JPH03225975A - Laminated piezoelectric actuator element - Google Patents
Laminated piezoelectric actuator elementInfo
- Publication number
- JPH03225975A JPH03225975A JP2022628A JP2262890A JPH03225975A JP H03225975 A JPH03225975 A JP H03225975A JP 2022628 A JP2022628 A JP 2022628A JP 2262890 A JP2262890 A JP 2262890A JP H03225975 A JPH03225975 A JP H03225975A
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- comb
- side face
- laminated
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims abstract description 32
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 abstract description 9
- 238000007639 printing Methods 0.000 abstract description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 3
- 238000005476 soldering Methods 0.000 abstract 2
- 239000011521 glass Substances 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 238000001962 electrophoresis Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Impact Printers (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は積層圧電アクチュエ〒り素子に関し、特に外部
電極の構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laminated piezoelectric actuator element, and particularly to the structure of an external electrode.
第3図及び第4図は従来の積層圧電アクチュエータ素子
の構造を示す横断面図と斜視図である。3 and 4 are a cross-sectional view and a perspective view showing the structure of a conventional laminated piezoelectric actuator element.
従来の積層圧電アクチュエータ素子は、圧電セラミック
材1と内部電極2とを交互に積層し、素子の対向する側
面にそれぞれ露出する内部電極2の一方の端面は対向す
る側面において一層おきにガラスの絶縁体3を電気泳動
法やスクリーン印刷法等により付着させた後、焼成して
絶縁した後、前記対向する側面で絶縁されていない一方
の内部電極を接続するためにAgペーストを塗布し、内
部電極2と絶縁体3.外部電極4により2つの櫛形電極
を構成し、この2つの櫛形電極間に電圧を印加し、内部
電極間の圧電セラミックス材1を変形させ、アクチュエ
ータとして変位を取出していた。In a conventional multilayer piezoelectric actuator element, piezoelectric ceramic materials 1 and internal electrodes 2 are alternately laminated, and one end surface of the internal electrodes 2 exposed on opposing sides of the element is covered with glass insulation every other layer on the opposing sides. After attaching the body 3 by electrophoresis, screen printing, etc., and insulating it by firing, an Ag paste is applied to connect one of the internal electrodes that is not insulated on the opposing sides, and the internal electrode 2 and insulator 3. The external electrode 4 constitutes two comb-shaped electrodes, a voltage is applied between the two comb-shaped electrodes, the piezoelectric ceramic material 1 between the internal electrodes is deformed, and displacement is taken out as an actuator.
上述した従来の圧電アクチュエータ素子は側面に露出し
た内部型8ii2を1層毎に絶縁体3で絶縁しているが
、絶縁方法として電気泳動法を用いた場合、絶縁したい
内部電極に絶縁体3を確実に付着させることは容易では
あるが、内部電極2に絶縁体3が付着し、付着量が多く
なると絶縁体3が抵抗となりより厚い絶縁体3を形成す
ることが難しくなる。又スクリーン印刷法を用いた場合
は、側面の全幅に渡り、内部電極2を絶縁体3で覆う必
要があるが、内部電極2は焼成時に湾曲することもあり
内部電極2の露出を防ぐため、絶縁体3の幅を大きくす
ると、絶縁体3が付着してはならない内部電極2にも付
着してしまい導通が得られなくなるため、幅を大きくす
ることがでないという欠点がある。又いずれの方法にお
いても絶縁体としてガラスを使用しているため、内部電
極間に電圧を繰り返し印加すると、ガラスに歪が作用し
疲労破壊が生じ絶縁性が失なわれ、放電するという品質
的な欠点がある。In the conventional piezoelectric actuator element described above, the internal mold 8ii2 exposed on the side surface is insulated layer by layer with an insulator 3, but when electrophoresis is used as the insulation method, the insulator 3 is applied to the internal electrode to be insulated. Although it is easy to deposit the insulator 3 reliably, if the insulator 3 adheres to the internal electrode 2 and the amount of adhesion increases, the insulator 3 becomes a resistance, making it difficult to form a thicker insulator 3. In addition, when using the screen printing method, it is necessary to cover the internal electrode 2 with the insulator 3 over the entire width of the side surface, but since the internal electrode 2 may be curved during firing, in order to prevent the internal electrode 2 from being exposed, If the width of the insulator 3 is increased, the insulator 3 will also adhere to the internal electrodes 2 where it should not be attached, making it impossible to obtain electrical continuity, so there is a drawback that the width cannot be increased. In addition, since glass is used as an insulator in both methods, repeated application of voltage between internal electrodes causes strain on the glass, causing fatigue breakdown and loss of insulation, resulting in electrical discharge. There are drawbacks.
本発明の目的は、絶縁体の材料や厚さが自由に選択する
ことが可能となり、信頼性や繰り返し耐久性の高い積層
圧電アクチュエータ素子を提供することにある。An object of the present invention is to provide a laminated piezoelectric actuator element that allows the material and thickness of the insulator to be freely selected and has high reliability and repeated durability.
本発明の積層圧電アクチュエータ素子は、積層焼結体の
対向する1対の側面に形成された圧電セラミック材と内
部電極が積層されている方向の長さがほぼ側面の長さと
同じで、幅が側面の幅の80%以下である連続した絶縁
体と、この絶縁体上に櫛形状で櫛歯の先端部が側面に露
出している内部電極と一層おきに電気的に接続して形成
された外部電極とを有することを特徴として構成される
。In the laminated piezoelectric actuator element of the present invention, the length in the direction in which the piezoelectric ceramic material and the internal electrode formed on a pair of opposing side surfaces of the laminated sintered body are laminated is approximately the same as the length of the side surface, and the width is It is formed by electrically connecting every other layer a continuous insulator with a width of 80% or less of the width of the side surface and an internal electrode having a comb shape with the tips of the comb teeth exposed on the side surface. The structure is characterized by having an external electrode.
次に、本発明について図面を参照して説明する。第1図
は本発明の一実施例の側面図である。Next, the present invention will be explained with reference to the drawings. FIG. 1 is a side view of one embodiment of the present invention.
シート状の圧電セラミックス材1のみを積層した部分と
圧電セラミックス材1と内部電極2が交互になる部分を
高圧プレスにて一体に積層した後、積層体を焼成し焼結
体を得る。A portion in which only sheet-shaped piezoelectric ceramic materials 1 are laminated and a portion in which piezoelectric ceramic materials 1 and internal electrodes 2 are alternately laminated are integrally laminated using a high-pressure press, and then the laminated body is fired to obtain a sintered body.
次に、焼結体を積層方向に対し垂直に切離し、所望する
寸法の焼結体を切り出す。切り出された焼結体の対向す
る側面の圧電セラミックス材2のみが積層された部分に
銀ペーストを印刷し、焼成してはんだ肘用外部電極6を
形成する。Next, the sintered body is cut perpendicularly to the stacking direction to cut out a sintered body of desired dimensions. A silver paste is printed on a portion of the cut out sintered body on opposite sides where only the piezoelectric ceramic material 2 is laminated, and is fired to form an external electrode 6 for a solder elbow.
次に、切り出された焼結体のはんだ肘用外部電極6を形
成した側面に厚さ0.3tで長さがほぼ側面と同じで巾
が側面より3mmはど小さいガラスエポキシ板の絶縁体
3をエポキシ接着剤にて側面に接着する。Next, on the side surface of the cut out sintered body on which the external electrode 6 for the solder elbow was formed, an insulator 3 made of a glass epoxy plate having a thickness of 0.3 t, a length almost the same as the side surface, and a width 3 mm smaller than the side surface is attached. Glue it to the side using epoxy adhesive.
次に、一方の側面状に形状が櫛形をした外部電極4を櫛
形の櫛歯の先端部が側面に露出している内部電極2の端
部と一層おきに接し又はんだ肘用外部電極6にも接する
ような位置にしさらに櫛形の他の部分が絶縁体3上にな
るよう印刷法にて形成する。Next, an external electrode 4 having a comb-shaped shape on one side is brought into contact with the end of the internal electrode 2 whose comb-shaped tips are exposed on the side at every other layer, and is attached to the external electrode 6 for the solder elbow. The other part of the comb shape is formed by a printing method so as to be in contact with the insulator 3.
次に、他方の側面上にも同様に外部電極4を印剛性にて
形成するがこの場合、外部電極4は対向する側面で外部
電極4と接していない内部電極2の端面と接するように
する。この場合1層分の内部電極に流れる電流は少ない
なめ、外部電極4と内部電極の接続部は0.5〜1mm
で十分であるため、従来のスクリーン印刷方法と比べ位
置合せ精度は高精度を必要としない。Next, an external electrode 4 is similarly formed on the other side surface with a rigid shape, but in this case, the external electrode 4 is made to contact the end surface of the internal electrode 2 that is not in contact with the external electrode 4 on the opposite side surface. . In this case, the current flowing through one layer of internal electrodes is small, so the connection between the external electrode 4 and internal electrode is 0.5 to 1 mm.
is sufficient, so the alignment accuracy does not need to be as high as in conventional screen printing methods.
次に、はんだ肘用外部電極6にリード線5をはんだ付け
し圧電アクチュエータ素子を得る。Next, the lead wire 5 is soldered to the solder elbow external electrode 6 to obtain a piezoelectric actuator element.
第2図は本発明の実施例2の側面図である。絶縁体の形
状を外部電極4と同様に櫛形状にし櫛歯の先端部の位置
を外部電極4の櫛歯の先端部とは1層ずらすようにする
。又絶縁体3の材料を液状絶縁物を使用することにより
、複雑な形状の絶縁体3の形成を可能にするとともに絶
縁体3の形成を印刷法でできるようにしたものである。FIG. 2 is a side view of Embodiment 2 of the present invention. The shape of the insulator is made into a comb shape like the external electrode 4, and the position of the tip of the comb teeth is shifted by one layer from the tip of the comb teeth of the external electrode 4. Further, by using a liquid insulator as the material for the insulator 3, it is possible to form the insulator 3 in a complicated shape, and the insulator 3 can be formed by a printing method.
この実施例では絶縁体3も櫛形状をしているため外部電
極4の印刷位置がズしてしまい接続してはいけない内部
電極との接続を防ぐことや絶縁体3の形成を印刷法でき
るため安価にすることができるとい6
う利点がある。In this embodiment, since the insulator 3 is also comb-shaped, the printing position of the external electrode 4 is misaligned, preventing connection with the internal electrode that should not be connected, and the insulator 3 can be formed using the printing method. It has the advantage of being inexpensive.
以上説明したように本発明は、圧電アクチュエータ素子
の対向する側面に、長さがほぼ側面の長さと同じで幅が
側面の幅の80%以下である連続した絶縁体を形成し、
この絶縁体上に櫛形状で櫛歯の先端部か側面に露出して
いる内部電極と一層おきに電気的に接続されている外部
電極を形成することにより、絶縁体の材料や厚さが自由
に選択することが可能となり、信頼性や繰り返し耐久性
の高い圧電アクチュエータ素子を提供することができる
。As explained above, the present invention forms continuous insulators on opposing side surfaces of a piezoelectric actuator element, the length of which is approximately the same as the length of the side surfaces, and the width of which is 80% or less of the width of the side surfaces;
By forming external electrodes on this insulator that are electrically connected every other layer to internal electrodes that are comb-shaped and exposed on the tips or sides of the comb teeth, the material and thickness of the insulator can be changed freely. This makes it possible to provide piezoelectric actuator elements with high reliability and repeated durability.
第1図は本発明の一実施例の圧電アクチュエータ素子の
側面図、第2図は本発明の第2の実施例を示す側面図、
第3図は従来の圧電アクチュエータ素子の横断面図、第
4図は第3図の側面図である。
1・・圧電セラミックス材、2・・内部電極、3・・・
絶縁体、
4・・・外部電極、
5・
リード線、
6・・・はん
だ付汚外部電極。FIG. 1 is a side view of a piezoelectric actuator element according to an embodiment of the present invention, and FIG. 2 is a side view showing a second embodiment of the present invention.
FIG. 3 is a cross-sectional view of a conventional piezoelectric actuator element, and FIG. 4 is a side view of FIG. 3. 1... Piezoelectric ceramic material, 2... Internal electrode, 3...
Insulator, 4... External electrode, 5. Lead wire, 6... Soldered dirty external electrode.
Claims (1)
焼結体と、前記積層焼結体の側面に露出する内部電極が
対向する一対の側面において、それぞれの内部電極の一
方の端部が互い違いに絶縁され、絶縁されていない他方
の内部電極の端部が前記対向する側面にそれぞれ設けら
れた外部電極と電気的に接続されている圧電アクチュエ
ータ素子において、前記積層焼結体の対向する側面に形
成された圧電セラミックス材と内部電極が積層されてい
る方向の長さがほぼ積層焼結体の側面の長さと同じで、
幅が側面の幅の80%以下である連続した絶縁体と、該
絶縁体上に櫛形状で櫛歯の先端部が側面に露出している
内部電極と一層おきに電気的に接続して形成された外部
電極とを有することを特徴とする圧電アクチュエータ素
子。A laminated sintered body in which piezoelectric ceramic materials and internal electrodes are alternately laminated, and a pair of opposing sides of the internal electrodes exposed on the side surfaces of the laminated sintered body, one end of each internal electrode is staggered. In a piezoelectric actuator element in which the ends of the other insulated and non-insulated internal electrodes are electrically connected to the external electrodes provided on the opposing sides, The length in the direction in which the piezoelectric ceramic material and the internal electrode are laminated is almost the same as the length of the side surface of the laminated sintered body,
Formed by electrically connecting every other layer to a continuous insulator whose width is 80% or less of the width of the side surface and an internal electrode having a comb shape with the tips of the comb teeth exposed on the side surface on the insulator. 1. A piezoelectric actuator element, characterized in that it has an external electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022628A JPH03225975A (en) | 1990-01-31 | 1990-01-31 | Laminated piezoelectric actuator element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022628A JPH03225975A (en) | 1990-01-31 | 1990-01-31 | Laminated piezoelectric actuator element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03225975A true JPH03225975A (en) | 1991-10-04 |
Family
ID=12088093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022628A Pending JPH03225975A (en) | 1990-01-31 | 1990-01-31 | Laminated piezoelectric actuator element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03225975A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07106652A (en) * | 1993-09-30 | 1995-04-21 | Nec Corp | Multilayer electrostriction effect device |
EP0910127A2 (en) * | 1997-10-15 | 1999-04-21 | DaimlerChrysler AG | Piezoelectric actuator |
-
1990
- 1990-01-31 JP JP2022628A patent/JPH03225975A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07106652A (en) * | 1993-09-30 | 1995-04-21 | Nec Corp | Multilayer electrostriction effect device |
EP0910127A2 (en) * | 1997-10-15 | 1999-04-21 | DaimlerChrysler AG | Piezoelectric actuator |
EP0910127A3 (en) * | 1997-10-15 | 2000-09-27 | DaimlerChrysler AG | Piezoelectric actuator |
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