JPH03224281A - Manufacture of piezoelectric laminated body - Google Patents
Manufacture of piezoelectric laminated bodyInfo
- Publication number
- JPH03224281A JPH03224281A JP2018009A JP1800990A JPH03224281A JP H03224281 A JPH03224281 A JP H03224281A JP 2018009 A JP2018009 A JP 2018009A JP 1800990 A JP1800990 A JP 1800990A JP H03224281 A JPH03224281 A JP H03224281A
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- laminated body
- metallic plates
- piezoelectric
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000919 ceramic Substances 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- 229910052751 metal Inorganic materials 0.000 claims description 45
- 239000002184 metal Substances 0.000 claims description 45
- 238000003825 pressing Methods 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 9
- 239000008188 pellet Substances 0.000 abstract description 8
- 229910052709 silver Inorganic materials 0.000 abstract description 7
- 239000004332 silver Substances 0.000 abstract description 7
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 5
- 239000010935 stainless steel Substances 0.000 abstract description 5
- 238000007747 plating Methods 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 238000009413 insulation Methods 0.000 abstract description 2
- 230000010287 polarization Effects 0.000 abstract description 2
- 238000007639 printing Methods 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は圧電積層体の製造方法に係る。[Detailed description of the invention] [Industrial application field] The present invention relates to a method for manufacturing a piezoelectric laminate.
圧電積層体は圧電セラミック素子と金属電極板とを交互
に積層し、１層おきの金属電極板にそれぞれ１対の外部
電極を接続して電気的に並列接続にして構成されるが、
圧電セラミック素子と金属電極板との接着のために、圧
電セラミック素子の表裏両面に金属ペーストを塗布して
から金属電極板と積層される。A piezoelectric laminate is constructed by alternately stacking piezoelectric ceramic elements and metal electrode plates, and electrically connecting them in parallel by connecting a pair of external electrodes to each metal electrode plate every other layer.
In order to bond the piezoelectric ceramic element and the metal electrode plate, a metal paste is applied to both the front and back surfaces of the piezoelectric ceramic element, and then the metal electrode plate is laminated.
金属板は、高強度で延性の無い、ステンレス板、銅板等
が使用される。また、金属ペーストは、温度安定性（酸
化されにくい）と低電気抵抗の点で、銀ペースト等の貴
金属ペーストが使用される。As the metal plate, a stainless steel plate, a copper plate, etc., which have high strength and no ductility, are used. Further, as the metal paste, a noble metal paste such as a silver paste is used because of its temperature stability (hard to be oxidized) and low electrical resistance.
上記のような構成において、金属ペーストと圧電セラミ
ック素子との接着強度は２０（］ ｋｇ ｆ ／ ｃｔ
ｉ以上あり、問題はない。しかし、金属ペーストと金属
板との接着には次のような問題がある。In the above configuration, the adhesive strength between the metal paste and the piezoelectric ceramic element is 20 (] kg f/ct
There are more than i, so there is no problem. However, there are the following problems in adhering the metal paste and the metal plate.
■異質の金属板と金属ペーストとの接着強度は、非常に
弱い。ステンレス板と、銀ペーストの密着強度ハ、３
ｋｇ ｆ ／ｃｒｌ以下である。■The adhesive strength between a dissimilar metal plate and metal paste is very weak. Adhesion strength between stainless steel plate and silver paste 3
kg f /crl or less.
■金属板と金属ペーストを接着するためには、４００℃
以上の熱処理が必要であり、ステンレス板、銅板等は、
酸化されてしまい、金属板自身の強度が低下する。■To bond the metal plate and metal paste, the temperature must be 400℃.
The above heat treatment is required, and stainless steel plates, copper plates, etc.
This results in oxidation, which reduces the strength of the metal plate itself.
■異質の金属板と金属ペーストの接着のため、金属板と
金属ペーストの界面に、大きな接触抵抗が生じる。また
、そのために駆動時の発熱が生じ、圧電積層体の破損（
特にセラミック亀裂）につながる。■Due to the adhesion between dissimilar metal plates and metal paste, large contact resistance occurs at the interface between the metal plate and metal paste. In addition, this causes heat generation during driving, causing damage to the piezoelectric laminate (
especially ceramic cracks).
本発明は、上記課題を解決するために、表裏両面に金属
ペーストを塗布した圧電セラミック素子と、少なくとも
表裏両面に該金属ペーストと同材質の薄膜を予め形成し
た金属板とを交互に複数枚積層し、この積層体を上下軸
方向から加圧加熱して該圧電セラミック素子と該金属板
とを該金属ペーストで接着することを特徴とする圧電積
層体の製造方法を提供する。In order to solve the above-mentioned problems, the present invention alternately stacks a plurality of piezoelectric ceramic elements coated with a metal paste on both the front and back sides, and metal plates on which a thin film of the same material as the metal paste is pre-formed on at least both the front and back sides. The present invention also provides a method for manufacturing a piezoelectric laminate, characterized in that the laminate is pressurized and heated from the vertical axis direction to bond the piezoelectric ceramic element and the metal plate with the metal paste.
金属板への薄膜の形成方法としてはメツキ法のほか、ス
パッタ法、ＣＶＤ法等が付着力向上のため好ましく採用
される。As a method for forming a thin film on a metal plate, in addition to plating, sputtering, CVD, etc. are preferably employed to improve adhesion.
予め金属板に金属ペーストと同材質の薄膜を形成すると
きはメツキ法など金属板との付着力の大きい成膜法を採
用するので接着力はもともと大きく、かつその薄膜と金
属ペーストとは同材質なのでそれらの間の接着力も大き
い。従って、積層体の接着力は向上する。また、金属板
は全面コートされることにより酸化から保護されること
ができ、また金属板には薄膜が完全に接触し、かつ薄膜
と金属ペーストが同一材質であるので接触抵抗も殆んど
なくなる。When forming a thin film of the same material as the metal paste on a metal plate in advance, we use a film formation method that has a strong adhesion to the metal plate, such as the plating method, so the adhesion is inherently strong, and the thin film and the metal paste are made of the same material. Therefore, the adhesive force between them is also great. Therefore, the adhesive strength of the laminate is improved. In addition, the metal plate can be protected from oxidation by being coated on the entire surface, and since the thin film is in complete contact with the metal plate, and the thin film and metal paste are made of the same material, there is almost no contact resistance. .
角１５ｎ＋＋ｎの圧電素子のベレッ） （ｌａ）と、そ
の表裏両面に、厚さ５〜２０ｐＩａの電気導電性を有す
る銀ペース）（ｌｂ）を印刷等で付着させる。銀ペース
トは、銀−Ｐｄペースト、ｐｔ−銀ペーストなどでもよ
い。（第１図）
第２図は厚み３０−のステンレス板に銀メツキ処理を施
して厚み５−の銀膜を全面１こ形成した内部電極板２を
示す。形状は、ペレットと同形状部２ａの他に突起部２
ｂが設けである。これは、ペレットの段積み積層後に折
り曲げて一つおきに同極同志を接続するためのものであ
る。An electrically conductive silver paste (lb) having a thickness of 5 to 20 pIa is attached by printing or the like to the beret (la) of a piezoelectric element having an angle of 15n++n and to both the front and back surfaces thereof. The silver paste may be a silver-Pd paste, a pt-silver paste, or the like. (FIG. 1) FIG. 2 shows an internal electrode plate 2 in which a 30-thick stainless steel plate is silver-plated to form one 5-thick silver film on the entire surface. The shape includes a protrusion 2 in addition to a portion 2a having the same shape as the pellet.
b is a provision. This is for connecting every other pellet of the same polarity by bending it after stacking the pellets.
第３図に、圧電素子のペレット１と、内部電極２を交互
に積層した様子を示す。内部電極２の突起部２ｂは、−
層毎、交互に逆向きにセットされている。FIG. 3 shows how piezoelectric element pellets 1 and internal electrodes 2 are alternately stacked. The protrusion 2b of the internal electrode 2 is -
Each layer is set alternately in opposite directions.
次に、この積層体に上下から１００ｋｇ／ｃｔｌの圧力
を加えながら、乾燥後５００℃で５〜３０分間、熱処理
を行って、一体化形成する。Next, while applying a pressure of 100 kg/ctl from above and below to this laminate, after drying, heat treatment is performed at 500° C. for 5 to 30 minutes to form an integrated structure.
このように一体化形成したものの内部電極２の突起部２
ｂを先に述べたように折り曲げ、同極同志を別の金属板
（４ａ）で接続する。接続は、ハンダ付けで行った。次
に外部からの電圧印加用のリード線（４ｂ）を金属板（
４ａ）にハンダ付けし、絶縁処理の為の外部コーティン
グ（４Ｃ）を行った。The protrusion 2 of the internal electrode 2 formed integrally in this way
b as described above and connect the same polarity with another metal plate (4a). Connections were made by soldering. Next, connect the lead wire (4b) for external voltage application to the metal plate (
4a) was soldered, and external coating (4C) was applied for insulation treatment.
それから、圧電特性持たせる為、シリコンオイル中、１
００℃、１０００Ｖで３０分間、分極処理を行い、最終
的に第４図に示す如き圧電積層体が完成した。Then, in order to give it piezoelectric properties, I put 1 in silicone oil.
Polarization was performed at 00° C. and 1000 V for 30 minutes, and a piezoelectric laminate as shown in FIG. 4 was finally completed.
こうして、でき上った圧電積層体を一２００〜６００Ｖ
でパルス駆動させたところ、１０’回駆動させて、どこ
にも破損が生じなかった。In this way, the completed piezoelectric laminate is heated to -200 to 600V.
When pulse driving was performed, no damage occurred anywhere after driving 10' times.
また、駆動前の圧電積層体の内部電極と圧電素子の接着
強度を測定したところ、１００ ｋｇ ｆ ／ ｃｒ１
以上あることが（ＵＲされた。Furthermore, when we measured the adhesive strength between the internal electrodes of the piezoelectric laminate and the piezoelectric element before driving, we found that it was 100 kg f/cr1.
There is more than that (UR).
本発明によれば、下記の如き効果が得られる。 According to the present invention, the following effects can be obtained.
ｌ）金属板と圧電素子との間（詳しくは金属ペーストと
の間）の接着強度が向上する。l) The adhesive strength between the metal plate and the piezoelectric element (specifically, between the metal paste) is improved.
２）金属板と金属ペースト間で、同一材質ゆえに接触抵
抗がほとんどなく、発熱の問題が解消される。2) Since the metal plate and the metal paste are made of the same material, there is almost no contact resistance, which eliminates the problem of heat generation.
３）熱処理時に酸化、腐食する金属板を薄膜で保護でき
る。3) Metal plates that oxidize and corrode during heat treatment can be protected with a thin film.
４）金属板に対する薄膜の形成は付着力強固なメツキ法
やスパッタ法を利用するので接触抵抗は殆んど生巳ない
。4) Since the thin film is formed on the metal plate using a plating method or sputtering method with strong adhesion, there is almost no contact resistance.
第１図は圧電素子の斜視図、第２図は内部電極板の斜視
図、第３図は圧電素子と内部電極とを積層した様子を示
す模式図、第４図は圧電積層体の模式断面図である。
１、ｌａ・・・圧電素子、 １ｂ・・・銀ペースト、
２゜２ａ・・・内部電極、 ２ｂ・・・突起部、４ａ・
・・外部電極、 ４ｂ・・・リード、４Ｃ・・・
外部コーティング。Fig. 1 is a perspective view of the piezoelectric element, Fig. 2 is a perspective view of the internal electrode plate, Fig. 3 is a schematic diagram showing how the piezoelectric element and internal electrode are laminated, and Fig. 4 is a schematic cross section of the piezoelectric laminate. It is a diagram. 1, la... piezoelectric element, 1b... silver paste,
2゜2a...Internal electrode, 2b...Protrusion, 4a...
...External electrode, 4b...Lead, 4C...
external coating.
Claims (1)
素子と、少なくとも表裏両面に該金属ペーストと同材質
の薄膜を予め形成した金属板とを交互に複数枚積層し、
この積層体を上下軸方向から加圧加熱して該圧電セラミ
ック素子と該金属板とを該金属ペーストで接着すること
を特徴とする圧電積層体の製造方法。1. A plurality of piezoelectric ceramic elements each coated with a metal paste on both the front and back sides and a plurality of metal plates each having a thin film of the same material as the metal paste formed in advance on at least both the front and back sides are laminated alternately,
A method for producing a piezoelectric laminate, which comprises applying pressure and heating to the laminate from the vertical and axial directions to bond the piezoelectric ceramic element and the metal plate with the metal paste.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018009A JPH03224281A (en) | 1990-01-30 | 1990-01-30 | Manufacture of piezoelectric laminated body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018009A JPH03224281A (en) | 1990-01-30 | 1990-01-30 | Manufacture of piezoelectric laminated body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03224281A true JPH03224281A (en) | 1991-10-03 |
Family
ID=11959681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018009A Pending JPH03224281A (en) | 1990-01-30 | 1990-01-30 | Manufacture of piezoelectric laminated body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03224281A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7765660B2 (en) | 2005-11-28 | 2010-08-03 | Fujifilm Corporation | Method of manufacturing a multilayered piezoelectric element having internal electrodes and side electrodes |
| US7849572B2 (en) * | 2003-06-19 | 2010-12-14 | Seiko Epson Corporation | Method of manufacturing a piezoelectric device |
| CN104197714A (en) * | 2014-08-27 | 2014-12-10 | 中国石油大学(华东) | Piezoelectric ceramic sintering furnace with polarization function and sintering polarization method thereof |
-
1990
- 1990-01-30 JP JP2018009A patent/JPH03224281A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7849572B2 (en) * | 2003-06-19 | 2010-12-14 | Seiko Epson Corporation | Method of manufacturing a piezoelectric device |
| US7765660B2 (en) | 2005-11-28 | 2010-08-03 | Fujifilm Corporation | Method of manufacturing a multilayered piezoelectric element having internal electrodes and side electrodes |
| CN104197714A (en) * | 2014-08-27 | 2014-12-10 | 中国石油大学(华东) | Piezoelectric ceramic sintering furnace with polarization function and sintering polarization method thereof |
| CN104197714B (en) * | 2014-08-27 | 2015-12-09 | 中国石油大学(华东) | There is the piezoelectric ceramics sintering furnace of function of polarization and the method for sintering polarization thereof |
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