JPS61182624A - Vertical magnetic recording medium - Google Patents

Vertical magnetic recording medium

Info

Publication number
JPS61182624A
JPS61182624A JP2081185A JP2081185A JPS61182624A JP S61182624 A JPS61182624 A JP S61182624A JP 2081185 A JP2081185 A JP 2081185A JP 2081185 A JP2081185 A JP 2081185A JP S61182624 A JPS61182624 A JP S61182624A
Authority
JP
Japan
Prior art keywords
recording
magnetic film
reproducing
magnetic recording
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2081185A
Other languages
Japanese (ja)
Other versions
JPH0322646B2 (en
Inventor
Michio Ishikawa
道夫 石川
Kyuzo Nakamura
久三 中村
Yoshifumi Oota
太田 賀文
Hirooki Yamada
太起 山田
Noriaki Tani
典明 谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2081185A priority Critical patent/JPS61182624A/en
Publication of JPS61182624A publication Critical patent/JPS61182624A/en
Publication of JPH0322646B2 publication Critical patent/JPH0322646B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To reproduce data at a stable high output level without modulation by providing a nonmagnetic base with numerous fine recessed and projected strips extending vertically with respect to the direction in which a head moves at recording and reproducing. CONSTITUTION:Numerous fine recessed strips vertical with respect to the recording and reproducing direction are formed at a degree of 1,000-10Angstrom on the nonmagnetic base 1, which is laminated with a soft magnetic film 1a and a vertical magnetic film 1b by a popular spatter device. Accordingly the head traveling direction is hard to be magnetized at recording and reproducing, and a stable high reproduced output can be attained with a high magnetic permeability and a far less modulation.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、高密度記録可能な垂直磁気記録体に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to a perpendicular magnetic recording medium capable of high-density recording.

(従来の技術) 従来、非磁性基材面上に、軟質磁性膜と垂直磁性膜とを
順次積層形成して成るいわゆる2層膜媒体型の垂直磁気
記録体は公知である。
(Prior Art) A so-called two-layer media type perpendicular magnetic recording body in which a soft magnetic film and a perpendicular magnetic film are sequentially laminated on a non-magnetic base material surface is known.

(発明が解決しようとする問題点) 前記型式の垂直磁気記録体は、その再生時、特にその軟
質磁性膜と記録再生用ヘッドとの相互作用が強く、特に
、再生時には、再生出力が軟質磁性膜の磁化容易方向で
は小さく、磁化困難方向では大きい。これは軟質磁性膜
の初透磁率が、磁化容易方向では小さく、磁化困難方向
では大きいことに起因している。従って、例えば、ディ
スク状の垂直磁気記録体の場合、軟質磁性膜に磁気異方
性が発生すると、円周方向には、即ち、ヘッドの移動方
向には、初透磁率が変化するので、モジュレーションが
生じてしまう。一般に、軟質磁性膜の磁気異方性は、作
成時の諸条件により生じ、特に、インライン型のスパッ
タ装置で、例えば非磁性ディスク基板を静置状態で、ト
レイに載置し、トレイを走行させて、これにスパッタ処
理で、軟質磁性膜を施すとき、そのスパッタ条件により
、その走行方向に平行に異方性が発生したり、走行方向
に対し垂直方向に異方性が発生したりし、その結果、生
成の磁気記録ディスク製品は、再生時モジュレーション
の大きいものとなり問題があった。
(Problems to be Solved by the Invention) In the perpendicular magnetic recording body of the above type, during reproduction, the interaction between the soft magnetic film and the recording/reproducing head is particularly strong, and particularly during reproduction, the reproduction output is caused by the soft magnetic film. It is small in the direction of easy magnetization of the film and large in the direction of difficult magnetization. This is because the initial magnetic permeability of the soft magnetic film is small in the direction of easy magnetization and large in the direction of difficult magnetization. Therefore, for example, in the case of a disk-shaped perpendicular magnetic recording medium, when magnetic anisotropy occurs in the soft magnetic film, the initial magnetic permeability changes in the circumferential direction, that is, in the direction of movement of the head. will occur. In general, the magnetic anisotropy of a soft magnetic film is caused by various conditions at the time of production, and in particular, in an in-line sputtering device, for example, a non-magnetic disk substrate is placed on a tray in a stationary state, and the tray is moved. When applying a soft magnetic film to this by sputtering, depending on the sputtering conditions, anisotropy may occur parallel to the running direction or perpendicular to the running direction. As a result, the produced magnetic recording disk products had a problem in that they had large modulation during playback.

(問題点を解決するための手段) 本発明は、上記の問題を解消したモジュレーションのな
い安定した高出力で再生し得る垂直磁気記録体を提供す
るもので、非磁性基材面上に、軟質磁性膜と垂直磁性膜
とを順次積層形成して成る垂直磁気記録体において、非
磁性基材の該面上に、記録再生時にヘッドが移動する方
向と直角の方向に延びた無数の微細な凹凸条を設けて成
る。
(Means for Solving the Problems) The present invention provides a perpendicular magnetic recording medium that solves the above problems and can be reproduced with stable high output without modulation. In a perpendicular magnetic recording body formed by sequentially laminating a magnetic film and a perpendicular magnetic film, there are countless fine irregularities on the surface of a non-magnetic base material extending in a direction perpendicular to the direction in which the head moves during recording and reproduction. It consists of provisions.

(実施例) 次に本発明の実施例につき説明する。(Example) Next, examples of the present invention will be described.

非磁性基材は、非磁性材のアルミニウム又は合成1i1
111材等から成り、従来使用されているものと変りが
なく、その形状は、円盤状、テープ状などである。か)
る非磁性基材面に、適宜の手段で、記録再生方向に対し
直角の無数の微細な凹凸条を形成する。第1図Aは、円
盤状の非磁性基材、いわゆるディスク基板(1)に、矢
示する記録再生方向に対し直角の方向、換言すればディ
スクの半径方向に無数の凹条(りを形成したものを示し
、第1図Bは、テープ状の非磁性基材、いわゆるテープ
基板(1)に、矢示する記録再生方向に対し直角の方向
、換言すればテープの幅方向に無数の平行の凹条(2)
を形成したものを示す。その凹条(ゐの深さは1000
〜10人程度が良い。尚、ディスク基板の場合、これに
NiPメッキなどの軟質膜を形成後、鏡面仕上げを行な
うことが一般であるが、その凹条の刻或は、その鏡面仕
上げの前又は後のいずれの段階でも行なうことができる
The non-magnetic base material is non-magnetic aluminum or synthetic 1i1
It is made of 111 material, etc., and is the same as that used conventionally, and its shape is disc-shaped, tape-shaped, etc. mosquito)
On the surface of the non-magnetic base material, countless fine irregularities perpendicular to the recording and reproducing direction are formed by an appropriate means. Figure 1A shows a disk-shaped non-magnetic base material, a so-called disk substrate (1), in which countless grooves are formed in a direction perpendicular to the recording and reproducing direction indicated by the arrow, in other words, in the radial direction of the disk. Figure 1B shows a tape-shaped non-magnetic base material, the so-called tape substrate (1), in a direction perpendicular to the recording and reproducing direction indicated by the arrow, in other words, in a direction parallel to the width direction of the tape. groove (2)
This shows what was formed. The depth of the groove (i) is 1000
~10 people is good. In the case of a disk substrate, it is common to perform mirror finishing after forming a soft film such as NiP plating on it, but it is common practice to perform mirror finishing after forming a soft film such as NiP plating. can be done.

該凹条の作成は、例えば、6000番程度0サンドベー
パーでキズをつける方法、比較的粗い研摩剤を懸濁せし
めた液体を用いて、パフ研摩す□。
The grooves can be created, for example, by making scratches with a sand vapor of about 6000, or by puff polishing using a liquid in which a relatively coarse abrasive is suspended.

る方法などにより達成される。このように作成した無数
の凹凸条面をもつ基材aを例えば、通常のインライン型
のスパッタ装置で常法により処理することにより本発明
のいわゆる2層膜媒体型垂直磁気記録体が得られる。第
2図は、その製造工程にあるインライン型スパッタ装置
(4)を示し、(5)はその仕込室、(6)はスパッタ
室、(7)は取出し室、(8)は軟質磁性膜形成用スパ
ッタカソード、(9)は垂直磁性膜形成用スパッタカソ
ード、(1Gはトレイ、■は、仕切室(5)、スパッタ
室(6)及び取出し室(7)に夫々接続する調節弁を介
在した真空排気口、(+21は、各室(ω(6) (7
)間並にその両外端に有する開閏弁つきの隔壁を示す。
This can be achieved by methods such as The so-called two-layer film medium type perpendicular magnetic recording body of the present invention can be obtained by processing the base material a having a countless number of uneven stripes thus prepared using, for example, a conventional in-line sputtering apparatus in a conventional manner. Figure 2 shows the in-line sputtering device (4) in its manufacturing process, where (5) is its preparation chamber, (6) is its sputtering chamber, (7) is its unloading chamber, and (8) is its soft magnetic film forming chamber. (9) is a sputtering cathode for forming a perpendicular magnetic film, (1G is a tray, and ■ is a control valve connected to the partition chamber (5), the sputtering chamber (6), and the take-out chamber (7), respectively. Vacuum exhaust port, (+21 is for each chamber (ω(6) (7
) shows a bulkhead with opening valves at both outer ends.

かくして、第1図Aの前記凹凸条をもつディスクの基板
aに軟質磁性膜と垂直磁化膜とを順次積層形成するため
、常法により、これをトレイ0G内に垂直に立て、静置
保持し、矢示の方向に移動させて、スパッタ室(6)内
で軟質磁性材のスパッタと強磁性材のスパッタとを行な
い、第3図示のように、該ディスク基板a上に、軟質磁
性膜(1a)と垂直磁性膜(1b)とを有する本発明の
垂直磁気ディスクを得る。
Thus, in order to sequentially laminate the soft magnetic film and the perpendicularly magnetized film on the substrate a of the disk having the uneven stripes shown in FIG. , in the direction of the arrow to perform sputtering of soft magnetic material and sputtering of ferromagnetic material in the sputtering chamber (6), and as shown in the third figure, a soft magnetic film ( A perpendicular magnetic disk of the present invention having a perpendicular magnetic film (1a) and a perpendicular magnetic film (1b) is obtained.

次に実験例につき説明する。Next, an experimental example will be explained.

中空円盤状のM板上面に、旧P非晶質層を20声の厚さ
にメッキしたものをディスク基板とし、この基板面に、
これをアルミナ研摩剤を懸濁せしめた水に浸け、パフ布
を用いて、基板の中心から半径方向に放射状に研摩して
無数の放射状に延びる微細な凹条を刻成した。
The upper surface of a hollow disk-shaped M plate is plated with a former P amorphous layer to a thickness of 20 tones to form a disk substrate, and on this substrate surface,
This was immersed in water in which alumina abrasive was suspended, and polished radially from the center of the substrate using a puff cloth to form countless fine grooves extending radially.

この際の凹条の深さは約200人であった。このように
作成した凹条を有する基板を、第2図示のインライン型
スパッタ装置に仕込み、その凹条のある面に、0.5I
J1厚のNo−パーマロイから成る軟質磁性膜と0.2
111厚のCo −20atXCrから成る垂直磁性膜
とを順次スパッタ処理で形成して取り出し、本発明の2
層媒体型の垂直磁気記録用ディスクのを製造した。一方
、比較のため、同じディスク基板に、四条創成処理をせ
ず、直ちに、インライン型スパッタに仕込み、前記と同
様の条件でスパッタ処理し、同じ材料の同じ厚さの前記
2層躾媒体型の垂直磁気記録用ディスクを製造した。
The depth of the groove at this time was approximately 200 people. The substrate having the grooves created in this way was placed in an in-line sputtering apparatus shown in the second figure, and a 0.5I
A soft magnetic film made of No-Permalloy with a thickness of J1 and 0.2
A perpendicular magnetic film made of Co-20at
A layered perpendicular magnetic recording disk was manufactured. On the other hand, for comparison, the same disk substrate was immediately subjected to in-line sputtering without undergoing the four-line forming process, and sputtered under the same conditions as above, and the two-layer medium type was prepared using the same material and the same thickness. A perpendicular magnetic recording disk was manufactured.

これらの両種ディスク製品を、主磁極励磁型垂直ヘッド
を用いて、1にBPIの記録密度で記録再生を行ない、
再生エンベロープを測定した。
These two types of disk products are recorded and reproduced at a recording density of 1 BPI using a main pole excitation type perpendicular head.
The reproduction envelope was measured.

又その両者の円周方向に測定した初透磁率を求めた。そ
の結果を第4図及び第5図に示す。図で、θは、トレイ
移動方向に相当する方向の水平線上の位置を06とし、
これを基線としこれからヘッドの走行する円周上の角度
位置を表わし、1回転し再び前記水平線上の位置を36
0゜としたものである。各図で■は本発明ディスクの特
性曲線、Cは従来ディスクの特性曲線を示す。
In addition, the initial magnetic permeability measured in the circumferential direction of both was determined. The results are shown in FIGS. 4 and 5. In the figure, θ is the position on the horizontal line in the direction corresponding to the tray movement direction, which is 06,
Using this as a base line, it represents the angular position on the circumference where the head will travel from now on, rotates once, and returns to the position on the horizontal line by 36
It is set to 0°. In each figure, ■ indicates the characteristic curve of the disc of the present invention, and C indicates the characteristic curve of the conventional disc.

これらグラフから、基板に凹条を施さない従来のディス
クは、再生出力及び初透磁率とも変動が極めて大きく、
波打つに対し、基板に所定の方向に凹条を施した本発明
ディスクでは、再生出力及び初透磁率とも変動が殆んど
なく、安定して層り再生出力も全体として大きいことが
認められる。
From these graphs, it can be seen that conventional disks without grooves on the substrate have extremely large fluctuations in both reproduction output and initial magnetic permeability.
In contrast to the waving, in the disk of the present invention in which the substrate is grooved in a predetermined direction, there is almost no fluctuation in both the reproduction output and the initial magnetic permeability, and it is recognized that the reproduction output is stable and large as a whole.

このように、本発明によるときは、基材面に、走行方向
に対し直角に微細な凹凸条を形成したものに、軟質磁性
膜並に垂直磁性膜を順次積層した垂直磁気記録体とした
ので、その記録再生時、ヘッド走行方向は、常に磁化困
難方向となり、初透磁率が高く、モジュレーションが殆
んどない安定した高い再生出力が得られる効果をもたら
す。
As described above, according to the present invention, a perpendicular magnetic recording body is obtained in which a soft magnetic film and a perpendicular magnetic film are sequentially laminated on a base material surface having minute unevenness lines formed perpendicular to the running direction. During recording and reproduction, the head running direction is always in the direction of difficulty in magnetization, resulting in a high initial magnetic permeability and a stable high reproduction output with almost no modulation.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図A及び第1図Bは、本発明実施例の垂直磁気記録
体の基材の平面図、第2図は、本発明実施の1例の1部
を截除した平面図、第3図は、本発明製品を製造するた
めの1例の装置の1部を截除した側面図、第4図は、本
発明製品と従来品とを対比した再生出力特性を示す図、
第5図は、同様の初透磁率特性を示す図である。 (1)・・・非磁性基材     (り・・・凹条a・
・・凹凸条をもつ基材 (1a)・・・軟質磁性膜(1
b)・・・垂直磁性膜     A・・・本発明品(4
)−・・スパッタ装置 !・・・本発明の再生出力、初透磁率 11!12る 第2図 第3図 第5図 (θつ
1A and 1B are plan views of a base material of a perpendicular magnetic recording medium according to an embodiment of the present invention, FIG. 2 is a partially cutaway plan view of an embodiment of the present invention, and FIG. The figure is a partially cutaway side view of an example of an apparatus for manufacturing the product of the present invention, and FIG. 4 is a diagram showing reproduction output characteristics comparing the product of the present invention and a conventional product.
FIG. 5 is a diagram showing similar initial permeability characteristics. (1)...Nonmagnetic base material (ri...concave strip a)
... Base material with uneven stripes (1a) ... Soft magnetic film (1
b)... Perpendicular magnetic film A... Product of the present invention (4
)--Sputtering equipment! ...Reproduction output of the present invention, initial magnetic permeability 11!12 Figure 2 Figure 3 Figure 5 (θ angle

Claims (1)

【特許請求の範囲】 1、非磁性基材面上に、軟質磁性膜と垂直磁性膜とを順
次積層形成して成る垂直磁気記録体において、非磁性基
材の該面上に、記録再生時にヘッドが移動する方向と直
角の方向に延びた無数の微細な凹凸条を設けて成る垂直
磁気記録体。 2、該凹凸条の深さは、1000〜10Å程度である特
許請求の範囲(1)に記載の垂直磁気記録体。
[Claims] 1. In a perpendicular magnetic recording body in which a soft magnetic film and a perpendicular magnetic film are sequentially laminated on a surface of a non-magnetic base material, on the surface of the non-magnetic base material, during recording and reproduction, A perpendicular magnetic recording medium consisting of countless fine irregularities extending in a direction perpendicular to the direction in which the head moves. 2. The perpendicular magnetic recording body according to claim (1), wherein the depth of the uneven stripes is about 1000 to 10 Å.
JP2081185A 1985-02-07 1985-02-07 Vertical magnetic recording medium Granted JPS61182624A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2081185A JPS61182624A (en) 1985-02-07 1985-02-07 Vertical magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2081185A JPS61182624A (en) 1985-02-07 1985-02-07 Vertical magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS61182624A true JPS61182624A (en) 1986-08-15
JPH0322646B2 JPH0322646B2 (en) 1991-03-27

Family

ID=12037420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2081185A Granted JPS61182624A (en) 1985-02-07 1985-02-07 Vertical magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS61182624A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61287028A (en) * 1985-06-12 1986-12-17 Tdk Corp Vertically magnetized rigid disk
JPS62262217A (en) * 1986-05-08 1987-11-14 Nec Corp Magnetic recording medium and its manufacture
JPS6388013U (en) * 1986-11-27 1988-06-08
JPS6388011U (en) * 1986-11-27 1988-06-08
US7249405B2 (en) 2002-05-22 2007-07-31 Hitachi Global Storage Technologies Japan, Ltd. Method for manufacturing a magnetic medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54155013A (en) * 1978-05-27 1979-12-06 Matsushita Electric Ind Co Ltd Magnetic recording medium
JPS5924432A (en) * 1982-07-29 1984-02-08 Matsushita Electric Ind Co Ltd Magnetic recording medium

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54155013A (en) * 1978-05-27 1979-12-06 Matsushita Electric Ind Co Ltd Magnetic recording medium
JPS5924432A (en) * 1982-07-29 1984-02-08 Matsushita Electric Ind Co Ltd Magnetic recording medium

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61287028A (en) * 1985-06-12 1986-12-17 Tdk Corp Vertically magnetized rigid disk
JPS62262217A (en) * 1986-05-08 1987-11-14 Nec Corp Magnetic recording medium and its manufacture
JPS6388013U (en) * 1986-11-27 1988-06-08
JPS6388011U (en) * 1986-11-27 1988-06-08
JPH0347382Y2 (en) * 1986-11-27 1991-10-09
US7249405B2 (en) 2002-05-22 2007-07-31 Hitachi Global Storage Technologies Japan, Ltd. Method for manufacturing a magnetic medium

Also Published As

Publication number Publication date
JPH0322646B2 (en) 1991-03-27

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