081185A JP H0322646 B2 JPH0322646 B2 JP H0322646B2
Authority
JP
Japan
Prior art keywords
magnetic
film
base material
perpendicular magnetic
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60020811A
Other languages
Japanese (ja)
Other versions
JPS61182624A (en
Inventor
Michio Ishikawa
Kyuzo Nakamura
Yoshifumi Oota
Hiroki Yamada
Noriaki Tani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2081185A priority Critical patent/JPS61182624A/en
Publication of JPS61182624A publication Critical patent/JPS61182624A/en
Publication of JPH0322646B2 publication Critical patent/JPH0322646B2/ja
Granted legal-status Critical Current

Links

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、高密度記録可能な垂直磁気記録体に
関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a perpendicular magnetic recording medium capable of high-density recording.

(従来の技術) 従来、非磁性基材面上に、軟質磁性膜と垂直磁
性膜とを順次積層形成して成るいわゆる2層膜媒
体型の垂直磁気記録体は公知である。
(Prior Art) A so-called two-layer media type perpendicular magnetic recording body in which a soft magnetic film and a perpendicular magnetic film are sequentially laminated on a non-magnetic base material surface is known.

(発明が解決しようとする問題点) 前記型式の垂直磁気記録体は、その再生時、特
にその軟質磁性膜と記録再生用ヘツドとの相互作
用が強く、特に、再生時には、再生出力が軟質磁
性膜の磁化容易方向では小さく、磁化困難方向で
は大きい。これは軟質磁性膜の初透磁率が、磁化
容易方向では小さく、磁化困難方向では大きいこ
とに起因している。従つて、例えば、デイスク状
の垂直磁気記録体の場合、軟質磁性膜に磁気異方
性が発生すると、円周方向には、即ち、ヘツドの
移動方向には、初透磁率が変化するので、モジユ
レーシヨンが生じてしまう。一般に、軟質磁性膜
の磁気異方性は、作成時の諸条件により生じ、特
に、インライン型のスパツタ装置で、例えば非磁
性デイスク基板を静置状態で、トレイに載置し、
トレイを走行させて、これにスパツタ処理で、軟
質磁性膜を施すとき、そのスパツタ条件により、
その走行方向に平行に磁気異方性が発生したり、
走行方向に対し垂直方向に磁気異方性が発生した
りし、その結果、生成の磁気記録デイスク製品
は、再生時モジユレーシヨンの大きいものとなり
問題があつた。
(Problems to be Solved by the Invention) In the perpendicular magnetic recording medium of the above type, the interaction between the soft magnetic film and the recording/reproducing head is particularly strong during reproduction, and especially during reproduction, the reproduction output is caused by the soft magnetic film. It is small in the direction of easy magnetization of the film and large in the direction of difficult magnetization. This is because the initial magnetic permeability of the soft magnetic film is small in the direction of easy magnetization and large in the direction of difficult magnetization. Therefore, for example, in the case of a disk-shaped perpendicular magnetic recording medium, when magnetic anisotropy occurs in the soft magnetic film, the initial magnetic permeability changes in the circumferential direction, that is, in the direction of movement of the head. Modulation will occur. In general, the magnetic anisotropy of a soft magnetic film is caused by various conditions at the time of production.
When running a tray and applying a soft magnetic film to it by sputtering, depending on the sputtering conditions,
Magnetic anisotropy occurs parallel to the running direction,
Magnetic anisotropy may occur in the direction perpendicular to the running direction, and as a result, the resulting magnetic recording disk product has a problem of large modulation during reproduction.

(問題点を解決するための手段) 本発明は、上記の問題を解消した磁気異方性を
一定に制御してモジユレーシヨンのない安定した
高出力で再生し得る垂直磁気記録体を提供するも
ので、非磁性基材面上に、軟質磁性膜と垂直磁性
膜とを順次積層形成して成る垂直磁気記録体にお
いて、非磁性基材の該面上に、記録再生時にヘツ
ドが移動する方向と直角の方向に延びた無数の微
細な凹凸条を設けて成る。
(Means for Solving the Problems) The present invention provides a perpendicular magnetic recording medium that solves the above problems and can reproduce at a stable high output without modulation by controlling the magnetic anisotropy to a constant level. In a perpendicular magnetic recording body in which a soft magnetic film and a perpendicular magnetic film are successively laminated on the surface of a non-magnetic base material, there is a magnetic field perpendicular to the direction in which the head moves during recording and reproduction on the surface of the non-magnetic base material. It is provided with countless fine unevenness lines extending in the direction of.

(実施例) 次に本発明の実施例につき説明する。(Example) Next, examples of the present invention will be described.

非磁性基材は、非磁性材のアルミニウム又は合
成樹脂材等から成り、従来使用されているものと
変りがなく、その形状は、円盤状、テープ状など
である。かゝる非磁性基材面に、適宜の手段で、
記録再生方向に対し直角の無数の微細な凹凸条を
形成する。第1図Aは、円盤状の非磁性基材、い
わゆるデイスク基板1に、矢示する記録再生方向
Xに対し直角の方向、換言すればデイスクの半径
方向に無数の凹条2を形成したものを示し、第1
図Bは、テープ状の非磁性基材、いわゆるテープ
基板1に、矢示する記録再生方向に対し直角の方
向、換言すればテープの幅方向に無数の平行の凹
条2を形成したものを示す。その凹条2の深さは
1000〜10Å程度が良い。尚、デイスク基板の場
合、これにNiPメツキなどの軟質膜を形成後、鏡
面仕上げを行なうことが一般であるが、その凹条
の刻成は、その鏡面仕上げの前又は後のいずれの
段階でも行なうことができる。
The non-magnetic base material is made of a non-magnetic material such as aluminum or a synthetic resin material, and is the same as that conventionally used, and its shape is a disc shape, a tape shape, etc. On the surface of such non-magnetic base material, by appropriate means,
Countless fine unevenness lines are formed perpendicular to the recording/reproducing direction. FIG. 1A shows a disc-shaped non-magnetic base material, a so-called disk substrate 1, in which countless grooves 2 are formed in a direction perpendicular to the recording/reproducing direction X indicated by the arrow, in other words, in the radial direction of the disk. and the first
Figure B shows a tape-shaped non-magnetic base material, a so-called tape substrate 1, on which countless parallel grooves 2 are formed in a direction perpendicular to the recording and reproducing direction shown by the arrow, in other words, in the width direction of the tape. show. The depth of the groove 2 is
Approximately 1000 to 10 Å is good. In the case of disk substrates, mirror finishing is generally performed after forming a soft film such as NiP plating, but the grooves are carved either before or after the mirror finishing. can be done.

該凹条の作成は、例えば、6000番程度のサンド
ペーパーでキズをつける方法、比較的粗い研摩剤
を懸濁せしめた液体を用いて、バフ研摩する方法
などにより達成される。このように作成した無数
の凹凸条面をもつ基材aを例えば、通常のインラ
イン型のスパツタ装置で常法により処理すること
により本発明のいわゆる2層膜媒体型垂直磁気記
録体が得られる。第3図は、その製造工程にある
インライン型スパツタ装置4を示し、5はその仕
込室、6はスパツタ績室、7は取出し室、8は軟
質磁性膜形成用スパツタカソード、9は垂直磁性
膜形成用スパツタカソード、10はトレイ、11
は、仕切室5、スパツタ室6及び取出し室7に
夫々接続する調節弁を介在した真空排気口、12
は、各室5,6,7間並にその両外端に有する開
閉弁つきの隔壁を示す。かくして、第1図Aの前
記凹凸条をもつデイスクの基板aに軟質磁性膜と
垂直磁化膜とを順次積層形成するため、常法によ
り、これをトレイ10内に垂直に立て、静置保持
し、矢示の方向に移動させて、スパツタ室6内で
軟質磁性材のスパツタと強磁性材のスパツタとを
行ない、第2図示のように、該デイスク基板a上
に、軟質磁性膜1aと垂直磁性膜1bとを有する
本発明の垂直磁気デイスクを得る。
The formation of the grooves can be achieved, for example, by making scratches with sandpaper of about 6000 grit, or by buffing using a liquid in which a relatively coarse abrasive is suspended. The so-called two-layer film medium type perpendicular magnetic recording body of the present invention can be obtained by processing the base material a having a countless number of uneven striped surfaces, produced in this manner, using a conventional method using, for example, a conventional in-line sputtering device. FIG. 3 shows an in-line sputtering device 4 in its manufacturing process, with reference numeral 5 to its preparation chamber, 6 to the sputtering chamber, 7 to the unloading chamber, 8 to the sputtering cathode for forming a soft magnetic film, and 9 to the perpendicular magnetic Sputter cathode for film formation, 10 is a tray, 11
12 is a vacuum exhaust port connected to the partition chamber 5, the sputtering chamber 6 and the take-out chamber 7 through a control valve, respectively;
1 shows a partition with on-off valves provided between the chambers 5, 6, and 7 and at both outer ends thereof. Thus, in order to sequentially laminate the soft magnetic film and the perpendicularly magnetized film on the substrate a of the disk having the uneven stripes shown in FIG. , and sputter a soft magnetic material and a ferromagnetic material in the sputtering chamber 6 by moving in the direction of the arrow. A perpendicular magnetic disk of the present invention having a magnetic film 1b is obtained.

次に実験例につき説明する。 Next, an experimental example will be explained.

中空円盤状のAl板上面に、NiP非晶質層を20μ
mの厚さにメツキしたものをデイスク基板とし、
この基板面に、これをアルミナ研摩剤を懸濁せし
めた水に浸け、バフ布を用いて、基板の中心から
半径方向に放射状に研摩して無数の方射状に延び
る微細な凹条を刻成した。
20 μm of NiP amorphous layer is placed on the top surface of the hollow disc-shaped Al plate.
The disk substrate is plated to a thickness of m,
The surface of this substrate is immersed in water in which alumina abrasive is suspended, and then polished radially from the center of the substrate using a buffing cloth to form countless fine grooves extending radially. accomplished.

この際の凹条の深さは約200Åであつた。この
ように作成した凹条を有する基板を、第3図示の
インライン型スパツタ装置に仕込み、その凹条の
ある面に、0.5μm厚のMo−パーマロイから成る
軟質磁性膜と0.2μm厚のCo−20at%Crから成る
垂直磁性膜とを順次スパツタ処理で形成して取り
出し、本発明の2層媒体型の垂直磁気記録用デイ
スクのを製造した。一方、比較のため、同じデイ
スク基板に、凹条刻成処理をせず、直ちに、イン
ライン型スパツタに仕込み、前記と同様の条件で
スパツタ処理し、同じ材料の同じ厚さの前記2層
膜媒体型の垂直磁気記録用デイスクを製造した。
The depth of the groove at this time was approximately 200 Å. The substrate having the grooves created in this way is placed in an in-line sputtering device shown in Figure 3, and a soft magnetic film made of Mo-permalloy with a thickness of 0.5 μm and a Co-permalloy with a thickness of 0.2 μm are placed on the surface with the grooves. A perpendicular magnetic film made of 20 at % Cr was sequentially formed by sputtering and removed to produce a two-layer medium type perpendicular magnetic recording disk of the present invention. On the other hand, for comparison, the same two-layer film medium made of the same material and having the same thickness was immediately charged into an in-line sputtering machine without performing the concave groove forming process and sputtered under the same conditions as above. A type of perpendicular magnetic recording disk was manufactured.

これらの両種デイスク製品を、主磁極励磁型垂
直ヘツドを用いて、1KBPIの記録密度で記録再
生を行ない、再生エンベロープを測定した。又そ
の両者の円周方向に測定した初透磁率を求めた。
その結果を第4図及び第5図に示す。図で、θ
は、トレイ移動方向に相当する方向の水平線上の
位を0゜とし、これを基線としこれからヘツドの走
行する円周上の角度位置を表わし、1回転し再び
前記水平線上の位置を360゜としたものである。各
図でIは本発明デイスクの特性曲線、Cは従来デ
イスクの特性曲線を示す。
Recording and reproduction were performed on both of these disk products at a recording density of 1 KBPI using a main pole excitation type vertical head, and the reproduction envelope was measured. In addition, the initial magnetic permeability measured in the circumferential direction of both was determined.
The results are shown in FIGS. 4 and 5. In the figure, θ
The position on the horizontal line in the direction corresponding to the tray movement direction is set to 0°, and this is used as the base line to represent the angular position on the circumference where the head travels from now on.After one rotation, the position on the horizontal line is set to 360° again. This is what I did. In each figure, I shows the characteristic curve of the disk of the present invention, and C shows the characteristic curve of the conventional disk.

これらグラフから、基板に凹条を施さない従来
のデイスクは、再生出力及び初透磁率とも変動が
極めて大きく、波打つに対し、基板に所定の方向
に凹条を施した本発明デイスクでは、再生出力及
び初透磁率とも変動が殆んどなく、安定して居り
再生出力も全体として大きいことが認められる。
From these graphs, it can be seen that the conventional disk without grooves on the substrate has extremely large fluctuations in both reproduction output and initial permeability and is wavy, whereas the disk of the present invention with grooves on the substrate in a predetermined direction has a reproduction output It is recognized that both the initial magnetic permeability and the initial magnetic permeability are stable with almost no fluctuation, and the reproduction output is large as a whole.

このように、本発明によるときは、基材面に、
走行方向に対し直角に微細な凹凸条を形成したも
のに、軟質磁性膜と垂直磁性膜を順次積層した垂
直磁気記録体としたので、磁気異方性を該凹凸条
の形成方向に平行して発生させることができるか
ら、該磁気異方性を一定に制御することができ
て、その記録再生時、ヘツド走行方向は、常に磁
化困難方向となり、初透磁率が高く、モジユレー
シヨンが殆んどない安定した高い再生出力が得ら
れる効果をもたらす。
In this way, according to the present invention, on the base material surface,
Since we created a perpendicular magnetic recording body in which a soft magnetic film and a perpendicular magnetic film were sequentially laminated on a material on which fine uneven stripes were formed perpendicular to the running direction, the magnetic anisotropy could be adjusted parallel to the direction in which the uneven stripes were formed. Because the magnetic anisotropy can be generated, the magnetic anisotropy can be controlled to a constant level, and during recording and reproduction, the head travel direction is always in the direction of difficulty in magnetization, the initial magnetic permeability is high, and there is almost no modulation. This provides the effect of obtaining stable and high playback output.

【図面の簡単な説明】[Brief explanation of drawings]

第1図A及び第1図Bは、本発明実施例の垂直
磁気記録体の基材の平面図、第2図は、本発明実
施の1例の1部を截除した平面図、第3図は、本
発明製品を製造するための1例の装置の1部を截
除した側面図、第4図は、本発明製品と従来品と
を対比した再生出力特性を示す図、第5図は、同
様の初透磁率特性を示す図である。 1……非磁性基材、2……凹条、a……凹凸条
をもつ基材、1a……軟質磁性膜、1b……垂直
磁性膜、4……スパツタ装置、I……本発明の再
生出力、初透磁率。
1A and 1B are plan views of a base material of a perpendicular magnetic recording medium according to an embodiment of the present invention, FIG. 2 is a partially cutaway plan view of an embodiment of the present invention, and FIG. The figure is a partially cutaway side view of an example of an apparatus for manufacturing the product of the present invention, FIG. 4 is a diagram showing reproduction output characteristics comparing the product of the present invention and a conventional product, and FIG. is a diagram showing similar initial permeability characteristics. DESCRIPTION OF SYMBOLS 1... Non-magnetic base material, 2... Recessed stripes, a... Base material with uneven stripes, 1a... Soft magnetic film, 1b... Perpendicular magnetic film, 4... Sputtering device, I... of the present invention Reproduction output, initial permeability.

Claims (1)

【特許請求の範囲】 1 非磁性基材面上に、軟質磁性膜と垂直磁性膜
とを順次積層形成して成る垂直磁気記録体におい
て、非磁性基材の該面上に、記録再生時にヘツド
が移動する方向と直角の方向に延びた無数の微細
な凹凸条を設けて成る垂直磁気記録体。 2 該凹凸条の深さは、1000〜10Å程度である特
許請求の範囲1に記載の垂直磁気記録体。
[Claims] 1. In a perpendicular magnetic recording body formed by successively laminating a soft magnetic film and a perpendicular magnetic film on the surface of a non-magnetic base material, a head is placed on the surface of the non-magnetic base material during recording and reproduction. A perpendicular magnetic recording medium consisting of countless fine concave and convex stripes extending in a direction perpendicular to the direction of movement. 2. The perpendicular magnetic recording body according to claim 1, wherein the depth of the uneven stripes is about 1000 to 10 Å.
JP2081185A 1985-02-07 1985-02-07 Vertical magnetic recording medium Granted JPS61182624A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2081185A JPS61182624A (en) 1985-02-07 1985-02-07 Vertical magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2081185A JPS61182624A (en) 1985-02-07 1985-02-07 Vertical magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS61182624A JPS61182624A (en) 1986-08-15
JPH0322646B2 true JPH0322646B2 (en) 1991-03-27

Family

ID=12037420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2081185A Granted JPS61182624A (en) 1985-02-07 1985-02-07 Vertical magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS61182624A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0715754B2 (en) * 1985-06-12 1995-02-22 ティーディーケイ株式会社 Perpendicular magnetization rigid disk
JPH0758538B2 (en) * 1986-05-08 1995-06-21 日本電気株式会社 Magnetic recording body and manufacturing method thereof
JPH0347382Y2 (en) * 1986-11-27 1991-10-09
JPS6388013U (en) * 1986-11-27 1988-06-08
JP2003338019A (en) 2002-05-22 2003-11-28 Hitachi Ltd Magnetic recording medium and its manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54155013A (en) * 1978-05-27 1979-12-06 Matsushita Electric Ind Co Ltd Magnetic recording medium
JPS5924432A (en) * 1982-07-29 1984-02-08 Matsushita Electric Ind Co Ltd Magnetic recording medium

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54155013A (en) * 1978-05-27 1979-12-06 Matsushita Electric Ind Co Ltd Magnetic recording medium
JPS5924432A (en) * 1982-07-29 1984-02-08 Matsushita Electric Ind Co Ltd Magnetic recording medium

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